Fig. 1. Test sections (a) MEMS recipe, (b) 3D-profiler image (d20g20 case)
Fig. 2. Visualization of spreading phenomena (d4g4 case)
Fig. 3. Comparison of precursor radius in various geometrical conditions (total regimes)
Fig. 4. Comparison of precursor radius in various geometrical conditions (2nd regime)
Fig. 5. Dynamic coefficient (D) depending on roughness ratio (fW)
Table 1. Specific geometrical features of test sections
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