• Title/Summary/Keyword: 불균일 표면

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Fabrication and Characterization of LPCVD $P_2O_5-SiO_2$ Films for Inegrated Optics (1) -LPCVD of TEOS and TMPite (LPCVD $P_2O_5-SiO_2$ 집적광학박막의 제작 및 특성 연구(1) -TEOS와 TMPite의 LPCVD-)

  • 정환재
    • Korean Journal of Optics and Photonics
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    • v.4 no.3
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    • pp.266-275
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    • 1993
  • We made $P_2O_5-SiO_2$ films on silicon for integrated optics application by low pressure chemical vapor deposition using TEOS (tetraethylorthosilicate) and TMPite (trimethylphosphite) and studied the deposition characteristics. The activation energy of the reaction was changed from 54.6 kcal/mole to 39.2 kcal/mole by incorporating the TMPite into the reaction of TEOS. The deposition rate and the P concentration of films increased in proportion to the flow of TMPite. As the deposition temperature increased, the deposition rate of the films increased but the P concentration decreased. The fabricated films showed the increase of refractive index of 0.0019 per 1 wt% of P concentration. The nonuniformity of films was ${\pm}$7% in thickness and ${\pm}$0.5wt% in P concentration and we showed this'nonuniformity is due to the nonuniform transport of TMPite. The films of more than 10wt% P concentration developed phosphoric acid on its surface when exposed to air for long time.

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Analyses on the Physical and Electrochemical Properties of Al2O3 Coated LiCoO2 (리튬이차전지용 양극 활물질(LiCoC2)의 표면처리의 특성 분석 및 전기화학적 특성 고찰)

  • Chang, Youn-Han;Choi, Sei-Young
    • Journal of the Korean Electrochemical Society
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    • v.10 no.3
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    • pp.184-189
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    • 2007
  • The importance of secondary battery industry is getting excited according to the development of battery industry as a high efficiency energy supplier of electronic machine of mobile information such as mobile phone, lap-top computer, PDA. It is rasing the interest about security of safety and high efficiency of cathode material for main part of secondary lithium battery. The cathode material which has been used like $LiCoO_2,\;LiMn_2O_4,\;LiNi_xCo_yMn_zO_2,\;LiNi_xCo_yM_zO_2$ (M=Al, Zr, Mg etc.,) the most typical material is $LiCoO_2$. But it is studying the development of substitute such as efficiency amelioration of $LiCoO_2$, thetiary element, olivine element because of the capacity of $LiCoO_2$, the matter of security; especially the betterment of efficiency, security research of safety has been actively processed in domestic and overseas about surface coating treatment of active cathode which is using oxide ($M_xO_3$). This study analyses side effect of battery according to increase of surface treatment, formation of precipitation for reagent condensation, non-reagent residue of oxide ($M_xO_3$) which is remains during the surface treatment of $LiCoO_2$; conducts study of new process, the consideration of the electrochemical property to improve oxide solution of mixing rate, mixture of surface treatment, dryness, calcinations conditionetc.

Effect of Ion Mass Doping on Metal-Induced Lateral Crystallization (이온 질량 주입이 금속 유도 측면 결정화에 미치는 영향)

  • Kim, Tae-Gyeong;Kim, Gi-Beom;Yun, Yeo-Geon;Kim, Chang-Hun;Lee, Byeong-Il;Ju, Seung-Gi
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.37 no.4
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    • pp.25-30
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    • 2000
  • Ion mass doping method has been implemented for the fabrication of large area electronic devices such as TFT-LCD. In this work, the effect of ion mass doping on the velocity and the behavior of MILC was investigated. When amorphous silicon was either doped or bombarded by accelerated ions, MILC velocity was reduced by over 50% and the front edge of MILC became coarse. In order to analyze the dependence of silicon film's properties on ion mass doping, ultraviolet reflectance and sulfate roughness were investigated. Both the velocity and the behavior of MILC were found to be related with the increase of surface roughness by ion bombardment.

