• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.32 no.9
• /
• pp.720-727
• /
• 2008

Microfluidic single chip integrating thermopneumatic micropump and micro check valve are developed. The micropump and micorvalve are made of biocompatible materials, glass and PDMS, so as to be applicable to the biochip. By using the passive-type check valve, backward flow and fluid leakage are blocked and flow control is stable and precise. The chip is composed of three PDMS layers and a glass substrate. In the chip, flow channel and pump chamber were made on the PDMS layers by the replica molding technique and pump heater was made on the glass substrate by Cr/Au deposition. Diameter of the pump chamber is 7 mm and the width and depth of the channel are 200 and $180{\mu}m$, respectively. The PDMS layers chip and the heater deposited glass chip are combined by a jig and a clamp for pumping operation, and they are separable so that PDMS chip is used as a disposable but the heater chip is able to be used repeatedly. Pumping performance was simulated by CFD software and investigated experimentally. The performance was the best when the duty ratio of the applied voltage to the heater was 33%.

• Journal of the Korean Society for Aeronautical & Space Sciences
• /
• v.35 no.4
• /
• pp.302-307
• /
• 2007

In this paper, a flap valve micropump with an ionic polymer-metal composite (IPMC) actuator was designed, fabricated, and experimentally characterized. A multilayered IPMC based on Nafion/layered silicate and Nafion/silica nanocomposites was fabricated for the actuation section of the micropump. The IPMC diaphragm, a key element of the mircopump, was designed so that the IPMC actuator was supported by a flexible polydimethylsiloxane (PDMS) structure at its perimeter. This design feature enabled a significantly high displacement of the IPMC diaphragm. The overall size of the micropump is $20{\times}20{\times}5$ ${mm}^3$. Water flow rates of up to 760 ${\mu}l$/min and a maximum backpressure of 1.5 kPa were recorded. A significant advantage of the proposed micropump is its low driven voltage from only 1-3 V. In addition, a simple and effective design, and an ease of manufacturing are other advantages of the present micropump.

• Proceedings of the KSME Conference
• /
• 2003.11a
• /
• pp.1864-1869
• /
• 2003

A novel piezoelectric micropump using active check valves in place of conventional passive check valves in inlet and outlet has been proposed and investigated. It actively controls open/close motion of check valves using piezoelectric actuator for expansion/contraction of pump chamber. In this paper, bi-directional flow characteristics and load characteristics are experimentally investigated using an adequate timing control for valve closing motion with a prototype micropump fabricated with the effective size of $17{\times}8{\times}11mm^{3}$. From the experimental results, it is ascertained that optimal values of phase shift against voltage to drive pump chamber for realization of a miniaturized but powerful micropump, are $15^{\circ}$ in inlet check valve and $195^{\circ}$ in outlet. Based on the obtained results, a sheet-type active shuttle valve that has a unified valve-body for inlet and outlet check valves is proposed. A micropump with the effective size of $10{\times}10{\times}10mm^{3}$ is fabricated and basic characteristics are experimentally investigated.

• Proceedings of the KSME Conference
• /
• 2004.11a
• /
• pp.876-881
• /
• 2004

In this study, A special quality analysis and experiment for low power consumption type pneumatic on-off micro valve was performed. And flow characteristics of the micro valve by stroke change was numerically investigated. As a result, it is shown that magnetic force(2.4N) is exerted enough to move poppet with 0.3mm stroke with 0.01 seconds of response time, and that there is no magnetic force emitted by yoke. Under the condition of poppet stroke smaller than about 0.8mm, dynamic pressure acts to poppet wall up to supply pressure level. But, that is decreasing to 40% when poppet stroke is 0.8mm.

