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$C_4F_8/H_2$ 헬리콘 플라즈마를 이용한 산화막 식각시 형성된 잔류막 손상층이 후속 실리사이드 형성 및 전기적 특성에 미치는 효과

  • 김현수;이원정;윤종구;염근영
    • Proceedings of the Korean Vacuum Society Conference
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    • 1998.02a
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    • pp.179-179
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    • 1998
  • 실리콘 집적회로 제조시 sub-micron 의 contact 형성 공정은 질연막 형성 후 이의 식각 및 세정, c contact 실리사이드, 획산방지막, 배선 금속층의 형성 과정올 거치게 된다. 본 연구팀에서는 C.F야f2 헬리 콘 플라즈마훌 이용한 고선택비 contact 산화막 식각공정시 형성된 잔류막충과 오염 손상올 관찰하고 산소 플라즈마 처리와 후속 열처리에 따른 이들의 제거 정도를 관찰하여 이에 대한 결과를 발표하였다. 본 연구메서는 식각 및 후처리에 따라 잔류하는 잔류막과 손상층이 후속 공정인 contact 실리사이드 형 섬에 미치는 영향올 관찰하였다. C C.F바f2 웰리콘 풀라즈마률 이용한 식각시 공정 변수로는 수소가스 첨가, bias voltage 와 과식각 시간 의 효과를 관찰하였으며 다른 조건은 일정하게 하였다 .. Contact 실리사이드로는 Ti, Co-싫리사이드를 선 택하였으며 Piranha cleaning, 산소 플라즈마 처리, 산소 풀라즈마+600 'C annealing으로 각각 후처리된 시 편을 후처리하지 않은 시펀돌과 함께 실리사이드 형성용‘시펀으로 이용하였다 각각 일정 조건에서 동 일 두께의 실리사이드훌 형성시킨 후 4-point probe룰 이용하여 면저황올 측정하였다 후처리하지 않은 시편의 경무 실리사이드 형성은 아주 시펀의 일부분에서만 형성되었으며 후속 세정 및 얼처리훌 황에 따라 실리사이드의 면저항은 감소하여 식각 과정을 거치지 않은 깨끗한 실리콘 웨이퍼위에 실리사이드 를 형성시킨 값(control 값)에 접근하였다. 실리사이드의 면저항값은 식각시 노훌된 실리콘 표면 위에 형 성된 손상충보다는 잔류막에 큰 영향을 받았으며 수소 가스가 첨가된 식각 가스로 식각한 시편으로 형 성한 실리사이드의 면저항값이 손상이 상대적으로 적은 것으로 관찰된 수소훌 첨가하지 않은 식각 가 스로 식각한 시펀 위에 형성된 실리사이드의 면저황에 비해 낮은 값을 나타내었다. 실리사이드의 전기적 륙성에 미치는 손상층의 영향올 좀더 면밀히 관찰하고자 bare 실리콘 wafer 에 잔류막이 거의 없이 손상층을 유발시키는 식각 조건들 (100% HBr, 100%H2, 100%Ar, Cl싸fz)에 대하여 실 리콘 식각을 수행한 후 Co-실리사이드률 형성하여 이의 면저황을 측정한 걸과 100% Ar 가스로 식각된 시편을 이용하여 형성한 실리사이드의 면저항은 control 에 기까운 면저항값올 지니고 따라서 손상층이 실리사이드 형섬메 미치는 영향은 크지 않음을 알 수 있었다. 이상의 연구 결과훌 통해 손상층이 실리사이드의 형성이나 전기적 톡섬에 미치는 영황은 잔류막층 에 의한 영향보다 적다는 것을 알 수 았으며 잔류막층의 두께보다는 성분이나 걸합상태, 특히 식각 및 후처리 후 잔류하는 탄소 싱분과 C-Si 결함에 큰 영향올 받는 것올 알 수 있었다.

