• Title/Summary/Keyword: 로터진동해석

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Failure analysis of a turbo molecular pump in semiconductor equipments (반도체 장비에서 터보 분자 펌프의 파손 사례 연구)

  • Jeong, Jin-Yong;Ju, Jeong-Hun;O, Sam-Gyun
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2018.06a
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    • pp.120-120
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    • 2018
  • 반도체 소자나 디스플레이 패널 제조 공정에 가장 많이 사용되는 진공 펌프인 터보 분자 펌프는 오일을 사용하지 않고, 설치 방향이 자유로우며 넓은 작동 압력 영역을 가지고 있어서 고가임에도 불구하고 점점 더 사용 영역을 넓혀 가고 있다. 상하의 두 곳에 회전축을 지지하는 베어링이 필요한데, 기계식 금속 베어링을 채용하는 경우에는 반드시 윤활유를 공급해 주어야 하고, 고온, 부식성 또는 산화성 가스의 배기 시에는 퍼지 가스로 비활성인 질소나 알곤등을 이용하여 보호를 해주어야 한다. 반면, 자기 베어링을 채택한 모델은 윤활의 걱정에서 자유로울 수 있기 때문에 채용이 늘어나고 있다. 동일극의 반발력이나 반대극의 인상력을 이용한 구조를 갖게 되는데 갑작스러운 입구 쪽 압력의 증가 시에는 자석 끼리 부딪치는 일이 발생하고 이로 인해서 로터 모듈 전체에 큰 손상을 갖게 되므로 한 곳 정도에 비상용 터치 다운 베어링을 기계식으로 윤활제 없이 설치하기도 한다. 기본적으로 자기 베어링 방식은 로터 모듈의 부상과 제어를 위해서 3축 또는 5축 제어를 하게 되는데 여기에는 전자석의 전류를 미세하게 조정하여 피드백 하는 시스템을 활용하기 때문에 외부에서의 자기장이 일정값 이상 침투하게 되면 제어 회로의 기능에 문제를 일으키게 된다. 또한 축 방향에 수직인 자기장의 강도가 높아지면 고속으로 회전하는 금속 블레이드가 자속을 자르게 되므로 표면에 와전류가 발생하여 문제가 된다. 터보 분자 펌프는 회전자와 고정자 간격이 1 mm 이내로 작아서 약간의 진동이라도 발생하면 회전자와 고정자 간에 충돌이 일어나고 이는 곧 파손으로 이어진다. 그림 1에는 파손 원인 분석을 위한 회전자 모듈의 수치 해석용 모델의 일부를 나타내었고, 그림 2에는 실제로 외부 자기장에 의한 파손이 발생한 사례의 자기 베어링 모듈의 사진을 나타내었다. 본 발표에서는 외부 자기장의 형태에 따라 제어 자기장에 미치는 영향을 CFD-ACE+(ESI corp)를 활용하여 해석하였다.

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Development of Rotordynamic Analytical Model and Analysis of Vibration Response of a Turbocharger (터보차져의 로터다이나믹 해석모델 개발 및 진동응답 해석)

  • Kim, Byung-Ok;Lee, An-Sung
    • The KSFM Journal of Fluid Machinery
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    • v.13 no.5
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    • pp.35-42
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    • 2010
  • This paper deals with the development of analytical model of a turbocharger and its detail rotordynamic analysis. Two analytical models, which are verified by experimental modal testing, are proposed and the analytical model including rotor shaft extended to compressor and turbine wheel end side is chosen. A rotordynamic analysis includes the critical map, Campbell diagram, stability, and unbalance response, especially nonlinear transient response considering nonlinear fluid film force at bearings. Although the linearized analysis accurately predicts the critical speeds, stability limit, and stability threshold speed, the predicted vibration results are not valid for speeds above the stability threshold speed since the rotor vibrates with a subsynchronous component much larger than the one synchronous with rotor speed. Hence, for operating speed above the stability threshold, a nonlinear transient analysis considering nonlinear fluid film force must be performed in order to accurately predict vibration responses of rotor and guarantee results of analysis.

Rotor High-Speed Noise Prediction with a Combined CFD-Kirchhoff Method (CFD와 Kirchhoff 방법의 결합을 이용한 로터의 고속 충격소음 해석)

