• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.302-302
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• 2012

최근 비 휘발성 메모리 시장의 확대와 수요가 많아지면서, 비휘발성 메모리 소자의 제작에 대한 연구가 활발히 진행되고 있다. 특히, 실리사이드 나노입자를 적용한 소자는 현 실리콘 기반의 반도체 공정의 적용이 용이하다. 따라서 본 연구에서는 실리사이드 계열의 화합물 중에서 일함수가 4.63 eV인 Vanadium silicide (V3Si) 나노입자 메모리소자를 제작하여 전기적 특성과 열 안정성에 대하여 알아보았다. p-Si기판에 약 6nm 두께의 SiO2 터널층을 건식 산화 방법으로 성장시킨 후 V3Si 나노입자를 제작하기 위해서 V3Si 금속박막을 스퍼터링 방법으로 4 nm~6 nm의 두께로 터널 절연막 위에 증착시켰다. 그리고 컨트롤 절연막으로 SiO2를 초고진공 스퍼터를 이용하여 50 nm 증착하였고, 급속 열처리 방법으로 질소 분위기에서 $800^{\circ}C$의 5초 동안 열처리하여 V3Si 나노 입자를 형성하였다. 마지막으로 200 nm두께의 Al을 증착하고, 리소그래피 공정을 통하여 채널 길이와 너비가 각각 $2{\mu}m$, $5{\mu}m$, $10{\mu}m$를 가지는 트랜지스터를 제작하였다. 제작된 시편의 V3Si 나노입자의 크기와 균일성은 투과 전자 현미경으로 확인하였고, 후 열처리 공정 이후 V3Si의 존재여부의 확인을 위해서 X-ray 광전자 분광법의 표면분석기술을 이용하여 확인하였다. 소자의 전기적인 측정은 Agilent E4980A LCR meter, 1-MHz HP4280A와 HP 8166A pulse generator, HP4156A precision semiconductor parameter analyzer을 이용하여 측정온도를 $125^{\circ}C$까지 변화시키면서 전기적인 특성을 확인하였다. 본 연구에서는 온도에 선형적 의존성을 가지는 전하누설 모델인 T-model 을 이용하여 나노입자 비휘발성 메모리소자의 전하누설 근원을 확인한 후, 메모리 소자의 동작 특성과의 물리적인 연관성을 논의하였다. 이를 바탕으로 나노입자 비휘발성 메모리소자의 열적안정성을 확보하고 소자 특성향상을 위한 최적화 구조를 제안하고자 한다.

• Proceedings of the KIEE Conference
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• 1999.11d
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• pp.882-884
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• 1999

금속 다층박막과 미세입상 합금박막에서 발견된 Giant Magnetoresistance(GMR)현상에 고무되어 최근에는 50년대에 밝혀졌던 산화물 자기저항 재료에 관하여 새롭게 연구하고 있다. Perovskite 구조를 가지는 $La_{1-x}Ca_{x}MnO_{3}$ 박막에서 큰 자기저항을 얻었으며 이를 Colossal Magentoresistance (CMR)이라 한다. 본 연구에서는 $La_{1-x}Ca_{x}MnO_{3}$ 분말을 고상반응법과 자발착화연소 합성법(Glycine-Nitrate Process)으로 각각 제조하였으며 비교 분석하였다. TGA을 이용하여 불순물과 미반응 물질을 확인하여 적당한 하소온도를 결정하였고 XRD를 이용하여 결정상을 분석하였다. Dilatometer를 이용해 $1400^{\circ}C$까지의 열팽창율을 측정하였다. BET로 비 표면적을 비교하였으며, 주사전자현미경(SEM)으로 각각 제조된 분말의 입자상태와 입자성장을 확인하였다. GNP법으로 합성한 경우가 고상반응법을 이용한 경우보다 입자의 크기가 submicron 단위로 미세하고 비표면적도 수배 컸으며, 고순도의 perovskite 구조를 갖는 $La_{1-x}Ca_{x}MnO_{3}$ 분말을 얻을 수 있었다.

