• Korean Journal of Optics and Photonics
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• v.5 no.1
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• pp.138-143
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• 1994

A speckle correlation method was applied to measure the in-plane translation of a diffuse object which has rough surface using a linear CCD sensor and personal computer. Displacement of a speckle pattern produced from the object illuminated by a laser beam was measured by the cross-correlation functions between the I-D speckle profiles before and after the object translation, which were measured by linear CCD array sensor to be sent to IBM 386 personal computer. The sensitivity of the measurement was dependent on the radius of the wavefront curvature of incident beam as well as the spatial resolution of linear CCD array. A linear CCD array had 15 Jlffi pitch and 1728 pixels. The ratio of the speckle displacement and object translation varied from 1.03 to 5.20. The object translation of $3\mu\textrm{m}$ can be measured br the linear CCD sensor of which pitch was $15\mu\textrm{m}$, when the ratio of the speckle displacement and object translation was 5.20.s 5.20.

• Transactions of the Korean Society of Mechanical Engineers
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• v.17 no.5
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• pp.1208-1217
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• 1993

The simple and effective optical technique synthesizing holographic interferometry and speckle photography is presented. The optical system used in this experiment is based on image holography. A cantilever beam located on the precision translator is used to evaluate this measurement system. Experimental results agree well with the actual displacements within the error of 2.8%. As an its application, three dimensional contact deformation in the ball indentation is measured by using this optical system and compared with the numerical analysis by finite element method.

• Proceedings of the KIEE Conference
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• 2003.07c
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• pp.1923-1925
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• 2003

본 논문은 유리 기판과 실리콘 기판의 양극접합과 CMP공정을 통하여 정전기력으로 구동되는 마이크로 비틀림 액추에이터를 제작하고 이 제작된 액추에이터의 성능을 개선하는 방법과 실험에 관한 것이다. 이 비틀림 액추에이터는 미소 거울로 사용하기 위해 제작하였다. 미소 거울은 영상을 정확히 반사하거나 회절 시키는 것이 목적이지만 MEMS 공정의 특성 문제로 인해 일관적인 성능을 나타내는 것이 비교적 힘들다. 따라서 이를 개선하기 위해선 구조적인 접근 보다 실제 구동될 때의 현상을 보상하는 것이 필요하다. 일정한 입력전압에 비례하는 미소 거울의 변위를 알고 이를 기준으로 하여 시스템을 구동하여야 한다. 여기서 인가되는 전압에 비례하는 변위가 정확한지 측정을 해야 하고 만약 오차가 있다면 이를 개선하여야 한다. 또한 구동 시 발생하는 overshoot 현상과 작은 떨림 현상을 줄이고 빠른 시간 내에 응답하도록 시스템을 보상하여야 한다. 본 논문에선 PID 제어기법을 사용하여 $0.5^{\circ}$의 각도로 구동할 때를 기준으로 이 때의 구동전압 200V를 인가하고 오차를 측정하여 시스템을 보상하였다.

• Proceedings of the Korean Geotechical Society Conference
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• 2001.03a
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• pp.57-64
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• 2001

암석-콘크리트 불연속면의 전단변형 및 파괴특성을 규명하기 위해 상부 재료를 콘크리트로, 하부 재료를 암석으로 하는 규칙.불규칙 톱니형 시료와 인공 절리시료를 제작하여 실험실 직접전단시험을 실시하였다. 전단과정 동안 하중과 변위 외에 미소파괴음의 계수와 에너지를 측정하여 전단과정의 단계별 특징을 규명하였고 미소파괴음 음원추적을 실시하여 불연속면에서의 거칠기 파괴부분의 변화를 고찰하였다. 또한 암석 불연속면과 암석-콘크리트 불연속면의 거동을 비교하고 거칠기의 불규칙성 증가에 따른 전단거동의 변화를 관찰하였다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1195-1198
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• 2003

Micro former has been known as a useful tool for machining micro parts. It makes micro holes automatically with punches, a hole-shape die and material by rotation of crank shaft synchronously. Micro displacement in micro forming affects on the performance of machining because micro forming size is similar with its mechanical displacement. Therefore, the measurement of this micro displacement is essential to be guaranteed to obtain high forming precision in the whole machine as well as its devices. This paper addresses the development of a laser interferometer to measure micro displacement for a micro former. The laser interferometer is able to measure micro displacement during a few micro seconds with non-contact. For the experiment, a laser probe is installed on the optical table with optical devices and a micro displacement generating device. The velocity decoding board is also added to calculate doppler shift frequency directly. Finally simple experiments are conducted to confirm its functional operation.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.31 no.2
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• pp.57-62
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• 2003