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Panperitonitis with Advanced Gastric Cancer - Based on Seminar of Korean Family Medicine Palliative Medicine Research Group - (진행된 위암 환자에게 발생한 범복막염 치료의 완화의학적 접근 - 대한가정의학회 완화의학연구회 세미나를 기초로 하여 -)

  • Jung, Yun-Joo;Kim, Dae-Kyun;Choi, Youn-Seon;Korean Palliative Medicine Research Group, Korean Palliative Medicine Research Group;Shim, Jae-Yong
    • Journal of Hospice and Palliative Care
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    • v.9 no.1
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    • pp.35-39
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    • 2006
  • A 77-year-old female presented panperitonitis due to advanced gastric ranter during palliative care. In the case of panperitonitis following obstruction or perforation, surgical treatment is vital to avoid fatal sepsis and dehydration. However, the risk of surgery and the residual life of a patient must be carefully considered because of high mortality and complication rate in those patients with advanced disease due to the poor condition. The therapeutic value of aggressive hydration, nasogastric tube insertion, and the use of antibiotics is also questionable. Palliative surgery was not performed on this case, and she passed away peacefully in the presence of family after 4 days of palliative medical care. Here is the appropriate management for this kind of patients we would like to recommend through review of relevant references and long discussions. Firstly, we need to predict survival time using clinical variables. Secondly, considering patient status and risk of surgery, non surgical palliative care such as pain control, transient nasogastric tube insertion, and parenteral hydration is recommended. Minimal use of fluid is desirable to minimize complications such as edema and dyspnea if massive hydration in the beginning of treatment is not proved to be effective. Even though started earlier in the course of disease, discontinuation of antibiotics could be discussed with patients and their caregiver if patient status is not improved.

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Preparation and Keeping Quality of Intermediate Moisture Food from Oyster and Sea Mussel (굴, 홍합의 중간수분 식품제조 및 저장 안정성에 관한 연구)

  • Jo, Kil-Suk;Kim, Hyun-Ku;Kang, Tong-Sam;Shin, Dong-Hwa
    • Korean Journal of Food Science and Technology
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    • v.20 no.3
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    • pp.363-370
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    • 1988
  • An attempt was made in this study to investigate the possibility of processing oyster and sea mussel into an intermediate moisture food. To obtain a palatable and instant product, shucked samples were heated in soy sauce for 5 min., heated in seasoning solution for 10 min., and then dried by the method of hot-air blowing for 4-6 hours at $40^{\circ}C$. Optimum seasoning solutions consisted of 2% monosodium glutamate, 3.5% sodium chloride, 15% sorbitol, 2% propylene glycol, 5% glycine and 0.02% rosemary oleoresin in 72.48% water. Judging from water activity, thiobarbituric acid, viable cell count, volatile basic nitrogen, surface color and sensory evaluation, vacuum-packaging method in nylon/PE $(20{\mu}m/40{\mu}m)$ or polyester/viniliden chloride/polypropylene $(12{\mu}m/15{\mu}m/50{\mu}m)$ film bag did hardly damage to the quality of intermediate moisture products, but air-packaging method in polyethylene(0.06m/m) bag did considerable damage to the quality during storage for 60 days in an incubator with 49-51% relative humidity at $30^{\circ}C$.

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Exclusive correlation analysis for algae and environmental factors in weirs of four major rivers in South Korea (4대강 주요지점에서의 조류 발생인자의 배타적 상관성분석에 대한 연구)

  • Lee, Eun Hyung;Kim, Yeonhwa;Kim, Kyunghyun;Kim, Sanghyun
    • Journal of Korea Water Resources Association
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    • v.49 no.2
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    • pp.155-164
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    • 2016
  • Algal blooms not only destroy fish habitats but also diminish biological diversity of ecosystem which results into water quality deterioration of 4 major rivers in South Korea. The relationship between algal bloom and environmental factors had been analyzed through the cross-correlation function between concentration of chlorophyll a and other environmental factors. However, time series of cross-correlations can be affected by the stochastic structure such auto-correlated feature of other controllers. In order to remove external effect in the correlation analysis, the pre-whitening procedure was implemented into the cross correlation analysis. The modeling process is consisted of a series of procedure (e.g., model identification, parameter estimation, and diagnostic checking of selected models). This study provides the exclusive correlation relationship between algae concentration and other environmental factors. The difference between the conventional correlation using raw data and that of pre-whitened series was discussed. The process implemented in this paper is useful not only to identify exclusive environmental variables to model Chl-a concentration but also in further extensive application to configure causality in the environment.

