• Title/Summary/Keyword: 마이크로센서

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Novel Fiber Optic Microbend Sensor for the Measurement of Cable's Curvature (케이블의 곡률 측정을 위한 새로운 형태의 광섬유 마이크로벤드 센서 개발)

  • Oh, Sang-Woo;Choi, Hyeuk-Jin
    • Journal of the Korean Society for Marine Environment & Energy
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    • v.12 no.4
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    • pp.289-295
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    • 2009
  • In this paper the measurement method of cable's curvature using fiber optic microbend effect and its experimental results are presented. The novel structure of fiber optic microbender, which can generate microbend effect on the optical fiber in the case of both directional bending of cable, was designed. Through the experiment using suggested sensing system, the increasing trend of attenuated optical power was found out under the range from $0.1\;cm^{-1}$ to $0.4\;cm^{-1}$ of curvature. To the multi and distributed measurement, using OTDR, the scattered optical pulses at the bending points are measured and compared with the result which was measured by optical power meter.

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Automatic Control System in Room using Zigbee Sensor and Microcontroller Chip (무선센서와 마이크로 컨트롤러를 이용한 실내 환경 자동 제어 시스템)

  • Jean, Byoung-Chan;Choi, Gyoo-Seok
    • The Journal of the Institute of Internet, Broadcasting and Communication
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    • v.9 no.5
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    • pp.147-154
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    • 2009
  • Lately, superhigh speed network infra is developing with the fast speed, is evolved by step that existent appliances are digitalised and appliances are become remote control by being gear to network. Also, gearing in Home network and superhigh speed network infra, control appliances in Internet and research that do monitering is proceed. Therefore, describe about indoor environment automatic control system that use Wireless sensor and Microcontroler in this paper. Because using that electric power, Zigbee sensor and Wireless module, embodied system that measured in the room temperature and use ATmega128 Microcontroler and use each device (temperature, illumination, humidity) back in house and control humidifier, electric fan etc. Can use variously in Home network field by this Wireless sensor and Microcontroler base, and also can apply variously to several industry fields as well as Home network field.

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A Dual Micro Gas Sensor Array with Nano Sized $SnO_2$ Thin Film (나노 박막을 이용한 듀얼 $SnO_2$ 마이크로 가스센서 어레이)

  • Chung Wan-Young
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.10 no.9
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    • pp.1641-1647
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    • 2006
  • A dual micro gas sensor way for detecting reducing gas and bad order was fabricated using nano sized $SnO_2$ thin film fabrication method. To make nano-sized thin gas sensitive $SnO_2$ thin rilm, thin tin metal layer $2500{\AA}$ thick was oxidized between 600 and $800^{\circ}C$ by thermal oxidation. The gas sensing layers such as $SnO_2,\;SnO_2(+Pt)\;and\;SnO_2(+CuO)$ were patterned by metal shadow mask for simple fabrication process on the silicon substrate. The micro gas sensors with $SnO_2(Pt)$ and $SnO_2(+CuO)$ showed good selectivity to CO gas among reducing gases and good sensitivity to $H_2S$ that is main component of bad odor, separately.

Fabrication of an acceleration sensor using silicon micromachining and reactive ion etching (실리콘 마이크로머시닝과 RIE를 이용한 가속도센서의 제조)

  • Kim, Dong-Jin;Kim, Woo-Jeong;Choi, Sie-Young
    • Journal of Sensor Science and Technology
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    • v.6 no.6
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    • pp.430-436
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    • 1997
  • A piezoresistive acceleration sensor for 30 G has been fabricated by silicon micromachining method using SDB(silicon direct bonding) wafer. The structure of the piezoresistive acceleration sensor consists of a seismic square pillar type mass and four beams. This structure was fabricated by reactive ion etching and chemical etching using KOH-etchant. The rectangular square structure is used in order to compensate the deformation of the edges due to underetching. The fabricated sensor showed a linear output voltage-acceleration characteristics and its sensitivity was about $88{\mu}V/V{\cdot}g$ from 0 to 10 G.

