• Proceedings of the KSME Conference
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• 2005.11a
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• pp.207.2-207.2
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• 2005

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.179-179
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• 2006

산업기술의 고도화에 따른 IT 산업의 급속한 발전으로 각종 전자, 정보통신기기에 대해 더욱 소형화 고성능화를 요구하고 있다. 이와 같은 경향에 따라 더욱 향상된 기능을 가지고 각종 소자 부품의 개발과 동시에 유독 물질 발생이 없는 청정생산기술 개발에 대한 요구가 끊임없이 제기 되어 왔다. 이러한 요구에 부응하여 기술들이 개발되고 있으며 그 중의 하나로 잉크젯 프린팅 기술이 연구되고 있다. 특히 Dod(Drop on Demand) 방식의 잉크젯은 가정용 프린터로 개발되어 널리 보급된 기술이지만, 이 기술을 PCB 제조기술에 전용하면 친환경 생산공정으로 부품 성장밀도를 증대 시킬 수 있다. 기존의 PCB 제조기술은 전극과 신호 패턴을 형성시키기 위하여 노광공정과 에칭공정을 반복적으로 사용하고 있는데, 노광공정에서 쓰이는 마스크와 유틸리티 설비 유지 비용의 문제가 대두되고 있다. 노즐로부터 분사된 잉크 액적들의 집합으로 기판위에 점/선/면의 인쇄이미지를 구현하게 된다. 그러므로 인쇄 해상도는 잉크액적 및 인쇄 방법, 기판과의 상호작용에 크게 의존하게 된다. 잉크 액적과 기판의 상호작용에 영향을 미치는 요소로는 잉크의 물리화학적 물성(밀도, 점도, 표면장력), 잉크 액적의 충돌 조건(액적 지름, 부피, 속도), 그리고 기판의 특성(친수/소수성, Porous/Nonporous, 표면조도 등)을 들 수 있겠다. 우선적으로 노즐을 통과해서 분사되는 액적의 크기에 따라 기판위에 형성되는 라인의 두께 및 폭이 결정된다. 떨어진 액적이 기판위에서 퍼지는 것을 UV 조사를 통한 가경화 과정을 통해서 최종적으로 라인의 투께 및 폭을 조절하려고 한다. 따라서 선폭 $75{\mu}m$의 일정한 미세 배선을 형성시키기 위해 액적 크기 조절과 탄착 resist 액적 표면의 UV 가경화 조건으로 구현하려고 한다. 또한 DPI(Dot Per Inch) 조절을 통한 인쇄로 탄착 resist의 두께 확보 후 에칭시 박리되는 현상을 억제 시키려 한다.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.29 no.1 s.232
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• pp.67-73
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• 2005

The paper presents a single-heater microfluid injector, whose ejected droplet volume is adjusted by digital current path control for a single microheater. The previous droplet volume adjustable methods have used the digital current control for multiple heaters or the analog current control for a single heater, while the present method uses the digital current control for a single microheater. Two different microinjectors, having a rectangular heater and a circular hearter, are designed and fabricated in the chip area of $7.64\;mm{\times}5.26\;mm$. The fabricated microinjectors have been tested and characterized for the number, size, shape and lifetime of the generated bubbles as well as for the volume and velocity of the ejected droplets. The input power for the rectangular heater and the circular heater has been varied in the ranges of $8.7{\sim}24.9{\mu}W\;and\;8.1{\sim}43.8{\mu}W$, respectively. The projected area of the generated bubble has been changed in the ranges of $440{\sim}l,3600{\mu}m^2\;and\;800{\sim}3,300{\mu}m^2$ for the rectangular heater and the circular heater, respectively. The microinjector with the rectangular heater ejects three discrete levels of the droplet in the volume range of $9.4{\sim}20.7pl$ with the velocity range of $0.8{\sim}1.7m/s$, while the microinjector with the circular heater achieves five discrete levels of the droplet in the volume range of $7.4{\sim}27.4pl$ with the velocity range of $0.5{\sim}2.8m/s$.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.18 no.6
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• pp.1-7
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• 2017

