• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2001.11a
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• pp.41-47
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• 2001

폴리머 박막은 반도체 패키징, MEMS 구조물은 물론 MCM-D 등의 기술에도 널리 쓰이고 있다. 또한 대부분 폴리머/금속의 다층구조의 형태를 띠고 있어 이 상태의 기계적 특성의 이해는 더욱 중요하다. 본 연구에서는 폴리머 박막의 기계적 특성을 측정하기 위한 새로운 방법이 제안된다. 제안된 방법은 최근 발달된 마이크로머시닝기술을 사용하여 구현된 공진형 스트링구조를 이용하게된다. 폴리머 기계적 특성치와 스트링의 공진특성은 서로 상관 관계를 갖게되며 이러한 공진특성의 측정은 기계적 특성의 실시간 관찰을 가능하게 해준다. 본 논문에서는 공진형 스트링을 이용하여 폴리이미드의 잔류음력과 폴리이미드/금속간의 접착 내구성을 정량화하는 방법을 제안한다. 제안된 측정방법은 단순히 스트링구조 뿐만 아니라 다른 기계적 구조에도 응용이 가능하다.

• Proceedings of the KSME Conference
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• 2003.11a
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• pp.1787-1792
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• 2003

Recently with the development of semiconductor technology, the miniaturization of parts and products as well as their high precision is required. In addition, as the national competitiveness is increasingly affected by the development of the micro parts through micro machining technology, the study of the micro machining technology is being conducted in many countries. The goal of this study is to fabricate micro tools under the size of $20{\mu}m$ and to machine micro holes using them. The fabrication is done by grinding and the application of ELID to the grinding wheel. The surface roughness of the micro tools is measured to evaluate the study.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.2
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• pp.211-218
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• 2002

It has been investigated for the temperature profile in a planar evaporator of micro-cooler subject to a uniform heat flux prior to tole initiation of boiling. The results of the analysis allow for the determination of applied power levels fur which nucleation is likely to occur only within the vapor grooves of the evaporator while maintaining subcooling in the liquid core, thereby increasing the likelihood of a successful startup. Also, limits are fecund for which additional increases in the applied heat flux do not increase the temperature difference between the vapor grooves and the wick-liquid core interface. This analysis is appropriate for the microscale evaporators of micro-cooler during a fully-flooded startup as well as starter pump designs and micro-CPLs(capillary pumped loops). The results are useful in the initial basic design of microscale heat transfer devices.

• 기계와재료
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• v.19 no.3 s.73
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• pp.41-49
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• 2007

• 기계와재료
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• v.16 no.1 s.59
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• pp.50-59
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• 2004

• 기계와재료
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• v.18 no.1 s.67
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• pp.56-62
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• 2006

• Transactions of the Korean Society of Mechanical Engineers B
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• v.35 no.10
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• pp.1041-1046
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• 2011

Micro shockwaves are induced in laser shock peening and their effect on metal samples is presented. Laser shock peening produces maximized internal compressive stress on metal surfaces. This research evaluated the effects of micro shockwaves from laser shock peening with a pulsed Nd:YAG laser on steel samples, through the analysis of the mechanical properties of the samples. In the experiments, a piezo material was applied to measure the micro shockwaves and the hardnesses and micro tensile strengths of the samples were evaluated.

• Korean Chemical Engineering Research
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• v.59 no.3
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• pp.429-434
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• 2021

The feasibility of lecithin as a material for dissolving microneedles to improve skin permeability of drugs and the effect of the composition of lecithin on the mechanical strength, solubility, and skin permeability of rhodamine B (RhB) of the dissolving microneedles were investigated. Dissolving microneedles with needles of uniform shape and size were fabricated with the mold made using the laser-writing technique, simpler and more efficient method compared to the photolithography method, the conventional method to fabricate the microneedle mold. The composition of lecithin in the microneedle affected the mechanical strength and solubility of the needle thus, the mechanical strength of the needle increased as the composition of lecithin in the needle increased, resulting in improving the skin permeability of RhB contained in the microneedles. When comparing the microneedles containing same composition of amylopectin (AP), the skin permeability of RhB of the microneedles containing lecithin was higher. These results indicate that lecithin can be used as a material for dissolving microneedles and the skin permeability of the microneedle could be controlled by changing the composition of lecithin.

• Journal of the KSME
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• v.24 no.6
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• pp.422-427
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• 1984

최근의 높은 생산성을 향한 NC 혹은 CNC 공작기계를 이용한 기계가공의 자동화 및 작업 공간 내부에서의 오차측정이라는 시대적 조류와 함께, 기계가공 오차의 보상 제어, 혹은 형상 및 치 수의 적응 제어(Geometric Adaptive Control, GAC)는 이미 여러 선진국가에서 주목을 받아 왔고, 병기 공학을 포함한 여러 분야에서 정밀도의 향상에 대한 요구는 높아만 가고 있어 이 방향에 대한 계속적인 연구가 요망된다. 더군다나 전자 및 광전자적인 계측 제어 기구의 발달과, 저렴 하고 높은 성능의 마이크로 컴퓨터의 등장으로 GAC를 통한 정밀도 향상은 더욱 가능하여졌다.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.34 no.9
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• pp.851-857
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• 2010

In this study, an experiment was performed to obtain the optimum design of a passive micromixer for effective mixing by using a microsized device and rectangular obstacles; a low Reynolds number was maintained in the microchannel. The experiment was carried out by varying the number, size, and location of the rectangular obstacles. Further, the Y-channel's shape was optimized for maximizing the mixture ratio, which has limit qualification that an allowed value of pressure drop. The increase in the efficiency of mixing was observed to be greater than that in the case of circular obstacles by approximately 2.5%.