• Title/Summary/Keyword: 산화니켈

Search Result 251, Processing Time 0.025 seconds

Direct Bonding of Si(100)/NiSi/Si(100) Wafer Pairs Using Nickel Silicides with Silicidation Temperature (열처리 온도에 따른 니켈실리사이드 실리콘 기판쌍의 직접접합)

  • Song, O-Seong;An, Yeong-Suk;Lee, Yeong-Min;Yang, Cheol-Ung
    • Korean Journal of Materials Research
    • /
    • v.11 no.7
    • /
    • pp.556-561
    • /
    • 2001
  • We prepared a new a SOS(silicon-on-silicide) wafer pair which is consisted of Si(100)/1000$\AA$-NiSi Si (100) layers. SOS can be employed in MEMS(micro- electronic-mechanical system) application due to low resistance of the NiSi layer. A thermally evaporated $1000\AA$-thick Ni/Si wafer and a clean Si wafer were pre-mated in the class 100 clean room, then annealed at $300~900^{\circ}C$ for 15hrs to induce silicidation reaction. SOS wafer pairs were investigated by a IR camera to measure bonded area and probed by a SEM(scanning electron microscope) and TEM(transmission electron microscope) to observe cross-sectional view of Si/NiSi. IR camera observation showed that the annealed SOS wafer pairs have over 52% bonded area in all temperature region except silicidation phase transition temperature. By probing cross-sectional view with SEM of magnification of 30,000, we found that $1000\AA$-thick uniform NiSi layer was formed at the center area of bonded wafers without void defects. However we observed debonded area at the edge area of wafers. Through TEM observation, we found that $10-20\AA$ thick amourphous layer formed between Si surface and NiSix near the counter part of SOS. This layer may be an oxide layer and lead to degradation of bonding. At the edge area of wafers, that amorphous layer was formed even to thickness of $1500\AA$ during annealing. Therefore, to increase bonding area of Si NiSi ∥ Si wafer pairs, we may lessen the amorphous layers.

  • PDF

Trace Metal Contamination and Solid Phase Partitioning of Metals in National Roadside Sediments Within the Watershed of Hoidong Reservoir in Pusan City (부산시 회동저수지 집수분지 내 국도도로변 퇴적물의 미량원소 오염 및 존재형태)

  • Lee Pyeong-Koo;Kang Min-Joo;Youm Seung-Jun;Lee In-Gyeong;Park Sung-Won;Lee Wook-Jong
    • Journal of Soil and Groundwater Environment
    • /
    • v.11 no.5
    • /
    • pp.20-34
    • /
    • 2006
  • This study was undertaken to assess the anthropogenic impact on trace metal concentrations (Zn, Cu, Pb, Cr, Ni, and Cd) of roadside sediments (N = 70) from No.7 national road within the watershed of Hoidong Reservoir in Pusan City and to estimate the potential mobility of selected metals using sequential extraction. We generally found high concentrations of metals, especially Zn, Cu and Pb, affected by anthropogenic inputs. Compared to the trace metal concentrations of uncontaminated stream sediments, arithmetic mean concentrations of roadside sediments were about 7 times higher for Cu, 4 times higher for Zn, 3 times higher for Pb and Cr and, 2 times higher for Ni and As. Speciation data on the basis of sequential extraction indicate that most of the trace metals considered do not occur in significant quantities in the exchangeable fraction, except for Cd and Ni whose exchangeable fractions are appreciable (average 29.3 and 25.8%, respectively). Other metals such as Zn (51.4%) and Pb (45.2%) are preferentially bound to the reducible fraction, and therefore they can be potentially released by a pH decrease and/or redox change. Copper is mainly found in the organic fraction, while Cd is highest in the exchangeable fraction, and Cr and Ni in the residual fraction. Considering the proportion of metals bound to the exchangeable and carbonate fractions, the comparative mobility of metals probably decreases in the order of Cd>Ni>Pb>Zn>Cr>Cu. Although the total concentration data showed that Zn was typically present in potentially harmful concentration levels, the data on metal partitioning indicated that Cd, Ni and Pb pose the highest potential hazard for runoff water. As potential changes of redox state and pH may remobilize the metals bound to carbonates, amorphous oxides, and/or organic matter, and may release and flush them through drain networks into the watershed of Hoidong Reservoir, careful monitoring of environmental conditions appears to be very important.