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The Change of $NO_{2}$ Sensing Characteristics for Carbon Nanotubes with Growth and Post Treatment Conditions (탄소 나노튜브의 성장 및 후처리 조건에 따른 이산화질소 감지특성의 변화)

  • Lee, R.Y.
    • Journal of the Microelectronics and Packaging Society
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    • v.13 no.4
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    • pp.65-70
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    • 2006
  • Carbon nanotubes (CNT) grown by chemical vapor deposition (CVD) and plasma enhanced chemical vapor deposition (PECVD), and followed by annealing at $400{\sim}500^{\circ}C$ were investigated for gas sensing under 1.5ppm $NO_{2}$ concentration at an operating temperature of $200^{\circ}C$. The electrical resistance of CNT sensor decreased with temperature, indicating a semiconductor type. The resistance of CNT sensor decreased with $NO_{2}$ adsorption. It was found that the sensitivity of sensor was affected by humidity and decreased under microwave irradiation for 3 minutes. The CNT sensor grown by PECVD had a higher sensitivity than that of CVD.

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High-Sensitivity Microstrip Patch Sensor Antenna for Detecting Concentration of Ethanol-Water Solution in Microliter Volume (마이크로리터 부피의 에탄올 수용액 농도 검출을 위한 고감도 마이크로스트립 패치 센서 안테나)

  • Junho Yeo;Jong-Ig Lee
    • Journal of Advanced Navigation Technology
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    • v.26 no.6
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    • pp.510-515
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    • 2022
  • In this paper, a microstrip patch sensor antenna (MPSA) for detecting the concentration of an ethanol-water solution in a microliter volume is proposed. A rectangular slot was added at the radiating edge of the patch to increase the sensitivity to the relative permittivity change. To improve a low input resistance caused by placing an ethanol-water solution, which is a polar liquid with high dielectric constant and high loss tangent, on the patch, a quarter-wave impedance transformer was added between the 50-ohm feedline and the patch, and the MPSA was fabricated on a 0.76 mm-thick RF-35 substrate. A cylindrical container was made of acryl, and 15 microliters of the ethanol-water solution was tested from 0% to 100% of ethanol concentration at 20% intervals. Experiment results show that the resonant frequency increased from 1.947 GHz to 2.509 GHz when the ethanol concentration of the ethanol-water solution was increased from 0% to 100%, demonstrating the performance as a concentration detecting sensor.

Wire-tension Control System using Photo-interrupter Sensor and Micro-electrode Fabrication (광단속센서를 이용한 와이어장력 제어장치 및 마이크로전극 제조)

  • Kang, Myung Chang;Lee, Chang Hoon;Kim, Nam-Kyung
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.12 no.3
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    • pp.28-35
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    • 2013
  • Micro electrical discharge machining (EDM) as a non-contact machining process is very effective for micromachining with a thin electrode because of its low machining reaction force. The micro-electrode machining device has the advantage of maintaining high precision through the whole processes and uses a feeding wire in the thin electrode tool manufacturing process. This study describes the design and evaluation of a micro-electrode machining device using optical photo-interrupter. The electrode was fabricated by reverse electrical discharge machining. The performance of designed system was evaluated to measure tension force according to feed speed of wire. This system for micro electrode fabrication proves the feasibility in the micro-EDM process of the micro holes and parts for industrial applications.

Fabrication and Sensorization of a Superelastic Alloy Microrobot Gripper using Piezoelectric Polymer Sensors (초탄성 마이크로 그리퍼의 제작 및 압전폴리머 센서를 이용한 센서화)

  • 김덕호;김병규;강현재;김상민
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2003.06a
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    • pp.251-255
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    • 2003
  • This paper presents the design, fabrication, and calibration of a piezoelectric polymer-based sensorized microgripper. Electro discharge machining technology is employed to fabricate super-elastic alloy based micro gripper. It is tested to present improvement of mechanical performance. For integration of force sensor on the micro gripper, the sensor design based on the piezoelectric polymer PVDF film and fabrication process are presented. The calibration and performance test of force sensor integrated micro gripper are experimentally carried out. The force sensor integrated micro gripper is applied to perform fine alignment tasks of micro opto-electrical components. It successfully supplies force feedback to the operator through the haptic device and plays a main role in preventing damage of assembly parts by adjusting the teaching command.

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