• Title/Summary/Keyword: 미세펌프

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Calibration of Discharge Coefficient of Sonic Nozzle Using CVFM (정적형 유량계를 이용한 소닉노즐 유출계수 교정 방법에 관한 연구)

  • Shin, J.H.;Kang, S.B.;Park, K.A.;Lim, J.Y.;Cheung, W.S.
    • Journal of the Korean Vacuum Society
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    • v.19 no.4
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    • pp.243-248
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    • 2010
  • Sonic nozzles have been a standard device for measurement of steady state gas flow, as recommended in ISO 9300. This paper introduces two sonic nozzles of diameter ${\Phi}$ 0.03 mm and ${\Phi}$ 0.2 mm precisely machined according to ISO 9300. The constant volume flow meter(CVFM), readily set up in the Vacuum center of KRISS. was used to calibrate the discharge coefficients of both nozzles. The calibration results were shown to determine them within the 3% expanded measurement uncertainty. Calibrated sonic nozzles were found to be applicable for precision measurement of steady state gas flow in the vacuum process in the ranges of 0.6~1,800 cc/min. Those flow conditions are equivalent to the fine gas flow with Reynolds numbers of 26~12,100. Those encouraging results confirm that calibrated sonic nozzles enable precision measurement of extremely low gas flow encountered very often in th vacuum processes. Both calibrated sonic nozzles are proven to provide the precision measurement of the volume flow rate of the dry vacuum pump within one percent difference in reference to CVFM. Calibrated sonic nozzles are applied to a new 'in-situ and in-field' equipment designed to measure the volume flow rate of vacuum pumps in the semiconductor and flat display processes. Furthermore, they can provide other applications to flow control devices in vacuum, such as MFC, etc.

Development of O-Ring Measurement Systems of Muscular Meridians for objectification of Constitutional Diagnosis (체질 진단의 객관화를 위한 O-Ring 경근 계측시스템의 개발)

  • 정동명
    • Journal of Biomedical Engineering Research
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    • v.16 no.4
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    • pp.555-561
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    • 1995
  • In this paper, the O-Ring Measurement System (O-R MS) has been designed to supplement such subectivity and apply to the diagnosis by constitution. A single chip microprocessor of Intel MCS-51 family has been used to control the O-R MS and process data with real time, and the O-R MS could measure the minute muscular strength, expanded width between fingers, and time of the measurement. Therefore the objective constitutional diagnosis is possible by the O-R MS. As a clinical testing for estimating credibility of O-R MS, the acupuncture points representing the constitution has been stimulated using a semiconductor laser stimulator and measure the muscular strength by the O-R MS. The result of clinical testing has been shown that the constitutional diagnosis with the O-R MS is proved highly precision of 96% and it is expected that the O-R MS can be used practically for the objective constitutional diagnosis.

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Development of Vacuum System for Improving Productivity of Fine Multi-hole Sheet Metal Product (미세 다공 박판제품 생산성 향상을 위한 진공 시스템의 개선)

  • Park, Joon-Hong;Kwon, Taek-Hwan;Choi, Young;Kim, Chul;Choi, Jae-Chan
    • Journal of the Korean Society for Precision Engineering
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    • v.17 no.8
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    • pp.180-188
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    • 2000
  • Fine multi-hole sheet metal product(FMSMP) is a specific metal plate which is used in color TV and computer monitor. Processes of manufacturing FMSMP are generally composed of coating cleaning exposure and etching processes. After a thin metal plate is made by rolling photosensitive liquid is coated on the metal plate in coating process. Then the coated thin metal plate consecutively passes through exposure process in which upper and lower glasses are compressed by vacuuming the space between glasses and metal plate. In this lowered glasses are compressed by vacuuming the space between glasses and metal plate. In this lowered vacuum state certain part of metal plate is desirably exposed to light and will be etched into forming lots of well-arranged holes with a specific diameter, nowadays to manufacture FMSMP of 17 inch braun tube 80 second is required for complete vacuum but 35 second is applied to manufacture FMSMP in reality. In the present study vacuuming time is tried to reduce for improvement of productivity by analyzing vacuum system and proposing several solutions, for faster vacuuming speed degree of vacuum state between glasses and metal plate is improved by the proposed method and experiments using the proposed method are performed for verification. In addition microstructure of FMSMP is investigated to prevent stain phenomena and to improve quality of the product.

