• Title/Summary/Keyword: 반도체 위치 검출기

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The Study on Design of Semiconductor Detector for Checking the Position of a Radioactive Source in an NDT (비파괴검사 분야에서 방사선원의 위치 확인을 위한 반도체 검출기 설계에 관한 연구)

  • Kim, Kyo-Tae;Kim, Joo-Hee;Han, Moo-Jae;Heo, Ye-Ji;Ahn, Ki-Jung;Park, Sung-Kwang
    • Journal of the Korean Society of Radiology
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    • v.11 no.3
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    • pp.171-175
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    • 2017
  • In the non-destructive inspection field, we invest a lot of time and resources in developing the radiation source system to ensure the safety of the workers. However, the probability of accidents is still high. In order to prevent potential radiation accidents in advance, it is necessary to directly verify the position of the radiation source, but the research is still insufficient. In this study, we developed a monitoring system that can detect the position of the radiation source in the source guide tube in the gamma-ray irradiator. The characteristics of the radiation detector are estimated by monte carlo simulation. As a result, the radiation detector for Ir-192 gamma-ray energy was analyzed to have secondary electron equilibrium at $150{\mu}m$ regardless of the semiconductor material. Also, it is expected that the gamma ray response characteristic is the best in $HgI_2$. These results are expected to be used as a basis for determining the optimal thickness of the radiation detector located in the detection part of the future monitoring system. In addition, when developing a monitoring system based on this, radiation workers can easily recognize the danger and secure safety, as well as prevent and preemptively respond to potential radiation accidents.

TOF spectrometer를 사용하는 중이온 후방산란장치 (HIRBS)

  • Kim, Jun-Gon;Kim, Young-Seok;Kim, Gi-Dong;Hong, Wan;Woo, Hyung-Joo;Choi, Han-Woo
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.76-76
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    • 1999
  • 한국자원연구소 제작된 TOF spectrometer는 입자의 비행시간과 에너지를 동시에 측정 기록하여 질량분별된 에너지 스펙트럼을 얻고자 하는 목적으로 제작되었다. 그러나 질량분별이 필요치 않은 후방 산란실험에서는 비행시간의 측정만으로 훌륭한 에너지 계측기가 된다. 중이온 산란분석법(heavy ion RBS)은 He을 사용하는 산란분석법에 비하여 원리적으로 분해능이 우수하나 사용하는 반도체 검출기의 에너지 분해능의 불량이 이러한 장점을 상쇄하는 실정이다. 그러나 TOF spectrometer를 중이온 산란실험의 에너지 계측기로 사용하면 H, He에 대한 반도체 검출기 정도의 낮은 에너지분해능 수준을 유지할 수 있으므로 중이온 산란실험의 원리적인 장점을 살릴 수 있다. 한국자원연구소에서는 He RBS의 취약점으로 지적되어온 medium elements에 대한 질량분해능과 깊이 분해능을 향상시키고자 140$^{\circ}$ 산란각에 TOF spectrometer가 위치하는 Heavy Ion Rutherford Backscattering Spectrometry (HIRBS) 시스템을 설계하였다. 설계된 TOF spectrometer를 채용하였을 때 기대되는 질량분해능 향상효과와 분석의 최적조건에 관하여 논한다.

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A Study on Precision Position Control of 1 Axis Linear BLDC Motor for a Stage (반도체 제조장비용 Stage를 위한 1축 선형 브러시리스 DC 모터의 정밀 위치제어에 관한 연구)

  • Chun, Y.H.;Kim, J.W.;Jeon, J.H.;Jeon, J.W.;Kang, D.H.
    • Proceedings of the KIEE Conference
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    • 2001.11c
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    • pp.115-118
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    • 2001
  • 일반적으로 반도체 제조 공정은 매우 복잡하고 다양한 공정들로 구성된다. 이러한 공정 중 Stage 부분은 웨이퍼에 회로 패턴을 기입하기 위하여 웨이퍼를 미리 지정된 위치로 이송하는 공정으로 매우 높은 정밀도가 요구되고 있다. Stage에 대해서는 x, y, z축 뿐아니라 각 축에 대한 회전까지도 고려한 6축 제어가 수행되어야 한다. 본 논문에서는 stage에 대한 정밀제어의 기반기술로서 선형 BLDC 모터를 이용하여 1축 위치제어 시스템의 제어에 관하여 연구하였다. 선형 BLDC 모터의 이동 중 발생하는 추럭리플을 보상하여 제어기 설계시 선형 시스템으로 고려하여 제어기를 설계할 수 있도록 하는 방법을 제안하였으며 실험을 통하여 1[${\mu}m$]의 해상도를 갖는 위치검출 엔코더를 이용하여 5[${\mu}m$]의 정밀도를 얻을 수 있었다.