The atomization of a liquid into multiple droplets has many important industrial applications, including the atomization of fuels in combustion processes and coating of surfaces and particles. Ultrasonic atomizing nozzle has a transducer that receives electrical input in the form of a high frequency signal from a power generator and converts that into mechanical energy at the same frequency. Liquid is atomized into a fine mist spray using high frequency sound vibrations. In coating applications, the unpressurized, low-velocity spray reduces the amount of overspray significantly because the droplets tend to settle on the substrate, rather than bouncing off it. The spray can be controlled and shaped precisely by entraining the slow-moving spray in an ancillary air stream using specialized types of spray-shaping equipment. The desired patterns of spray can be obtained using an air stream. To simulate the water mist behavior of an ultrasonic atomizing nozzle using an air stream, the Lagrangian dispersed phase model was employed using the commercial code FLUENT. The effects of the nozzle contraction shape, water droplet size and the pneumatic pressure drop on the spray characteristics were investigated to obtain the optimal condition for coating applications.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.29 no.3 s.234
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• pp.418-424
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• 2005

We present the design, fabrication and experimental results of 4-bit digital microinjectors, whose ejected droplet volumes are adjusted by the digital operation of a 4-bit microheater array. We design the reference microinjectors as well as its comparative test structures. In the fabrication process, we use a five-mask micromachining process and the total chip size of the fabricated microinjector is $7,640{\mu}m{\times}5,260{\mu}m.$ We measure the ejected droplet volumes and velocities, which are adjusted from $12.1{\pm}1.0~55.6{\pm}14.7pl\;and\;2.3{\pm}0.1~15.7{\pm}0.8m/s.$ respectively, depending on the 15 possible combinations of 4-bit microheater array. We also experimentally characterize the effect of geometric variation including the microheater size, inter-microheater gap, microchannel width and sequential operation of microheater array on the ejected droplet volume and velocity. Among these parameters, we find that the microheater size is the most dominant parameter affected to the ejected droplet volumes and velocities. Thus, the present microinjector has a potential for application to the high-resolution inkjet printers with multiple gray levels or high-precision fluid injectors with variable volume control.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.47 no.9
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• pp.658-664
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• 2019

In the development of the liquid rocket engine using the pintle injector, spray characteristics such as spray angle, droplet size, and distribution of the droplets are dominant parameters. Three different kind of multi hole type pintle tip and a continuous type pintle tip were designed. In the case of multi hole pintle tip, SMD result did not have a significant difference depending on the number of holes. In analysis with visualization images, however, the droplets were uniformly distributed as the number of holes increased. Liquid droplets from continuous type pintle tip were finely atomized and dispersed uniformly than those from multi-hole type pintle tip. In addition, the thrust control by adjusting the liquid injection area of the pintle is suitable for the continuous type, which is easier to face-shutoff rather than the multi hole type. The spray angle of each pintle tip according to TMR was measured to derive a specific tendency and corresponding empirical formula.

• Journal of Advanced Marine Engineering and Technology
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• v.37 no.5
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• pp.510-519
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• 2013

In this study, the spray characteristics of a pressure swirl atomizer classified into a liquid sheet-type swirl nozzle for Urea-SCR system were investigated experimentally with the variation of injection pressure. The length to diameter ratio ($l_o/d$) of the nozzle was 3.1, and the swirler was set inside the nozzle tip to give injecting fluid angular momentum. The injection duration of the nozzle was controlled by PWM (pulse width modulation) modes. The development processes of the spray were imaged by a 2-D PIV system, and the change of spray angle was measured. The atomization characteristics, including axial velocity and SMD, were measured using a 2-D PDA system with the injection pressures at room temperature and ambient pressure conditions. As the experimental results, the injection pressure had a significant impact on the spray structure showing a different shape around the spray leading edge, and the smaller SMD was observed with increasing injection pressures, which was similar to that of the previous work.