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Comparison of Dissolved Air and Micro-Bubble Concentration by a Micro-Bubble Generating Pump (미세기포 발생 펌프에서 생성되는 기포농도와 용존공기농도의 비교)

  • Lee, Chang-Han;Ahn, Kab-Hwan
    • Journal of Environmental Science International
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    • v.23 no.11
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    • pp.1835-1842
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    • 2014
  • The goal of this study was to evaluate micro-bubble concentration ($C_{air}$) in water by air/water ratio (A/W ratio) with a micro-bubble generating pump. The estimation of micro-bubble concentration is based on the balance of inlet/outlet air and water flow rate. On net A/W ratio to be generated micro-bubble, we found that the obtained the $C_{air}$ are shown as a function of discharge pressure ($P_g$) of the micro-bubble generating pump. The correlation of the $C_{air}$ and the $P_g$ ($C_{air}=3.261P_g-1.754$) was adequately described by the least square methods with a high correlation coefficient (r = 0.9459) and calculated values fit the experimental data quite well. The $C_{air}$ was lower than theoretical dissolved air concentration ($C_{aq}$) calculated by Henry's law. The $C_{air}$ for being operated the micro-bubble generating pump was 6.75 - 39.53 mL/L, however, we found that the optimum of the $C_{air}$ to generate micro-bubble was the range from 10 to 12 mL/L.

A study on the Thermopneumatic Actuator with Phase Change for Micro Pump (상변화를 이용한 열공압형 마이크로 펌프용 액츄에이터 성능에 관한 연구)

  • Park, S.;Hwang, J.Y.;Lee, S.;Kang, K.;Kang, H.;Jang, J.;Lee, H.;Kang, S.
    • 한국신재생에너지학회:학술대회논문집
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    • 2006.11a
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    • pp.425-428
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    • 2006
  • Recently, Direct Methanol Fuel Cell (DMFC) for portable devices has been received much attention because DMFC has a possibility of higher energy density than electrical batteries and smaller size than other fuel cells. This paper presents the fabrication and test of a thermopneumatic microactuator with a phase change for DMFC. A microactuator consists of an inlet an outlet a chamber, a heater and a sensor of resistance temperature detector(RTD). The micoractuator is fabricated by the spin-coating process, the lithograph process, the deep RIE process and so on. The total size of microactuator is $20{\times}20{\times}0.53mm^3$. When the current is applied, the heater heats liquid in chamber. As a result the liquid vaporizes. The response of temperature in the chamber was measured using thermocouple The changed temperature is $3^{\circ}C$ for 5 sec at 0.032W.

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A Study on the Friction and Wear Characteristics with Purity on $AL_{2}O_{3}$ Ceramic ($AL_{2}O_{3}$ 세라믹의 순도에 따른 마찰 마모 특성 연구)

  • Jeon Chan-Yeal;Oh Seong-Mo
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.6 no.5
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    • pp.439-445
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    • 2005
  • The tribological properties of ceramics are very important in the application to engineering ceramic parts such as seal rings, pump parts, meter parts, and so on. In this study, the effects of each other purity on the mechanical and tribological properties of alumina and zirconia ceramics were investigated. Sliding distance, sliding speed, contact load. friction coefficient, the amount of worn out material at a certain time, and the prepared composites were measured. Crystalline phases and microstructure were examined with XRD and SEM. We obtained the good properties of friction coefficient and wear resistance at the purity 99.7$\%$ of alumina. However, The purity 95$\%$ were great at the wear amount of worn out material.

