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Park, Se-Kwang
- Proceedings of the KOSOMBE Conference
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- v.1991 no.11
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- pp.7-15
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- 1991
체내의 유익한 정보를 검출하기 위해서는 생리학적으로 부작용이 얼고 정확한 정보를 신속히 걸출하여야만 한다. 이를 위해서는 무침습적으로 측정하거나 무침습적이지 못할 경우, 침습을 최소화하기 위한 센서의 소형화가 불가피하다. 최근 집적회로 공정 기술인 미세 가공 기술을 응용하여 소형화될 뿐 아니라 고도의 기능을 가진 센서가 연구되고 있다. 또한 센서에 집적회로와 액류에이터를 일체화한 집적화 센서도 연구되고 있다. 여기서는 현재 사용되고 있는 미세 가공 기술들 중 식각 기술과 식각 중지 기술, 접합 기술에 관해 언급하였다. 그리고, 이러한 기술을 이용하여 제작된 마이크로 센서(Micro Sensor)에 관해 간략히 살펴본다.
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Kim, Haan;Park, Jong Wuk
- Journal of the Korean Society of Manufacturing Process Engineers
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- v.21 no.4
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- pp.77-83
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- 2022
Amorphous alloys exhibit excellent mechanical properties; therefore, application technology development is being attempted in various fields. However, industrial use of application technology is limited owing to the limitations in fabrication. In this study, micropattern fabrication of an amorphous alloy was conducted using laser beam machining. Although microhole fabrication is possible without the deformation of the amorphous phase through nanosecond pulsed laser beam machining, there are limitations in the generation of recast layers and spatters. In cover plate laser beam machining (c-LBM), a cover plate is used to reduce the thermal deformation and processing area. Therefore, it is possible to fabricate holes at the level of several micrometers. In this study, it was confirmed that recast layers are hardly generated in c-LBM. Furthermore, square-shaped micropatterns were successfully fabricated using c-LBM.
https://doi.org/10.14775/ksmpe.2022.21.04.077 인용 PDF KSCI

Baek,Chang-Il;Chu,Won-Sik;An,Seong-Hun
- Journal of the Korean Society for Aeronautical & Space Sciences
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- v.31 no.9
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- pp.32-37
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- 2003
The trend of miniaturization has been applied to the research on micro rockets resulting in prototype rockets fabricated by MEMS processes. In this paper, the development of three-dimensional micro rockets using micro milling as well as the results of combustion and flight tests are discussed. The body of rocket was made of 6061 aluminum cylinder. The three-dimensional micro nozzles were fabricated on brass by micro endmill with 127${\mu}m$ diameter. Two different micro nozzles were fabricated, one with 1.0mm of throat diameter and the other with 0.5mm. The total mass of rocket was 7.32g and that of propellant was 0.65g. The thrust-to-weight ratio was between 1.58 and 1.74, and the flight test with 45 degree launch angle form the ground resulted in 46m-53m of horizontal flight distance
https://doi.org/10.5139/JKSAS.2003.31.9.032 인용 PDF KSCI