In vitro activity comparison of Erm proteins from Firmicutes and Actinobacteria (Firmicutes와 Actinobacteria에 속하는 세균들의 Erm 단백질 in vitro 활성 비교)

  • Jin, Hyung Jong
    • Korean Journal of Microbiology
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    • v.52 no.3
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    • pp.269-277
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    • 2016
  • Erm proteins methylate the specific adenine residue ($A_{2058}$, E. coli numbering) on 23S rRNA to confer the $MLS_B$ (macrolidelincosamide-streptogramin B) antibiotic resistance on a variety of microorganisms ranging from antibiotic producers to pathogens. When phylogenetic tree is constructed, two main clusters come out forming each cluster of Actinobacteria and Firmicutes. Two representative Erm proteins from each cluster were selected and their in vitro methylation activities were compared. ErmS and ErmE from Actinobacteria cluster exhibited much higher activities than ErmB and ErmC' from Firmicutes: 9 fold difference when ErmC' and ErmE were compared and 13 fold between ErmS and ErmB. Most of the difference was observed and presumed to be caused by N-terminal and C-terminal extra region from ErmS and ErmE, respectively because NT59TE in which N-terminal end 59 amino acids was truncated from wild type ErmS exhibited only 22.5% of wild type ErmS activity. Meanwhile, even NT59TE showed three and 2.2 times more activity when it was compared to ErmB and C, respectively, suggesting core region from antibiotic producers contains extra structure enabling higher activity. This is suggested to be possible through the extra region of 197RWS199 (from both ErmS and ErmE), 261GVGGSLY267 (from ErmS), and 261GVGGNIQ267 (from ErmE) and 291SVV293 (from ErmS) and 291GAV293 (from ErmE) by multiple sequence alignment.

Transformation of Populus tremuloides Using Agrobacterium rhizogenes (Agrobacterium rhizogenes를 이용한 Populus tremuloides의 형질전환)

  • So, In-Sup;U, Zang-Kual;Ko, Young-Hwan;Lee, Sun-Joo;Hackett, Wesley P.;Riu, Key-Zung
    • Applied Biological Chemistry
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    • v.38 no.2
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    • pp.123-128
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    • 1995
  • Several factors affecting on transformation efficiency were studied to establish a Agrobacterium rhizogenes mediated system for the transformation of Populus species, and We could obtaine tansgenic plantlets expressing the introduced gene. Leaf sections were more sensitive than stem sections to kanamycin and thought to be better material for transformant screening. The bacterial density did not affect on the efficiency of transformation over the range of $4{\times}10^5{\sim}7{\times}10^9\;cfu$. The optimum period for co-cultivation was one day or shorter. Both of the optimum concentrations of cefotaxime and ampicillin in the medium were $250\;{\mu}g/ml$ for elimination of bacteria from the inoculated leaf sections. The addition of acetosyringone in the bacterial culture medium increased transformation rate, and the highest rate was obtained at $50\;{\mu}M$ of acetosyringone. The transformed galls could be selectively induced and gown on the growth regulator-free medium or on the medium containing $100\;{\mu}g/ml$ or higher contrition of kanamycin. The roots were induced from the galls incited by A. rhizogenes within 3 weeks on the growth regulator-free medium as well as on the medium containing growth regulators. The plantlets were regenerated from the galls cultured for 6 weeks on the medium containing 0.05 mg/ml of NAA and 0.5 mg/ml of BA. The expressions of the introduced opine gene in the transformed galls and plantlets were confirmed by the analysis of agropine and mannopine.

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Topic-Specific Mobile Web Contents Adaptation (주제기반 모바일 웹 콘텐츠 적응화)

  • Lee, Eun-Shil;Kang, Jin-Beom;Choi, Joong-Min
    • Journal of KIISE:Software and Applications
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    • v.34 no.6
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    • pp.539-548
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    • 2007
  • Mobile content adaptation is a technology of effectively representing the contents originally built for the desktop PC on wireless mobile devices. Previous approaches for Web content adaptation are mostly device-dependent. Also, the content transformation to suit to a smaller device is done manually. Furthermore, the same contents are provided to different users regardless of their individual preferences. As a result, the user has difficulty in selecting relevant information from a heavy volume of contents since the context information related to the content is not provided. To resolve these problems, this paper proposes an enhanced method of Web content adaptation for mobile devices. In our system, the process of Web content adaptation consists of 4 stages including block filtering, block title extraction, block content summarization, and personalization through learning. Learning is initiated when the user selects the full content menu from the content summary page. As a result of learning, personalization is realized by showing the information for the relevant block at the top of the content list. A series of experiments are performed to evaluate the content adaptation for a number of Web sites including online newspapers. The results of evaluation are satisfactory, both in block filtering accuracy and in user satisfaction by personalization.

