• Applied Chemistry for Engineering
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• v.9 no.1
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• pp.94-100
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• 1998

Methane, the major constituent of natural gas, had been converted to higher hydrocarbons by a microwave plasma. The yield of C2+ product could be increased from 29.2% to 42.2% with increasing plasma power(40~120 watt) and decreasing flow rate(40~5 mL/min) of methane. With catalyst, the selectivities of ethylene and increased while yield of C2+ remaining constant. Among various catalysts, Fe catalyst showed the highest ethylene selectivity of 30%. A natural gas could produce more C2+ than a pure methane. This is due to high reactivity of ethane and propane in the natural gas.

• Journal of the Korean Vacuum Society
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• v.10 no.4
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• pp.424-430
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• 2001

An electron Boltzmann equation is solved numerically to calculate the electron energy distribution functions in plasma discharge which is generated by radio-frequency (RF) and microwave frequency electric field. The maintenance field strengths are determined self-consistently by solving the homogeneous electron Boltzmann equation in the Lorentz approximation expressed by 2nd order differential equation and an additional particle balance equation expressed by integro-differential equation. By using this numerical code, the electron energy distribution functions in argon discharge are calculated in the range from RF to microwave frequency. The influence of frequency of the HF electric field on the electron energy distribution functions and ionization rate are investigated.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2009.05a
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• pp.160-161
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• 2009

마이크로웨이브 플라즈마 화학기상증착(MPCVD) 시스템을 이용하여 실리콘 웨이퍼 위에 나노결정질 다이아몬드 박막을 증착하였다. 공정압력, 마이크로웨이브 전력, Ar/$CH_4$ 조성비를 일정하게 놓고 기판온도를 $400^{\circ}C$ 및 $600^{\circ}C$, 증착시간을 0.5, 1, 4시간으로 변화시켜 박막의 성장 과정을 관찰하였다. 성장 초기에 약 30 nm 크기의 나노 결정립으로 이루어진 구형 입자가 형성되어 시간의 경과에 따라 입자들이 성장하고 4시간 이후에는 입자들이 서로 붙어 완전한 박막을 형성함을 관찰하였다. 같은 증착시간에서 기판온도가 $400^{\circ}C$에서 $600^{\circ}C$로 증가함에 따라 다이아몬드 입자의 크기가 증가하였다. 시간의 경과에 따라 기판 위에서 입자들이 차지하는 면적의 비율은 증가하였다.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2013.05a
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• pp.124-124
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• 2013

마이크로웨이브 플라즈마 화학기상증착(MPCVD) 시스템을 이용하여 서로 다른 기판(Si,SiC,W,Ti) 위에 나노결정질 다이몬드 박막을 증착하였다. 공정압력, 마이크로웨이브 전력, $Ar/CH_4$,기판온도를 일정하게 놓고, 증착시간을 0.5,1,2h으로 변화시켜 박막의 성장과정을 관찰하였다. 기판 종류에 따라 성장 초기에 형성되는 입자의 시간이 달랐으며, 2h 이후에는 입자들이 서로 붙어 완전한 박막을 형성함을 관찰하였다. 같은 증착시간에서 서로 다른 기판을 비교하였을 때, W > (Si, SiC) > Ti 기판의 순이었다.

• Analytical Science and Technology
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• v.16 no.2
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• pp.152-158
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• 2003

This study was conducted to evaluate two sample digestion procedures and instrumental determination parameters for analysis of lead in bone. Amputated human legs were treated by acid digestion or microwave dissolution prior to spectrometric analysis. Inductively coupled plasma mass spectrometry (ICP-MS) and graphite furnace atomic absorption spectrometry (GF-AAS) were used for determining bone lead levels. Recovery efficiencies using standard reference material from acid digestion measured by ICP-MS were in good agreement with those of the certified value, but in cases of acid digestion by GF-AAS and microwave digestion by both two methods, recovery underestimated and overestimated, respectively. For the bone samples, the lead concentrations obtained by ICP-MS after acid digestionwere in good agreement with those by GF-AAS (correlation coefficient = 0.983), but GF-AAS gave systematically higher values than ICP-MS. While a good agreement between two analytical methods after microwave digestion was also obtained (correlation coefficient = 0.950), bone lead concentrations from microwave were relatively higher than those from acid digestion. In conclusion, the use of the simple nitric acid digestion procedure at an ambient temperature coupled to ICP-MS seems to be efficient for the determination of lead in bone in consideration for both the convenience and validity.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.119.2-119.2
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• 2014

