• 터널과지하공간
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• 제32권6호
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• pp.345-352
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• 2022

도심지 터널 건설에서 발파공법은 민원이 제기되는 문제점이 있어 적용에 제약받고 있다. 이에 대한 대안으로 TBM 및 기계굴착 공법 적용이 필수적으로 검토되고 있다. 이 중 쉴드 TBM(Tunnel Boring Machine)은 굴진과 세그먼트 체결이 번갈아 반복되며 굴진하는 공정을 가지고 있는데, 세그먼트 체결 동안 굴진을 멈추게 된다. 이러한 가동 정지시간을 최소화하고자 세그먼트 체결 중에도 가동할 수 있는 연속굴착형 TBM 기술이 개발되고 있다. 나선형 세그먼트의 굴진 반력을 확보하기 위해 추진잭을 개조하고 신뢰성을 확보하는 연구가 진행 중이다. 또한 체결 중 세그먼트를 제외한 나머지 부분의 추진잭을 가동하는 유압제어 및 유압시스템 설계기술이 개발될 예정이다. 본 보고는 연속굴착형 TBM 과제 중 부품개조 및 유압제어 기술에 대한 일부 내용을 소개한다.

• E2M - 전기 전자와 첨단 소재
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• 제34권6호
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• pp.32-41
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• 2021

• 한국수소및신에너지학회논문집
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• 제33권5호
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• pp.499-506
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• 2022

This study proposes kinetic parameters of Ru catalyst for steam methane reforming (SMR). First, extensive experiments are performed under different SMR conditions to evaluate performance of the catalyst in SMR. Second, a kinetic model is designed and developed for parameter estimation and validation using gPROMS. Finally, estimated parameters are fitted to the kinetic model and then, the model results are compared with the experimental data. The model results are in a good agreement with the experimental data.

• 반도체디스플레이기술학회지
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• 제20권4호
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• pp.119-124
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• 2021

In a situation where Moore's law, which states that the performance of semiconductor integrated circuits doubles every two years, is showing a limit from a certain point, and it is difficult to increase the performance due to the limitations of exposure technology.In this study, a wafer hybrid method that can increase the degree of integration Various research on bonding technology is currently in progress. In this study, in order to achieve rotational precision between wafers in wafer hybrid bonding technology, modeling of θ_z alignment stage and VCM actuator modeling used for rotational alignment, magnetic field analysis and desgin, control, and evaluation are performed. The system of this study was controlled by VCM actuator, capactive sensor, and dspace, and the working range was ±7200 arcsec, and the in-position and resoultion were ±0.01 arcsec. The results of this study confirmed that safety and precise control are possible, and it is expected to be applied to the process to increase the integration.

• 반도체디스플레이기술학회지
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• 제22권3호
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• pp.8-13
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• 2023

High bandwidth memory a core technology of the future memory semiconductor industry, is attracting attention. Temporary bonding and debonding process technology, which plays an important role in high bandwidth memory process technology, is also being studied. In this process, total thickness variation is a major factor determining wafer performance. In this study, the reliability of the equipment measuring total thickness variation is identified, and the servo motor settling, and wafer total thickness variation measurement accuracy are analyzed. As for the experimental variables, vacuum, acceleration time, and speed are changed to find the most efficient value by comparing the stabilization time. The smaller the vacuum and the larger the radius, the longer the settling time. If the radius is small, high-speed rotation performance is good, and if the radius is large, low-speed rotation performance is good. In the future, we plan to conduct an experiment to measure the entire of the wafer.

• 과학기술정책
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• 제1권9호통권9호
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• pp.22-22
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• 1991

• 반도체디스플레이기술학회지
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• 제22권4호
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• pp.108-112
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• 2023

Precision manufacturing technology is rapidly developing due to the extreme miniaturization of semiconductor processes to comply with Moore's Law. Accurate and precise alignment, which is one of the key elements of the semiconductor pre-process and post-process, is very important in the semiconductor process. The center detection of wafer align marks plays a key role in improving yield by reducing defects and research on accurate detection methods for this is necessary. Methods for accurate alignment using traditional image sensors can cause problems due to changes in image brightness and noise. To solve this problem, engineers must go directly into the line and perform maintenance work. This paper emphasizes that the development of AI technology can provide innovative solutions in the semiconductor process as high-resolution image and image processing technology also develops. This study proposes a new wafer center detection method through variable thresholding. And this study introduces a method for detecting the center that is less sensitive to the brightness of LEDs by utilizing a high-performance object detection model such as YOLOv8 without relying on existing algorithms. Through this, we aim to enable precise wafer focus detection using artificial intelligence.

