• 한국생산제조학회지
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• 제18권6호
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• pp.636-641
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• 2009

Recently, expansion of micro-technology parts requires micro-precision machining technology. Micro-groove machining is important to fabricate micro-grating lens and many micro-parts such as microscope lens, fluidic graphite channel etc. Conventional groove fabrication methods such as etching and lithography have some problems in efficiency and surface integrity. But, mechanical micromachining methods using single crystal diamond tools can reduce these problems in chemical process. For this reason, microfabrication methods are expected to be very efficient, and widely studied. This study deals with machinability in micro-precision V-grooves machining of nickel plated layer using non-rotational single crystal diamond tool and 3-axis micro stages. Micro V-groove shape, chip formation and tool wear were investigated for the analysis of machinability of Ni plated layer.

• 한국정밀공학회지
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• 제14권3호
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• pp.28-34
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• 1997

The side burrs and shape distortion resulting from the micromachining of an array of V-shape microgrooves in fresnel lens mould were experimentally invesigated. The focus of this study is on the influence of depth of cut and prism angle on the burr growing rate. The main experiments were con- ducted on the single prism cutting for the convinient of measuring the burr shape and cutting force. From the observation of the burr shape and burr growing rate, it was found that there exits a critical depth of cut below which the burrs are more or less irregular and weak. But above that critical value, the burrs are re- latively clear and stiff.

• 한국정밀공학회지
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• 제25권11호
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• pp.45-51
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• 2008

Successive micro-scale V-grooves and a grid of pyramids were machined by elliptical vibration tufting (EVC) to investigate feasibility of using EVC as an alternative method of creating micro-molds to photo-lithography and electroforming, which have been commonly employed. An elliptical vibration grooving machine was developed which consists of two orthogonally-arranged piezoelectric actuators, a diamond cutting tool, and a motorized xyz stage. The micro-scale features were machined on materials of copper, duralumin, nickel, and hastelloy and it was found that EVC significantly reduces cutting resistance and prohibits generation of side burrs and rollover burrs, thus resulting in improving machining qualify of micro-molds in ail experimented workpiece materials.

• 한국정밀공학회지
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• 제16권1호통권94호
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• pp.68-74
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• 1999

One of the recent changes in machining technology is rapid application of micro- and high precision grinding processes. A fine groove generation is necessary for the fabrication of optic, electronic and semiconductor parts, and achieved by chemical or mechanical processes. Slot grinding is very efficient for the generation of micro ordered groove with hard and brittle materials. As slot grinding is continuous, the ground depth become gradually shallow because of wheel wear. The form accuracy become worse from the increase of ground slot width by the loading phenomena at wheel side, results on chipping damage of the workpiece. The experiments achieve to the enhancement of the form accuracy and chipping free of the brittle materials using V shaped cast iron bonded diamond wheels. In this study we focused on the investigation of the effect of the high pressure air jet on the grinding characteristics. As a results, we found that the high pressure air jet is very effective on the reductions of the wheel wear, enhancement of the form accuracy.

• 한국정밀공학회지
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• 제24권11호
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• pp.52-58
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• 2007

A cutting device capable of generating various shapes of the cyclic elliptical trajectory of a cutting tool was proposed and micro v-grooving experiments were performed to investigate the characteristics of elliptical vibration cutting (EVC). The proposed cutting device is comprised of a pair of parallel piezoelectric actuators with which harmonic voltages of varying phase difference and magnitude are supplied, creating various shapes of the elliptical tool path. The attributes of the elliptical locus involving the direction of the axis of an ellipse, the rotational direction and amplitudes of a trajectory were fine-tuned for stable operation of the EVC. The EVC characteristics performed with brass and copper revealed reduction in the cutting resistance and suppression of burr formation, resulting in the enhancement of form accuracy of machined micro-features. While the effect of the EVC increases with the increase of excitation frequency and the amplitude, it is found that a change in the cutting force decreases as the amplitude of an elliptical locus increases.

• 한국정밀공학회지
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• 제22권12호
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• pp.198-204
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• 2005

For precise micro V-grooving, ultrasonic elliptical vibration cutting (UEVC) is proposed using two parallel piezoelectric actuators, which are energized by sinusoidal voltages with a phase difference of 90 degrees. Experimental setup is composed of stacked PZT actuators, a single crystal diamond cutting tool, and a precision motorized xyz stage. It is found that the chip formed in the process of UEVC is discontinuous because of the periodic contacts and non-contacts occurring between the tool and workpiece. It is experimentally observed that the cutting force in the process of UEVC significantly reduces compared to the ordinary non-vibration cutting. In addition, the creation of burr during UEVC is significantly suppressed, which is attributable to the decrease in the specific cutting energy.

• 광학세계
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• 통권101호
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• pp.43-45
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• 2006

근래에 일본을 비롯하여 한국과 대만 등 아시아 여러나라에서 광학소자의 플라스틱화로 흐름이 급속히 진행되고 있는 가운데 광학소자에 생기는 성형불량을 예측하는 기술에 관심이 모아지고 있다. 도레이 주식회사에서는 3차원 유한요소 모델용 시스템을 세계에서 처음 실용화에 성공한 바 있으며, 본 고에서는 이 기술에 대해 소개하고자 한다. 광학소자에 관한 CAE 해석의 역사는 아직 시작단계지만 요구 정밀도는 상당히 높기 때문에 끊임없이 해석기술의 정밀도화에 노력하고 있다. 또 미세 V(브이)홈에 있어서 전사성 평가에 대해서도 요구가 높기 때문에 예측 기술의 확립을 도모하고 있다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.625-628
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• 2005

For precise micro-grooving and surface machining, ultrasonic cyclic elliptical cutting is proposed using two parallel piezoelectric actuators. The piezoelectric actuators are energized by sinusoidal voltages of varying phase which is essenstial to generating elliptical cutting. Experimental setup is composed of ultrasonic motor, single crystal diamond cutting tool, and precise motorized xyz stage. It is confirmed experimentally that the cutting performance, in terms of the cutting force, the burr formation, and the discontinuous chip formation is improved remarkably by applying ultrasonic elliptical vibration cutting.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1223-1227
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• 2005

Fine microgroove is the key component to fabricate micro-grating, micro-grating lens and so on. Conventional groove fabrication methods such as etching and lithography have some problems in efficiency and surface integrity. This study deals with the creation of ultra-precision micro grooves using non-rotational diamond tool and CNC machining center. The shaping type machining method proposed in the study allows to produce V-shaped grooves of $40\mu{m}$ in depth with enough dimensional accuracy and surface. For the analysis of machining characteristics in micro V-grooving, three components of cutting forces and AE signal are measured and processed. Experimental results showed that large amplitude of cutting forces and AE appeared at the beginning of every cutting path, and cutting forces had a linear relation with the cross-sectional area of uncut chip thickness. From the results of this study, proposed micro V-grooving technique could be successfully applied to forming the precise optical parts like prism patterns on light guide panel of TFT-LCD.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.542-546
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• 2003

This paper describes the machining characteristics of a developed micro grooving machine. Experiments have been conducted on the various grooving condition such as spindle revolution speed, feed rates and depth of groove. V and U-shaped blade tool and STD11 workpiece was used in this study. Evaluating the machining conditions, RMS and frequency spectrum analysis of AE(acoustic emission) signals according to each conditions were applied. As a result, this study presented the process to optimize micro grooving condition and possibility of application of AE technique in groove machining.