• Journal of the Institute of Electronics Engineers of Korea SC
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• v.42 no.6
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• pp.49-56
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• 2005

An electron microbeam system has been developed to investigate the biological effect of cells by irradiating cell-nuclei with low-energy and low-flux electrons. It is essential to discern the cell nucleus from its cytoplasm and the culture medium and to locateit exactly onto the beam exit. The irradiation speed at more than 10,000 cells per hour is another requisite for the observations on cellular response to have good statistics. Long-time labor with patience and high concentration is needed since the frames of $320{\times}240{\mu}m^2$ should be moved more than 500 times for irradiating more than 10,000 cells per an hour. This paper describes the electron microbeam system with a focus on the user interfaces concerning the process of automatically recognizing the cell nuclei and injecting electron beam into the target cell nuclei at the irradiation speed of more than 10,000 cell nuclei per hour.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.8 no.1
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• pp.35-41
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• 1997

A series-fed microstrip array antenna of beamwidth $10^{\circ}$, squint angle $80^{\circ}$ and SLL -15 dB below is designed. Series-fed arrays are formed by interconnecting all the elements by high-impedance transmission lines and feeding the power at the first element and it is a traveling-wave antenna which is terminated with a matched load. Radiation patterns and impedance matching of the antenna are analyzed by Ensemble 4.0, which is a popular software package for designing printed antennas and arrays. The squint angle of beam can be controlled by the spacing between the elements. The major advantages of series-fed array antennas are that feed arangement is compact and the losses associated with the feeding network are less than those of a corporate feed type. The antennas are fabricated on the RT/Duroid Laminates of 62 mil thickness. The experimental results are very close to the specifications to be designed.

• Journal of the Microelectronics and Packaging Society
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• v.6 no.2
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• pp.45-49
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• 1999

A flammable gas sensor based on the $SnO_2$thin film deposited by the reactive ion assisted deposition was fabricated and ultra-thin Pd layer as catalyst was adsorbed at surface by ion beam sputtering. The initial oxidation states of Pd catalyst were controlled to investigate the role of Pd in the sensing process of inflammale gas sensor through annealing in air and vacuum respectively. The Pd catalyst existing in pure metallic state showed the sensitivity higher than that of PdO. The result might be closely related to the fact that PdO as a surface acceptor would receive electrons via Pd sub-channel from $SnO_2$, and thus which reduces the sensitivity and delay the response time.

• Journal of Sensor Science and Technology
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• v.6 no.5
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• pp.346-355
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• 1997

In this paper, the analyses of the stress disturibution and frequency characteristics of silicon microstructures for an accelerometer were performed using the general purpose finite element simulation program, ANSYS. From the analyses, we determined the parameter values of a new 6-beam piezoresistive accelerometer applicable to the accelerometer's specification in airbag system of automobile. Then, the mass paddle radius, beam length, beam width, and beam thickness of the designed accelerometer were$500{\mu}m$, $350{\mu}m$, $100{\mu}m$, and $5{\mu}m$, respectively and two different seismic masses with 0.4 mg and 0.8 mg were defined on the same sensor structure. The designed 6- beam accelerometers were fabricated on the selectively diffused (111)-oriented $n/n^{+}/n$ silicon substrates and the characteristics of the fabricated accelerometers were investigated. Then, we used a micromachining technique using porous silicon etching method for the formation of the micromechanical structure of the accelerometer.

• The Journal of the Korea institute of electronic communication sciences
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• v.12 no.5
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• pp.731-736
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• 2017

In this paper, we report the fabrication of concave surface fiber tips for optical resonators. It was confirmed that the radius of curvature on fiber end can be controlled by introducing the hydrofluoric acid solution and the wavelength of $1.55{\mu}m$ laser which is absorbed well in the etchant to induce the photothermal effect. Using the microscope images, we observed the proposed concave fiber tip fabrication method is effective to make the controllable concave tips. We also observed changes in the size of the beam emitted from the tips with the various radius of curvature using the beam profiler. The authors believe that the proposed method will be applied to resonators for optical communications.

