• Transactions of the Korean Society of Mechanical Engineers B
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• v.31 no.4
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• pp.320-329
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• 2007

Electrokinesis and dielectrophoresis are important transport phenomena produced by external electric field applied to a microchannel containing a conductive fluid. We developed a CFD code to predict electrokinetic and dielectrophoretic flows in a microchannel with a uniform circular post array. Using the code, we calculated particle velocities driven by electrokinesis and dielectrophoresis, and conducted Monte Carlo simulations to visualize the particle motions. The code was validated by comparing the results with those from previous studies in literature. At a low electric field, electrokinesis and diffusion is the dominant transport mechanism. At a moderate electric field, dielectrophoresis is balanced with electrokinesis and diffusion, resulting in flowing filaments of particles in the microchannels. However, dielectrophoresis overwhelms the flow at a high electric field and traps particles locally. These results provide useful insight for optimizing design parameters of a microfluidic chip for biochemical analysis, especially for development of on-chip sample pretreatment techniques using electrokinetic and dielectrophoretic effects.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.202-202
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• 2010

최근 반도체 소자의 미세화에 따라, 단채널 효과에 의한 누설전류 및 소비전력증가 등이 문제가 되고 있다. DRAM의 경우, 캐패시터 영역의 축소문제가 소자집적화를 방해하는 요소로 작용하고 있다. 1T-DRAM은 기존의 DRAM과 달리 캐패시터 영역을 없애고 상부실리콘의 중성영역에 전하를 저장함으로써 소자집적화에 구조적인 이점을 갖는다. 또한 silicon-on-insulator (SOI) 기판을 이용할 경우, 뛰어난 전기적 절연 특성과 기생 정전용량의 감소, 소자의 저전력화를 실현할 수 있다. 본 연구에서는 silicon-germanium-on-insulator (SGOI) 기판을 이용한 1T-DRAM의 열처리온도에 따른 특성 변화를 평가하였다. 기존의 SOI 기판을 이용한 1T-DRAM과 달리, SGOI 기판을 사용할 경우, strained-Si 층과 relaxed-SiGe 층간의 격자상수 차에 의한 캐리어 이동도의 증가효과를 기대할 수 있다. 하지만 열처리 시, SiGe층의 Ge 확산으로 인해 상부실리콘 및 SiGe 층의 두께를 변화시켜, 소자의 특성에 영향을 줄 수 있다. 열처리는 급속 열처리 공정을 통해 $850^{\circ}C$와 $1000^{\circ}C$로 나누어 30초 동안 N2/O2 분위기에서 진행하였다. 그리고 Programming/Erasing (P/E)에 따라 달라지는 전류의 차를 감지하여 제작된 1T-DRAM의 메모리 특성을 평가하였다.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2017.05a
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• pp.134.2-134.2
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• 2017

최근 고성능, 저 전력 반도체 소자를 위한 미세 공정 기술이 발전함에 따라, gate oxide의 두께 및 선폭이 감소하고, aspect ratio가 증가하고 있는 추세이다. 따라서 얇아진 gate oxide를 통한 채널 물질로의 boron 확산을 막기 위한 고농도 질화 막 증착의 필요성이 높아지고 있으며, high aspect ratio의 gate oxide에 적용 가능한 우수한 step coverage의 질화막 또한 요구되고 있다. 이러한 요구조건을 만족시키기 위해 일반적인 13.56MHz의 플라즈마 소스를 이용한 질화연구들이 선행되어져 왔으나, 높은 binding energy(~24 eV)를 가지고 있는 N2 molecule gas를 효과적으로 dissociation 하지 못해 충분한 질화공정이 수행되어질 수 없었을 뿐만 아니라 높은 공정온도($>200^{\circ}C$에서 진행되어 반도체소자에 손상을 줄 수 있다. 본 연구에서는 이러한 문제들을 해결하기 위해 VHF (162MHz)를 이용한 플라즈마를 통해 고밀도에서 낮은 전자온도와 높은 진동온도의 플라즈마를 구현하여 20%이상의 높은 질화율을 얻을 수 있었고, multi-tile push-pull 플라즈마 소스를 통해 VHF 사용 시 나타나는 standing wave effect를 제어하여 high aspect ratio의 gate sidewall spacer에 우수한 step coverage의 질화막을 형성시킬 수 있었다.

• Design & Manufacturing
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• v.2 no.1
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• pp.45-50
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• 2008

Micro channel is to fabricate desired pattern on the polymer substrate by pressing the patterned mold against the substrate which is heated above the glass transition temperature, and it is a high throughput fabrication method for bio chip, optical microstructure, etc. due to the simultaneous large area patterning. However, the bad pattern fidelity in large area patterning is one of the obstacles to applying the hot embossing technology for mass production. In the present study, stamper of cross channel with width $100{\mu}m$ and height $50{\mu}m$ was manufactured using UV-LiGA process. Micro channel was manufactured using stamper manufactured in this study. Also replicability appliance was evaluated for micro channel and factors affected replicability were investigated using Taguchi method.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.285-285
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• 2011

