• Proceedings of the Korean Vacuum Society Conference
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• 1998.02a
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• pp.166-166
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• 1998

반도체 공정에서 기존보다 큰 30cm 웨이퍼훌 이용하기 위해서 기존의 ECR, Helicon, ICP, 등 공정용 고 밀도 플라즈마 원들의 대면적화에 대한 연구가 세계적으로 진행되고 있다 현 상황에서는 평판형 안테 나룰 이용한 TCP가 대면적용 폴라즈마 원의 가장 유력한 후보로 여겨지고 있다 TCP롤 대면적화 하는 데 있어서 중요한 문제점으로는 대면적에서의 큰 안테나 인되턴스로 인한 임피던스 정합과 대면적에서 의 유전울질의 기계적 강도이다. 앓은 유전물질올 사용힐 수 있도록 대면적 TCP 플라즈마 원올 실계 저l작하였고 이차원 가열이론올 이용한 TCPRP code 률 이용하여 안테나의 반경옳 결정하였디 안테나의 인덕턴스 값올 줄이기 위해서는 주m수는 13.56MHz 보다 낮은 4-5MHz 부근에서 작동하는 RF 파워룰 선택하였다 이 파워 서플라이는 보통 사용되는 50n 흩력 입묘$\mid$던스훌 갖는 형태가 Of니라 LC 공진현상 올 이용하여 부하에 파워률 전달하는 형태이다 .. TCP 장치에 사용할 수 있도록 파워 서플라이 흩력 단에 안테나와 직혈로 가변 콘덴서를 달아서 임11I던스 정합올 힐 수 있게 하였다 안테나에 직훌로 달Of줌으 로써 안테니의 인덕턴스훌 훌여주는 효과훌 얻올 수 있다 안테나에 흐르는 전류룰 측정하기 위해서 사 각형 루프로 전류 픽업 코일을 만들었고 진공상태에서 RF 파워률 인가하고 안테나의 전류와 전압을 측정하여 픽업 코일걸과훌 조정하였다. 발생기체로는 헬륨올 사용하였고 1-100mTorr 의 압력범위에서 실험을 하였다 플라즈마롤 빌샘시키고 파워를 증가 시킴에 따라 E-H mode transition 현상이 관찰되었고 그 때의 임계 전류 값을 측정하였다. 압력이 낮올수록 모드 변화가 일어나는 전류의 값이 작았다 임계 전류는 압력에 대해서 선형적인 특성을 보였다 이는 압력이 낮을수록 유도걸힘이 더 잘 된다는 것을 의미한다 1 1 mTorr에서는 H-mode에서 안테나의 전류가 파워훌 증가시킴에 따라 계속 증가하였으니, 압력이 올라 갈수록 조금씩 증가하는 정도가 줄어들고. 100mTorr에서는 포화된 값을 나타냈다 H-mode로 넘어간 후 에는 파워가 증가황에 따라 안테나의 임피던스 값이 모든 압력영역에서 줄어드는 경황을 보였고, 이는 플라즈마의 인덕턴스에 의해서 안테나의 인덕턴스 기 감소되기 때문이다, 파워가 증가할수록 안테U오} 플라즈마 루프사이의 상호걸합이 증가하는 걸로 해석힐 수 있다 안테나의 인되턴스 변화보다는 저항.성 분의 변화가 컸다 하지만 전체 임피던스로 볼 때 저항성분이 상대적으로 작기 때문에 인덕턴스의 감소 가 더 큰 영향을 미치는 걸로 볼 수 있다. 하지만 플라즈마로의 파워 전달에는 저항성분만이 영향올 미 치므로 저항성분의 큰 변화는 파워가 많이 전달될올 의미한다 피워전달 효율을 계산해 본 결과 수 r mTorr 부근이 80-90% 정도의 높은 효율올 보였고 5mTorr 일 때가 가장 좋았다.

• Journal of the Korean Society for Nondestructive Testing
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• v.36 no.6
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• pp.443-450
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• 2016

In this study, we propose a novel fiber optic sensor to show the measurement feasibility of distributed temperature and strains in a single sensing fiber line. Distributed temperature can be measured using optical time domain reflectometry (OTDR) with a Raman anti-Stokes light in the sensing fiber line. Moreover, the strain can be measured by fiber Bragg gratings (FBGs) in the same sensing fiber line. The anti-Stokes Raman back-scattering lights from both ends of the sensing fiber, which consists of a 4 km single mode optical fiber, are acquired and inserted into a newly formulated equation to calculate the temperature. Furthermore, the center wavelengths from the FBGs in the sensing fiber are detected by an optical spectrum analyzer; these are converted to strain values. The initial wavelengths of the FBGs are selected to avoid a cross-talk with the wavelength of the Raman pulsed pump light. Wavelength shifts from a tension test were found to be 0.1 nm, 0.17 nm, 0.29 nm, and 0.00 nm, with corresponding strain values of $85.76{\mu}{\epsilon}$, $145.55{\mu}{\epsilon}$, $247.86{\mu}{\epsilon}$, and $0.00{\mu}{\epsilon}$, respectively. In addition, a 50 m portion of the sensing fiber from $30^{\circ}C$ to $70^{\circ}C$ at $10^{\circ}C$ intervals was used to measure the distributed temperature. In all tests, the temperature measurement accuracy of the proposed sensor was less than $0.50^{\circ}C$.

