• Journal of the Semiconductor & Display Technology
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• v.2 no.4
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• pp.37-40
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• 2003

We have studied micro-machining technologies to fabricate parts and sensors used in the semiconductor equipment. The studies were based on the silicon integrated circuit processes, and composed of the anisotropic etching of single crystal silicon to fabricate a membrane structure for hot and cold junctions in the infrared absorber. KOH and TMAH were used as etching solutions for the anisotropic wet etching for membrane structure formation. The etching characteristic was observed for the each solution, and etching rate was measured depending upon the temperature and concentration of the etching solution. The different characteristics were observed according to pattern directions and etchant concentration. The pattern was made to incline $45^{\circ}$ on the primary flat, and optimum etching property was obtained in the case of 30 wt% and $90^{\circ}C$ of KOH etching solution for the formation of the membrane structure.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.17 no.2
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• pp.273-279
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• 2013

In this paper, a novel split ring resonator is proposed for improvement of phase noise characteristics that is weak point of oscillator using planar type microstrip line resonator, and oscillator for 5.8GHz band is designed using proposed split ring resonator. At the fundamental frequency of 5.8GHz, 7.22dBm output power and -83.5 dBc@100kHz phase noise have been measured for oscillator with split ring resonator. The phase noise characteristics of oscillator is improved about 9.7dB compared to one using the general ${\lambda}$/4 microstrip resonator. Because it is possible that varactor diode or lumped capacitor is placed on the gaps of split ring resonator, resonant frequency can be controlled by bias voltage. We can design voltage controlled oscillator using proposed split ring resonator. Thus, due to its simple fabrication process and planar type, it is expected that the technique in this paper can be widely used for low phase noise oscillators for both MIC and MMIC applications.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.11 no.5
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• pp.853-859
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• 2007

This paper presents a microstrip patch array antenna having transmission feed and reception feed for satellite communication in the Ku band. In this paper, the element of the patch array antenna is a three-stacked structure consisting of one radiation patch and two parasitic patches for high gain and wide bandwidth characteristics. To obtain higher gain, the unit elements are expanded into a $1{\times}8$ may using a mixture of series and parallel feeds. The proposed antenna has horizontal polarization for the Rx band and vertical polarization for the Tx band. To verify the practicality of this antenna, we fabricated a three-stacked patch array antenna and measured its performance. The gain of the array antenna in the Rx and Tx bands exceeds 17 and 18 dBi, respectively. The impedance bandwidth is over 10 % in both bands. The cross-polarization level is below -25 dB, and the sidelobe level is below -9.4 dB.

• The Journal of the Korea institute of electronic communication sciences
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• v.14 no.6
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• pp.1045-1052
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• 2019

In this paper, the slot-coupled microstrip antenna structure with reflector is used for broadband. The reflector of this structure is designed to reduce the radiation emitted from the slot and minimize the influence of external electromagnetic environment while reducing the overall antenna height. Experimental results show that the antenna is very well matched with VSWR below 1.4 at 1.942.17GHz, and the maximum gain of the antenna in this band was measured 9.21dBi. The measured results shows that it can be used in the wireless communication field or IoT field of other frequency band in the future.

• Korean Journal of Optics and Photonics
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• v.13 no.6
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• pp.554-558
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• 2002

A new laser material, Nd:LSB $(Nd${3}:LaSc_3(BO_3)_4$, lanthanum scandium borate), of microchip type was grown by the Czochralski pulling method, and tested for optical and lasing properties. Nd:LSB, able to be highly doped with $Nd^{3+}$ ions while maintaining good optical, chemical, mechanical properties, was compared to another Nd-type laser material. The absorption and fluorescence spectra, and fluorescence lifetime were measured, and the crystal structure was analyzed. The lasing characteristics were investigated by using Ti:sapphire laser as a pumping light source.