• 유체기계공업학회:학술대회논문집
• /
• 2004.12a
• /
• pp.748-753
• /
• 2004

The performance of a valveless micropump driven by chamber wall oscillation was numerically investigated for various frequency and amplitude of the oscillation. The numerical study was performed in the range of oscillation frequency from 200Hz to 1000Hz and amplitude from $1{\mu}m$ to $15{\mu}m$. And optimal values for the parameters are found. At the oscillation frequency 600Hz, the net flow rate of micropump shows a maximum value. Also the results show good agreement with the experimental results. The total flow rate was increased with the oscillation amplitude. However, the net flow rate was found to be decreased over $7{\mu}m$.

• Transactions of The Korea Fluid Power Systems Society
• /
• v.1 no.2
• /
• pp.15-19
• /
• 2004

In this study, Design and simulation for low power consumption type pneumatic on-off micro valve was performed. And flow characteristics of the micro valve by stroke change was numerically investigated. As a result, it is shown that magnetic force(6.8N) is exerted enough to move poppet with 0.438mm stroke with 0.01 seconds of response time, and that there is no magnetic force emitted by yoke. Under the condition of poppet stroke smaller than about 0.4mm, dynamic pressure acts to poppet wall up to supply pressure level. But, that is decreasing to 40% when poppet stroke is 0.8mm.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.17 no.2
• /
• pp.137-146
• /
• 2016

An increase in EGR rate can reduce NOx emissions. On the other hand, an excessive EGR rate is a major cause of incomplete combustion. Precise position control of the EGR valve that is optimized for the operating conditions of the engine should be supported to meet the strict emission regulations. Accordingly, this study performed mathematical modeling and control theory for characteristic analysis of an EGR valve motor. Because it is a step for controlling the position of the EGR valve motor using the Microchip development tool, this study analyzed the characteristics of the motor for each opening and closing section according to the input value of the duty ratio of PWM (Pulse Width Modulation).

• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.21 no.3
• /
• pp.355-361
• /
• 2012

Though a micro pump is a crucial element in miniaturized bio-fluidic systems or drug delivery systems, it has some intrinsic disadvantages such as backward flow, pulsation of flow, low repeatability and producibility, and high cost. To overcome these limitation, a PZT disc actuated micro pump including a novel ring-shaped multi-flap check valve is introduced. To enhance the performance of the micro pump, the static behaviour of flap valve module and the micro fluidic behavior of fluids are numerically modelled and analyzed. As results of the numerical analysis, the optimal dimension and configuration of the ring-shaped multi flap valve are $1{\times}0.05$ mm and 2 (inlet side)${\times}1$ (outlet side) type. The obtained maximum flow rates and flow resolution are about 90 ml/min and 30 ${\mu}l$/stroke respectively.

• Proceedings of the KIEE Conference
• /
• 1989.07a
• /
• pp.345-348
• /
• 1989

A small linear incremental device, which is called a microworm, is introduced, and this paper explains working principle, design considerations and theoritcal force analysis of the microworm. A fluid control microvalve and a piezoelectric motor as an application of the microworm are explored for feasibility.

• Proceedings of the KIEE Conference
• /
• 2004.07c
• /
• pp.2093-2095
• /
• 2004

본 논문은 압전소자를 구동장치로 사용한 마이크로 펌프의 제작과 실험에 관한 논문이다. 마이크로 펌프의 상부기판은 polydimethyl siloxane(PDMS)을 소재로 미세유로에 상시 닫힌 밸브가 일체화된 구조로 제작되었고, 하부기판은 polymethyl methacrylate(PMMA)를 소재로 3개의 압전 디스크가 구동기로 부착되었다. 최종적으로 상, 하부 기판은 액상 PUMS로 접합하여 제작했다. 구동기의 입력신호는 6상으로 구형파를 인가하여 연동구동하며 주파수와 전압을 가변하면서 유량을 측정하였다. 구동 주파수가 0.167 Hz이고 전압이 20 V일 때, 마이크로펌프의 1회 토출량은 104 nl이고, 유량은 1.04${\mu}{\el}$/min이다.