• 한국전산유체공학회:학술대회논문집
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• 2008.03b
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• pp.581-584
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• 2008

A generation of a particle beam is the key technique in a flow cytometry that measures the fluorescence and light scattering of individual cell and other particulate or molecular analytes in biomedical research. Recent methods performing this function require a laborious and time-consuming assembly. In the present work, we propose a novel device for the generation of an axisymmetrical focusing beam of microparticles (3-D focusing) in a single capillary without sheath flows. This work uses the concept that the particles migrate toward the centerline of the channel when they lag behind the parabolic velocity profile. Particle focusing of spherical particles was successfully made with a beam diameter of about 10 ${\mu}$m. Proposed device provides crucial solutions for simple and innovative 3-D particle focusing method for the applications to the MEMS-based micro-flow cytometry. We believe that this device can be utilized in a wide variety of applications, such as biomedical/ biochemical engineering.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.19 no.6
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• pp.834-840
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• 2010

Photo lithography process is very important technology to fabricate highly integrated micro patterns with high precision for semiconductor and display industries. Up to now, mask type lithography process has been generally used for this purpose; however, it is not efficient for small quantity and/or frequently changing products. Therefore, in order to obtain higher productivity and lower manufacturing cost, the mask type lithography process should be replaced. In this study, a maskless lithography system using the DMD(Digital Micromirror Device) is developed, and the exposure condition and optical properties are analyzed and simulated for a single beam case. From the proposed experimental conditions, required exposure experiments were preformed, and the results were investigated. As a results, 10${\mu}m$ spots can be generated at optimal focal length.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.3
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• pp.207-213
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• 2014

A study was carried out to fabricate the cutting tool geometry with micro/nanoscale on the single crystal diamond tool by using the FIB. The FIB technique is an ideal tool for TEM sample preparation that allows for the fabrication of electron-transparent foils. The FIB is appropriate techniques to sample and subsequently define the chemical composition and the structural state of mineral inclusion on the micro/nanoscale. The combination of FIB with a SEM allows for 3D information to be obtained from samples including 3D imaging. Cutting strategies were demonstrated to improve the performance of cutting tool geometry and to generate high aspect ratio micro cutting tool. A finely focused beam of 30keV Ga+ ions was used to mill cutting tool shapes for various micro patterns. Therefore FIB sputtering is used to shape a variety of cutting tools with dimensions in the $1-5{\mu}m$ range and cutting edge radii of curvature of under 50nm.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.9 no.6
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• pp.1607-1613
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• 2008

We investigated the miniaturized free electron laser(FEL) module based on microcolumn. The miniaturized FEL is composed of two parts: electron generation part and radiation emission part. The radiation emission part, called wiggler, consists of a grid plate. While the electrons are passing through the wiggler, electron trajectory shows sinusoidal curve caused by the periodically applied voltage on the grid, and then it give rise to radiation emission. We analyzed the wiggler parameters, grid width, depth, period, applied voltage and the pair wiggler space using 2-D simulation tool.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.20 no.2
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• pp.208-214
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• 2009

A design and its experimental result of a wideband self-complementary spiral antenna for UWB USPR(Ultrashort-Pulse Radar) system applications is presented. By utilizing the planar-type ultra-wideband microstrip-to-CPS balun, ultra-wideband characteristics of the inherent spiral antenna are retrieved. Also, the design procedure of the spiral antenna is simplified by performing simple impedance matching between separately designed balun and antenna. The proposed spiral antenna is equiangular self-complementary spiral antenna. The implemented antenna demonstrates widebaad performance for frequency ranges from 2.9 to 12 GHz with the relatively flat antenna gain of 2.7 to 5.3 dB and broad beamwidth of more than $70^{\circ}$. From these result, the possibility of a spiral antenna using a ultra-wideband microstrip-CPS balun is verified.