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Characterization of iron oxide scale films using radio frequency waves (전파를 이용한 철산화물 스케일 박막 특성 연구)

  • Muhn, Sung-Jin;Shin, Dong-Sik;Yun, Him-Chan;Park, Wee-Sang
    • The Journal of the Institute of Internet, Broadcasting and Communication
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    • v.9 no.3
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    • pp.55-60
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    • 2009
  • This paper deals with the analysis of characteristics of the scale non-uniformly formed on the surface of the steel during the steel production processes. The steel made at the high temperature contacts with the oxygen in the air, so forms the scale immediately. The scale has a role to protect the surface of the steel product as a oxide-layer, but the scale formed non-uniformly spoils the exterior of the steel product and occurs the problems about the next processes. There is a pickling process to remove the scale of the steel products, but the real situation is that the pickling process is not also based on the analysis of the characteristics of the scale. Therefore, this paper describe the procedures of the analysis of the scale more effectively using the radio-frequency wave. Using the radio-frequency wave, this paper introduce the experimentations to analyze the distributions of scale, the junction characteristics between the surface of steel and scale and the distributions of scale on the produced steel coil. Also, according to the simple simulations, this paper proves the proprieties about the above contents.

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Characteristics and Preparation of Manganese Oxide Electrode by Using Pulse Voltammetry Electrodeposition for Electrolysis (펄스 전착법을 이용한 전기분해용 망간 산화물 전극의 제조 및 특성)

  • Yang, Jeong-Jin;Lee, Mi-Young;Kim, Jeong-Sik;Shin, Hyun-Soo;Park, Soo-Gil
    • Journal of the Korean Electrochemical Society
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    • v.13 no.2
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    • pp.138-144
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    • 2010
  • In order to investigate the electrochemical propertied of titanium electrode for electrolysis, manganese oxide was electrodeposited on surface of mesh titanium by pulse voltammetry. The morphological changes and impedance results of manganese oxide electrodeposited electrode were analyzed by SEM and EDX. The size of electrodeposited manganese oxide on mesh titanium was increased with first cycle pulse time increase, and approximately 100 non-uniform manganese oxide was grown at 10 ms pulse polarization time. Charge transfer resistance($R_{ct}$) of near the overpotential was analyzed by EIS measurement and the feasibility of prepared electrode was evaluated by the overpotential calculated from Tafel plots.

Numerical Study of Impact of Microdroplet Containing Nanoparticles (나노입자를 포함한 미세액적의 충돌에 대한 수치적 연구)

  • Roh, Sang-Eun;Son, Gi-Hun
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.36 no.6
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    • pp.609-617
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    • 2012
  • The impact, spreading and recoil processes of a nanoparticle-laden droplet impacting on a horizontal solid surface are numerically investigated by solving the conservation equations for mass, momentum, energy and mass fraction. The liquid-air interface is tracked using a level-set method that is modified to include the effect of contact angle hysteresis at the wall. The species transport equation including a thermal diffusion term is additionaly solved to determine the nanoparticle distribution in the droplet. The effect of nanoparticle concentration and contact angle are also studied.

Investigation of Uniformity in Ceria based Oxide CMP (Ceria 입자 Oxide CMP에서의 연마 균일도 연구)