• Proceedings of the Korean Society of Dyers and Finishers Conference
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• 2012.03a
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• pp.109-109
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• 2012

아라미드 섬유는 태양광의 직사광선에 계속 노출될 경우 120주 경과 후에는 강도가 3분의 1로 떨어지는 단점이 있다. 이와 같은 단점을 보완하기 위해 나노 크기의 금속산화물인 $TiO_2$ 졸-겔 나노합성법을 이용하여 나노졸을 제조하고 이를 직물에 함침하는 공정을 통하여 아라미드 섬유의 내광성 증진에 대해 연구하였다. TTIP, TEOS 등의 금속전구체를 이용하여 구형의 나노졸 합성에 의한 $TiO_2$ 나노졸을 수분산형태의 졸로서 섬유가공 공정상에 접목하였다. 제조된 나노크기의 $TiO_2$ 입자분포와 크기, 미세구조 및 결정상을 알아보기 위해 입도분포분석기, TEM, XRD를 이용하였다. $TiO_2$ 나노졸을 함침한 아라미드 직물은 내광성은 24, 48, 96시간 동안 Xenon-arc 광조사한 후, 물성변화를 분석하였다. 나노졸 합성시 반응물의 농도 및 용액의 pH 조건에 따른 나노졸의 미세구조를 TEM을 이용하여 관찰한 결과, 반응물의 농도에 따라 평균입도는 313.7nm, 500.5nm, 840.3nm, 1002nm로 커졌다. 하지만, 반응물의 농도가 증가할수록 시간이 지남에 따라 입자들이 층 분리 현상이 관찰되었으며, 단분산된 나노졸 입자를 제조하기 위해서는 TTIP의 투입량을 0.67mole(200ml)로 유지하였다. 또한 이를 아라미드 직물에 함침하여 광조사 시간에 따른 아라미드 섬유의 물리적 특성의 변화를 분석하였다.

• Journal of the Korean Chemical Society
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• v.47 no.6
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• pp.608-613
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• 2003

In order to remove particles on surface of post-oxide CMP wafer, new cleaning solution was prepared by mixing with DHF (Diluted HF), nonionic surfactant PAAE (Polyoxyethylene Alkyl Aryl Ether), DMSO (Dimethylsulfoxide) and D.I.W.. Silicone wafers were intentionally contaminated by silica, alumina and PSL (polystylene latex) which had different zeta potentials in cleaning solution. This cleaning solution under megasonic irradiation could remove particles and metals simultaneously at room temperature in contrast to traditional AMP (mixture of $NH_4OH,\;H_2O_2$ and D.I.W) without any side effects such as increasing of microroughness, metal line corrosion and deposition of organic contaminants. This suggests that this cleaning solution would be useful future application with copper CMP in brush cleaning process as well as traditional post CMP cleaning process.

• Journal of Energy Engineering
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• v.12 no.4
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• pp.289-301
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• 2003

To develop a chemical-looping combustion technology, conceptual design of 50 kW thermal chemical-looping combustor, which is composed of two interconnected pressurized circulating fluidized beds, was performed by means of mass and energy balance calculations. A riser type fast fluidized bed was selected as an oxidizer and a bubbling fluidized bed was selected as a reducer by mass balance for the chemical-looping combustor. Calculated values of bed mass, solid circulation flux, and reactor dimension by mass and energy balance calculations were suitable for construction and operation of chemical-looping combustor. It is concluded from the comparison of the design results and operating values of commercial circulating fluidized bed that the process outline is realistic. Moreover, the previous results support that oxygen carrier particle, NiO/bentonite, fulfills the conversion rates needed for the proposed design. The effects of system capacity, metal oxide content in a oxygen carrier particle, amount of steam input, gas velocity, and solid depth on design values were investigated and the changes in the system performance can be estimated by proposed design tool.

• Journal of the Korea Organic Resources Recycling Association
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• v.29 no.4
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• pp.47-54
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• 2021

In this study, the performance of a honeycomb-type hydrogen oxidation catalyst to remove hydrogen in a hydrogen economy society to secure leaking hydrogen. The Pd/TiO₂ catalyst was prepared based on a liquid phase reduction method that is not exposed to a heat source, and it was showed through H₂-chemisorption analysis that it existed as very small active particles of 2~4 nm. In addition, it was found that the metal dispersion decreased and the active particle size increased as the reduction reaction temperature increased. It was meant that the active metal particle size and the hydrogen oxidation performance were in a proportional correlation, so that it was consistent with the hydrogen oxidation performance reduction result. The prepared catalyst was coated on a support in the form of a honeycomb so that it could be applied to the hydrogen industrial process. When 20 wt% or more of the AS-40 binder was coated, oxidation performance of 90% or more was observed under low-concentration hydrogen conditions. It was showed through SEM analysis that long-term catalytic activity can be expected by enhancing the adhesion strength of the catalyst and preventing catalyst desorption. It is a basic research that can secure safety in a hydrogen society such as gasification, organic resource, and it can be utilized as a system that can respond to unexpected safety accidents in the future.

