• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 추계학술대회 논문요약집
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• pp.40-40
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• 2003

• 한국기계가공학회지
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• 제10권1호
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• pp.1-7
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• 2011

Micromachining is gaining popularity due to recent advancements in MEMS(Micro Electro Mechanical Systems). Using conventional micromachining, it is relatively difficult to produce moving components in the order of microns. Photolithography for silicon material has high accuracy machining, but it has low aspect ratio. X-ray lithography has ultra high accuracy machining, but it has expensive cost. Micro-EDM(electro discharge machining) has been gaining popularity as a new alternative method to fabricate micro-structures. In this study, Micro-EDM machine is developed available for fabricate micro-structures and two processes such as side cut EDM and milling EDM is proposed. Several sets of experiment results have been performed to study the characteristics of the machining process.

• 한국기계가공학회지
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• 제12권6호
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• pp.3-9
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• 2013

Aluminum Oxide($Al_2O_3$) ceramics are excellent candidates for such applications due to their outstanding mechanical, thermal, and tribological properties. However, they are difficult to machine using conventional mechanical methods. Carbon fillers, such as carbon nanotubes(CNT) and graphene nanoplatelets(GNP)can be dispersed in a ceramic matrix to improve the mechanical and electrical properties. In this study, CNT and Graphene reinforced hybrid ceramic composites were fabricated using the spark plasma sintering method at a temperature of $1,500^{\circ}C$, pressure of 40 MPa, and soaking time of 10min. Besides this, the material properties such as microstructure, crystal structure, hardness, and electrical conductivity were analyzed using FE-SEM, XRD, Vickers, and the 4-point probe method. A micro machining test was carried out to compare the effects of the material properties and the machining performance for CNT and Graphene reinforced ceramic composites.

• 한국정밀공학회지
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• 제21권12호
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• pp.44-51
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• 2004

In a micro-EDM, it is well known that an RC circuit is suitable as a discharge circuit because of its low pulse width and relatively high peak current. To increase machining speed without changing unit discharge energy, charge resistance should be decreased. But, when the resistance is very low, continuous (or normal) arc discharge occurs, electrode wear increases and machining speed is reduced remarkably. In this paper, an RC circuit with transistors is used in a micro-EDM. Experimental results show that the RC circuit with transistors can cut off a continuous (o. normal) arc discharge effectively if the duty factor and switching period of the transistor are set up optimally. Through experiments with varying charge resistances, it is shown that the RC circuit with transistors has about two times faster machining speed than that of an RC circuit.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.235-240
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• 2002

In micro-EBM, it is well blown that RC circuit is suitable for discharge circuit because of its low pulse width and relatively high peak current. To increase machining speed without changing unit discharge energy, charge resistance should be decreased. But, if very low, continuous (or normal) arc discharge occurs, then increases electrode wear and reduces machining speed remarkably. In this paper, RC circuit with transistor is used to micro-EDM. Experimental results show that RC circuit with transistor can cut off continuous (or normal) arc discharge effectively if duty factor and switching period of transistor are set up optimally. Through experiments with varying charge resistance, it can be known that RC circuit with transistor has about two times faster machining speed than that of RC circuit. Especially, it has prominent rise-effect of machining speed in low unit discharge energy, so that a high-quality and high-speed micro-EDM can be realized through RC circuit with transistor.

• 한국기계가공학회지
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• 제13권6호
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• pp.119-126
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• 2014

Micro-holes of conductive ceramic are required in micro structures. Micro-electrical discharge machining (Micro-EDM) is an effective machining method since EDM is as process for shaping hard metals and complex-shaped holes by spark erosion in all kinds of electro-conductive materials. However, as the depth of micro hole increases, the machining condition becomes more unstable due to inefficient removal of debris between the electrode and the workpiece. In this paper, micro-EDM was performed to evaluate machining characteristic such as electrode wear, machining time, taper angle, radial clearance with varying voltage and ultrasonic vibration on 10 vol.% Carbon-nanotube reinforced conductive $Al_2O_3$ composite fabricated by spark plasma sintering in previous research.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.444-444
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• 2010

최근 복잡한 고진공 시스템에서 수행되는 플라즈마 공정을 대신하여 진공 시스템 없이 대기압 플라즈마를 이용한 보다 경제적이고 신속하게 공정을 수행하는 연구가 활발히 진행 중이다. 이러한 대기압 플라즈마의 높은 응용성을 이용한 에칭과 증착 등의 기술은 플라즈마의 물리적 접근 없이 세계적으로 몇몇 선도 연구그룹에서 시도되고 있다. 본 연구팀에서는 대기 중에서 He, Ar, $N_2$, $O_2$, Air 등의 여러 종류의 기체에서 방전하여 미세가공이 가능한 $500\;{\mu}m$ 이하의 마이크로 제트를 개발하였다. 입력전압, 기체유량, 노즐의 구조와 크기 등의 여러 운전변수의 조절을 통해 폴리머 기판위에서 방전되는 마이크로 플라즈마 제트의 안정된 방전조건을 찾았고, 전압-전류 특성곡선(V-I characteristics), 광방출분광법(OES), 시간분해 이미지 촬영법(ICCD), 기체온도 측정법 등을 이용하여 발생된 플라즈마의 물리적인 특성을 분석하였다. 발생된 플라즈마를 이용해 처리된 폴리머 기판의 물성변화를 AFM을 통해 관찰하여 짧은 플라즈마 처리시간에도 효과적인 표면개질의 변화를 확인하였다. 마지막으로 본 기술을 이용한 대기압 마이크로 공정의 응용기술 및 가능성을 연구하였다.

• 한국기계가공학회지
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• 제10권1호
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• pp.87-92
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• 2011

This article proposes a new technique of the dynamic model using multi-body dynamic analysis tool for a flexible main spindle rotor system with a novel phase adjusting control technique for the purpose of an active control of rotor vibration. The dynamic model is used as a plant model. Also in order to make control system, a component parameters and phase controller is composed and simulated by SIMULINK. The vibration is reduced to 50%. Therefore the ADAMS dynamic model for the flexible main spindle rotor and the phase adjusting control techniques may be effective for the suppressing the vibration and helpful for the future active control for rotor vibration.

• 한국기계가공학회지
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• 제16권1호
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• pp.149-156
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• 2017

Graphene nanoplatelet (GNP)-reinforced alumina ($Al_2O_3$) is a promising material for micro-partapplications, particularly micro-nozzle shapes, because of its excellent wearresistance. In this study, a $Al_2O_3$/GNPcomposite with 15 vol% graphene nanoplatelets (GNP) was highly densified and fabricated via spark plasma sintering for micro-electrical discharge drilling (Micro-ED drilling) and the wear resistance property of the composite is evaluated via the ball-on-disk method. In addition, the diameter and shape of the micro-electrodes machined by wire electrical discharge grinding (WEDG), block electrical discharge grinding (BEDG), and new linear block moving electrical discharge grinding (LBMEDG) methods are systematically compared and analyzed to observe the micro-hole machining in the micro-ED drilling of the $Al_2O_3$/15vol% GNP composite.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 추계학술대회 논문집
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• pp.317-318
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• 2008