• Journal of the korean academy of Pediatric Dentistry
• /
• v.30 no.1
• /
• pp.41-46
• /
• 2003

In order to evaluate the sufficient etching time for successful bonding and also minimizing unnecessary mineral loss, the enamel surface roughness analysis was performed using confocal laser scanning microscopy. Sixty extracted sound human molar teeth were imbedded in the center of acrylic cylinder using self-curing clear resin exposing buccal surface, and then polished with series of SiC paper(220, 500, 800, 1000, 2000, 4000 grit). Each specimen was randomly assigned to six groups(N=10). 37% phosphoric acid was applied to the polished tooth surface for 10, 20, 30, 40, 50, 60 seconds respectively and washed with copious water. After the surface roughness analysis, five roughness parameters(Sa, Sq, Sz, Sdr, Ra) were statistically analysed by ANOVA and Duncan post hoc test. We found that the all five parameters had higher roughness value in 30 seconds etching time, especially parameter Sz showed the lowest value in 10 seconds etching time and the highest value in 30 seconds etching time compared with the other etching times(p<0.05).

• Proceedings of the KIEE Conference
• /
• 2002.07c
• /
• pp.1612-1614
• /
• 2002

본 논문에서는 엑시머 레이저 조사에 의한 이온 농도의 분포 변화를 알아보기 위해 붕소 이온이 선택적으로 주입된 비정질 실리콘 박막 위에 XeCl (${\lambda}$=308nm) 엑시머 레이저를 조사하여 붕소이온의 수평 확산 현상을 관찰하였다. 도핑 농도의 분포를 알아보기 위해 불산/질산 용액에 의한 고농도 도핑 영역의 습식 식각을 이용하여 약 $10^{18}/cm^3$ 이하의 붕소이온을 가지는 실리콘 박막의 형태를 전자주사 현미경을 이용해서 관찰하였다. 실험 결과, $200mJ/cm^2$의 레이저 에너지가 조사될 경우, 약 100nm의 수평 확산이 일어났음을 확인 할 수 있었다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2008.06a
• /
• pp.23-24
• /
• 2008

본 논문에서는 폴리머(Polymer)기판에서의 레이저의 조사밀도와 기판의 온도 변화에 따라서 성장하는 ZnO박막의 구조적 특성을 알아보기위해 펄스 레이저 증착 법으로 PMMA(Polymethly Methacrylate)기판상에 ZnO박막을 형성하였다. 레이저의 조사 밀도는 2 J/$cm^2$에서 3 J/$cm^2$까지 기판의 온도는 상온에서부터 $50^{\circ}C$까지 변화시켰고 박막의 구조적 특성을 X-선 회절법(XRD)과 주사 전자 현미경(SEM)으로 관찰하였다.

• Journal of the Microelectronics and Packaging Society
• /
• v.8 no.4
• /
• pp.43-45
• /
• 2001

For photosensitive and micro-structuring in $Li_2O-A1_2O_3-SiO_2$glasses by laser treatment, Nd:YAG laser in 355 nm and 1064 nm wavelength was irradiated to the glass to investigate fracture characterization and optical changes. The fractured glass surfaces irradiated by 1064 nm laser was observed by Scanning Electron Microscope(SEM) and optical microscope, and optical changes caused by 355 nm later was identified from absorption spectra. In this study, it could be expected that the laser treatment technology will be utilized for 3-dimensional micro-structure, internal waveguide, optical memory by optical absorption changes in glass matrix.

• Clean Technology
• /
• v.19 no.3
• /
• pp.327-332
• /
• 2013

Space- and time-resolved in-situ optical and fluorescence microspectroscopy techniques have been applied to investigate the coke formation during aromatization of C5 paraffin and olefin over H-ZSM-5 crystal. In-situ UV/vis absorption measurement offers space- and time-resolved information for the coke formation. Different coking trends have been observed with respect to the location of a crystal as well as the reactant types. From in-situ confocal fluorescence microspectroscopy study, it is revealed that the concentration of certain species photo-excited at 488 nm becomes high at the central region, whereas the compounds emitting fluorescence by 561 nm laser move towards the boundary region of the crystal. The different fluorescence patterns obtained varying excitation lasers suggest the existence of distinct fluorescence emitting species having different degree of coke growth.

• Proceedings of the Korean Institute of Surface Engineering Conference
• /
• 2018.06a
• /
• pp.77-77
• /
• 2018