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Encapsulation of Agro-Probiotics for Promoting Viable Cell Activity (생균력 증진을 위한 농업용 미생물제 미세캡슐화)

  • Choi, So-Young;Yoon, Min-Ho;Whang, Kyung-Sook
    • Korean Journal of Soil Science and Fertilizer
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    • v.38 no.5
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    • pp.287-293
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    • 2005
  • In this work, to develop soil inoculant which maintains stable viable cells and normalized quality, studies on micro-encapsulation with bacteria and yeast cells were performed by investigating materials and methods for micro-encapsulation as well as variation and stability of encapsulated cells. Preparation of capsule was conducted by application of extrusion system using micro-nozzle and peristaltic pump. K-carragenan and Na-alginate were selected as best carrier for gelation among K-carageenan, Na-alginate, locust bean gum, cellulose acetate phthalate (CAP), chitosan and gelatin tested. Comparing the gels prepared with Bacillus sp. KSIA-9 and carriers of 1.5% concentration, although viable cell of K-carragenan and Na-alginate was six times higher than those of other, Na-alginate was finally selected as carrier for gelation because it is seven times cheaper than K-carragenan. The gel of 1.5% Na-alginate was also observed to have the best morphology with circular hardness polymatrix and highest viable cell. When investigating the stability of encapsulated cells and the stabilizer effect, free cells were almost dead within 30 or 40 days whereas encapsulated cells decreased in 10% after 30 days and 15-30% even after 120 days. As stabilizer for maintaining viable cell, both 1% starch and zeolite appeared to possess the level of 70-80% cell for bacteria and yeast until after 120 days.

Stabilizing Soil Moisture and Indoor Air Quality Purification in a Wall-typed Botanical Biofiltration System Controlled by Humidifying Cycle (가습 주기에 따른 벽면형 식물바이오필터의 토양 수분 안정화 및 실내공기질 정화)

  • Lee, Chang Hee;Choi, Bom;Chun, Man Young
    • Horticultural Science & Technology
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    • v.33 no.4
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    • pp.605-617
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    • 2015
  • The ultimate goal of this research is to develop a botanical biofiltration system that combines a green interior, biofiltering, and automatic irrigation to purify indoor air pollutants according to indoor space and the size of biofilter. This study was performed to compare the stability of air flow characteristics and removal efficiency (RE) of fine dust within a wall-typed (vertical) botanical biofilter depending on humidifying cycle and to investigate RE of volatile organic compounds (VOCs) by the biofilter. The biofilter used in this experiment was designed as an integral form of water metering pump, water tank, blower, humidifier, and multi-level planting space in order to be suitable for indoor space utilization. As a result, relative humidity, air temperature, and soil moisture content (SMC) within the biofilter showed stable values regardless of three different humidifying cycles operated by the metering pump. In particular, SMCs were consistently maintained in the range of 27.1-29.7% during all humidifying cycles; moreover, a humidifying cycle of operating for 15 min and pausing for 45 min showed the best horizontal linear regression (y = 0.0008x + 29.09) on SMC ($29.0{\pm}0.2%$) during 120 hour. REs for number of fine dust (PM10) and ultra-fine dust (PM2.5) particles passed through the biofilter were in the range of 82.7-89.7% and 65.4-73.0%, respectively. RE for weight of PM10 passed through the biofilter was in the range of 58.1-78.9%, depending on humidifying cycle. REs of xylene, ethyl benzene, total VOCs (TVOCs), and toluene passed through the biofilter were in the range of 71.3-75.5%, while REs of benzene and formaldehyde (HCHO) passed through the biofilter were 39.7% and 44.9%, respectively. Hence, it was confirmed that the wall-typed botanical biofilter suitable for indoor plants was very effective for indoor air purification.

Microstructural Realization of SD400 Rebar by Developing Tempcore Simulation Apparatus (템프코어 냉각모사 장치 개발을 통한 SD400 철근 미세조직 구현)

  • Park, Chun Su;Yi, Hyang Jun;Bae, Seh Wook;Kim, Gil-Su
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.39 no.5
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    • pp.543-547
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    • 2015
  • The cooling process referred to as Tempcore has been applied to produce a high-strength rebar. Excellent rebar with strength and weldability can be manufactured from mild steel without the addition of alloying elements by using the Tempcore process. However, there are limitations to evaluating the effect of various chemical compositions and cooling conditions within a site facility. In this study, we developed an apparatus to simulate the Tempcore process and obtained microstructures with a hardened surface layer, an intermediate region and a soft inner core. The experimental apparatus has been equipped with a cooler set that is the same as the site facility and consists of a pump line that supplies pressure of 12-13 bar and flow rate of up to $50m^3/h$. In accordance with the simulation result of steel grade SD400 that requires more than 400 MPa of yield strength, both the hardened area ratio and the hardness with respect to each cooling depth were found to agree well with the product.