플라즈마를 이용한 그래핀의 저온합성

  • Lee, Byeong-Ju;Park, Se-Rin;Yu, Han-Yeong;Lee, Jeong-O;Jeong, Gu-Hwan
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2011.02a
    • /
    • pp.427-427
    • /
    • 2011
  • 그래핀은 탄소원자가 육각형의 벌집형태로 배열되어 있는 원자단위 두께의 가장 얇은 재료중의 하나이다. 이는 우수한 기계적, 전기적, 광학적 특성을 지니고 있어 다양한 분야로의 응용이 가능할 것으로 예측되고 있다. 그래핀의 산업적 응용을 위해서는 대면적으로 두께 균일도가 높은 그래핀을 저렴한 방법으로 합성하는 것이 무엇보다도 우선적으로 요구된다. 그래핀을 얻는 방법으로는 물리 화학적 박리, 탄화규소의 흑연화, 열화학기상증착법(thermal chemical vapor deposition; TCVD) 등의 다양한 방법이 있으며, 현재로선 그 중 TCVD법이 대면적으로 두께균일도가 높은 그래핀을 합성할 수 있는 가장 적합한 방법으로 인식되고 있다. 그러나 이 방법은 탄소가 포함된 원료가스를 분해하기 위하여 고온의 공정이 요구되는 단점이 있다. 이러한 이유로 최근 그래핀은 저온에서 합성하기 위한 많은 연구들이 진행 중에 있으며 그 결과가 속속 보고 되고 있다. 본 연구에서는 고주파 플라즈마가 결합된 TCVD장치를 이용하여 원료가스를 효율적으로 분해함으로서 그래핀의 저온합성을 도모하였다. 기판은 300 nm 두께의 니켈박막이 증착된 산화막 실리콘 기판을 사용하였으며, 원료가스로는 메탄을 사용하였다. 실험결과, 350 W의 파워로 플라즈마를 방전하여 30분간 합성을 수행하였을 때 약 $450^{\circ}C$ 근처의 저온에서 수 겹의 그래핀이 합성 가능한 것을 확인하였다. 합성된 그래핀은 분석의 용이함 및 향후 다양한 응용을 위하여 산화막 실리콘 기판 및 투명 고분자 기판 등으로 전사하였다. 그래핀의 특성분석을 위해서는 광학현미경, 라만 분광기, 투과전자현미경, 자외 및 가시선 분광광도계, 4탐침측정기 등을 이용하였다.

  • PDF

Effect of Microstructure on Mechanical and Electrical Properties in Ni-YSZ of Anode Supported SOFC (연료극 지지체식 고체산화물 연료전지의 기계적 및 전기적 특성에 미치는 Ni-YSZ의 미세구조의 영향)

  • Choi, Mi-Hwa;Choi, Jin-Hyeok;Lee, Tae-Hee;Yoo, Young-Sung
    • Transactions of the Korean hydrogen and new energy society
    • /
    • v.22 no.5
    • /
    • pp.592-598
    • /
    • 2011
  • Electrode of solid oxide fuel cell must have sufficient porosity to allow gas transport to the interface with electrolyte effectively but high porosity has a negative impact on structural stability in electrode support. Thus, the upper limit of porosity is based on consideration of mechanical strength of electrode. In this study, the effect of microstructure of Ni-YSZ anode supported SOFC on the mechanical and electrical property was investigated. LSCF composite cathode and 8YSZ electrolyte were used. The porosity of the anode was modified by the amount of graphite powder and added graphite contents were 24, 18, 12 vol%, respectively. The higher the porosity, the better the electrical performance, $P_{max}$. While the flexural strength decreased with increasing the amount of graphite. But the rate of increase in electrical performance and the rate of decrease in mechanical strength were not directly proportional to amount of graphite. The optimum graphite content incorporating both electrical and mechanical performance was 18 vol%.

