• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.04a
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• pp.666-669
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• 1996

기계 부품 응력 해석 시 널리 쓰이는 유한 요소 해법은 형상을 작은 유한 요소로 근사화하는 과정이 필요하다. 유한 요소생성의자동화는 많은 기존 연구가 있었고 산업 현장에서도 실질적인 자동 유한 요소 생성의 혜택을 받고있다. 이러한 자동 유한 요소 생성 알고리즘들은 형상을 충실하게 유한 요소로 근사화 하는데 그목적이 있다. 때로는 이러한 충실성이 너무 많은 유한 요소들을 관심 영역이 아닌 곳에 생성하게 된다. 컴퓨터의 계산 능력이 눈부시게 발전하고 있지만 기술자가 다루고자 하는 기술적인 문제가 나날이 복잡해지고있는 상황에서 컴퓨터의 계산 능력에 너무 의존하는 것은 바람직하지 않다. 본 논문은 지능과 유사하게 미소 특징을 추출하고 이를 바탕으로 기하 형상 에서 미소 특징을 소거하는 알고리즘을 소개한다. 이를 활용하면 유한 요소의 수를 해석 결과에 악 영향을 미치지 않는 상태에서 줄일 수 있으며, 결과적으로 불필요한 계산비용을 절감할 수 있다.

• Proceedings of the KIEE Conference
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• 2000.07d
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• pp.3136-3138
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• 2000

마이크로머시닝을 이용한 각속도 센서에서는 기계 구조체의 기준진동에 의한 캐패시턴스의 변화와 인가되는 각속도에 따른 캐패시턴스의 변화를 감지하야 한다. 이러한 캐패시턴스의 변화량을 전기적으로 감지하는데 있어서 기준진동을 위해 구조체에 인가되는 구동신호의 간섭이 최소화 되도록 구조체를 설계하여야 하고 회로적으로 간섭을 상쇄할 수 있어야 미소한 캐패시턴스의 변화량을 감지하여 각속도 센서의 감도를 극대화할 수 있다. 본 논문에서는 이러한 구동신호의 간섭을 상쇄하여 미소캐패시턴스 변화를 감지하는 회로를 설계 하였다.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.6
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• pp.7-14
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• 2004

나노 임프린트 기술은 기존의 광학적 리소그라피 (optical lithography) 기술보다 저렴한 비용으로 나노 구조물을 대량으로 제조할 수 있을 것으로 기대되고 있는 기술이다. 현재까지 반도체 공정기술의 주류를 이루고 있는 광학적인 리소그라피 기술은, 100nm이상의 CD(Critical Dimension)를 가지는 구조물들을 정밀하게 제조하여, 미소전자공학 (microelectronics) 소자, MEMS/MEMS, 광학소자 등의 제품들을 대량으로 생산하는 데에 널리 활용되고 있다. 반도체 소자의 고집적화 경향에 따라 100 nm 이하의 CD를 가지는 나노 구조물들을 제조할 필요성이 높아지고 있지만, 광학적인 방법으로는 광원의 파장보다 작은 구조물들을 제조하기가 어렵다. 보다 짧은 파장을 가지는 광원을 이용하는 리소그라피 장비가 계속적으로 개발되고 있으나, 그에 따른 장비 비용 및 제조 단가가 기하급수적으로 증가하고 있다.(중략)

• Transactions of the Korean Society of Mechanical Engineers
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• v.11 no.5
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• pp.828-836
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• 1987

The inclusion of thermophoresis in particle deposition studies has often been treated separately from deposition due to flow characteristics. Also previously reported experimental results on thermophoresis have been studied in the regions of relatively small temperature gradients. In this study, using real-time laser light reflectivity method, we measured the angular dependence of the deposition rates of particles of the cylindrical collector surface, which immerged in laminar flow of a hot gas suspension of small particles. And we extended the previous narrowband results of thermophoretic deposition rates to the regions of large temperature gradients between the hot gas stream and the collector surface. Based on the obtained data, the cylinder's forward stagnation-point region is considerably enriched in particle 'phase' density owing to the compressibility effect, which leads to locally enhanced deposition while the downstream region from the stagnation point inertial force acts in the opposite direction, which tends to centrifuge particles away from the wall, thus the local deposition rates by thermophoresis are reduced.