• Analytical Science and Technology
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• v.23 no.6
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• pp.524-530
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• 2010

Chloramphenicol is one of the most effective antibiotics for treatment of food-producing animals for typhoid fever. However, it has been reported that it caused severe side effects such as aplastic anemia in human, therefore the use of chloramphenicol for food-producing animal is prohibited by European Union and other countries. In this study, the analytical method using isotope dilution liquid chromatography-mass spectrometry (ID-LC/MS) was established for accurate determination of chloramphenicol in meat. Chloramphenicol was extracted with ethylacetate from porcine and solid phase extraction cartridge was used for enhancing the recovery. The residue of chloramphenicol in porcine was analyzed using the liquid chromatography mass spectrometer (LC/MS) interfaced with electrospray ionization source. Analysis was performed in negative mode with selected reaction mornitoring mode at m/z 321${\rightarrow}$257 of $[M-H]^-$ ${\rightarrow}$ $[M-H-(HCOCl)]^-$ and m/z 326 ${\rightarrow}$ 262 channels for its isotope. The established method was tested using fortified samples at the level of 0.2 1, 10, $25\;{\mu}g$/kg and analytical results agreed with the gravimetrically fortified values within their uncertainties. This method was validated by analyzing a certified reference material, BCR 445, from IRMM (Institute for Reference Materials and Measurement). Our measurement values agreed with the certified value within their uncertainties. The uncertainty of our measured value was much lower than that the certified value from IRMM.

• Journal of the Korean Chemical Society
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• v.62 no.5
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• pp.358-363
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• 2018

The purpose of this study is to show the possibility of using Cu catalyst in removal of $NO_x$ from automobile exhaust which is regarded as the primary source of fine dust PM2.5. The energy and the bond lengths of the three possible structures of Cu-NO complex, which is formed by binding NO molecule to Cu, and the changes in IR and Raman spectra are calculated using MPW1PW91 method on the level of 6-311(+)G(d,p) of basis sets with Gaussian 09 program. As a result, the enthalpy of formation of the Cu-NO complexes are obtained as ${\Delta}H=104.89$, 91.98, -127.48 kJ/mol for the linear, bent, and bridging forms of them, respectively. And the bond lengths between N and O in NO complexes, which becomes longer than NO molecule, indicates that O is easily reduced from Cu-NO. In addition, the Cu-NO complexes using Cu catalyst can be easily measured by infrared or Raman spectroscopy because in the IR and Raman spectra of the NO and Cu-NO complexes the positon and the intensity of bands are definitely different in each vibration mode.

• Geophysics and Geophysical Exploration
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• v.12 no.4
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• pp.361-366
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• 2009

Layered-earth Green's functions in electormagnetic (EM) surveys play a key role in modeling the response of exploration targets. They are computed through the Hankel transforms of analytic kernels. Computational precision depends upon the choice of algebraically equivalent forms by which these kemels are expressed. Since three-dimensional (3D) modeling can require a huge number of Green's function evaluations, total computational time can be influenced by computational time for the Hankel transform evaluations. Linear digital filters have proven to be a fast and accurate method of computing these Hankel transforms. In EM modeling for 3D inversion, electric fields are generally evaluated by the secondary field formulation to avoid the singularity problem. In this study, three components of electric fields for five different sources on the surface of homogeneous half-space were derived as primary field solutions. Moreover, reflection coefficients in TE and TM modes were produced to calculate EM responses accurately for a two-layered model having a sea layer. Accurate primary fields should substantially improve accuracy and decrease computation times for Green's function-based problems like MT problems and marine EM surveys.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.20 no.1
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• pp.12-20
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• 2010

Metamictization and color change in zircons from Cambodia and Tanzania were investigated. Elements analysis to detect radioactivity of elements such as U and Th, and spectroscopic analysis using UV-VIS and Fourier transform infrared spectroscopy were performed. According to the UV-VIS spectroscopic analysis, it was perceived that many and high intense absorption peaks appeared in blue and colorless zircons, while less and low intense absorption peaks appeared in uranium contained green and yellow zircons. It was found that those stones have made progress to the metamictization. After heat treatment, we could detect opposite results. As the results of FTIR spectroscopy analysis, in the metamict green and yellow zircon, it is showed that 3-phonon combination mode bands of $[SiO_4]^{4-}$ internal vibration in the region of 3100~3400 $cm^{-1}$ are broad and some of them disappear. However, the disappeared bands are observed again due to restored crystal lattice by the heat treatment. Also, $U^{4+}$ peaks that can detect the uranium content in zircon appears at near 4800 $cm^{-1}$ in the green and yellow samples. From this investigation, we could observe the metamictization effect and color change in uranium-bearing zircon by heat treatment using spectroscopic analysis.

