• Title/Summary/Keyword: 분광타원법

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Complex refractive index of PECVD grown DLC thin films and density variation versus growth condition (PECVD 방법으로 성장시킨 DLC 박막의 복소굴절율 및 성장조건에 따른 박막상수 변화)

  • 김상준;방현용;김상열;김성화;이상현;김성영
    • Korean Journal of Optics and Photonics
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    • v.8 no.4
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    • pp.277-282
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    • 1997

  • The complex refractive index of Diamond-like Carbon (DLC) thin films, which can be applied to optical devices or electrical devices, have been determined using optical methods. DLC thin films are grown on Si(100) substrates and vitreous silica substrates respectively, using the technique of plasma enhanced chemical vapor deposition (PECVD). The spectroscopic ellipsometry data($\psi$, $\Delta$) and the transmission spectra of these DLC films are obtained. These optical spectra are analyzed with the help of the Sellmeier dipersion relation and a quantum mechanically derived dispersion relation. Using spectroscopic ellipsometry data at their transparent region, the refractive index and the effective thickness of DLC films on vitreous silica are model calculated, Then the transmission spectra are inverted to yield the extinction coefficient spectra k(λ) at absorbing region. These spectra are fit to the quantum mechanical dispersion relation and the best fit dispersion constants are determined. The complex refractive indices are easily calculated with these constants. The spectroscopic ellipsometry data at the absorbing region in model calculated to give the packing densities and the degrees of surface microroughness of DLC films. Discussions are made in correlation with the growth condition of DLC films.

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Spectroscopic Ellipsometry Measurement and Modeling of Hydrogenated Amorphous Silicon (수소화된 비정질 실리콘의 타원편광분광분석 측정 및 모델링)

  • Kim, Ka-Hyun
    • Journal of the Korean Solar Energy Society
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    • v.39 no.1
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    • pp.11-19
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    • 2019

  • Spectroscopic ellipsometry is a powerful tool for analyzing optical properties of material. Ellipsometry measurement results is usually given by change of polarization state of probe light, so the measured result should be properly treated and transformed to meaningful parameters by transformation and modeling of the measurement result. In case of hydrogenated amorphous silicon, Tauc-Lorentz dispersion is usually used to model the measured ellipsometry spectrum. In this paper, modeling of spectroscopic ellipsometry result of hydrogenated amorphous silicon using Tauc-Lorentz dispersion is discussed.

  • https://doi.org/10.7836/kses.2019.39.1.011 인용 PDF KSCI HTML

Refractive index change of nonlinear polymer thin films induced by corona poling and quantitative evaluation of poling effect (코로나 극성배향이 비선형 고분자박막의 복소굴절율에 미치는 영향 및 배향효과의 정량화)

  • 길현옥;김상준;방현용;김상열
    • Korean Journal of Optics and Photonics
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    • v.10 no.3
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    • pp.181-187
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    • 1999

  • We prepared the side-chain type nonlinear optical NPP(N-(6-nitrophenyl)-(L)-prolinol) polymer films by spin coating method. Ellipsometric spectra were in situ collected by using spectroscopic phase modulated ellipsometer while the NPP polymer films were being corona poled at the temperature above glass transition. We calculated film thickness and the refractive index dispersion by modeling the spectro-ellipsometry data in transparent region. We also calculated the refractive index and the extinction coefficient of the polymer films by numerically inverting the spectro-ellipsometry data in absorbing region, while the previously determined film thickness was used. The independently determined extinction coefficient spectra from the analysis of transmission spectra were compared with those by spectro-ellipsometry and they showed an excellent agreement with each other. From the analysis of the complex refractive index change of the NPP polymer thin films induced by the corona poling, we could determine the vertical complex refractive index and the horizontal complex refractive index separately. Using the volume fraction of the vertical component f⊥, the degree of poling of poled NPP polymer films was quantitatively addressed. It is suggested that the present method can be used to quantitatively address the degree of poling in an absolute manner and to depth profile the poled fraction of thick polymer films. It will be useful to understand the structural change of polymer films and hence the poling mechanism during the poling process.

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Determination of optical constants and thickness of organic electroluminescence films using variable angle spectroscopic ellipsometry (가변입사각 분광타원법을 이용한 유기 발광 박막의 광학 상수 및 두께 결정)

  • 류장위;김상열;김동현;정혜인
    • Proceedings of the Optical Society of Korea Conference
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    • 2001.02a
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    • pp.264-265
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    • 2001

  • 영상표시방법은 관례적인 CRT 방법에 더하여 LCD, TFT-LCD, FED, PDP 등 다양한 방법들이 개발되었거나 개발되고 있다. 유기발광소자(OLED)를 이용한 영상표시법도 최근 그 실용성이 크게 향상된 방법으로 이 OLED를 이용하는 발광소자는 LCD, TFT-LCD 등의 방법과 마찬가지로 다층박막구조를 가지므로 각 박막층의 특성과 계면 급준성 등을 정확하게 평가하는 것은 긴요하다 하겠다. (중략)

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