Panel level packaging (PLP) 공정은 차세대 반도체 패키징 기술로써 wafer level packaging 대비 net die 면적이 넓어 생산 단가 절감에 유리하다. PLP 공정에 적용되는 구리 재배선 층 (RDL, redistribution layer)은 두께 불균일도에 의해 전기 저항의 유동이 민감하게 변화하기 때문에 RDL의 두께를 균일하게 형성하는 것은 신뢰성 측면에서 매우 중요하다. 구리 RDL은 주로 도금 공정을 통해 형성되며, 균일한 도금막 형성을 위해 도금조에 평탄제를 첨가하여 도금 속도를 균일하게 한다. 도금막에 대한 흡착은 주로 평탄제의 imine 작용기에 포함된 질소 원자가 관여하며, imine 작용기의 4차화에 의한 평탄제의 흡착 정도를 제어하여 평탄제 성능을 개선할 수 있다. 본 연구에서는 도금 평탄제에 포함된 imine 작용기의 질소 원자를 4차화하여 구리 RDL의 도금 두께 불균일도를 제어하고자 하였다. 유기첨가제와 4차화 반응을 위해 알킬화제로써 dimethyl sulfate의 비율을 조절하여 각각 0, 50, 100 %로 4차화 반응을 진행하였다. 평탄제의 4차화 여부를 확인하기 위해 gel permeation chromatography (GPC) 분석을 실시하였다. 도금은 20 ~ 200 um의 다양한 배선 폭을 갖는 구리 RDL 미세패턴에서 진행하였으며, 4차화 평탄제를 첨가하여 광학 현미경과 공초점 레이저 현미경을 통해 도금막 표면과 두께에 대한 분석을 실시하였다. GPC 분석을 통해 4차화 반응 후 알킬화제에 의해 나타나는 GPC peak이 감소한 것을 확인하였다. 광학 현미경 및 공초점 레이저 현미경 분석 결과, 4차화된 질소 원자가 존재하지 않는 평탄제의 경우, 도금 시 도금막의 두께가 불균일하였으며 단면 분석 시 dome 형태가 관찰되었다. 또한 100 % 4차화를 실시한 평탄제를 첨가하여 도금 한 경우 마찬가지로 두께가 불균일한 dish 형태의 도금막이 형성되었다. 반면, 50 % 4차화를 적용한 평탄제를 첨가한 경우, 도금막 단면의 형태는 평평한 모습을 보였으며 매우 양호한 균일도를 가지는 것으로 확인되었다. 이로 인해 imine 작용기를 포함한 평탄제의 4차화 반응을 통해 구리 RDL의 단면 형상 및 불균일도가 제어되는 것을 확인하였으며, 4차화된 imine 작용기의 비율을 조절하여 높은 균일도를 갖는 구리 RDL 도금이 가능한 것으로 판단되었다.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.37 no.7
• /
• pp.669-674
• /
• 2013

A three-dimensional hydrogel scaffold has been proposed for the effective production of biomimetic intestinal villi to reduce ethical and cost problems caused by animal testing in pharmaceutical development. This study explores an experimental approach to develop a new technique based on laser machining and microdrilling processes to produce a plastic mold for the fabrication of a three-dimensional hydrogel scaffold. For process optimization, both the laser machining and the microdrilling experiments are conducted by varying the experimental conditions, and structural characterization of the mold and intestinal villi were performed using SEM (scanning electron microscope) and OM (optical microscope) images. Polycarbonate (PC) was used as a candidate material. The experimental results show that intestinal villi can be fabricated by both laser and microdrilling machining processes.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.6 no.1
• /
• pp.58-63
• /
• 2005

PTFE (polytetrafluoroethylene) thin films were prepared from the pellets of the graphite doped PTFE via pulsed laser ablation with 1064 nm Nd:YAG laser. The graphite powder converts the absorbed photon energy into thermal energy which is transmitted to nearby PTFE. The PTFE is decomposed by thermal process. The deposited films were transparent and crystalline. SEM (scanning electron microscopy) and AFM (atomic force microscopy) analyses indicated that the film surface morphology changed to fibrous structure with increasing thickness. The fluorine to carbon ratios of the film were 1.7 and molecular axis was parallel with (100) Si-wafer substrate. These results obtained by XPS (X-ray photoelectron spectroscopy), FTIR (fourier transform infrared spectroscopy) and XRD (X-ray diffraction).

• Korean Journal of Optics and Photonics
• /
• v.3 no.1
• /
• pp.67-72
• /
• 1992

Since the inception of the idea to develop an X-ray laser in 1960's, a rapid progress to demonstrate soft X-ray lasers in the wavelength region below 300$\AA$ has been made during the last ten years. Among many prospective proposals, the recombination scheme and the collisional exitation scheme have been most successful in achieving a significant gain. An appreciable single-pass amplification was achieved at 182 $\AA$ from CVI ions using the recombination scheme and at 206 and 290$\AA$ from the Se XXV ions using the collisional excitation scheme. The current research on X-ray lasers emphasizes the enhancement of amplification upto saturation and the extension of operating wavelength to shorter wavelengths, especially to the water window region between 23 and 44 $\AA$. X-ray lasers are expected to open many application fields, such as X-ray laser microscopy, X-ray holography, X-ray lithography, and more, in the near future.

• Korean Journal of Optics and Photonics
• /
• v.10 no.3
• /
• pp.201-207
• /
• 1999

The fiber-optical confocal scanning interference microscope with a simple configuration was constructed with a 4-port fiber-optic coupler, and the new method based on the phase shifting method was proposed for surface profiling by the system. In the method, the height of a specimen was determined from the phase of confocal beam. It was verified experimentally that the method was applicable to even the confocal interference microscope with a long-wavelength source and a low NA objective, and that the scanning time could be drastically reduced compared with the conventional method. Finally, it was found that our method is less sensitive to the variation of surface reflectivity than the conventional method.