최근 반도체 소자의 미세화에 따라, 단채널 효과에 의한 누설전류 및 소비전력의 증가 등이 문제되고 있다. 대표적인 휘발성 메모리인 dynammic random access memory (DRAM)의 경우, 소자의 집적화가 진행됨에 따라 저장되는 정보의 양을 유지하기 위해 캐패시터영역의 복잡한 공정을 요구하게 된다. 하나의 캐패시터와 하나의 트랜지스터로 이루어진 기존의 DRAM과 달리, single transistor (1T) DRAM은 silicon-on-insulator (SOI) 기술을 기반으로 하여, 하나의 트랜지스터로 DRAM 동작을 구현한다. 이러한 구조적인 이점 이외에도, 우수한 전기적 절연 특성과 기생 정전용량 및 소비 전력의 감소 등의 장점을 가지고 있다. 또한 strained-Si 층을 적용한 strained-Silicon-On-Insulator (sSOI) 기술을 이용하여, 전기적 특성 및 메모리 특성의 향상을 기대 할 수 있다. 본 연구에서는 sSOI 기판위에 1T-DRAM을 구현하였으며, impact ionization과 gate induced-drain-leakage (GIDL) 전류에 의한 메모리 구동 방법을 통해 sSOI 1T-DRAM의 메모리 특성을 평가하였다. 그 결과 strain 효과에 의한 전기적 특성의 향상을 확인하였으며, GIDL 전류를 이용한 메모리 구동 방법을 사용했을 경우 낮은 소비 전력과 개선된 메모리 윈도우를 확인하였다.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.27 no.2
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• pp.75-80
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• 2015

The effect of inlet mixer geometries on the two-phase flow patterns in square micro-channel with $600{\times}600{\mu}m$ was investigated experimentally in this paper. The 4 different mixer configurations based on the Y, Impacting, and two T types (gas and liquid inlets were switched) were used. The test fluids were nitrogen and water. The liquid and gas superficial velocities were 0.01~10 m/s and 0.1~100 m/s, respectively. Several distinctive flow patterns, namely, annular, slug-annular, slug, slug-bubbly, bubbly, and churn flow could be seen. The flow pattern maps for each mixer were suggested, and it can be concluded that two-phase flow patterns are not very sensitive to the mixer geometries. But the mixing behaviors of gas and liquid for each mixer were different for slug and bubbly flow. Thus, the characteristics of slug and bubble for each case were not same.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2002.05a
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• pp.574-577
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• 2002

In this paper, we propose a new symbol time synchronization scheme suitable for the OFDM system with an interpolator. The proposed performs the following three steps. In the first step, the coarse symbol time synchronization is achieved by continuously measuring the average power of the received envelope signal. Based on this average power, the detection possibility for the symbol time synchronization is determined. If the signal is sufficient for synchronization, we next perform a relatively accurate symbol time synchronization by measuring the correlation a short training signal and the received envelope signal. Finally, an additional frequency synchronization is performed with a long training signal to correct symbol synchronization errors caused by the phase rotation. From the simulation results, one can see that the proposed synchronization scheme provides a good synchronization performance over frequency selective channels.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.27 no.10
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• pp.520-526
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• 2015

The characteristics of gas-liquid Taylor (Slug) flow in a square micro-channel of $600{\sim}600{{\mu}m}$ were investigated experimentally in this paper. The test fluids were nitrogen and water. The liquid and gas superficial velocities were 0.01~3 m/s and 0.1~3 m/s, respectively. Bubble and liquid slug length, bubble velocity, and frequency were measured by analyzing optical images using a high speed camera. Bubble length decreased with higher liquid flow rate, which increased dramatically with higher gas flow rate. However, slug length did not vary with changes in inlet liquid conditions. Additionally, bubble velocities and frequencies increased with higher liquid and gas flow rates. It was found that measured bubble lengths were in good agreement with the empirical models in the existing literature, but slug lengths were not.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.11 no.3
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• pp.1023-1026
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• 2010

In this paper, rheological property of polymer blends in a confined geometry was investigated. The shear viscosity was measured in a capillary rheometer incorporated with a specially designed piston and three slit dies having 0.1, 0.2 and 0.5 mm in thickness. It was observed that the viscosity of polymer blends does not depend on the die size when the phase of polymer blends is a sea-island structure. However, when the phase of polymer blends is a co-continuous structure, the viscosity of the blends was dependent on the die size. By additional investigations, this result is attributed to the slip phenomenon between polymer phases in the blends.

• Journal of the Korean Society of Visualization
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• v.18 no.3
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• pp.103-108
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• 2020

RBC (red blood cell) deformability is one of factors inducing blood shear thinning effect. Reduction of RBC deformability increases blood viscosity in high shear region. In this study, 3D printed chip with proper distribution of wall shear rate (WSR) was proposed to measure RBC deformability of blood samples. To fabricate 3D printed chip, the design of 3D printed chip determined through numerical simulation was modified based on the resolution of the 3D printer. For the estimation of pressure drop in the 3D printed chip, two bypass outlets with low and high WSR are exposed to atmospheric pressure through the needles. By positioning the outlet of needles in the gravity direction, the formation of droplets at bypass outlets can be captured by smartphone. Through image processing and fast Fourier transform (FFT) analysis, the frequency of droplet formation was analyzed. Since the frequency of droplet formation is related with the pressure at bypass, high pressure drop caused by reduction of RBC deformability can be estimated by monitoring the formation of blood droplets using the smartphone.