Control of the Pore Size of Sputtered Nickel Thin Films Supported on an Anodic Aluminum Oxide Substrate (스퍼터링을 통하여 다공성 양극산화 알루미늄 기판에 증착되는 니켈 박막의 기공 크기 조절)

  • JI, SANGHOON;JANG, CHOON-MAN;JUNG, WOOCHUL
    • Transactions of the Korean hydrogen and new energy society
    • /
    • v.29 no.5
    • /
    • pp.434-441
    • /
    • 2018
  • The pore size of nickel (Ni) bottom electrode layer (BEL) for low-temperature solid oxide fuel cells embedded with ultrathin-film electrolyte was controlled by changing the substrate surface morphology and deposition process parameters. For ~150-nm-thick Ni BEL, the upper side of an anodic aluminum oxide (AAO) substrate with ~65-nm-sized pores provided ~1.7 times smaller pore size than the lower side of the AAO substrate. For ~100-nm-thick Ni BEL, the AAO substrate with ~45-nm-sized pores provided ~2.6 times smaller pore size than the AAO substrate with ~95-nm-sized pores, and the deposition pressure of ~4 mTorr provided ~1.3 times smaller pore size than that of ~48 mTorr. On the AAO substrate with ~65-nm-sized pores, the Ni BEL deposited for 400 seconds had ~2 times smaller pore size than the Ni BEL deposited for 100 seconds.

Fabrication of Nanowire by Electrospinning Process Using Nickel Oxide Particle Recovered from MLCC (MLCC에서 회수된 산화니켈 분말의 전기방사공정을 통한 나노와이어 제조)

  • Haein Shin;Jongwon Bae;Minsu Kang;Kun-Jae Lee
    • Journal of Powder Materials
    • /
    • v.30 no.6
    • /
    • pp.502-508
    • /
    • 2023
  • With the increasing demand for electronic products, the amount of multilayer ceramic capacitor (MLCC) waste has also increased. Recycling technology has recently gained attention because it can simultaneously address raw material supply and waste disposal issues. However, research on recovering valuable metals from MLCCs and converting the recovered metals into high-value-added materials remains insufficient. Herein, we describe an electrospinning (E-spinning) process to recover nickel from MLCCs and modulate the morphology of the recovered nickel oxide particles. The nickel oxalate powder was recovered using organic acid leaching and precipitation. Nickel oxide nanoparticles were prepared via heat treatment and ultrasonic milling. A mixture of nickel oxide particles and polyvinylpyrrolidone (PVP) was used as the E-spinning solution. A PVP/NiO nanowire composite was fabricated via E-spinning, and a nickel oxide nanowire with a network structure was manufactured through calcination. The nanowire diameters and morphologies are discussed based on the nickel oxide content in the E-spinning solution.

Electrochemical and Optical Studies on the Passivation of Nickel (니켈의 부동화에 관한 전기화학적 및 광학적 연구)

  • Dong Jin Kim;Woon-Kie Paik
    • Journal of the Korean Chemical Society
    • /
    • v.26 no.6
    • /
    • pp.369-377
    • /
    • 1982
  • The technique of combined-measurement of reflectance and ellipsometric parameters was used for studying the anodic film formed on nickel surface in basic solutions. An ellipsometer was automated for transient measurements by way of modulating the plane-polarized light with the Faraday effect. Surface film was formed electrochemically by applying a potential step from the reduction potential range to the passivation range on a polished, high-purity, polycrystalline nickel specimen. From that instant, the changes in the reflectance(r) and the ellipsometric parameters(${\Delta},{\Psi}$) of the surface film were recorded by the automatic ellipsometer. Three exact simultaneous equations including these optical signals, ${\Delta},{\Psi}$ and r were solved numerically with a computer in order to determine the optical properties, n, k, and the thickness, ${\tau}$, of the surface film. From the computed results which showed dependence on pH and time, it was found that passivation of nickel can be effectively attained by surface film thinner than $15{\AA}$ and this passivation film has a small optical absorption coefficient. It seemed that a high pH environment enhances the rate of passivation and is favorable for a denser structure of the surface film. The experimental evidence is in accordance with the hypothesis that the composition of the passive film can be approximated by $Ni(OH)_2$ in the early stage of passivation and that as time passes the composition changes partially toward that of NiO through dehydration.