분무진공동결건조기 개발

  • Ryu, Gyeong-Ha;Ban, Byeong-Min;Kim, Jae-Hyeong;Son, Sang-Ho
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.258-258
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    • 2013
  • 최근 건조 제품의 양질화, 고급화 및 편의화가 요구되어 이를 충족시키기 위한 새로운 건조방법이 계속 개발 되어 왔다. 이러한 방법들 중에서 저온과 진공하에서 건조가 이루어지는 진공 동결 건조는 가장 완벽한 건조 방법으로 최근 실용화 되고 있다. 진공동결건조란 건조의 한 종류로 수분을 함유한 시료를 동결시킨 후 진공펌프를 이용하여 수증기압을 3중점 이하로 낮추어 얼음을 직접 증기로 만드는 승화의 원리에 의해서 얻어진다. 분무진공동결건조의 특징은 (1) 물리적구조의 보존성, (2) 화학적인 안정성, (3) 생물학적인 활동의 보존성, (4) 제품의 높은 복원성 및 재생성이다. 따라서 분무진공동결건조 기술은 크게 진공, 분무, 동결, 건조, 멸균 등과 같은 요소기술의 복합기술이라 할 수 있다. 분말을 제조하기 위해서 진공동결건조 후 분쇄하는 방법을 사용하나 본 방법에서는 정밀화학품 제조를 위해서 분무진공동결건조 방식을 사용한다. 이를 통하여 적당한 크기인 5~10 um의 입경 제조가 가능하고, 공기동력학적인 입경이 기존 방식에 비해 작아서 허파까지의 운반효율이 1.5~2배 우수하다. 화학, 의학 분야에서의 분무동결 건조는 주로 민감한 제품, 즉 생물학적 고유성의 손상 없이 물을 제거하는데 사용되어 영구적으로 저장 가능한 상태로 보관할 수 있으며 물의 첨가로 원상태로 복구할 수 있어서 매우 각광을 받고 있다. 의약용 냉동건조 제품은 항생물질, 박테리아, 혈청, 백신, 검사 약물, 단백질을 포함하는 생물공학 제품들, 세포, 섬유, 화학제품 등이 있으며 주로 vial 또는 ampule 상태로 건조가 이루어진다.본 연구에서는 원료를 $-194^{\circ}C$의 액체질소에 분무시켜 동결된 미립자를 형성한 후 진공 및 저온상태에서얼음의 승화(sublimation)에 기반한 1차 건조와 수증기 탈착(desorption)에 기초한 2차 건조 과정으로 구성된 분무진공동결건조기를 개발하였다. 분무동결 과정의 해석을 통해 2유체식 노즐을 통해 분무된 미세 입경의 액적이 액체 질소 표면까지 도달하는 회수률, 분무 노즐의 위치, 운전 조건 및 용기의 설계의 최적화를 수행하였다. 초기 액적속도, 분무노즐의 높이, 흡입구 추가에 따른 액적 유동 및 회수의 특성을 제시하였으며 이를 통한 분사시스템 고도화 가능성을 제시하였다. 구형의 미세 입자가 적층된 제품의 동결건조 공정의 해석은 흡착승화 모델(sorption sublimation model)을 기반으로 다음과 같은 열전달, 물질전달, 상변화 모델을 고려하여 유도되었다. 분무노즐 및 냉동/진공 배기계 시작품을 개발하여, 표면의 고다공도를 갖춘 입경 3~20 m 정도의 시료를 얻을 수 있으며, 동역학적 입경 5 m 충족함을 확인하였다.

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