대기환경 규제가 강화됨에 따라 기존 기술 대비 획기적인 성능과 가격 경쟁력을 갖춘 새로운 대기환경 기술에 대한 수요가 지속적으로 요구되고 있다. 특히 최근에는 종래의 분진, 이산화황가스 및 질소산화물에 대한 규제와 더불어 지구온난화가스인 이산화탄소, 과불화화합물 (Perfluorocompounds, PFCs), 메탄가스 등에 대한 규제가 강화되면서 이에 대응할 수 있는 대기환경 기술의 수요가 늘고 있다. 한국기계연구원에서는 지난 10 여 년간 지구온난화가스이자 난분해성 가스인 메탄 및 PFCs 가스를 플라즈마 화학반응 공정을 통해 분해하는 연구를 수행해왔으며, 이를 바탕으로 산업에 적용할 수 있는 기술개발도 병행하여 수행하였다. 현재 개발된 기술 가운데 일부는 산업에 실제로 적용되고 있으며, 이를 통해 산업현장에서는 지구온난화가스는 물론 질소산화물과 같은 다른 종류의 규제물질도 동시에 저감할 수 있었다. 본 발표에서는 플라즈마를 활용하여 난분해성 가스인 메탄과 PFCs를 분해하는 기술의 특성을 살펴보았으며, 이를 바탕으로 산업현장에 적용된 대기환경기술이 어떻게 활용되고 있는지를 소개하고 있다. 본 발표에서 다루게 될 플라즈마 발생기술은 펄스 코로나, 유전체장벽방전, 마이크로웨이브 토치, 아아크 토치 등이며, 플라즈마 발생조건은 수 torr 이하의 진공조건부터 및 대기압 조건에 이르고 있다.

• Journal of the Korean Ceramic Society
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• v.26 no.3
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• pp.331-340
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• 1989

In this study, it was tried to deposit diamond films from a mixture of CH4 and H2 by the microwave plasma chemical vapor deposition(MWCVD). The MWCVD process was designed and set up from the 2.45GHz microwave generator. And the diamond film was successfully deposited on silicon wafers from the mixture of methane and hydrogen. The microstructures of the deposited diamond films were studied by using the following deposition variables : (a) methane concentration(0.6-10%), (b) reaction pressure(10-100torr), and (c) the substrate temperature(450-76$0^{\circ}C$).

• Aerospace Engineering and Technology
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• v.4 no.2
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• pp.60-64
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• 2005

STSAT-2 will demonstrate the scientific mission(acquisition of brightness temperature of the earth at 23.8 GHz and 37 GHz) and spacecraft technologies(laser ranging, frame-type satellite structure, Dual-head star tracker, CCD sun sensor, pulsed plasma thruster, etc.). In this paper STSAT-2 satellite system is described. It includes the definition of the system and the overview of payloads and BUS.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.4 no.1
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• pp.92-99
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• 1994

Diamond thin film was deposited on n type (100) Si substrate by MPECVD(Microwave plasma Enhanced Chemical Vapor Deposition). For the increase in nucleation density of diamond, Si substrate was pretreated by diamond powder or negative bias voltage was applied to the substrate during the initial deposition. In the case of retreated Si substrate, the diamond thin film quality was enhanced with increasing the total pressure in the range of 20~150 Torr. For the negative bias voltage, the formation condition of the diamond was seriously affected by $CH_4$ concentration and total pressure. The formation condition will be discussed with electrical current of substrate generated by plasma ions which depend on $CH_4$concentration, bias voltage, and total pressure.

• Journal of Hydrogen and New Energy
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• v.23 no.1
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• pp.93-99
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• 2012

The investigation of clean and environment-friendly coal utilization technology is actively progressed due to high oil price and serious climate change caused by greenhouse gas emissions. In this study, the plasma gasification was performed using a 6kW microwave plasma unit under various reaction conditions: the particle sizes of coal ($45{\mu}m-150{\mu}m$), $O_2$/fuel ratio (0 - 1.3), and steam/fuel ratio (0 - 1.5). The $H_2$ composition decreases with decreasing coal particle size. With increasing $O_2$/fuel ratio, the $H_2$ composition in the syngas decreased while the $CO_2$ composition increased. As the steam/fuel ratio increased from 0 to 1.5, the $H_2$ composition in the syngas increased while the $CO_2$ composition decreased. From the results, it was proven that the variation of syngas composition greatly affected by $O_2$/fuel ratio than steam/fuel ratio. The $H_2$ composition in the syngas, carbon conversion, and cold gas efficiency increased with increasing plasma power.