• 정보저장시스템학회:학술대회논문집
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• 2005.10a
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• pp.17-21
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• 2005

High-density image sensors have microlens array to improve photosensitivity. It is conventionally fabricated by reflow process. The reflow process has some weak points. UV imprinting process can be proposed as an alternative process to integrate microlens array on photodiodes. In this study, the UV imprionting process to integrate microlens array on image sensor was developed using W transparent flexible mold and simulated image sensor substrate. The UV transparent flexible mold was fabricated by replicating master pattern using siliconacrylate photopolymer. The releasing property and shape accuacy of siliconacrylate mold was analysed. After UV imprinting process, replication quality and align accuracy was analysed.

• Transactions of the Society of Information Storage Systems
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• v.2 no.2
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• pp.91-95
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• 2006

High-density image sensors rave microlens array to improve photosensitivity. It is conventionally fabricated by reflow process. The reflow process has some weak points. UV imprinting process can be proposed as an alternative process to integrate microlens array on photodiodes. In this study, the UV imprionting process to integrate microlens array on image sensor was developed using UV transparent flexible mold and simulated image sensor substrate. The UV transparent flexible mold was fabricated by replicating master pattern using siliconacrylate photopolymer. The releasing property and shape accuacy of siliconacrylate mold was analysed. After UV imprinting process, replication quality and align accuracy was analysed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.351-354
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• 2004

This work presents a simple and cost-effective approach for maskless fabrication of positive-tone silicon master for the replica molding of hyperfine elastomeric channel. Positive-tone silicon masters were fabricated by a maskless fabrication technique using the combination of nanoscratch by Nanoindenter ⓡ XP and XOH wet etching. Grooves were machined on a silicon surface coated with native oxide by ductile-regime nanoscratch, and they were etched in a 20 wt％ KOH solution. After the KOH etching process, positive-tone structures resulted because of the etch-mask effect of the amorphous oxide layer generated by nanoscratch. The size and shape of the positive-tone structures were controlled by varying the etching time (5, 15, 18, 20, 25, 30 min) and the normal loads (1, 5 mN) during nanoscratch. Moreover, the effects of the Berkovich tip alignment (0, 45$^{\circ}$) on the deformation behavior and etching characteristic of silicon material were investigated.

• Journal of Sensor Science and Technology
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• v.10 no.6
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• pp.279-285
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• 2001

In this study, we fabricated the microlens array using very simple and economical method which used Si molds made by bulk etching in HNA and spreaded SU-8 on top of the Si mold. And, we developed fabrication conditions for high fill factor microlens array that is $45{\mu}m$ in height and $150{\mu}m$ in diameter. This microlens array can be used for imaging system like IR detector or projection display. It is expected that it can improve the characteristics of these devices.

• Journal of the Korean Vacuum Society
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• v.19 no.4
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• pp.300-306
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• 2010

Superhydrophobic micro-nano hybrid structures were fabricated by reactive ion etching of hydrophobic polymer micro patterns using gold nanoparticles as etch masks. Micro structures of perfluoropolyether bisurethane methacrylate (PFPE) were prepared by soft-lithographic technique using polydimethylsiloxane (PDMS) molds. Water contact angles on the surfaces of various PFPE micro structures and corresponding micro-nano hybrid structures were compared to examine the effects of micro patterning and nanostructure formation in the manifestation of superhydrophobicity. The PFPE micro-nano hybrid structures exhibited a very stable superhydrophobicity, while the micro-only structures could not reach the superhydrophobicity but only showed the unstable hydrophobicity.

• Journal of Korea Foundry Society
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• v.41 no.2
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• pp.127-131
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• 2021

Based on its good compatibility with high-temperature environments, the Ti-48Al-2Cr-2Nb alloy is used for high-temperature materials of industrial equipment. In this study, a Ti-48Al-2Cr-2Nb alloy turbocharger turbine wheel was fabricated by a vacuum centrifugal casting method. The conditions that prevent misrun defects of the turbocharger turbine wheel blade from centrifugal casting using alumina molds were investigated. The microstructure of the alloy prepared by vacuum centrifugal casting was studied by means of optical microscopy (OM), with a micro-Vickers hardness analyzer (HV), by X-ray diffraction (XRD) and by SEM-EDS. The HV and SEM-EDS examinations of the as-cast Ti-48Al-2Cr-2Nb alloy showed that the thickness of the oxide layer (α-case) was typically less than 50 ㎛. At a high preheating temperature of 1,100℃, a moderate RPM of 260, and with an alumina mold with a large gate size, there were almost no misrun defects. Therefore, it was confirmed that a Ti-48Al-2Cr-2Nb alloy turbocharger turbine wheel with fewer misrun defects could be achieved through a high preheating temperature, a moderate RPM, a large gate size and an alumina mold to suppress the formation of alpha-case components.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.10a
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• pp.323-324
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• 2012

• Journal of the Microelectronics and Packaging Society
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• v.14 no.4
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• pp.1-7
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• 2007

Nanoimprint lithography (NIL) is an emerging technology enabling cost-effective and high-throughput nanofabrication. To successfully imprint a nano-sized pattern, the process conditions such as temperature, pressure, and time should be appropriately selected. This starts with a clear understanding of polymer material behavior during the NIL process. In this work, the squeezing of thin polymer films into nanocavities during the thermal NIL has been investigated based upon a two-dimensional viscoelastic finite element analysis in order to understand how the process conditions affect a pattern quality. The simulations have been performed within the viscoelastic plateau region and the stress relaxation effect has been taken into account.

• KSBB Journal
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• v.21 no.4
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• pp.273-278
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• 2006

The noble method of hybrid agarose gel microstamp fabricated by replica molding against PDMS master to make bacteria patterns on agar surface was presented. After the fabricated hybrid agarose gel microstamp was inked with E. coli, we could obtain 2 dimensional bacterial arrays with $50{\mu}m$ circular spots. And the various shaped patterns based on experimental design were easily generated. The analysis of mean fluorescent signal was showed that bacterial pattern have high contrast between spots and background and homogeneity of pattern. Our proposed method solved the problem of wetting and handling with small soft agarose gel microstamp when bacteria were used for ink. The agarose gel stamp provides appropriate environment to inked bacteria, which is essential technology for cell patterning with high retaining viability during the patterning process. This method is reproducible, convenient, rapid, and could be applied to screening system, study of cell-surface interaction, and microbial ecology.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.11a
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• pp.69-72
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• 2007

Cellulose is a beneficial material that has low cost, lightweight, high compatibility and biodegradability. Recently electroactive paper (EAPap) on cellulose base was discovered as a smart material and actuator through ion migration and piezoelectric effect. Furthermore cellulose has a potentiality to apply the display material, because of its high reflectivity, flexibility and high transmittance. The various shapes and height patterns of the Cellulose acetate (CA) solution, such as circle and honeycomb patterns, were fabricated and observed by field emission scanning electron microscope (FESEM, S4300 Hitachi). The resulting pattern showed uniform size in the large area without defect. After stretching the CA film with saponification process in the sodium methoxide in methanol solution, Most of the compositions become one directional ordered nanofibers below 50nm.