Key-pair(Public key, Private key) conflict analysis using OpenSSL (OpenSSL을 이용한 키쌍(공개키·개인키) 충돌율 분석)

  • Lee, Kwang-Hyoung;Park, Jeong-Hyo;Jun, Moon-Seog
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.15 no.8
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    • pp.5294-5302
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    • 2014
  • The development of public-key-based technique that enables a variety of services(E-government, e-banking, e-payment, etc.) evaluated as having complete safety. On the other hand, vulnerabilities(e.g, heartbleed bug, etc.) are constantly being discovered. In this paper, a public key infrastructure to verify the safety and reliability, the collision rate using OpenSSL key pair was analyzed. the experiment was performed using the following procedure. Openssl was used to create five private certification agencies, and each of the private certificate authority certificates to create 2 million, generating a total of 10 million by the certificate of the key pair conflicts analysis. The results revealed 35,000 in 1 million, 0.35% chance of a public key, a private key conflict occurred. This is sufficient in various fields(E-payment, Security Server, etc.). A future public-key-based technique to remove the threat of a random number generator, large minority issues, in-depth study of selection will be needed.

Titanium Geology and Metallurgical Processes from Applied Petrologic Viewpoints

  • Park, Won Choon
    • Economic and Environmental Geology
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    • v.11 no.3
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    • pp.89-98
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    • 1978
  • Mineralogy, beneficiation, and processes of titanium ores are reviewed from petrographic viewpoints. The most important titanium minerals are ilmenite ($FeTiO_3$) and rutile ($TiO_2$). Ilmenite will play major role :for raw material, because rutile are rapidly diminishing. Thus, there is a need to develope a successful process for producing high grade Ti02 from ilmenite. Commercial, as well as R and D processes to treat more abundant ilmenite ores fall in three general classess: 1. Iron in ilmenite is partially or completely reduced and separated either physically or chemically. 2. Iron is reduced to ferrous state and chemically leached away from the titanium. 3. Ore is treated to make chlorides either selectively or with subsequent separation and purification of $TiC_4$. Routes and efficiencies of these process technologies are primarily influenced by the particular ore deposit to be mined and secondly by environmental considerations. One deposit parameters which influence ilmenite process technologies are: 1. Complexity of microtextures of ilmenite intergrown with Fe-oxide minerals. 2. Composition of concentrates; ilmenites contain minor amounts of substituted Mg, Mn, and V. These elements plus iron and gangue minerals can cause difficulties to complete reactions, substantial acid consumption, difficulties of removing waste solids, and waste disposal problems. Major contributions to be made by petrologists for process optimization are: characterization and interpretation of compositional and physical changes of raw materials and solids derived from process streams. These informations can play significant role in selecting and improving process steps for titania production.

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Optimization of solid phase extraction and simultaneous determination of trace anions in concentrated hydrofluoric acid by ion chromatography (불산 중 극미량 음이온 분석을 위한 고상 추출법 및 이온크로마토그래프를 이용한 동시분석법 확립)

  • Yoon, Suk-Hwan;Jo, Dong-ho;Kim, Hyun-Ji;Shin, Ho-Sang
    • Analytical Science and Technology
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    • v.29 no.5
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    • pp.219-224
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    • 2016
  • 불산 중 극미량 음이온의 고상추출과 이온크로마토그래프를 이용한 고감도 분석법이 개발되었다. 불산 중 불소이온이 고상에 의해 제거하였고 이어서 음이온 (F, CH3COO, Cl, Br, NO3, PO43−, SO42−)들이 이온크로마토그래프를 이용하여 연속적으로 분리하였다. 고상 추출법에 영향을 주는 각 인자들 (흡착제의 선택, 시료의 부피 및 pH, 용출 용액과 용출용액의 부피)을 결정하였으며 그 결과 흡착제로서 Oasis WAX 컬럼이 가장 우수하였고 1.0 mL의 시료부피, 용출용액으로 50 mM 초산암모늄염 5 mL가 분리능에서 가장 우수하였다. 개발한 방법에 의한 음이온 (Cl, Br, NO3, PO43−, SO42−)들의 방법검출한계는 25 % 불산용액 (w/w) 중에 0.04~0.30 µg/L의 범위를 보였고 정밀도는 20.0와 40.0 µg/L의 농도에서 5 % 이내를 보였다. 한 제조회사에 의한 25 % 불산 중 음이온의 4.2에서 47.5 µg/L의 범위로 모두 검출되었다. 이 방법은 시험절차가 간단하고, 재현성 및 감도가 좋아서 반도체회사에서 불산 중 음이온 불순물을 정도 관리하는데 매우 유용한 방법이 될 것으로 판단된다.