DEVELOPMENT OF PREDICTION MODEL OF THE SHAPE OF DEPOSITED PARTICLES APPLIED FOR AEROSOL BASED DIRECT-WRITE TECHNOLOGY

Aerosol을 이용한 Direct-Write 시스템에서 침착된 입자의 형상예측 모델에 관한 연구

  • 박준정 (서울시립대학교 대학원 기계정보공학과) ;
  • 백성구 (삼성전자(주) 생산기술연구소) ;
  • 리광훈 (서울시립대학교 기계정보공학과)
  • Published : 2008.03.31

Abstract

Direct Write Technologies are being utilized in various industrial fields such as antennas, engineered structures, sensors and tissue engineering. With Direct Write Technologies, producing features have the mesoscale range, from 1 to 100 microns. One form of the Direct Write Technologies is based on aerosol dynamics. The shape of deposited aerosols determine the form of products in the Direct Write Technology based on aerosol dynamics. To predict shape of deposited aerosol, a prediction model is created. In this study, we estimated Line-Width and Line-Thickness from the prediction model. Results of prediction model is valid from comparison with experimental results.

Keywords

References

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