• Progress in Medical Physics
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• v.15 no.4
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• pp.179-185
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• 2004

To deal with tumor motion from respiration is one of the important issues for the advanced treatment techniques, such as the intensity modulated radiation therapy (IMRT), the image guided radiation therapy (IGRT), the three dimensional conformal therapy (3D-CRT) and the Cyber Knife. Studies including the active breath control (ABC) and the gated radiation therapy have been reported. Authors have developed the device for reducing the respiration effects and the diaphragm motions with this device were observed to determined the effectiveness of the device. The device consists of four belts to immobilize diaphragm motion and the vacuum cushion. Diaphragm motions without and with device were monitored fluoroscopically. Diaphragm motion ranges were found to be 1.14 ～ 3.14 cm (average 2.14 cm) without the device and 0.72～1.95 cm (average 1.16 cm) with the device. The motion ranges were decreased 20 ～ 68.4% (average 44.9%.) However, the respiration cycle was increased from 4.4 seconds to 3.7 seconds. The CTV-PTV margin could be decreased significantly with the device developed in this study, which may be applied to the treatments of the tumor sited diaphragm region.

• Korean Journal of Optics and Photonics
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• v.10 no.4
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• pp.342-347
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• 1999

As the waveguide width and the radius of curvature get smaller for the effort of monolithic fabrication of integrated photonic devices, the waveguide characteristics change significantly according to the change of the waveguide width or the radius of curvature. Especially, variation of the waveguide width due to fabrication process errors induces a phase error for each waveguide from the change of the propagation constant. Therefore, it is important to quantify these variation effects on the device characteristics for the design and fabrication of highly integrated photonic devices. Here, we analyze four different types of waveguides to get general characteristics in propagation constant change by utilizing the effective index method and the analytic solution method. Futhermore, the output characteristics of two AWG(Arrayed Waveguide Grating) devices are simulated by a highly-functional computer code. The simulated results have been found to be similar to the realistic device characteristics. The required fabrication error limit for the ridge-type InP-AWG device should be smaller than 0.02 ${\mu}{\textrm}{m}$ to get better channel crosstalk than-25 dB, while the required fabrication error limit for rib-type silica-AWG devices may be allowed up to 0.1 ${\mu}{\textrm}{m}$ to obtain better crosstalk than -30 dB.

• Korean Journal of Optics and Photonics
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• v.14 no.2
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• pp.142-145
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• 2003

The nonreciprocal phase shift characteristics of infinite slab optical waveguides with magneto-optic materials in the cladding layer was calculated at 1.55 ${\mu}{\textrm}{m}$ for optical isolators. The infinite slab waveguide structures considered in this paper were as follows. rho magneto-optic materials used as a cladding layer were Ce:YIG and LNB(LuNdBi)$_3$(FeAl)$_{5}$)$_{12}$,). Their specific Faraday rotations Θ$_{F}$ are 4500$^{\circ}$/cm, 500$^{\circ}$/cm at wavelength 1.55 ${\mu}{\textrm}{m}$ respectively. The guiding layer with multi-quantum well structure was used, and it consists of 1.3Q and InGaAs. In order to investigate the effect of evanescent field penetrating the cadding, layer, guiding mode characteristics were calculated for the cases when the substrate is InP and air. We calculated the minimum lengths of 90$^{\circ}$ nonreciprocal phase shifters and their optimum guiding layer thicknesses in various optical waveguide structures.res.s.

• Korean Journal of Optics and Photonics
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• v.10 no.3
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• pp.195-200
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• 1999

We made sharp optical fiber tips with less than 100 nm diameter by using the heating and pulling method with a good repetition and fabricated the photon scanning tunneling microscope (PSTM) using constant intensity mode. The 3-dimensional PZT (Piezoelctric transducer) scanner made of a long PZT tube is consisted of three divided parts, that is, a pair of $\pm$ x and a pair of $\pm$y scanning parts and a z scanning part for the fine approach and scanning. The scanning dimension is 1.43 $\mu\textrm{m}$$\times$1.76 $\mu\textrm{m}$. The height of a optical tip to maintain a constant height within $1/{\lambda}_0$ (${\lambda}_0$ is the incident wavelength) from surface of a specimen to a optical tip is controlled automatically by using the electric feedback circuit. The 3-dimensional shape of standing evanescent waves generated on the surface of a dove prism was measured successfully by using the constant intensity mode PSTM.