• Journal of the Institute of Convergence Signal Processing
• /
• v.2 no.3
• /
• pp.86-92
• /
• 2001

Position controls are very important in semiconductor manufacturing devices, machine tools, precision measuring instruments, etc. to measure the distance of movement of moving objects in minute units and the accuracy of measurement for the moving distance in these devices affect the performance of the whole devices. Therefore, in those precision instruments, a sensing device that can measure the distance of movement with high-precision resolution is required. Thus an optical encoder that has such advantages as easy digital interface, economical price, and a resolution similar to that of laser interferometers can be used. In this paper, a interferometer-type linear scale with easy digital interface and high-resolution has been set up and measured the distance of movement based on the diffraction principle. Interference signals produced in this optical setup of the linear scale have beers digitalized through fabricated photodetectors and designed signal processing circuits. A resolution of 0.5${\mu}{\textrm}{m}$ is acquired from the experimental interferometer-type linear scale without for the movement of scales any additional dividing circuits. It is shown that from this experiment a high-resolution distance measurement device can be designed by a simple optical setup.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2003.06a
• /
• pp.1243-1248
• /
• 2003

It is very important to measure linear motion accuracy of NC lathe as it affects all other parts of machines machined by them in industries. If the motion accuracy of NC lathe is bad, the dimension accuracy and the change-ability of works will be bad in the assembly of machine parts. In this paper, computer software systems are organized to measure linear motion of ATC(Automatic tool changer) on zx plane of NC lathe using two linear scales and the time pulses coming out from computer in order to get data at constant time intervals from the linear scales. And each sets of error data obtained from the test is discripted to plots and the results of linear motion errors are expressed as numerics by computer treatment.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
• /
• 1999.05a
• /
• pp.170-174
• /
• 1999

The main scale of linear scale greatly affects on the precision of displacement measurement. Especially when needing the long range measurement, the length of main scale should be increased accordingly. In this paper, we propose a linear scale that uses laser interference pattern as main scale for long range measurement. The linear scale is similar to Michelson interferometer excepting that the reference mirror is tilted so as to obtain interference fringe pattern and a grating panel is attached on a quadratic photo diodes. Four kinds of grating having phase differences of 0, $\pi$ /4, $\pi$ /2, 3 $\pi$ /4 are arranged on the panel. The experimental results show that signals of - quadratic photo diode, A, B,$\overline{A}$ and $\overline{B}$ are cosine wavelike and successive signals have phase difference of $\pi$/4 each other. So the proposed method can achieve improved measurement resolution.

• Transactions of the Korean Society of Machine Tool Engineers
• /
• v.12 no.2
• /
• pp.53-58
• /
• 2003

It is very important to measure linear cycle plane positioning accuracy of NC lathe as it effects all other parts of machines machined by them in industries. If the plane positioning accuracy of NC lathe is bad, the dimension accuracy and the change-ability of works will be bad in the assembly of machine parts. In this paper, computer software systems are organized to measure linear cycle plane positioning displacement of ATC(Automatic tool changer) on zx plane of NC lathe using two linear scales. And each sets of error data obtained from the test is descriptions to plots and the results of linear cycle plane positioning errors are expressed as nutriments by computer treatment.

• Proceedings of the Korea Information Processing Society Conference
• /
• 2021.11a
• /
• pp.756-759
• /
• 2021

본 논문은 기존의 5축 치아가공기나 반도체장비등에 사용하고 있는 회전형 모터의 경우는 엔코더와 리졸버를 사용하고 있다. 엔코더와 레졸버는 고가이므로 실제 산업현장에서 전동기의 위치 센서로는 적용하기가 힘들다. 또한 엔코더와 레졸버와 같은 광학식 위치센서는 그 크기와 내구성에 있어 약점이 있기 때문에 취부 할 때에도 어려움이 있다. 따라서 본 연구에서는 5축치아가공기에 적용하기 위해서 자석가동자를 만들었으며, 이러한 문제점을 해결하는 방안으로 리니어모터를 고정자로 하고 자석플레이트를 이동자로 하는 시스템과 별도의 리니어 스케일을 배제하고 기존의 정현파를 발생하는 2개의 리니어홀센서 및 영구자석을 이용하여 가동자의 절대위치와 이동 위치를 검출할 수 있는 리니어 모터 및 그 제어방법, 안정성 및 신뢰성을 향상시킬 수 있는 자석가동자를 이용하여 구동시 실시간으로 데이터를 확인할 수 있고 제어할 수 있는 모니터링 시스템을 개발하는 연구이다.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2003.06a
• /
• pp.1144-1149
• /
• 2003