• Journal of Food Hygiene and Safety
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• v.34 no.4
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• pp.317-324
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• 2019

This study focuses on the role of nanotechnology in the field of food industries. Bioactive components with antimicrobial activity against food pathogens are encapsulated into nanoparticles (NPs) to improve and extend their efficiency in food preservation. However, these NPs should be biocompatible and nontoxic for humans. Advancement in this field has resulted in the development of NPs for food packaging in some industries. The most commonly used group of NPs in the food industry is metal oxide. As metal oxide NPs such as zinc oxide and titanium dioxide exhibit antimicrobial activity in food materials, the NPs can be used for food preservation with enhanced functional properties. The application and effects of nanotechnology in correlation with the nutritional and sensory properties of foods were briefly discussed with a few insights into safety regulations on nano-based food formulation and preservation.

• Journal of IKEEE
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• v.28 no.3
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• pp.261-270
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• 2024

In this study, a lanthanum gallium oxide (LaGaO) solution was prepared using a sol-gel method. By simply forming a LaGaO thin film through adjusting the curing temperature after applying the solution onto the substrate using a brush coating process, the potential for use as a liquid crystal (LC) alignment film in the LC display industry was validated. Through optical microscope observation, it was confirmed that the LC molecules were uniformly aligned as the curing temperature of the LaGaO thin film increased. It was confirmed that the LaGaO thin film cured at 230℃ had low pretilt angle, and that LaGaO particles were formed in a single direction as observed through an atomic force microscope. Through X-ray photoelectron spectroscopy, it was found that the LaGaO metal oxide thin film was well formed. Finally, it has been confirmed that LaGaO metal oxide has the potential as a novel LC alignment film material, as it exhibits excellent electrical and optical properties, along with high optical transmittance.

• Analytical Science and Technology
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• v.18 no.2
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• pp.120-129
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• 2005

Volatile organic compounds (VOCs) have been recognized as major contributor to air pollution. The catalytic oxidationis is one of the most important processes for VOCs destruction due to the possibility getting high efficiency at low temperature. In this study, monometallic Pt, Ir and bimetallic Pt-Ir were supported to $TiO_2$. In order to distribute metals uniformly, $H_2O-H_2$ treatment method was used. Xylene, toluene and MEK were used as reactants. The monometallic or bimetallic catalysts were prepared by the excess wetness impregnation method and characterized by XRD, XPS, and TEM analysis. Pt catalyst showed higher conversion than Ir catalyst and Pt-Ir bimetallic catalyst showed the highest conversion. The catalysts prepared by $H_2O-H_2$ treatment had better VOC's conversion than that of nothing treatment. In the VOCs oxidation, Pt-Ir bimetallic catalysts had multipoint active sites, so it improved the range of Pt metal state. Therefore, bimetallic catalysts showed higher conversion of VOCs than monometallic ones. $H_2O-H_2$ treatment effected an uniform distribution of Pt particles. In VOCs oxidation was found to follow first order reaetion kinetics. The activation energy of $H_2O-H_2$ treatment catalysts was lower than that of untreated ones. In this study, the a small amount of Ir was used with Pt to promote the oxidation conversion of VOCs.

• Korean Chemical Engineering Research
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• v.56 no.6
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• pp.819-825
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• 2018

Porous nanofibers comprising hollow ${\alpha}-Fe_2O_3$ nanospheres were prepared by applying both template method and Kirkendall diffusion effect to electrospinning process. During heat-treatment processes, the solid Fe nano-metals formed by initial heat-treatment in the carbon matrix were converted into the hollow structured ${\alpha}-Fe_2O_3$ nanospheres. In particular, PS nanobeads added in the spinning solution were decomposed and formed numerous channels in the composite, which served as a good pathway for Kirkendall diffusion gas. The resulting porous nanofibers comprising hollow ${\alpha}-Fe_2O_3$ nanospheres were applied as an anode material for lithium-ion batteries. The discharge capacities of the nanofibers for the 30th cycle at a high current density of $1.0A\;g^{-1}$ was $776mA\;h\;g^{-1}$. The good lithium ion storage property was attributed to the synergetic effects of the hollow ${\alpha}-Fe_2O_3$ nanospheres and the interstitial nanovoids between the nanospheres. The synthetic method proposed in this study could be applied to the preparation of porous nanofibers comprising hollow nanospheres with various composition for various applications, including energy storage.