The Characterization of Re-used Oxide CMP Slurry (재생된 산화막 CMP용 슬러리의 특성에 대한 연구)

• 김명식;김형준;엄대홍;박진구;마석중;류홍기
• • Proceedings of the Materials Research Society of Korea Conference
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  • 2000.11a
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  • pp.52-52
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  • 2000
• PDF

The Growth of $CoSi_2$ Using the Chemical Oxide Depending on the Surface Structure of Si(100) Substrates (Si(200)기판의 표면 구조변화에 따른 화학적 산화막을 이용한 $CoSi_2$의 성장에 관한 연구)

• 허진화;전형탁
• • Proceedings of the Materials Research Society of Korea Conference
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  • 1999.05a
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  • pp.14-14
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  • 1999
• PDF

Fabrication of Ultra Thin Films with (N-docosyl quinolinium)-TCNQ(1:2) Complex by the Langmuir-Blodgett Technique (Langmuir-Blodgett법을 이용한 (N-docosyl quinolinium)-TCNQ(1:2) 착물의 초박막 제작)

• 정순욱;정희걸
• • Proceedings of the Materials Research Society of Korea Conference
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  • 1999.05a
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  • pp.54-54
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  • 1999
• PDF

Voltage Characteristics and annealing effect on Aging characteristics of MgO-CaO Protective Layer for ACPDP (AC PDP용 MgO-CaO 보호막의 전압특성과 시효처리에 미치는 열처리의 효과)

• 이용욱;김영현;박종완;김희재
• • Proceedings of the Materials Research Society of Korea Conference
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  • 2000.11a
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  • pp.115-115
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  • 2000
• PDF

The effect of UV/O$_3$and HF cleaning on the removal of metallic impurity and on the gate-oxide properties ($UV/O_3$과 HF 세정이 금속불순물 제거와 gate 산화막 특성에 미치는 영향)

• 이원준;전형탁
• • Proceedings of the Materials Research Society of Korea Conference
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  • 1996.05a
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  • pp.75-75
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  • 1996
• PDF

A Study on $PZT/BaTiO_3$ Double Layered Structure for MESFET Device (MESFET 소자의 응용을 위한 $PZT/BaTiO_3$ 이중막 구조의 연구)

• 길덕신;이병일;주승기
• • Proceedings of the Materials Research Society of Korea Conference
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  • 1996.05a
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  • pp.19-19
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  • 1996
• PDF

Formation of $CoSi_2$ on Si(100) using Co/Ti Bilayer (Co/Ti 이중막을 이용한 $CoSi_2$의 형성)

• 홍성수;송진태;엄우용;장호정;장지근
• • Proceedings of the Materials Research Society of Korea Conference
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  • 1996.05a
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  • pp.57-57
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  • 1996
• PDF

A study on the characteristics of thin oxides on the Si wafer cleaning condition (Si 기판 세정 조건에 따른 산화막의 특성 연구)

• 전형탁;강응렬;조윤성
• • Proceedings of the Materials Research Society of Korea Conference
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  • 1994.05a
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  • pp.133-133
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  • 1994
• PDF

Fabrication of Ultra Thin Films with (3-docosyl benzimidazolium)-TCNQ Complex by the Langmuir-Blodgett Technique (Langmuir-Blodgett법을 이용한 (3-docosyl benzimidazolium)-TCNQ착체의 초박막제작)

• 정순욱;김성진;황교현
• • Proceedings of the Materials Research Society of Korea Conference
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  • 1994.05a
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  • pp.136-137
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  • 1994
• PDF

The study of the formation of Co$Si_{2}$through the thin oxide interlayer of Si(100) (Si(100)의 얇은 산화막을 통한 Co$Si_{2}$형성에 관한 연구)

• 신영철;전형탁
• • Proceedings of the Materials Research Society of Korea Conference
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  • 1997.05a
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  • pp.13-13
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  • 1997
• PDF

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