  • 이수갑;윤태석
    • Journal of KSNVE
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    • v.6 no.5
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    • pp.607-616
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    • 1996
  • A combined computational fluid dynamics(CFD)-Kirchhoff method is presented for predicting high-speed impulsive noise generated by a hovering blade. Two types of Kirchhoff integral formula are used; one for the classical linear Kirchhoff formulation and the other for the nonlinear Kirchhoff formulation. An Euler finite difference solver is solved first to obtain the flow field close to the blade, and then this flow field is used as an input to a Kirchhoff formulation to predict the acoustic far-field. These formulas are used at Mach numbers of 0.90 and 0.95 to investigate the effectiveness of the linear and nonlinear Kirchhoff formulas for delocalized flow. During these calculiations, the retarded time equation is also carefully examined, in particular, for the cases of the control surface located outside of the sonic cylinder, where multiple roots are obtained. Predicted results of acoustic far-field pressure with the linear Kirchhoff formulation agree well with experimental data when the control surface is at the certain location(R=1.46), but the correlation is getting worse before or after this specific location of the control surface due to the delocalized nonlinear aerodynamic flow field. Calculations based on the nonlinear Kirchhoff equation using a linear sonic cylinder as a control surface show a reasonable agreement with experimental data in negative amplitudes for both tip Mach numbers of 0.90 and 0.95, except some computational integration problems over a shock. This concliudes that a nonlinear formulation is necessary if the control surface is close to the blade and the flow is delocalized.

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Rotordynamic Design and Analysis of the Rotor-Bearing System of a 500Wh Flywheel Energy Storage Device (플라이휠 에너지 저장장치 회전체계의 동역학적 설계및 해석)

  • 최상규;김영철;경진호
    • Journal of KSNVE
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    • v.8 no.1
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    • pp.81-86
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    • 1998
  • A 500Wh class high-speed Flywheel Energy Storage System (FESS) driven by a built-in BLDC motor/generator has been designed, which runs from 30000 to 60000rpm nominally. Due to the motor/generator inside, the flywheel rotor made of composites supported by PM/EM hybrid bearing system has a shape of bell or pendulum and thus requires accurate rotordynamic analysis and prediction of its dynamic behavior to secure the operating reliability. Rotordynamic analyses of the flywheel rotor-bearing system revealed that the bell shaped rotor has two conical rigid-body modes in the system operating range and the first conical mode, of which nodal point lies in the radial EM bearing position, can adversely affect the dynamic response of the rotor at the corresponding critical speed. To eliminate the possibility of wild behavior of the rotor, two guide bearings are adopted at the upper end of the rotor and motor/generator. It was also revealed that the EM bearing stiffness if 0.5~1.0E+6 N/m and damping of 2000 Ns/m are favirable for smooth operation of the system around the 2nd critical speed.

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Rotordynamics of a Centrifuge Rotor-Bearing System for 100,000 rpm Operation (100,000 rpm 운전용 원심분리기 로터-베어링 시스템의 회전체동역학 해석)

  • 이안성;김영철;박종권
    • Journal of KSNVE
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    • v.8 no.3
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    • pp.450-456
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    • 1998
  • A rotordynamic analysis is performed with a centrifuge rotor-bearing system for the raing speed of 100,000 rpm. The system is composed of a centrifuge rotor(or simply the rotor), flexible shaft, motor rotor and shaft, and two support rolling element bearings of the motor shaft. Design goals are to achieve wide separation margins of critical speeds and favorable unbalance responses of the rotor at the associated critical speeds. The latter requirements are especially important as the system crosses multiple numbers of critical speeds and as the system may not have enough separaton margins around the rating speed. As the system adopts an extra-flexible shaft, it is shown that the rotor has satisfactory small unbalance responses over higher criticals while having an unsatisfactory large one at the first critical. To supress this a bumper ring or guide bearing needs to be installed at a suitable location of the flexible shaft. It is also shown that even with the flexible shaft the dynamics of the motor must be incoporated into the full system model to accurately identify the fourth critical speed, which is close to the rating speed, and higher ones. The analysis is based on the finite element method.

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Shock Response Analysis of Rotor-Bearing System using the State-Space Newmark Method (상태공간 Newmark 기법을 이용한 로터-베어링 시스템의 충격응답 해석)

  • Lee, An-Sung;Kim, Byung-Ok;Kim, Young-Cheol;Kim, Yeong-Chun
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2004.11a
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    • pp.242-247
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    • 2004
  • In this study was proposed a transient response analysis technique of a rotor system, applying the generalized FE modeling method of a rotor-bearing system considering a base-transferred shock force and together the state-space Newmark method of direct time integration scheme based on the average velocity concept. Experiments were performed to a test rig of a mock-up rotor-bearing system with series of half-sine shock waves imposed by an electromagnetic shaker, and quantitative error analyses between analytical and experimental results were carried out. The transient reponses of the rotor were sensitive to duration times and shape-qualities of the shock waves, and overally the analytical results agreed quite well with the experimental ones. Particularly, in cases that the frequencies, $1/(2{\times}duration\;time)$, of the shock waves were close to the critical speed of the rotor-bearing system, resonances occurred and the transient responses of the rotor were amplified.