  • Lim, Jong-Heun;Lee, Jae-Dong;Hong, Chang-Ki;Cho, Han-Ku;Moon, Joo-Tae
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.11a
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    • pp.120-124
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    • 2004
  • 본 연구는 Diluted Ceria 입자를 사용한 $SiO_2$(Oxide) CMP 현상에 대한 내용이다. Ceria Slurry의 경우 Silica Slurry와 비교하였을 때 Oxide Wafer 표면과 축합 화학반응을 일으키며 Chemistry Dominant한 CMP Mechanism을 따르고, Wafer Center Removal Rate(RR) Fast 의 특성을 가진다. Ceria Slurry의 문제점인 연마 불균일도를 해결하기 위해 Tribological System을 이용하였다. CMP Tribology는 Pad-Slurry 유막-Wafer의 System을 가지며 윤활막에 작용하는 마찰계수(COF)가 주요 인자이다. Tribology에 적용되는 Stribeck Curve를 통해 Slurry 윤활막의 두께(h) 정도를 예상할 수 있으며, 이 윤활막의 두께를 조절함으로써 Uniformity 향상이 가능하다. 이 Ceria Slurry CMP의 연마 불균일도를 향상시킬 수 있는 방법으로 pH 조절 및 점도 증가가 있다. Ceria 입자 CMP는 분산액의 pH 변화에 강한 작용을 받게 되며 PH5 근방에서 최적화된 Uniformity가 가능하다. 점도를 증가시키는 경우 유막 h가 증가하게 되어 Ceria Slurry의 유동이 균일 분포 상태에 가까워지며 Wafer Uniformity 향상이 가능하다.

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Synthesis of Cobalt Phosphates and their Catalytic Properties of the Hydrogen Generation from the Hydrolysis of NaBH4 (비결정질 코발트 인산염 합성 및 NaBH4 가수분해를 통한 수소발생 촉매 활성 연구)

  • Kim, Youngyong;Park, Joon Bum;Kwon, Ki-Young
    • Applied Chemistry for Engineering
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    • v.26 no.6
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    • pp.743-745
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    • 2015
  • Amorphous cobalt phosphates were synthesized with their distinct morphology by controlling the amount of base in the synthetic condition. The crystallinity and morphology of cobalt phosphates were characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The prepared cobalt phosphates were applied as a heterogeneous catalyst for generating hydrogen gas from the hydrolysis reaction of sodium borohydride. We found that the catalyst prepared using the least amount of base condition at room temperature showed a plate shape with less than 10 nm thickness, which resulted in the best catalytic activity among all catalysts due to the large surface area.

A Study on the Defect Classification of Low-contrast·Uneven·Featureless Surface Using Wavelet Transform and Support Vector Machine (웨이블렛변환과 서포트벡터머신을 이용한 저대비·불균일·무특징 표면 결함 분류에 관한 연구)

  • Kim, Sung Joo;Kim, Gyung Bum
    • Journal of the Semiconductor & Display Technology
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    • v.19 no.3
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    • pp.1-6
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    • 2020
  • In this paper, a method for improving the defect classification performance in steel plate surface has been studied, based on DWT(discrete wavelet transform) and SVM(support vector machine). Surface images of the steel plate have low contrast, uneven, and featureless, so that the contrast between defect and defect-free regions is not discriminated. These characteristics make it difficult to extract the feature of the surface defect image. In order to improve the characteristics of these images, a synthetic images based on discrete wavelet transform are modeled. Using the synthetic images, edge-based features are extracted and also geometrical features are computed. SVM was configured in order to classify defect images using extracted features. As results of the experiment, the support vector machine based classifier showed good classification performance of 94.3%. The proposed classifier is expected to contribute to the key element of inspection process in smart factory.

Synthesis and Characterization of Sulfonated Polyetherimide (Sulfonated Polyetherimide 합성 및 특성)

  • 김완주;최남석;최중구;김인철;김종호;탁태문
    • Membrane Journal
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    • v.9 no.1
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    • pp.10-16
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    • 1999
  • In this study, polyetherimide with pellet state was sulfonated with a chlorosulfonic acid. The volume ratio of carbon tetrachloride (CCI$_4$/1,2-dichloroethane (DCE) was 5/1. Therefore, sulfonated polyetherimide of anionic charge and more hydrophilicity were produced. The optimum reaction conditions of sulfonation were that PES/CSA mole ratio was I/I, temperature were lO$^{\circ}$ and reaction time were 3hr. SPEls having ion capacity in the range of 0.2-1.2meq/mg were synthesized. Through FT-IR, sulfonic acid peak was shown at 1020cm$^{-1}$ and 1170cm$^{-1}$ Polymer dispersity index was broad and we confirmed that PEl was hydrophilzed in the measure of contact angle.

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