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A novel encoder of digital and analog hybrid type for servo control with high-precision resolution (디지털 아날로그 혼합형 고정도 엔코더 개발)

  • 홍정표;박성준;권순재
    • The Transactions of the Korean Institute of Power Electronics
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    • v.8 no.6
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    • pp.512-518
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    • 2003
  • Position controls are very important in semiconductor manufacturing devices, machine tools Precision measuring instruments, etc. To measure the distance of movement of moving objects in minute units and the accuracy of measurement for the moving distance in these devices affect the performance of the whole devices. Therefore, in those Precision instruments, a sensing device that can measure the distance of movement with high-precision resolution is required. In this paper, a novel encoder of digital and analog hybrid type is proposed. It is shown that from this experiment a high-resolution angle measurement device can be designed by a low cost incremental encoder.

The evaluation of dose of TSEI with TLD and diode dector of the uterine cervix cancer (열형광선량계와 반도체검출기를 이용한 전신피부전자선조사의 선량평가)

  • Je Young Wan;Na Keyung Su;Yoon IL Kyu;Park Heung Deuk
    • The Journal of Korean Society for Radiation Therapy
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    • v.17 no.1
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    • pp.57-71
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    • 2005
  • Purpose : To evaluate radiation dose and accuracy with TLD and diode detector when treat total skin with electron beam. Materials and Methods : Using Stanford Technique, we treated patient with Mycosis Fungoides. 6 MeV electron beam of LINAC was used and the SSD was 300 cm. Also, acrylic speller(0.8 cm) was used. The patient position was 6 types and the gantry angle was 64, 90 and $116^{\circ}$. The patient's skin dose and the output were detected 5 to 6 times with TLD and diode. Result : The deviations of dose detected with TLD from tumor dose were CA $+\;6\%$, thigh $+\;8\%$, umbilicus $+\;4\%$, calf $-\;8\%$, vertex $-\;74.4\%$, deep axillae $-\;10.2\%$, anus and testis $-\;87\%$, sole $-\;86\%$ and nails shielded with 4mm lead $+4\%$. The deviations of dose detected with diode were $-4.5\%{\sim}+5\%$ at the patient center and $-1.1\%{\sim}+1\%$ at the speller. Conclusion : The deviation of total skin dose was $+\;8\%{\sim}-\;8\%$ and that deviation was within the acceptable range(${\pm}\;10\%$). The boost dose was irradiated for the low dose areas(vertex, anus, sole). The electron beam output detected at the sootier was stable. It is thought that the deviation of dose at patient center detected with diode was induced by detection point and patient position.

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Moving magnet operator monitoring system with high-precision position control (고정밀 위치제어가 가능한 자석가동자 모니터링 시스템)

  • Kim, Hong-youn;Kim, Seu-hong;Piao, Hai-lian
    • Proceedings of the Korea Information Processing Society Conference
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    • 2021.11a
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    • pp.756-759
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    • 2021
  • 본 논문은 기존의 5축 치아가공기나 반도체장비등에 사용하고 있는 회전형 모터의 경우는 엔코더와 리졸버를 사용하고 있다. 엔코더와 레졸버는 고가이므로 실제 산업현장에서 전동기의 위치 센서로는 적용하기가 힘들다. 또한 엔코더와 레졸버와 같은 광학식 위치센서는 그 크기와 내구성에 있어 약점이 있기 때문에 취부 할 때에도 어려움이 있다. 따라서 본 연구에서는 5축치아가공기에 적용하기 위해서 자석가동자를 만들었으며, 이러한 문제점을 해결하는 방안으로 리니어모터를 고정자로 하고 자석플레이트를 이동자로 하는 시스템과 별도의 리니어 스케일을 배제하고 기존의 정현파를 발생하는 2개의 리니어홀센서 및 영구자석을 이용하여 가동자의 절대위치와 이동 위치를 검출할 수 있는 리니어 모터 및 그 제어방법, 안정성 및 신뢰성을 향상시킬 수 있는 자석가동자를 이용하여 구동시 실시간으로 데이터를 확인할 수 있고 제어할 수 있는 모니터링 시스템을 개발하는 연구이다.