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Dynamic Characteristics Analysis of Rotor-Bearing System with Support Structures (지지구조물을 고려한 로터-베어링 시스템의 동 특성해석)

  • 박성훈;오택열
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1997.10a
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    • pp.547-550
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    • 1997
  • The dynamic behavior of rotor-bearing system has been investigated using finite element method. A procedure is presented for dynamic modeling of rotor-bearing system which consist of shaft elements, rigid disk, flexible bearing and support structures. A finite element model including the effects of rotary inertia, shear deformation, gyroscopic moments is developed. Linear stiffness and damping coefficient are calculated for 3 lobe sleeve bearing. The whirl frequency, mode shape, stability and unbalance response of rotor system included effect of bearing coefficient and support structures are calculated.

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A Rotordynamic Analysis of a Industrial Centrifuge for Vibration Reduction (산업용 원심분리기의 진동저감을 위한 로터다이나믹 해석)

  • Kim, Byung-Ok;Lee, An-Sung
    • Transactions of the Korean Society for Noise and Vibration Engineering
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    • v.18 no.8
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    • pp.879-885
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    • 2008
  • A rotordynamic analysis was performed with a decant-type centrifuge, which is a kind of industrial centrifuge. The system is composed of screw rotor, bowl rotor, driving motors, gear box, and support rolling element bearings. These rotors have a rated speed of 4300 rpm, and were modeled utilizing a rotordynamic FE method for analysis, which was verified through 3-D FE analysis. Design goals are to achieve wide separation margins of lateral critical speeds, and favorable unbalance responses of the rotor in the operating range. Then, a complex analysis rotordynamic analysis of the system was carried out to evaluate its forward synchronous critical speeds and mode shapes, whirl natural frequencies, and unbalance responses under various balance grade. As a result of analysis, the rotordynamic analysis performed by separating a screw rotor and bowl rotor may cause an error in predicting critical speed of entire system. Therefore, the rotordynamic analysis of a coupled rotor combining a screw and bowl rotor must be performed in order to more accurately estimate dynamic characteristics of the decanter-type centrifuge as presented in this paper. Also, rolling element bearings with suitable stiffness should be selected to keep enough separation margin. In addition, in establishing balance grade of a screw and bowl rotor, ISO G2.5 balance grade is more recommended than ISO G6.3, in particular balancing correction of a screw rotor based on ISO G2.5 grade is strongly recommended.

Investigation of Unbalanced Mass of a Work Roll in a Cold Rolling Mill (냉간 압연기에서 작업롤의 질량 불평형에 관한 연구)

  • Kim, Young-Deuk;Kim, Chang-Wan;Park, Hyun-Chul
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.36 no.4
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    • pp.429-435
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    • 2012
  • An abrasion due to continuous friction between a work roll and strip causes the mass of the work roll to be unbalanced in the rolling process. We developed a mathematical model for the rolling mill considering the unbalanced mass and verified the model experimentally. The work roll was approximated as a rigid rotor with eccentricity, and the effect of the unbalanced mass on chatter vibration was investigated. The joint forces computed by quasistatic analysis were applied to the work roll in the rolling mill. Transient responses were obtained, and frequency analysis was performed by solving equations of motion using a direct integration method. Horizontal vibrations were more strongly affected by eccentricity than vertical vibrations. In the horizontal direction, a small eccentricity of 1% of the work roll radius considerably increased the amplitude of the chatter frequency.

A Study on the Development of Circular Hub type offshore wind power generation (Circular Hub타입 해상용 풍력발전기 개발에 관한 연구)

  • Lee, Byeongseong;Kim, Namhun;Oh, Jinseok;Kim, Donghyun
    • 한국신재생에너지학회:학술대회논문집
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    • 2010.06a
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    • pp.183.2-183.2
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    • 2010
  • 본 개발에서의 해상용 풍력발전기는 크게 허브와 블레이드를 합한 상부 구조물, 전기 발전기와 연결 조인트의 중간구조물, 각종 제어 장치가 들어있는 제어박스로 나누어진다. 상부 구조물은 Circular Hub 타입의 Darrieus 형상으로 양력(lift)을 이용한 회전력이 발생하며, Circular Hub 타입은 기존의 허브와 블레이드를 연결하여주는 암(arm)에 의해 유발되는 항력토크를 최소화 하기 위한 신개념 형상설계가 이루어 졌으며, 저속에서 우수한 회전특성을 가진다. 이는 바람을 받아 기계적 에너지로 전환 하는 역할을 하며, 풍력발전기의 성능에 직접적인 영향을 미친다. 중간구조물의 전기발전기는, 상부에서 발생된 기계적 에너지를 이용하여 전기적 에너지로 전환 하는 역할을 수행한다. 이렇게 전환된 전기적 에너지는 하부의 제어박스를 거쳐서 해상용 부이(buoy)의 하단에 위치한 베터리 뱅크로 전달, 저장되어 부이에서 쓰이는 전력을 충당하게 된다. 한편 본 개발은 풍력발전기의 공력하중 해석과 로터블레이드의 설계, 풍력발전기의 구조, 진동해석, MPPT 제어컨트롤러와 Breaking controller, 풍동 및 차량시험을 통한 성능평가 및 분석 등의 순으로 개발을 수행하였다.

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