• Title/Summary/Keyword: 마이크로구조특성

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Micro/Nano Porous Silicon-based Biosensors (마이크로/나노 다공질 실리콘을 이용한 바이오센서)

  • Park, Eun-Jin;Jin, Joon-Hyung;Song, Min-Jung;Hong, Suk-In;Min, Nam-Ki
    • Proceedings of the KIEE Conference
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    • 2006.07c
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    • pp.1643-1644
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    • 2006
  • 본 논문에서는 마이크로/나노 다공질 실리콘 기판에 여러 형태의 전극을 형성하여 혈액 중의 요소, 콜레스테롤, AST, ALT 농도를 검출하는 바이오센서를 제각하고, 그 특성을 고찰하였다. 다공질 실리콘에 제작된 전극들은 모두 평면전극에 비해서 높은 감도증가를 나타내었는데, 이것은 다공질 실리콘 구조를 통한 유효전극면적의 증가에 기인하는 것으로 생각된다.

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The fabrication of high-response time, low consumption power, microflowsensor and its characteristics (고속응답, 저소비전력형 마이크로 유속센서의 제작과 그 특성)

  • 홍석우;김병태;김길중;정귀상
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.11a
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    • pp.343-346
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    • 2000
  • This paper presents the characteristics of low consumption, high-response time hot-film type micro-flowsensors with SOI(Si-on-insulator) and trench structures. Output voltages increased due to increase of heat-loss from sensor to external. Compared with no-trench on the SOI structure, the micro-flowsensors with trench structures have properties of high output voltage and low consume power. Output voltage of micro-flowsensors with SOI and trench structures was 250 mV at $N_2$ flow rate of 2000 sccm/min, heating power of 0.3 W. The response time was about 85 msec when input flow was step-input.

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Experimental study of spreading phenomena on hydrophilic micro-textured surfaces depending on surface geometrical features (친수성 마이크로 기둥 구조 표면에서의 표면 지형적 특성에 따른 퍼짐성 현상에 대한 실험적 연구)

  • Jang, Munyoung;Park, Sehyeon;Yu, Dong In
    • Journal of the Korean Society of Visualization
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    • v.16 no.3
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    • pp.35-39
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    • 2018
  • In multiphase systems, surface wettability is one of dominant design parameters to enhance system performance. Since surface wettability can be maximized and minimized with micro-textured surfaces, therefore micro-textured surfaces are widely countered in various research and engineering fields. In this study, for better understanding of micrometer scaled surface wettability, spreading phenomena is experimentally investigated on the hydrophilic micro-textured surfaces. By photolithography and conventional dry etching method, there are prepared the surfaces with uniformly arrayed micro-pillars. The interfacial motions of a water droplet on the test sections are visualized by high speed camera in top view. On the basis of visualization data, it is analyzed the relation between dynamic coefficient and geometrical features on micro-textured surfaces.

The Effect of Dimensions of Micro-post on Oleophobic Property (마이크로 기둥 구조의 크기가 소유성 특성 발현에 미치는 영향)

  • Kim, Nam-Kyung;Kim, Hae-Ji
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.17 no.5
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    • pp.91-96
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    • 2018
  • The oleophobic property of surfaces modified with micro-post structures are investigated for a range of micro-post diameter ($11-23{\mu}m$) and pitch ($20-40{\mu}m$). The contact angle of an oil droplet on surfaces with various micro-post dimensions was calculated using the Cassie-Baxter model and did not show a good agreement with the measured contact angle. From measurement, the micro-post with diameter of $23{\mu}m$ and pitch of $32{\mu}m$ was found to have the highest contact angle ($134.3^{\circ}$).

Stacked Microstrip Antenna Design for PCS Base Station (개인휴대통신 기지국용 적층된 마이크로스트립 안테나 설계)

  • Park, Jong-Sung;Jeon, Joo-Seong;Kim, Hyung-Bum;Kim, Dong-Won;Jin, Sung-Woo;Lee, Jin;Lee, Yun-Hyun
    • Journal of Advanced Navigation Technology
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    • v.4 no.1
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    • pp.23-35
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    • 2000
  • In this paper, the design for a PCS base station antenna which is using broadband method by a stacked structure has been studied. The sensitive parameters, such as the parasitic elements, the height of air layer between the upper and lower patch, and the variation of feed point, of the microstrip antenna that has stacked structure in a characteristics variation situation are classified and the characteristics has been investigated through the simulations. A designed antenna has following characters. Impedance bandwidth is Z57.5MHz(VSWR${\leq}$2), horizontal beamwidth is $64.1^{\circ}$, and gain is 14.7dBi. Therefore, it is confirmed the characteristics is good. In this paper, through the designing of a stacked microstrip antenna, we has investigated the availability for Korea PCS base station antenna.

