• Korean Journal of Optics and Photonics
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• v.3 no.2
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• pp.92-100
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• 1992

A Spectroscopic Ellipsorneter(SE) is fabricated. The PSA configuration of the rotating analyzer type where the effects of the imperfect optical elements can be minimized is adopted. The straight through operation shows that the standard deviations of tan$\psi$ and cos$\Delta$ are less than 0.2% in the spectral range of 300nm-850nm. From the film data of ellipsometric spectra the bulk dispersion relation of a few fluorides and the void distribution inside the fluoride thin films are obtained.

• Proceedings of the Optical Society of Korea Conference
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• 1995.06a
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• pp.75-83
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• 1995

In-situ, 실시간 측정을 위해 상업화 모형의 He-Ne 타원해석기 및 고속 분광 타원해석기(SE, Spectoscopic Ellipsometer)를 제작하였다. 후자의 경우 1024개의 화소를 가진 광학 다채널분석기 (OMA, Optical Multichannel Analyzer)를 이용한 RP형 분광타원해석기로써 1.5∼5.0eV의 측정 파장대역을 가지며, 한 스펙트럼의 측정시간은 약 100msec이다. cos 와 tanΨ의 정확도는 각각 약0.01이하로 측정되었다. 이러한 in-situ 타원해석기들을 사용하여 Au, ZnS 박막들의 성장 초기단계에서의 박막구조의 변화, 성장속도 그리고 HF식각후의 Si 자연산화층(SiO2)의 초기 성장과정을 밝히고 SiO2/c-Si 시료의 온도를 비 접촉적, 비간석적으로 기존의 방법에 의한 결과와 비교하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 1995.02a
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• pp.80-80
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• 1995

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.5
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• pp.371-377
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• 1998

The plasma chemical vapor deposition is one of the most utilized techniques for the diamond growth. As the applications of diamond thin films prepared by plasma chemical vapor deposition(CVD) techniques become more demanding, improved fine-tuning and control of the process are required. The important parameters in diamond film deposition include the substrate temperature, $CO/H_2$gas flow ratio, total gas pressure, and gas excitation power. With the spectroscopic ellipsometry, the substrate temperature as well as the various parameters of the film can be determined without the physical contact and the destructiveness under the extreme environment associated with the diamond film deposition. Through this paper, the important parameters during the diamond film growth using $CO+H_2$are determined and it is shown that $sp^2$ C in the diamond film is greatly reduced.

• Korean Journal of Optics and Photonics
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• v.10 no.3
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• pp.181-187
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• 1999

We prepared the side-chain type nonlinear optical NPP(N-(6-nitrophenyl)-(L)-prolinol) polymer films by spin coating method. Ellipsometric spectra were in situ collected by using spectroscopic phase modulated ellipsometer while the NPP polymer films were being corona poled at the temperature above glass transition. We calculated film thickness and the refractive index dispersion by modeling the spectro-ellipsometry data in transparent region. We also calculated the refractive index and the extinction coefficient of the polymer films by numerically inverting the spectro-ellipsometry data in absorbing region, while the previously determined film thickness was used. The independently determined extinction coefficient spectra from the analysis of transmission spectra were compared with those by spectro-ellipsometry and they showed an excellent agreement with each other. From the analysis of the complex refractive index change of the NPP polymer thin films induced by the corona poling, we could determine the vertical complex refractive index and the horizontal complex refractive index separately. Using the volume fraction of the vertical component f⊥, the degree of poling of poled NPP polymer films was quantitatively addressed. It is suggested that the present method can be used to quantitatively address the degree of poling in an absolute manner and to depth profile the poled fraction of thick polymer films. It will be useful to understand the structural change of polymer films and hence the poling mechanism during the poling process.

• Journal of the Society of Cosmetic Scientists of Korea
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• v.37 no.2
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• pp.137-141
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• 2011

Sunscreen is divided into the organic agent of UV absorption and inorganic agent of reflection. These are evaluated by sun protection factor (SPF) in-vivo test requiring high cost and time, while in-vitro tests are adopted commonly because of short test time, easy result collection. Generally, test method of SPF use SPF 290a by UV-vis spectrometer. The evaluate by SPF 290 has low reproducibility. Although analysis using UV-vis spectrometer has high reproducibility, it is hard to separated results of transmission, adsorption, and reflection. In this study, suggested method of elipsometer has some merit such as high reproducibility, easy separation of transmission/adsorption/re- flection, analysis using various incident angle. We tested the validity of elipsometer for SPF measurement, using commercially available sun-block (SPF 50).