  • PDF

A Study on Separation of Limonite and Saprolite from Nickel Laterite Ores (니켈라테라이트광으로부터 리모나이트 및 사프로라이트의 분리선별 연구)

  • Kim, Kee-Seok;Seo, Joo-Beom;Bea, In-Kook;Bae, Kwang-Hyun;Yoo, Kwang-Suk;Lee, Jae-Young;Kim, Hyung-Seok
    • Resources Recycling
    • /
    • v.23 no.6
    • /
    • pp.12-21
    • /
    • 2014
  • Nickel oxide ores are composed of two kinds of minerals; one is saprolite that is processed by smelting to obtain nickel products, and the other is limonite that is used in hydrometallugical processes. It is not efficient economically to process the mixture of limonite and saprolite, so the processes to saparate the ore mixture should be developed. In the present study, the mixture was separated by dry-classification after liberationg using grindability difference between limonite and saprolite. Consequently, it is possible to obtain the limonite with less than 10% of Mg+Si contents, which could be treated by hydrometallurgical processes, when the limonite contain less than 30% of saprolite.

Remediation of Soils Contaminated with Arsenic and heavy Metals by Soil Washing (토양세척에 의한 비소 및 중금속 오염토양의 복원)

  • Ko Ilwon;Lee Cheol-Hyo;Lee Kwang-Pyo;Kim Kyoung-Woong
    • Journal of Soil and Groundwater Environment
    • /
    • v.9 no.4
    • /
    • pp.52-61
    • /
    • 2004
  • In order to remediate soils contaminated with oxyanionic As and cationic Zn and Ni through the pilot-scale acid washing, the effectiveness of acid washing and the properties of contaminated soils, fine soil particle and dissolved contaminants were evaluated. $H_{2}SO_4\;and\;H_{3}PO_4$ washing at pH $2{\sim}3$ enhanced the removal of As by the presence of competitive oxyanions and HCl washing effectively removed simultaneously As, Zn and Ni. The effectiveness of soil washing was little enhanced above the critical reaction time, and the carbonate, Fe/Mn oxide and organic/sulfides associated fraction were dominantly removed. The washing of coarse soil particles was highly efficient, but that of fine soil particles($<74{\mu}m$) was recalcitrant due to the enrichment with contaminants. Moreover, the physical separation of fine particles($<149{\mu}m$) enhanced the overall efficiency of soil washing. Therefore, both chemical extraction and separation of fine soil particles showed the high effectiveness of soil washing in the intersection point to minimize the amount of fine soil particles and to maximize the chemical extraction of contaminants.

High temperature oxidation behavior and surface modification of Ni-based superalloys (니켈기 초합금의 고온산화거동과 표면개질에 관한 연구)

  • Seol, Gyeong-Won
    • Korean Journal of Materials Research
    • /
    • v.4 no.2
    • /
    • pp.166-176
    • /
    • 1994
  • Ni base superalloys are composed of solid sohltion hardening elements(Co, Cr. Mo. W and so on) and $\gamma '$ precipitation hardening elements(A1, Ti, Nb, Ta and so on). To Improve the mechanical properties and oxidation resistanre of superalloys, rare earth elements(%r, Hf, Y and so on) are added to the inner substrate, or are used as coating materials. Their pffects on the growth rate and adhes~on of oxide are changed according to the kinds of oxides such as $AI_2O_3$ and $Cr_2O_3$. The effect of yttrium on the oxidation rate, grain size of oxide, internal structure, and crack resistance was investigated for two kinds of Ni-base superalloys. One in AF'115 superalloy containing Hf and the other is MA6000 superalloy containing $Y_2O_3$. They werr owid~zed at high temperature after yttrium surface modification using ion coater. Yttrium coating on the AF115 and MA6000 superalloys results in a marked change in the growth of the inner oxide. For AF115 superalloy, the degree of gram boundary segregation of $Cr_2O_3$, and prefer en^ tial oxidation of Hf are decreased, and the shape of inner oxidation layer was changed from triangle to plate type. For MA6000 superalloy, $Cr_2O_3$ oxide scale was transformed as outer oxidation layer of CrZOI and inner oxidation layer of $Cr_2O_3$.

  • PDF