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Design of Lowpass Filter With the Wide Stopband Characteristics Using Microstrip Line (마이크로스트립 선로를 이용한 광대역 차단특성을 가지는 저역통과 필터 설계)

  • Choi Dong-Muk;Shim Joon-Hwan;Jeon Joongn-Sung;Kim Dong-Il
    • Journal of Navigation and Port Research
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    • v.30 no.5 s.111
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    • pp.331-334
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    • 2006
  • In this paper, we designed and fabricated the lowpass filter with the wide stopband characteristics using microp- strip line. Adding the $\lambda_g/4$ open stub at the input and output ports, we developed the L-C ladder type lowpass filter using the open stub which has wide stopband characteristics. In order to reduce the entire size qf this filter, the high impedance microstrip lines were made with the meander structure. The lowpass filter was fabricated with the cutoff frequency 2.3 GHz and its measured frequency responses agree well with the simulation results.

Introduction of Routable Molded Lead Frame and its Application (RtMLF(Routable Molded Lead Frame) 패키지 소개 및 응용)

  • Kim, ByongJin;Bang, Wonbae;Kim, GiJung;Jung, JiYoung;Yoon, JuHoon
    • Journal of the Microelectronics and Packaging Society
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    • v.22 no.2
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    • pp.41-45
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    • 2015
  • RtMLF (Routable Molded Lead Frame) based on molded substrate has been developed to maximize advantages of both leadframe product which has high thermal and electrical performance and laminate product which accommodates more I/O count and keeps fan-in/fan-out design flexibility. Due to its structural features, RtMLF provided excellent thermal and electrical performance which was confirmed with simulation. The RtMLF samples were manufactured and its reliability analysis was done to evaluate the opportunities of the production and application.

A Low Impedance and Short Guided-Wavelength Microstripline Employing a Periodically Perforated Ground Metal and Its Application to Miniaturized Ratrace MMIC (주기적 홀을 가지는 접지 금속막을 이용한 저임피던스/단파장 선로와 MMIC용 소형 레트레이스에의 응용)

  • Yun, Young
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.14 no.7
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    • pp.727-733
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    • 2003
  • In order to realize miniaturized and low-impedance MMIC passive component, a novel microstripline structure employing periodically perforated ground metal was proposed. The novel microstripline structure showed much lower impedance, and shorter guided-wavelength than conventional one. Using the novel microstripline with periodically perforated ground metal, a miniaturized 15 $\Omega$ ratrace was fabricated. The line width of the ratrace was 20 $\mu\textrm{m}$, and the size of it was 0.375 mm$^2$, which is 9.3 % of conventional one. The ratrace exhibited good RF performances from 20 to 30 GHz.

Textured Surface Epitaxial Base Silicon Solar Cell (Textured 표면을 갖는 에피텍셜 베이스 실리콘 태양전지)

  • 장지근;임용규;정진철
    • Journal of the Microelectronics and Packaging Society
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    • v.10 no.2
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    • pp.33-37
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    • 2003
  • The new textured surface epitaxial base(TSEB) cell as a high efficiency Si solar cell was fabricated and its eletro-optical characteristics were investigated. The fabricated device showed the open circuit voltage of 0.62 V, the short circuit current of 40 mA, the fill factor of 0.7, and the efficiency of 16% under the incident light of AM-1 100 mW/$cm^2$. The TSEB cell proposed in this paper has the structural superiority in the fabrication of high efficiency solar cell due to the carrier drift transport in the optical absorption region and the formation of back surface field by $P^-/P^+$ epitaxial base, and the low emitter series resistance by insertion of $n^+$ buried contact.

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Fabrication of an acceleration sensor using silicon micromachining and reactive ion etching (실리콘 마이크로머시닝과 RIE를 이용한 가속도센서의 제조)

  • Kim, Dong-Jin;Kim, Woo-Jeong;Choi, Sie-Young
    • Journal of Sensor Science and Technology
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    • v.6 no.6
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    • pp.430-436
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    • 1997
  • A piezoresistive acceleration sensor for 30 G has been fabricated by silicon micromachining method using SDB(silicon direct bonding) wafer. The structure of the piezoresistive acceleration sensor consists of a seismic square pillar type mass and four beams. This structure was fabricated by reactive ion etching and chemical etching using KOH-etchant. The rectangular square structure is used in order to compensate the deformation of the edges due to underetching. The fabricated sensor showed a linear output voltage-acceleration characteristics and its sensitivity was about $88{\mu}V/V{\cdot}g$ from 0 to 10 G.

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