Nano-bending method is presented to measure the Poisson's ratio of thinfilms for MEMS (Micro-Electro-Mechanical Systems) applicaiton. The douvle-ring specimen is designed and fabricated based on the surface micromachining process to facilitate the measurement of the Poisson's ratio. The Poisson's ratio can be obtained through analyzing the linear load-displacement relationship of the double ring specimen subjected to nano-indenter loading. The Present nano-bending mehod is an in-situ measurement approach due to the compatibility to the surface micromachining process. The Poisson's ratio is locally obtained at the location of the double ring specimen with micro dimension. To validate the nano-bending method, the Poisson's ratio of LPCVD (Low Pressure Chemical Vapor Deposition) poly-silicon with thickness of 2.3㎛ is investigated. Experimental results reveal that the Poisson's ratio of the poly-silicon film is 0.2569. The standard deviation of the nano-bending measurement for the stiffness of double ring specimens is 2.66%.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.368-371
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• 2008

An extensometer system to measure strain and displacement of cylindrical fatigue specimen in a autoclave of high temperature and high pressure environment has been developed by KEPRI. The extensometer reads the displacement caused by fatigue loads at the target length of the specimen installed inside the autoclave. The performance of the extensometer were tested at 15MPa, $315^{\circ}C$ of a operating pressurized water reactor. Two LVDT's of magnet type were connected to the extensometer and used for converting the fatigue displacement to electronic signal. The device is being used for developing environmental fatigue curve of CF8M cast austenitic stainless steel (CASS) in the test condition of low cycle and low strain. This paper introduces the background and results of the development.

• Geotechnical Engineering
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• v.10 no.1
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• pp.27-46
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• 1994

It has been demonstrated in plane strain compression tests performed on dense Toyoura sand and Silver Leighton Buzzard sand, that the newly developed instrumentation for small strain measurements was capable of measuring the altering stiffness of sands for a wide range of shear strain from ($10^{-6}$to $10^{-2}$. It was found that for the range of shear strain($\gamma$) from $10^{-5}$ to those at peak, the Rowe's stressiilatancy relation seemed to be a good approximation for Toyoura sand and Silver Leighton Buzzard sand. However, the value of K and Poisson's ratio(at elastic range:${\nu}_{psc}^e$) varied with sand types. It was also found that the value of ${\nu}_{psc}^e$ and stress -dilatancy relation was irrespective of overconsolidation ratio(OCR).

• Proceedings of the Korean Institute of Industrial Safety Conference
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• 2002.05a
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• pp.184-189
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• 2002

기계부품 및 구조물의 상호접촉면이 미소변위에 의해 상대운동을 할 때 접촉면에서는 마모가 발생하고 이러한 마모현상은 당해 구조물의 안전성을 심각하게 위협하는 결과를 초래하게 된다. 이러한 마모 현상에 대한 근래의 연구동향으로는 $Engel^{(1.2)}$ 이 충격(impact)에 의한 마모에 대해, 그리고 $Waterhouse^{(3)}$ 는 미끄럼(sliding) 마모에 대해 연구한 바 있다. 원자력발전소의 증기발생기(steam generator) 내에서 1차측의 세관(tube)과 2차측에 속하는 지지물(supporter) 또는 방진대(antivibration band) 사이에서 세관의 진동으로 인해 지지물과 충돌을 일으키고 충돌 횟수가 누적되면 세관의 마모로 이어져 결국 세관의 건전성은 침해받게 된다.(중략)

• Journal of the Korean Institute of Telematics and Electronics
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• v.24 no.5
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• pp.762-768
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• 1987

The capacitive transducers, which are used of the principle of capacitance changes by means of the variation of distance between electrodes, are usually utilized for measurement of small displacements. But the measurement ranges of this method are limited. In this study, the measurement ranges are extended by using the variation method of the surface area of electrodes. Thus the capacitive transducer and signal conditioner, which are having the capability of measurement range of 25mm and resolution of 0.1\ulcorner, have developed, and its environmental characteristics are also tested.