• Title/Summary/Keyword: 미세 밀링

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Discussion on the Mechanical Alloying Process of Ni-20Cr alloy (Ni-20 Cr계 분말의 기계적 합금화 과정에 대한 고찰)

  • Yoo, Myoung Ki;Choi, Ju
    • Analytical Science and Technology
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    • v.6 no.2
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    • pp.197-205
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    • 1993
  • Blends of elemental Ni and 20 weight % Cr powder were milled for different period in a laboratory attritor. Powder size distribution, microstructure and X-ray diffraction characteristics were investigated as a function of processing period. Saturated magnetization, Ms and coercive force, Hc we also measured and compared with plasma melted ingot to confirm the mechanically alloyed states. Mechanical alloying occurred as a consequence of the partition of powders and the increase of interfacial area driving diffusing of Cr into Ni. However, magnetic properties of chemically homogeneous solid solution like melted ingot has not been observed even though steady state of submicron grain size has been achieved after milling over 15 hrs. Further mechanical alloying period gave refinement of grain size, which resulted in the increase of alloyed layer. It is concluded that homogenization should be controlled by the increase of interfacial area between constitutive powders caused by plastic particle deformation and by the diffusion of Cr within the alloyed phase into Ni-rich phase through lattice defects.

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Fabrication and Performance of Electron Cyclotron Resonance Ion Milling System for Etching of Magnetic Film Device (자성박막 소자 에칭용 전자 사이클로트론 공명 이온밀링 시스템 제작과 특성연구)

  • Lee, Won-Hyung;Hwang, Do-Guwn;Lee, Sang-Suk;Rhee, Jang-Roh
    • Journal of the Korean Magnetics Society
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    • v.25 no.5
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    • pp.149-155
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    • 2015
  • The ECR (Electron Cyclotron Resonance) Ar ion milling was manufactured to fabricate the device of thin film. The ECR ion milling system applied to the device etching operated by a power of 600W, a frequency of 2.45 GHz, and a wavelength of 12.24 cm and transferred by a designed waveguide. In order to match one resonant frequency, a magnetic field of 908 G was applied to a cavity inside of ECR. The Ar gas intruded into a cavity and created the discharged ion beam. The surface of target material was etched by the ion beam having an acceleration voltage of 1000 V. The formed devices with a width of $1{\mu}m{\sim}9{\mu}m$ on the GMR-SV (Giant magnetoresistance-spin valve) multilayer after three major processes such as photo lithography, ion milling, and electrode fabrication were observed by the optical microscope.

Micro EDM Milling Using Deionized Water as Dielectric Fluid (탈수이온수를 절연액으로 사용한 미세 방전 밀링)

  • Chung, Do-Kwan;Kim, Bo-Hyun;Chu, Chong-Nam
    • 한국신재생에너지학회:학술대회논문집
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    • 2005.06a
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    • pp.546-549
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    • 2005
  • Micro EDM milling using deionized water as dielectric fluid was investigated. After machining micro grooves using deionized water with different voltage. capacitance. and resistivity of deionized water, machining characteristics were investigated. The wear of a tool electrode and the machining time can be reduced by using deionized water instead of kerosene. Micro hemispheres were machined in deionized water and kerosene and their machining characteristics were compared.

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Taper Reduction in Micro Electrochemical Milling Using Disk-type Electrode (디스크 전극을 이용한 미세 전해 밀링 가공에서의 테이퍼 형상 방지)

  • Kim Bo Hyun;Lee Young Soo;Choi Deok Ki;Chu Chong Nam
    • Journal of the Korean Society for Precision Engineering
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    • v.22 no.4
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    • pp.167-172
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    • 2005
  • In this paper. micro electrochemical machining (ECM) for micro structure fabrications is presented. By applying ultra short pulses. the chemical reaction can be restricted only to the region very close to the electrode. Micro ECM is applied to machining micro structures through electrochemical milling process becasuse it doesn't suffer from tool wear. Using this method. 3D micro structures were machined on stainless steel. It was found that micro machining is possible with good surface quality in the low concentration electrolyte,0.1 M H₂SO₄. In ECM, as the machining depth increases, better flushing of electrolyte is required for sufficient ion supply. Layer-by-layer milling is advantageous in flushing. However, layer-by-layer milling causes taper of structures. To reduce the taper, application of a disk-type electrode was introduced. By electrochemical milling, various 3D micro structures including a hemisphere with 60 ㎛ diameter were fabricated.

Micro End-milling Technology for Micro Pole Structures (미세 폴 구조물 가공을 위한 마이크로 앤드밀링 기술)

  • Je, Tae-Jin;Choi, Doo-Sun;Lee, Eung-Sug;Hong, Sung-Min;Lee, Jong-Chan;Choi, Han
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.4 no.4
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    • pp.7-13
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    • 2005
  • In the case of fabricating micro pole structures such as column, square-pole and gear shaft by the micro end-milling process, it can be useful in the fields of industry, for example, micro parts, electrode for electrical discharge machining and micro mold for injection molding. In this study, machining factors and the process were analyzed. Machining experiments of various micro pole configurations were performed. Analysis of the change and effect of the cutting force according to the machining conditions was carried out. An analytical study of the deformation of the micro pole caused cutting conditions and cutting force through the finite element method and ANSYS program was carried out. As a result, this research presented a method of fabricating the column pole of below $100{\mu}m$ diameter with high aspect ratio by using micro end-milling process, and based on that, a method of fabricating a variety of applicable structures. Also the minimum size of the pole capable of fabricating through theory and experiment were demonstrated.

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