• 대한기계학회논문집A
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• 제35권8호
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• pp.899-904
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• 2011

본 연구는 마이크로 머시닝을 적용한 유동채널가공에서 버의 발생과 제거에 관한 연구이다. AISI316 스테인리스강의 마이크로 유동채널가공은 마이크로 밀링과 자기 디버링을 결합하여 실시하였다. 먼저 마이크로 밀링으로 유동채널을 가공하였고, 가공조건에 따라 마이크로 채널주변에 미소 버가생성됨을 확인하였다. 미소 버를 제거하기 위해서 자기 디버링을 행하였다. AISI316 스테인리스강은 비자성체로 자기연마에 큰 영향을 미치는 자속밀도가 매우 낮은 금속이다. 본 연구에서는 공작물의 자속밀도를 향상시키기 위해서 자기 테이블을 개발하여 이를 자기연마 디버링에 적용하였고, 주사전자현미경(SEM)과 표면형상기로 자기 디버링에 의한 버의 제거효과를 측정하였다.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2005년도 춘계학술대회 논문집
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• pp.446-452
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• 2005

Recently, there are many studies for the micro-machining using Piezo actuator. However, because of its step by step motion, it is nearly impossible to increase the machining accuracy for a circular path. To increase the accuracy, it is well known that it is necessary the finer and synchronous movement for x-y axes. Therefore, this paper proposes a voltage control for finer movement of the actuator, and realizes a synchronous control for the x-y axes. The experimental results show that the machining accuracy is remarkably improved.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 추계학술대회 논문집
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• pp.143-144
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• 2010

• 한국정밀공학회지
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• 제31권5호
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• pp.381-387
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• 2014

This paper introduces a system to machine micro-sized patterns effectively on surface based on micro-milling process using tools with simultaneous rotation and oscillation, oscillation micro milling. To review the effectiveness of proposed concept, we integrated a micro-spindle supported by active magnetic bearings with a precision 3-axis air bearing stage using double-wedge mechanism, and tested this oscillation milling. Two types of oscillation milling were tested, which are linear oscillation milling with a flat end mill and elliptical oscillation milling with a ball end mill with 0.3 mm of diameter. The spindle was rotating 110 krpm and workpiece was moving constant speed of 2~8 mm/sec during the oscillation milling. As the results, multiple oval shape dimples were generated in regular spacing, and the variation of elliptical motion made different shapes of patterns. The results showed that proposed oscillation milling can be successfully used for machining repeated micro-patterns.

• 한국정밀공학회지
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• 제23권1호
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• pp.201-208
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• 2006

Recently, there are many studies for the micro-machining using Piezo actuator. However, because of its step-by-step motion, it is nearly impossible to increase the machining accuracy for a circular path. To increase the accuracy, it is well known that it is necessary the finer and synchronous movement for x-y axes. Therefore, this paper proposes an adaptive control for finer movement of the actuator, and realizes a synchronous control for the x-y axes. The experimental results show that the machining accuracy is remarkably improved.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2005년도 춘계학술대회 논문집
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• pp.278-281
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• 2005

Today, manufacturing capability at the micro or nano scale production field is requested strongly in view of parts and product miniaturization. Miniaturized parts and products will introduce lots of benefits in terms of high precision functionality and low energy consumption. This paper presents the results of micro milling machine tool development for micro machining process. Finite element analysis has been performed to know the relationship between design dimensional variables and structural stiffness in terms of static, dynamic, thermal aspects. Performance evaluation through machining has been tested and discussed for achievable machining characteristics.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.543-550
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• 2005

Recently, there are many studies for the micro-machining using Piezo actuator. However, because of its step by step motion, it is nearly impossible to increase the machining accuracy for a circular path. To increase the accuracy, it is well known that it is necessary the finer and synchronous movement for x-y axes. Therefore, this paper proposes an adaptive control for finer movement of the actuator, and realizes a synchronous control for the x-y axes. The experimental results show that the machining accuracy is remarkably improved.

• 마이크로전자및패키징학회지
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• 제21권4호
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• pp.133-137
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• 2014

직경 수 마이크론급의 Ag 코팅 Cu 플레이크를 제조하기 위한 선행공정으로 습식 화학적 합성법으로 제조된 서브마이크론급의 Cu 입자를 볼 밀링 공정을 통해 프레이크화 하였다. 입자들의 산화 및 응집을 막기 위해 볼 밀링 유체로는 에틸렌글리콜을 사용하였고, 에틸아세테이트 표면개질제도 첨가하였다. 용기의 회전수에 따른 실험 결과를 통해 회전수에 따른 회전 모드의 변화가 밀링 후 Cu 입자들의 평균적인 형상과 형상 균일도를 크게 변화시킴을 확인할 수 있었다. 또한 첨가한 지르코니아 볼의 직경 역시 Cu 입자들의 플레이크화 균일도를 결정하는 대표 공정변수임을 확인할 수 있었다. 그 결과 다소간의 응집체를 포함한 서브마이크론급의 Cu 입자를 사용했음에도 불구하고, 회전수, 표면개질제 첨가량, 그리고 지르코니아 볼의 직경 등의 대표 공정변수들을 최적화한 볼 밀링 공정을 통해 분산성이 우수한 수 마이크론급의 Cu 플레이크를 성공적으로 제조할 수 있었다.

• 한국정밀공학회지
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• 제31권3호
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• pp.269-275
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• 2014

Conventional machining technologies such as a milling process have limitations in accuracy to fabricate microstructures. Deep X-ray lithography using the synchrotron radiation is a promising micromachining process with an excellent accuracy, whereas there are difficulties in the fabrication of multi-layered structures. Therefore, it is mainly used for fabricating simple mono-layered microstructures with a high aspect ratio. In this study, a novel technology for fabricating multi-layered microstructures is proposed by combining two processes. In advance, an X-ray resist material is cut and machined into various shapes and heights by the micro milling process. Subsequent X-ray irradiation process facilitates the fabrication of multi-layered microstructures. The proposed technology can overcome the limitation of the pattern accuracy in conventional milling process and the difficulty of the multi-layered machining in x-ray process. The usefulness of the proposed technology is demonstrated in this study by applying the technique in the realization of various multi-layered microstructures.

• 한국생산제조학회지
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• 제18권3호
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• pp.294-299
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• 2009

Micro end-milling has been becoming an important machining process to manufacture a number of small products such as micro-devices, bio-chips, micro-patterns and so on. Many related researches have given grand effects to micro end-milling phenomenon, for example, micro end-milling mechanism, cutting force modeling and machinability. This paper strongly concerned actual problem, micro tool deflection, which causes excessive machining errors on the workpiece. Machining error were predicted and measured through a series of test micro cutting and analysis of their SEM images and FEM analysis. Experiments are carried out to validate the approaches.