It is very important to measure circular motion accuracy of NC lathes it affects accuracy, performance, interchange ability and quality of machine parts machined by the NC lathes in industries. So, in this study, measuring units system to measure circular motion accuracy two axes circular motion accuracy of NC lathes was composed of two optical linear scales installed on the z and x-axes of work coordinate system on NC lathe and a computer inserted with PC counter card enables to obtain measuring data. Here, ATC(Automatic Tool Changer) and moving part of linear scales are fixed with magnet bases in order to measure circular motion accuracy of the ATC of NC lathe. And next, computer software was developed in order to measure the circular motion accuracy of NC lathe under resolution of 0.1 $\mu\textrm{m}$ using two linear scales, and also computer softwares were developed so that measuring data could be modeled on plots and be analyzed numerically,

• Transactions of the Korean Society of Machine Tool Engineers
• /
• v.13 no.5
• /
• pp.1-6
• /
• 2004

Measurements of circular motion accuracy of NC lathe have achieved with ball bar systems proposed by Bryan, but the ball bar systems have ifluenced on the measuring data by way of the accuracy of the balls and the contacts of balls and bar seats. Therefore in this study, error data during of circular motion of ATC(Automatic Tool Changer) of NC lathe will be acquired by reading zx plane coordinates using two optical linear scales. Two optical linear scales of measuring unit are fixed on z-x plane of NC lathe, and the moving part is fixed to ATC and then is made to receive data of coordinates of the ATC at constant time intervals using tick pulses comming out from computer. And then, error data files of radial direction of circular motion are calculated with the data read, and the aspect of circular motion are modeled to plots, and are analysed by means of statistical treatments of circularity, means, standard deviations etc.

• Journal of the Korean Society for Precision Engineering
• /
• v.17 no.1
• /
• pp.21-26
• /
• 2000

This paper describes a positioning system for ultra-precision that will be utilized in semiconductor manufacturing field and precision machinery. This system is composed with laser scale unit with 10nm resolution, ball screw with LM guide, brushless DC servo motor, vibration isolator and is equipped in chamber for continuous measuring environment. The dynamic of table, the problem of servo control and the traceability for micro step motion are described. These data will be applied for getting more stable system with 50nm resolution.

• Journal of the Korean Society for Precision Engineering
• /
• v.12 no.2
• /
• pp.37-47
• /
• 1995

In recent years, it has been variously developed for testing the accuracy of circular motion of NC machine tools, for example Telescoping Ball Bar Method by Bryan, Circular test Method by Knapp and $r^{-{\theta} }$ Method by Tsutsumi etc., but these methods are all 2-dimentional measuring methods on plane. These simple methods of circular motion accuracy test of NC machine tools have been studied by many reserchers as above, but it is not yet settled in the code of measuring methods of motion errors of NC machine tools, because of errors of measuring units and sensors, and also especially the difficulties of centering of measuring units and the spindle of machining center. In this paper, in use of 2 rotary encoders and 1 magnetic type linear scale with resolution of 0.5 .mu. m, it has become possible for measuring of 3 dimentional space motion accuracy.

• Journal of Navigation and Port Research
• /
• v.28 no.6
• /
• pp.541-548
• /
• 2004

In the maritime container terminal. LMCTS (Linear Motor-based Container Transfer System) is horizontal transfer system for the yard automation, which In., been proposed to take the place of AGV (Automated Guided Vehicle). The system is based on PMLSM (Permanent Magnetic Linear Synchronous Motor) that is consists of stator modules on the rail and shuttle car (mover). Because of large variant of mover's weight by loading and unloading containers, the difference of each characteristic of stator modules, and a stator module's trouble etc. LMCTS is considered as that the system is changed its model suddenly and variously. In this paper, we will introduce the softcomputing method of a multi-step prediction control for LMCTS using DR- FNN (Dynamically-constructed Recurrent Fuzzy Neural Network). The proposed control system is used two networks for multi step prediction Consequently, the system has an ability to adapt for external disturbance, detent force, force ripple, and sudden changes by loading and unloading the container.