• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.160-160
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• 2004

초음파 여기를 이용한 물체 이송 시스템은 최근 급속히 발달하고 있는 광산업이나 반도체 산업에서 기존의 이송 시스템의 단점을 보완하기 위해 개발되었다. 기존의 이송 시스템들은 이송공정이나 검사 공정 등에서 광소자의 표면손상이나 자기장에 의한 반도체 소자의 전자적 배열의 손상이 우려되었다. 하지만 PZT 액츄에이터로 구동되는 초음파 발생장치(Ultrasonic wave generator)에서 발생한 초음파 여기를 이용하여 물체를 이송시킬 경우 이러한 단점은 보완된다.(중략)

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.10a
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• pp.256-256
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• 2003

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.10a
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• pp.267-267
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• 2003

• Proceedings of the KSME Conference
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• 2003.11a
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• pp.1608-1613
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• 2003

In the semiconductor and the optical industry, a new transport system which can replace the conventional sliding system is required. These systems are driven by the magnetic field and the conveyer belt. The magnetic field damages semiconductor and contact force scratches the optical lens. The ultrasonic wave driven system can solve these problems. In this paper, the object transport system using the excitation of ultrasonic wave is proposed. The experiments for finding the optimal excitation frequency, finding phasedifference between two ultrasonic wave generators are performed. The relationship of transporting speed according to the change of flexural beam shape is verified. In addition, the system performance for practical use is evaluated.

• Proceedings of the KAIS Fall Conference
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• 2002.05a
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• pp.55-58
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• 2002

본 논문은 쾌속제작법을 이용한 임의형상을 가공하는 새로운 방법의 개념을 소개하고 있다. 본 시스템은 레이저 절단, 이송, 적층, 소결의 단계를 통하여 세라믹재료로 된 임의형상을 가공할 수 있다. 시스템을 구성하는 주요장비로는 레이저발생장치, X-Y테이블, 이송시스템, 그리고 전기로 등이 있다. 이 시스템을 사공하면 표면의 거칠기가 매끄러운 형상을 상대적으로 짧은 시간에 제작할 수 있는 장점이 있다. 또, 2차 공정을 거치지 않고, 바로 물체를 제작할 수 있어 효율성이 높다고 할 수 있다. 제작된 모형은 바로 조립되어 사용할 수 있기 때문에 응용분야가 다양하다.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.11a
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• pp.841-844
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• 2003

In the semiconductor and the optical industry a new transport system which can replace the conventional sliding system is required. These systems are driven by magnetic field and conveyer belt. The magnetic field damages semiconductor and contact force scratches the optical lens. The ultrasonic wave driven system can solve these problem. In this paper, the vibration behavior of flexural beam in the ultrasonic transport system is verified using Laser Scanning Vibrometer. The experiments for verifying vibration are performed in three conditions such as in the maximum transport speed, in the zero speed, and in the change of transport direction.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.149-154
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• 2004

In the semiconductor and the optical industry a new transport system which can replace the conventional sliding system is required. These systems are driven by magnetic field and conveyer belt. The magnetic field damages semiconductor and contact force scratches the optical lens. The ultrasonic wave driven system can solve these problem. In this paper, the relationship of transporting speed according to the change of flexural beam shape and the effect of transporting speed according to the change of weight and amplification voltage are verified. The vibration behavior of flexural beam in the ultrasonic transport system is experimented using Laser Scanning Vibrometer.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1170-1173
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• 2003

In the semiconductor and the optical industry a new transport system which can replace the common system is required. The common systems are driven by magnetic field and conveyer belt. The magnetic field damages semiconductor and contact force scratches, the optical lens. The ultrasonic wave driven system solve these problem. In this paper the object transport system using the excitation of ultrasonic wave is proposed. the experiments for finding the optimal excitation frequency, finding phase-difference between two ultrasonic wave generators are performed. The effect of transporting speed according to the change of amplification voltage is verified. In addition, the system performance for actual use is evaluated

• Journal of the Korean Society for Precision Engineering
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• v.22 no.8 s.173
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• pp.151-158
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• 2005

In the semiconductor and the optical industry, a new transport system which can replace the conventional sliding systems is required. The sliding systems are driven by the magnetic field and conveyer belts. The magnetic field nay damage semiconductor and the contact force may scratch the optical lens. The ultrasonic wave driven system can solve these problems. In this paper, an object transport system using the excitation of ultrasonic wave is proposed. The experiments for finding the optimal progressive frequency and the phase-differences between two ultrasonic wave generators are performed. The relationships between transportation speed and the excitation frequency, flexural beam shapes and amplification voltage are investigated.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.04a
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• pp.371-375
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• 2003

In recent years, as the semiconductor and the optical industry grows, the necessity of the transporting system for semiconductor and precision optical lens without damage increases. The transport system using ultrasonic wave is very suitable for this area. In this paper the object transport system using the excitation of ultrasonic wave is proposed. The experiments for finding the optimal excitation frequency, finding phase-difference between two ultrasonic wave generators are performed. The effect of transporting speed according to the change of weight and amplification voltage are verified. In addition, the system performance for actual use is evaluated.