• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07b
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• pp.1203-1206
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• 2004

마이크로 컬럼은 차세대 리소그라피 기술의 하나로 마이크로 컬럼의 기능이 기존의 전자빔 컬럼을 능가하여 주목을 받는다. 초소형 전자빔 컬럼은 기존의 전자빔 컬럼과 비교하여 수차, 렌즈의 크기 및 원형에 성능이 보다 민감하게 반응하므로 정확한 정렬과 가공 기술은 초소형 전자빔 마이크로 컬럼의 성능에 매우 중요하다. 그러나, 기준치 piezoelectric transducer (PZT)나 scanning tunneling microscopy (STM)을 이용한 정렬 기술은 매우 복잡하고 어려운 단점이 있다. 본 연구에시는 레이저 회절 패턴방식과 레이저 정밀 가공으로 실리콘 렌즈와 파이렉스 spacer를 정확하게 교대로 조립하였으며, 이 방법으로 완성된 마이크로 컬럼의 STEM동작을 조사하였다.

• Journal of the Korean Chemical Society
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• v.39 no.11
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• pp.863-868
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• 1995

We have prepared microcolumns made of stainless steel tubing, glass-lined stainless steel tubing, and silica-lined stainless steel tubing and examined their performances comparatively. The length of columns was fixed as 30 cm, and the I.D.'s, either 1 mm or 0.5 mm. Octadecyl bonded silica paticles $(5\mu)$ were used as the stationary phases. p-Nitroaniline, N,N-dimethyl-o-nitro-p-toluidine,and ethylbenzene were used as the test solutes. The glass-lined or silica-lined stainless steel columns showed better performances than the plain stainless steel column did. The number of theoretical plates over 10,000 were obtained even for the 0.5 mm I.D. (30 cm long) column as long as the glass-lined stainless steel tubing was used.

• Analytical Science and Technology
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• v.12 no.2
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• pp.89-93
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• 1999

In this study, conductivity cell and suppressor for micro-column ion chromatography were developed to analyze ions in small columns of samples. With a capillary column, the flow rate of the mobile phase is so small (usually $5{\sim}20{\mu}L/min$) that the usual conductivity cell can not be used. Therefore, we developed a new type of conductivity cell and suppressor which have small inner volumes. The conductivity cell was made with two Pt hypodermic needles (i.d. 0.010 mm) which are slightly separated (about $2{\mu}m$), and the suppressor was made of Nafion tubings. When several anions(fluoride, nitrite, nitrate, chlorate) were analyzed using developed conductivity cell and suppressor, a good chromatogram was obtained.

• Journal of Korean Electronics
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• v.11 no.5
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• pp.32-34
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• 1991

• Journal of the Korean Institute of Telematics and Electronics D
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• v.35D no.9
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• pp.48-53
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• 1998

We have fabricated electrostatic lens with novel structure by mixing surface- and bulk-micromachining technology. Polysilicon was used for both the structure and sacrificial layer, and the structure layer was passivated with thermal oxide in order not to be attacked during the silicon wet etching. Compared with conventional electrostatic lens used in microcolumn, this device has the advantages in ; 1) hole alignment, throughput, reliability, damage of lens, 2) the possibility of arrayed lithography through the integration of microcolumn.

• Journal of the Korean Chemical Society
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• v.39 no.6
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• pp.471-476
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• 1995

• Information Display
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• v.21 no.5
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• pp.26-33
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• 2020

• Journal of the Korean Chemical Society
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• v.40 no.6
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• pp.462-465
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• 1996

• Journal of the Korea Academia-Industrial cooperation Society
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• v.12 no.4
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• pp.1803-1811
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• 2011

We have analyzed the electrical defect detection mechanism using low energy microcolumn on the TFT substrate for TFT-LCD. In this study, we have acquired the SEM images of the various pixel defects for 7-inch TFT substrate by scanning of low energy electron beam in the high vacuum chamber. Futhermore, we have interpreted the defect detection mechanism through the correlations between the SEM images and electrical behaviors of the defective pixels. As a result, we obtained consistent results as the follows. We can confirm that the SEM images using low energy electron beam are significantly affected by the space charge effect.

• Journal of the Korean Chemical Society
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• v.25 no.4
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• pp.275-282
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• 1981

A simple semiquantitative procedure was developed for the determination of sub-ppm level of chromium(VI) in aquatic samples by using an analytical micro-column packed with diphenylcarbazide(DPC) gel beads. DPC gel beads were prepared by swelling XAD-2 resin(115∼150 mesh in dry condition) in ethanol for 10min, packing into a glass column(1.5 mm bore, 65nm length) and adsorbing 1ml of ethanol solution of $2{\times}10^{-3}M$ DPC for 20min at room temperature. When 0.5ml of ethanol solution containing chromium(VI) was passed through the DPC gel column for 40min, the original white color of the reagent gel turned to red-violet from the up-stream of the column. As the length of colored band was proportional to the total amount of chromium(VI) in the sample solution passed through the column, the concentration of chromium(VI) could be determined from the calibration line which had been prepared by using the standard solution. Chromium(VI) ion as small as from 0.1 to 0.8 ppm could be determined with ${\pm}5{\sim}{\pm}15{\%}$ relative errors. Since other interfering cations were few, 100-fold excess of Fe(III), 50-fold excess of Cu(II) could be masked with EDTA. This method was successfully applied to the analysis of chromium(VI) in industrial effluents.