• Journal of the Korean Society for Precision Engineering
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• v.24 no.1 s.190
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• pp.47-56
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• 2007

Recently, demands on mechanical micro machining technology have been increased in manufacturing of micro-scale precision shapes and parts. The main purpose of this research is to verify the accuracy and cost efficiency of the mechanical micro machining. In order to measure the precision and feasibility of mechanical micro machining, various micro features were machined. Aluminum molds were machined by a 3-axis micro stage in order to fabricate microchips with $200{\mu}m$ wide channel for capillary electrophoresis, then the same geometry of microchip was made by injection molding. To evaluate the cost efficiency of various micro manufacturing processes, cost estimation for mechanical micro machining was conducted, and actual costs of microchips fabricated by mechanical micro machining, injection molding, and MEMS (Micro electro mechanical system) were compared.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.300-300
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• 2013

세계전자제품의 부품산업은 21세기 정보화 사회와 함께 IT 산업에서 급성장으로 인해 부품의 소형화, 경량화, 친환경화가 요구되고 있다. IT 산업에서 리드스크류(Leadsrew)는 마이크로 구동부품중의 이송장치를 구성하는 핵심 부품으로 탄소강과 합금강 및 스테인레스강 등이 사용되고 있다. 탄소강은 성형 가공성과 원가 절감에 최적의 소재로서 낮은 표면 경도로 인한 내마모성 저하와 부식 분위기에서의 내식성이 떨어지는 단점을 가지고 있다. 본 연구에서는 탄소강(S20C:${\oint}30{\times}h10$)을 이용하여 플라즈마 질화 표면처리를 통해 표면경도와 내마모성 향상 및 내식성을 높이는 연구를 수행하였다. 연구 방법으로 플라즈마 연질화 공정과 Post Oxidation 공정을 개발하였고, 질화 처리된 시험편에 대해 마이크로 비커스 경도, OEM&SEM, XRD 분석 및 염수분무(KS D 9502) 시험으로 특성을 분석하였다. 연구 결과로 탄소강(S20C)은 마이크로 비커스 경도 분석으로 표면 경도가 600Hv0.025 이상과 염수분무 시험으로 내식성은 24시간 이상의 결과를 얻었다.

• Transactions of the Korean hydrogen and new energy society
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• v.16 no.4
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• pp.350-355
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• 2005

소형 PEMFC(Proton Exchange Membrane Fuel Cell)는 전기를 만들기 위해서 고순도의 수소를 필요로 한다. 각각의 마이크로 성형된 금속박판(스테인레스 스틸, 알루미늄)을 진공 브레이징법으로 접합하여 수소공급용 소형 개질기를 제작하였다. 마이크로 채널의 내부는 졸-겔법(스테인레스 스틸)과 양극산화법(알루미늄)으로 촉매를 지지하기 위한 다공성 $Al_2O_3$ 층을 형성시켰다. 스테인레스 스틸 박판은 에칭과 브레이징에 유리하였으나, 표면산화층 코팅을 균일하게 하여 안정적인 촉매반응을 유도하기 위한 균일한 표면 산화층 형성이 힘들었다. 반면 알루미늄 박판은 표면 산화층 형성이 상대적으로 용이했으며, 촉매를 상하지 않는 낮은 온도에서의 적층이 가능했다.

• Journal of the Korean Society for Precision Engineering
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• v.32 no.9
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• pp.793-798
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• 2015

This study investigates the effects of the size of copper sheets on the plastic deformation behavior in a microscale deep drawing process. Tensile tests are conducted on the copper sheets to study the flow stress of the materials with different grain sizes before carrying out the microscale deep drawing experiments. After the tensile tests, a novel desktop-sized microscale deep drawing system is used to perform the microscale deep drawing process. A series of microscale deep drawing experiments are subsequently performed, and the experimental results indicate that an increase in the grain size results in the reduction of the deformation load of the copper sheets due to the effects of the surface grain. The results also show that the blank holder gap improves both the formability of copper sheets and the material flow.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.6
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• pp.193-200
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• 2007

Micro forming is a suited technology to manufacture very small metallic parts(several $mm{\sim}{\mu}m$). Al5083 superplastic alloy with very small grains has a great advantage in achieving micro deformation under low stress due to its relatively low strength at a specific high temperature range. Micro forming of $Zr_{62}Cu_{17}Ni_{13}Al_8$ bulk Metallic glass(BMG) as a candidate material for this developing process are feasible at a relatively low stress in the supercooled liquid state without any crystallization during hot deformation. In this study, the micro formability of Al5083 superplastic alloy and bulk metallic glass, $Zr_{62}Cu_{17}Ni_{13}Al_8$, was investigated with the specially designed micro vibration forming system using pyramid-shape, V-shape and U-shape micro die pattern. With these dies, micro vibration forming was conducted by varying the applied load, time. Micro formability was estimated by comparing the hight of formed shape using non-contact surface profiler system. The vibration load effect to metal flow in the micro die and improve the micro formability of Al5083 superplastic alloy and $Zr_{62}Cu_{17}Ni_{13}Al_8$ bulk Metallic glass(BMG).