• Journal of the Microelectronics and Packaging Society
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• v.4 no.2
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• pp.25-32
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• 1997

대용량, 고속 정보처리가 요구되는 System의 모듈은 Data 처리의 고속성 및 회로의 고집적이 가능한 MCM의 형태로 구현되어 ATM, GPS 및 PCS 등의 분야에 광범위하게 응 용되고 있다. 위와 같은 High Speed 응용분야에서의 System 성능은 Interconnect Line의 전달지연, 임피던스 부정합에 의한 신호 반사 손실. 신호선 간의 Crosstalk, Ground Bounce 등의 현상에 대한 최적화 여부에 결정적인 영향을 받는다. 그러나 Interconnect의 특성상 정 형이 존재하지 않으므로 추상적인 Library를 구축하는 형식으로 접근할 수밖에 없으며 이를 위하여 여러기본 구조를 정의한후 각 Dimension을 변수로 두고 해석 결과를 합성하여 Database화하는 접근방식이다. 본 논문에서는 MCM-D 공정을 이용하여 Interconnect Line 특성을 분석하고 Database화 하기 위한 Test Pattern을 구현하고 Time Domain reflectometry(TDR)을 이용하여 그특성들을 측정 분석하였다. Test pattern 제작은 MCM-D 공정으로 최소선폭 27$\mu$m, Via Hole 75$\mu$m으로 형성하였고 2 Layer Signal과 GND로 총 3Layer를 구현하였다. 특성분석을 위해 TDR장비와 모데링 및 Simulation S/W인 IPA 510 을 사용하였다. 이를 통해 MCM-D를 이용한 공정에서 Interconcet Line의 고주파 특성을 측정하고 정량화하여 LIbrary를 제작할수 있었다.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.16 no.8
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• pp.1581-1586
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• 2012

In this paper, a novel resonator using ring type DGS is proposed for improvement of phase noise characteristics that is weak point of oscillator using planar type microstrip line resonator, and oscillator for 5.8GHz band is designed using proposed DGS resonator. The ring type DGS resonator is composed of DGS cell etched on ground plane under $50{\Omega}$ microstrip line. At the fundamental frequency of 5.8GHz, 7.6dBm output power and -82.7 dBc@100kHz phase noise have been measured for oscillator with ring type DGS resonator. The phase noise characteristics of oscillator is improved about 9.5dB compared to one using the general ${\lambda}/4$ microstrip resonator. Because it is possible that varactor diode or lumped capacitor is placed on the gaps of ring type DGS, resonant frequency can be controlled by bias voltage. We can design voltage controlled oscillator using proposed ring type DGS resonator. Thus, due to its simple fabrication process and planar type, it is expected that the technique in this paper can be widely used for low phase noise oscillators for both MIC and MMIC applications.

• Journal of IKEEE
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• v.16 no.3
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• pp.173-176
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• 2012

This paper introduces a novel horn antenna for circular polarization using a planar-type radiator. This antenna can be divided to two parts, microstrip antenna and square horn. The microstrip antenna has the role of feeder and polarizer of the horn antenna, and it is designed to stacked type having metal spacer for high gain, high isolation and wideband characteristic. Using the proposed antenna structure, the horn antenna needs not additional structure such as feeder and polarizer, and the size of it can be considerably reduced. The horn antenna has typical gain of 8dBi and 3-dB axial-ratio bandwidth around 4.9%.This antenna can widely used for various antenna system for mobile and satellite communication using circular polarization expecially in high frequency band.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.14 no.1
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• pp.75-80
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• 2003

This paper presents novel compact circularly polarized(CP) operation of a annular ring slot antenna with a 45$^{\circ}$truncated in the patch and a cross-slot of unequal slot lengths. A simple configuration based on a cross-slot of unequal slot lengths on the annular ring patch is adopted to realize a small-size element antenna and used a proximity coupled feed method. Experimental results show that much wider impedance bandwidth of 7.74 % and axial ratio bandwidth of 1.9 % in GPS band(1.5 GHz).

• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2001.11a
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• pp.213-216
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• 2001

극자외선영역의 빛에대한 Mo/Si 반사형 다층 박막 미러를 스퍼터링 시스템으로 증착하여, 특성을 평가한 결과 3mTorr의 낮은 공정 압력에서 최적의 구조인자를 가진 다층 박막을 증착할 수 있었다. TEM, low angle XRD peak, 반사도 그래프로부터 다층 박막의 구조인자를 분석하였으며, 특히 low angle XRD peak로부터 다층박막의 d-spacing, 층간 두께 uniformity에 대한 정보 및 광학적 정보를 간접적으로 분석할 수 있었다. 최대 반사도는 12.7nm 파장에서 약 53%였으며, low angle XRD에서 추출한 d-spacing 값이 TEM 이미지에서 측정한 값보다 더 정확한 값을 얻을 수 있었다.