• 한국분말재료학회지
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• 제30권4호
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• pp.324-331
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• 2023

Lithium (Li) is a key resource driving the rapid growth of the electric vehicle industry globally, with demand and prices continually on the rise. To address the limited reserves of major lithium sources such as rock and brine, research is underway on seawater Li extraction using electrodialysis and Li-ion selective membranes. Lithium lanthanum titanate (LLTO), an oxide solid electrolyte for all-solid-state batteries, is a promising Li-ion selective membrane. An important factor in enhancing its performance is employing the powder synthesis process. In this study, the LLTO powder is prepared using two synthesis methods: sol-gel reaction (SGR) and solid-state reaction (SSR). Additionally, the powder size and uniformity are compared, which are indices related to membrane performance. X-ray diffraction and scanning electron microscopy are employed for determining characterization, with crystallite size analysis through the full width at half maximum parameter for the powders prepared using the two synthetic methods. The findings reveal that the powder SGR-synthesized powder exhibits smaller and more uniform characteristics (0.68 times smaller crystal size) than its SSR counterpart. This discovery lays the groundwork for optimizing the powder manufacturing process of LLTO membranes, making them more suitable for various applications, including manufacturing high-performance membranes or mass production of membranes.

• 한국기계가공학회지
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• 제18권9호
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• pp.100-105
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• 2019

In wire drawing, aterial deformation is concentrated on the surface of the drawn wire because of surface contact with the drawing die. Therefore, strain varies from the center to the surface of the drawn wire. In this study, based on the upper bound method, an effective strain prediction method from the center to the surface of a drawn wire was proposed. Using the proposed method, the effective strain of the drawn wire was calculated verify the proposed prediction method, the predicted effective strain was compared with the result of finite element analysis.

• 청정기술
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• 제27권4호
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• pp.325-331
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• 2021

본 연구에서는 미이용 바이오매스인 3급 목재펠렛 및 커피박을 이용하여 바이오카본을 생산하고 이를 통하여 저분자 극성 휘발성 유기화합물인 포름알데하이드 및 아세트알데하이드 제거 성능 실험을 수행하였다. 바이오카본 생산 실험은 이산화탄소를 활성화제로 사용하여 고정층 반응기에서 수행하였다. 활성화 실험 시 반응온도 900 ℃ 및 이산화탄소 1 L min^-1으로 반응조건을 고정하여 진행하였다. 활성화 실험 결과 1급 목재펠렛으로부터 생산한 바이오카본의 BET 비표면적이 약 788 m² g^-1으로 가장 높음을 알 수 있었고 커피박으로부터 생산한 바이오카본이 약 544 m² g^-1으로 가장 낮게 나타났다. 본 실험을 통해 생산된 바이오카본은 대부분 마이크로 기공을 가진 것으로 나타났다. 바이오매스 원료 내 회분의 함량이 낮을수록 바이오카본의 비표면적이 높아지는 것으로 나타났다. 포름알데하이드 및 아세트알데하이드 제거 실험 결과 1급 및 3급 목재펠렛으로 부터 생산한 바이오카본에 비해 커피박으로부터 생산한 바이오카본이 더욱 우수한 흡착 성능을 보여주었다. 추가적으로 상용 첨착 활성탄과 커피박으로부터 생산한 바이오카본의 비교 실험을 진행하였다. 포름알데하이드 제거 성능은 상용 첨착 활성탄이 우수한 반면 아세트알데하이드 제거에는 커피박으로부터 생산한 바이오카본이 우수한 것으로 나타났다.