• Journal of the Korean Society for Precision Engineering
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• v.29 no.11
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• pp.1221-1227
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• 2012

As demands on micro-products increase significantly with raising functional integration and increasing complexity, microfoming attracts a lot of attention in the manufacture of micro-products. Since the conventional big forming systems are not adequate to achieve sufficient tolerances of micro-scale parts, it is necessary to reduce the scale of the forming equipment and devices. In addition, understandings on the size effects, which exist in the material behavior and process characterization of microforming processes, need to be expanded. In this study, a miniaturized forming system based on the ball screw and servo motor actuator was developed for the efficient micro-parts production. In addition, tensile tests and cylindrical upsetting experiments were performed to evaluate the performance of the microforming system and to investigate the flow stress and friction size effects in microforming processes.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.10
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• pp.1471-1478
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• 2010

Microforming processes have recently attracted considerable attention from industry and academia since they enable the production of microscale parts using various materials at a high production rate, minimize material loss, and provide parts with excellent mechanical properties. However, for successful development and applications of the microforming process it is critical to take the tribological size effect into consideration because previous studies have shown that traditional friction models for macroscale forming generate significantly erroneous results in the case of microforming. In this paper, we performed scaled ring compression experiments to investigate the tribological size effect of aluminum and brass materials in microforming. The sensitivity of the interfacial friction to the deformation characteristics of the ring was quantitatively analyzed by the finite element analysis. In addition, a friction model based on slip line field and upper boundary techniques was used to theoretically explain the friction mechanism in microforming.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.6-6
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• 2004

마이크로 / 나노 바이오 기술은 생명공학 및 의약기술의 발전을 가능하게 하고 생체시스템 관련 연구를 위한 마이크로 및 나노 기기를 제작할 수 있게 함으로써 새로운 기술적 영역으로 부각되고 있다. 이러한 기술은 1990년대 초에 랩온어칩(Lab-on-a-chip)의 개발을 가능하게 하였다. 랩온어칩은 실험실(Lab)을 하나의 소자(Chip)에 올려놓는다(On)는 말로 쉽게 설명된다. 즉, 생물학이나 생화학 실험실에서 주로 연구되는 단백질, 세포 등 인체에 영향을 주는 다양한 물질들이 체내외에서 나타내는 반응을 쉽게 검출, 분석하는 일련의 과정들을 빠르고 정확하게 수행할 수 있도록 도와주는 도구인셈이다.(중략)

• Journal of the Korean Society for Precision Engineering
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• v.21 no.9
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• pp.182-187
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• 2004

As it is difficult to construct a micro-fluidic system composed of micro-mixers, micro-channels and/or micro-chambers in a single process, an assembly process is typically used. The assembling and bonding of micro-parts, however, introduces other problems. In this work, a virtual assembly process was developed that can be used to design various micro-systems before actual fabrication commences. In the process, the information required for the micro-stereolithography process is generated automatically. Consequently, complex micro-fluidic systems can be fabricated in a single process, thereby avoiding the need fur additional assembly or bonding processes. Using the developed process, several examples were fabricated.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.29 no.10 s.241
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• pp.1298-1306
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• 2005

In this paper, Part II, we realized the Serpentine Laminating Micromirer (SLM) which was proposed in the accompanying paper, Part I, by means of the injection molding process in mass production. In the SLM, the higher level of chaotic mixing can be achieved by combining two general chaotic mixing mechanisms of splitting/recombination and chaotic advection by the successive arrangement of 'F'-shape mixing units in two layers. Mold inserts for the injection molding process of the SLM were fabricated by SU-8 photolithography and nickel electroplating. The SLM was realized by injection molding of COC (cyclic olefin copolymer) with the fabricated mold inserts and thermal bonding of two injection molded COC substrates. To compare the mixing performance, a T-type micromixer was also fabricated. Mixing performances of micromixers were experimentally characterized in terms of an average mixing color intensity of a pH indicator, phenolphthalein. Experimental results show that the SLM has much better mixing performance than the I-type micromixer and chaotic mixing was successfully achieved from the SLM over the wide range of Reynolds number (Re). The chaotic micromixer, SLM proposed in this study, could be easily integrated in Micro-Total-Analysis- System , Lab-on-a-Chip and so on.