• Journal of the Korean Vacuum Society
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• v.10 no.3
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• pp.361-367
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• 2001

Recently, Chemical Mechanical Polishing(CMP) has become a leading planarization technique as a method for silicon wafer planarization that can meet the more stringent lithographic requirement of planarity for the future submicron device manufacturing. The SOI(Silicon On Insulator) wafer has received considerable attention as bulk-alternative wafer to improve the performance of semiconductor devices. In this paper, the objective of study is to investigate Material Removal Rate(MRR) and surface micro-roughness effects of slurry and pad in the CMP process. When particle size of slurry is increased, Material Removal rate increase. Surface micro-roughness is greater influenced by pad than by particle size of slurry. As a result of AM measurement, surface micro-roughness was improved from 27 $\AA$ Rms to 0.64 $\AA$Rms.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.33 no.4
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• pp.41-46
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• 2005

In this paper, a new method for suppressing microwelding on the RF MEMS (Radio Frequency Microelectromechanical System) direct contact switches is introduced. Two kinds of refractory metals, tungsten and molybdenum were coated onto the contact point of the switches and the effect of the coating was examined. The changes in insertion loss and isolation at the switch were measured by using network analyzer and power loss was evaluated by power measurement. The results revealed that while tungsten and molybdenum showed higher contact resistance than gold in low input power range, they enhanced the power handling capability and reliability of the switches in high input power region.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.44 no.1
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• pp.40-48
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• 2016

Micro-vibration induced by on-board appendages that have mechanical moving parts has always been treated as an useless objective that has to be isolated, in order to comply with a high-resolution mission requirement of the observation satellite. In this study, we proposed a tuned mass damper energy harvester combined with a conventional passive vibration isolator for exhibiting dual functions of both electrical energy harvesting and micro-vibration isolation. The feasibility of the proposed dual-function complex system has been demonstrated through the comparison with numerical simulations, based on the results of basic characteristic tests, and experiments of the harvested power and micro-vibration.

• Composites Research
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• v.19 no.4
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• pp.7-14
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• 2006

Interfacial shear strength between epoxy and carbon fiber has been analyzed utilizing the microbond specimen with an epoxy micro-droplet adhered onto single carbon fiber. The interfacial shear stress distributions along the fiber/matrix interface were calculated by finite element analysis using three kinds of finite element models such as droplet model, circular-crosssection model and pull-out model. Conclusions were obtained as follows. (1) Interfacial shear stress distribution showed that larger stresses were concentrated in the fiber/matrix interface for microbond test than for pull-out test. Thus, debonding at the fiber/matrix interface during microbond test was liable to occur at low load level. (2) Microbond test showed higher interfacial strength which was caused by various effects of micro-droplet geometry and size as well as stress concentration in the region contacting with the micro-vise tip.

• 월간 기계설비
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• s.307
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• pp.87-92
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• 2016

대한기계설비산업연구원(원장 이언구)은 지난해 4월 연구심의위원회에서 선정된 ${\triangle}$기계설비건설업 동향분석 ${\triangle}$기계설비건설업체의 부도예측 모형 연구 ${\triangle}$기계설비건설공사 시공상세도면 작성비 산정기준 연구 ${\triangle}$플랜트 건설 현장 외국인력 고용 개선방안 ${\triangle}$녹색기술 기준에 근거한 연구과제 도출을 위한 기초연구 ${\triangle}$대용량 지열설비 이용을 위한 지중열교환기 용량 설계 툴 개발 ${\triangle}$기계설비배관 및 장비 단열 기준 연구 등의 기본과제와 외부기관과 공동으로 수행한 ${\triangle}$플랜트 건설현장 외국인력 고용 개선방안 ${\triangle}$기계설비건설업 관련법류 개선방안 연구를 추진했다. 본지는 연구결과에 대한 요약 보고서를 연재한다.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.36 no.5
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• pp.487-493
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• 2012

We present interferometric modulators that reproduce RGB colors through the selective actuation of mechanically coupled mirror arrays having identical air gaps. The conventional transmittive interferometric modulators need additional backlights, which leads to high power consumption. The previous reflective interferometric modulators using ambient lights need three different air gaps for reproducing the three RGB colors, thus giving rise to process complexity. For process simplicity, we propose the use of reflective interferometric modulators that are capable of producing green, blue, red, and black colors with the aid of mechanically coupled mirrors with identical air gaps. In an experimental study, the present interferometric modulators reproduce green, blue, and red colors at the switching modes (000), (010), and (101). The spectrum peaks for the colors are measured at the wavelengths $511{\pm}5nm$, $478{\pm}3nm$, and $644{\pm}9nm$, respectively, with the bandwidths being $60{\pm}1nm$, $45{\pm}2nm$, and $105{\pm}4nm$, respectively; further, the maximum intensities of the colors are $77{\pm}5%$, $73{\pm}2%$, and $81{\pm}5%$, respectively. The black spectrum is measured below the intensity of $27{\pm}0%$. Thus, we experimentally demonstrate the color reproduction capability of interferometric modulators fabricated by using a simple process.