• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.35 no.8
• /
• pp.899-904
• /
• 2011

This This study aims to verify burr formation and to remove the burrs in micro-channel fabrication using micro-machining tools. The machining processes are combined with micro-milling and magnetic abrasive deburring for AISI316 stainless steel. Depending on the micro-milling conditions that are applied, burrs are formed around the side walls. Magnetic abrasive deburring is used to remove these burrs. AISI316 stainless steel is a nonferrous material and its magnetic flux density, which is an important parameter for efficient magnetic abrasive deburring, is low. To enhance this magnetic flux density, we design and build a magnetic array table. The effect of removing burrs is evaluated via SEM and a surface tester.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
• /
• 2005.05a
• /
• pp.446-452
• /
• 2005

Recently, there are many studies for the micro-machining using Piezo actuator. However, because of its step by step motion, it is nearly impossible to increase the machining accuracy for a circular path. To increase the accuracy, it is well known that it is necessary the finer and synchronous movement for x-y axes. Therefore, this paper proposes a voltage control for finer movement of the actuator, and realizes a synchronous control for the x-y axes. The experimental results show that the machining accuracy is remarkably improved.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2010.11a
• /
• pp.143-144
• /
• 2010

• Journal of the Korean Society for Precision Engineering
• /
• v.31 no.5
• /
• pp.381-387
• /
• 2014

This paper introduces a system to machine micro-sized patterns effectively on surface based on micro-milling process using tools with simultaneous rotation and oscillation, oscillation micro milling. To review the effectiveness of proposed concept, we integrated a micro-spindle supported by active magnetic bearings with a precision 3-axis air bearing stage using double-wedge mechanism, and tested this oscillation milling. Two types of oscillation milling were tested, which are linear oscillation milling with a flat end mill and elliptical oscillation milling with a ball end mill with 0.3 mm of diameter. The spindle was rotating 110 krpm and workpiece was moving constant speed of 2~8 mm/sec during the oscillation milling. As the results, multiple oval shape dimples were generated in regular spacing, and the variation of elliptical motion made different shapes of patterns. The results showed that proposed oscillation milling can be successfully used for machining repeated micro-patterns.

• Journal of the Korean Society for Precision Engineering
• /
• v.23 no.1 s.178
• /
• pp.201-208
• /
• 2006

Recently, there are many studies for the micro-machining using Piezo actuator. However, because of its step-by-step motion, it is nearly impossible to increase the machining accuracy for a circular path. To increase the accuracy, it is well known that it is necessary the finer and synchronous movement for x-y axes. Therefore, this paper proposes an adaptive control for finer movement of the actuator, and realizes a synchronous control for the x-y axes. The experimental results show that the machining accuracy is remarkably improved.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
• /
• 2005.05a
• /
• pp.278-281
• /
• 2005

Today, manufacturing capability at the micro or nano scale production field is requested strongly in view of parts and product miniaturization. Miniaturized parts and products will introduce lots of benefits in terms of high precision functionality and low energy consumption. This paper presents the results of micro milling machine tool development for micro machining process. Finite element analysis has been performed to know the relationship between design dimensional variables and structural stiffness in terms of static, dynamic, thermal aspects. Performance evaluation through machining has been tested and discussed for achievable machining characteristics.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.10a
• /
• pp.543-550
• /
• 2005

Recently, there are many studies for the micro-machining using Piezo actuator. However, because of its step by step motion, it is nearly impossible to increase the machining accuracy for a circular path. To increase the accuracy, it is well known that it is necessary the finer and synchronous movement for x-y axes. Therefore, this paper proposes an adaptive control for finer movement of the actuator, and realizes a synchronous control for the x-y axes. The experimental results show that the machining accuracy is remarkably improved.

• Journal of the Microelectronics and Packaging Society
• /
• v.21 no.4
• /
• pp.133-137
• /
• 2014

As a preceding process for preparing several micrometer sized Ag-coated Cu flakes, ball milling of submicrometer-sized Cu particles synthesized through a wet chemical method was performed in order to convert the particles into flakes. To suppress oxidation and aggregation of the particles during ball milling, ethylene glycol and ethyl acetate were used as a medium and a surface modifying agent, respectively. Results obtained with different rotation speeds of a jar indicated that the rotation speed changes a rotating mode, and strikingly alters the final shapes and shape uniformity of Cu particles after milling. The diameter of zirconia ball was also confirmed. Although there was aggregates in the initial submicrometer-sized Cu particles, therefore, well-dispersed Cu flakes with a size of several micrometers were successfully prepared by ball milling through optimization of rotation speed, amount of ethyl acetate, and diameter of zirconia ball.

• Journal of the Korean Society for Precision Engineering
• /
• v.31 no.3
• /
• pp.269-275
• /
• 2014

Conventional machining technologies such as a milling process have limitations in accuracy to fabricate microstructures. Deep X-ray lithography using the synchrotron radiation is a promising micromachining process with an excellent accuracy, whereas there are difficulties in the fabrication of multi-layered structures. Therefore, it is mainly used for fabricating simple mono-layered microstructures with a high aspect ratio. In this study, a novel technology for fabricating multi-layered microstructures is proposed by combining two processes. In advance, an X-ray resist material is cut and machined into various shapes and heights by the micro milling process. Subsequent X-ray irradiation process facilitates the fabrication of multi-layered microstructures. The proposed technology can overcome the limitation of the pattern accuracy in conventional milling process and the difficulty of the multi-layered machining in x-ray process. The usefulness of the proposed technology is demonstrated in this study by applying the technique in the realization of various multi-layered microstructures.

• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.18 no.3
• /
• pp.294-299
• /
• 2009

Micro end-milling has been becoming an important machining process to manufacture a number of small products such as micro-devices, bio-chips, micro-patterns and so on. Many related researches have given grand effects to micro end-milling phenomenon, for example, micro end-milling mechanism, cutting force modeling and machinability. This paper strongly concerned actual problem, micro tool deflection, which causes excessive machining errors on the workpiece. Machining error were predicted and measured through a series of test micro cutting and analysis of their SEM images and FEM analysis. Experiments are carried out to validate the approaches.