• Proceedings of the Materials Research Society of Korea Conference
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• 2010.05a
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• pp.58.2-58.2
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• 2010

FPD (Flat Panel Display) 제조 공정에서 사용되는 패턴은 수 ${\mu}m$ 수준까지 감소하였으며, FPD의 크기는 급격하게 대형화 되여 현재 8세대(2200mm*2500mm)에 이르고 있다. 이에 따라, $1\;{\mu}m$ 이상의 크기를 갖는 오염입자에 의한 수율 저하를 극복하기 위한 세정효율의 향상 및 다량의 초순수 사용에 따른 폐수 발생으로 인한 환경오염, 또한 장비의 크기에 따른 공간 효용성 감소와 이에 따른 공정 비용의 증가 등의 어려움에 직면하고 있다. 따라서, 현장에서는 고효율, 저비용의 세정 공정 기술 개발에 대한 연구가 활발히 진행되고 있다. 이러한 문제점들을 해결 하고자 이류체 노즐 세정 장치와, 화학액 린스를 위한 초순수 Spray, 건조 공정에 해당하는 Air-knife, Halogen lamp로 구성된 소형화 된 고속 FPD(Flat Panel Display) 세정기에 대한 연구를 진행 하였다. 이류체 노즐은 초순수와 $N_2$ 가스를 내부에서 혼합하여 액적(Droplet)을 형성하여 고압으로 분사시키는 장치로서 화학액을 사용하지 않고 물리적인 방법으로 오염입자를 제거한다. Spray는 유기 오염입자 제거를 위한 오존수의 린스 공정을 위해 설치 하였다. 세정 후 표면에 남아있는 기판의 액막(water film)은 고압의 가스를 분사하는 Air-knife를 통해 제거하였으며, 고속 공정시 발생할 수 있는 Air-knife에서 제거하지 못한 잔류 액막을 Halogen lamp를 사용하여 효과적으로 제거함으로써, 물반점(water mark) 없는 건조 공정을 얻을 수 있었다. 실험에는 미세 입자의 정량적인 측정을 위하여 유리 기판 대신에 6인치 실리콘 웨이퍼(P-type (100))를 사용하였으며, > $\;1{\mu}m$ 실리카 입자를 스핀방식을 사용하여 정량적으로 균일하게 오염하였으며, 오염물의 개수 및 분포는 파티클 스캐너 (Surfscan 6200, KLA-Tancor, USA)를 사용하여 분포 및 개수를 정량적으로 측정 하였다. 이류체 노즐은 $N_2$ 가스의 압력과 초순수의 압력을 변화시켜 측정하여, 각각 0.20 MPa, 0.01 MPa에서 최적의 세정 결과를 얻을 수 있었으며, 건조 효율은 Air-Knife의 입사 각도와 건조면 간격, 할로겐 램프의 온도를 조절 하여 최적의 조건을 얻을 수 있었다.

• Journal of Energy Engineering
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• v.7 no.1
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• pp.17-23
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• 1998

A simplified experiment was performed to figure out the atomization characteristics of highly viscous liquid of rice-bran oil by applying ultrasonic energy to improve the atomization of spray droplets. A spray system, an ultrasonic system, and three kinds of pintle-type nozzles(pin-edge angle: 5 , 10 , 15 ) were manufactured. To investigate the effects of ultrasonic energy on the atomization of a highly viscous liquid, a phase doppler particle analyzer was used for the measurement and calculation of spray droplets data. Nozzle opening pressures were chosen of 3 levels, i.e, 10, 13, 16 MPa. As a result, it could be concluded that the ultrasonic energy was effective to improve the spray atomization when applied to the fuel by means of 3 different nozzles because of the effects of the liquid fuel cavitation and relaxation between molecules caused by ultrasonic energy. The improvement rate of the spray atomization by the ultrasonic spray atomization by the ultrasonic spray compared with the conventional spray was about 10% increase in the case of pintle type nozzles. With the increase of pin-edge angles the distribution lines by nozzle opening pressures are declined for both conventional and ultrasonic sprays. This means that the increase of the pin-edge angle improves the atomization of sprays.