Evaluation of Usefulness on In-vivo Diode Dosimetry for Measuring the Tumor Dose of Oral Cancer Patient (구강암 환자의 종양 선량 측정을 위한 In-vivo Diode Dosimetry의 유용성 평가)

  • Na Kyung-Su;Lee Je-Hee;Park Heung-Deuk
    • The Journal of Korean Society for Radiation Therapy
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    • v.17 no.2
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    • pp.133-140
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    • 2005
  • Purpose : This test is designed to identify the validity of treatment plan by implementing real-time dosimetry by means of dose that is absorbed into PTV and OAR when preparing doses of 3D and POP plans. Materials and Methods : In treatment. error can be calculated be comparing Exp. Dose with the actual dose, which has been converted from 'the reading value obtained by placing diode detector on the area to be measured'. Same test can be repeated using Alderson-Rando phantom. Results : Errors were found: A patient(POP plan): 197.6/199=-1.2%, B patient(3D-plan): 199.9/198.7=+0.6%, C patient: 196/200=-1.5%. In addition, considering the resulted value of measuring OAR besides target-dose for C patient showed 96/200, representing does of 47%, the purpose of protection was judged to be duly accomplished. Also it was acknowledged the resulted value of -3.7% met the targeted dose within the range of ${\pm}5%$. Conclusion : Aimed for identifying the usefulness of pre-treatment dose measurement using diode detector, this test was useful to evaluate the validity of curing because it resulted in the identification of category to be protected as well as t dose. Moreover, it is thought to have great advantage in ascertaining the dose of target, dose of which is not calculated yet. Similar to L-gram before treatment, this test is thought to be very effective so that it can bring great advantages in the aspects such as validity of curing method and post-treatment plan as well.

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Dose Distribution&Calibration in HDR Intracavitary Irradiation for Uterine Cervical Cancer (자궁경부암의 강내치료를 위한 선량측정)

  • 김진기;김정수;김형진;권형철
    • Progress in Medical Physics
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    • v.6 no.1
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    • pp.13-18
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    • 1995
  • Dose distribution of HDR-RALS source represents an inverse square law as the distance. Difference of measurement value and calculation value according of brachytherapy. Therefore, in HDR-RALS dose calibration and calculation have an important effect in treatment of uterine cervical cancer and absorbed dose of interesting points. In intracavitary therapy, particula attention is paid for precise determination of the doses to be applied. In this report, we have discussed that the calibration of a HDR-RALS, differences between calculation dose use of isodose chart and measurement in rectum. Dose rate calibration of radiation sources are obtained from air kerma and Г factor with calibraed ion chamber for cobalt source. and used semiconductor detector for compared with measurement in phantom. Eighteen patients were treated with a HDR-RALS for intrcavitarty irradiation (ICR) using a cobalt-cesium source. Repoductivity of dose measurements were 0.3 -1.1% in phantom. The means of dose distribution was -6- +21% between calculation of isodose chart and measurement of recyum, and was same mean value upper 6.3% in measurement value than calculation does.

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Relative Navigation Algorithm Using PSD and Heterogeneous Sensor Fusion (PSD와 이종 센서 융합을 이용한 상대 항법 알고리즘)

  • Kim, Dongmin;Yang, Seungwon;Kim, Domyung;Suk, Jinyoung;Kim, Seungkeun
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.48 no.7
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    • pp.513-522
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    • 2020
  • This paper describes a relative navigation algorithm using PSD(Position Sensitive Detector) and heterogeneous sensor fusion. In order to perform relative navigation between a target and a chaser, a hardware system is constructed and simulations are conducted, using the relative navigation algorithm considering the hardware system. By analyzing errors through the simulations, advantages of using the heterogeneous sensor fusion are found. Finally, navigation performance is verified under an experimental environment established to obtain sensor data from the hardware system for data post-processing.

Fabrication and Evaluation of Mercury(II) Iodide Unit Cell Dosimeter to Confirm the Feasibility of Digital Quality Assurance in Intracavitary Radiotherapy (방사선 근접치료의 디지털 정도관리 가능성 확인을 위한 HgI2 Unit Cell 선량계의 제작 및 평가)

  • Jung, Jae-Hoon;Park, Sung-Kwang
    • Journal of the Korean Society of Radiology
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    • v.16 no.3
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    • pp.257-263
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    • 2022
  • In intracavitary radiotherapy, it is essential to verify the correct location of radiation source among quality control items because an incorrect location will irradiate an unnecessary dose to normal tissues. As a basic study of digital line dosimeters, this study fabricated a unit cell dosimeter based on polycrystalline mercury (II) iodide (HgI2) and compared its performance with a diode. The study result showed that for reproducibility, the relative standard deviation (RSD) was 1.21%, satisfying the RSD evaluation criterion of within 1.5%. Considering linearity, the coefficient of determination R2 showed an excellent result of 0.9997. Regarding the evaluation of distance dependence, it showed a similar trend in general with a difference of 0.035 cm for intensity 50% when compared with the inverse square value. This study suggests the applicability of a digital dosimeter for brachytherapy quality control by evaluating the performance of the HgI2 dosimeter. This study on dosimeter for candidate photoconductor materials can be used as basic data in all areas using radiation.