• Proceedings of the Korean Society for Rock Mechanics Conference
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• 1999.03a
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• pp.17-23
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• 1999

본 논문에서는 절리면 거칠기를 정밀하게 수치화 하기 위해 레이저 변위계를 이용한 3차원 거칠기 측정기를 구동시키는 프로그램 제작 및 여러 가지 상태의 절리면에 대해 수치화를 실시하여 각종 거칠기 파라미터를 결정한 후 오차분석을 실시하여 이 기계를 이용한 측정의 타당성을 검증하였다. 동일한 절리면에 대해 물리적인 접촉에 의한 3차원 거칠기 측정기로부터 얻어진 거칠기 파라미터와 레이저 변위계를 이용한 측정기로부터 얻어진 것들 사이의 관계를 살펴보았고, 레이저 측정기에 의해 수치화된 절리면 거칠기 파라미터 사이의 상관관계를 조사하였다. 연구에 사용한 시료는 황등화강암, 여산대리석의 2종류이며, 절리형상 측정을 위한 절리는 인장균열 발생장치를 이용하여 인공적으로 제작하였다. (중략)

• Proceedings of the Optical Society of Korea Conference
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• 2001.02a
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• pp.92-93
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• 2001

주파수 안정화 레이저 광원은 10-6 이상의 상대 불확도가 필요한 간섭계에서 널리 쓰이고 있으며 특히 변위 측정 시스템에서는 반드시 쓰이고 있다. 상용화된 많은 변위 측정 시스템은 신호 대 잡음비가 우수하고 광학계의 정렬이 더 쉬운 헤테로다인 방식을 채택하고 있으며 이를 위해서 서로 수직 선형 편광인 다른 주파수의 광을 내보내는 광원이 필요하다. 현재 헤테로다인 변위 측정 시스템에 쓰이고 있는 광원은 이중 주파수 광원을 만드는 방식에 따라 지만 효과(Zeeman effect)를 이용한 지만 레이저(HP사)와 음향-광 변조기(Acousto-optic modulator)를 이용한 이중 주파수 레이저(Zy해사)가 있다. (중략)

• Journal of the Korea Academia-Industrial cooperation Society
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• v.8 no.5
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• pp.1007-1012
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• 2007

A novel Michelson interferometer controlled with a feedback circuit(MIFC) has been developed and its performance has been evaluated. This new interferometer can measure the displacement of the sample by directly reading the feedback bias applied to the PZT whose piezoelectric characteristic is known. The experimental result showed that the step height the silicon membrane measured by using MIFC was actually same with the value measured by SEM, which confirms that MICS is an easy and accurate method for the nano-scale displacement measurement.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.1085-1087
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• 2002

Deformation of soft tissue is known inhomogeneous and non-linear in general. In this study, we propose a measurement methodology of local/global strain during soft tissue elongation precisely using laser extensometer which has high accuracy, resolution and is possible to measure global/local strain. The mechanical tensile test are performed on tibialis cranialis, flexor hallucis longus, extensor digitorum longus of swine hindlimb. In order to measure target displacement, reflective marker is attached to detect elongation on specimen using surgical adhesive. The result of this study is to show that laser extensometer is valid to measure longitudinal elongation which is inhomogeneous and non-linear fur soft tissue.

• Journal of Power System Engineering
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• v.10 no.2
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• pp.99-103
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• 2006

The laser interferometer has been used for measurement of the micro displacement error. Although the laser interferometer is widely accepted as a tool for measurement of motion accuracy, the set-up procedure is time-consuming because of the strict requirement on alignment between a laser head and optic units. This paper addresses the development of a laser interferometer to measure the micro displacement for a micro machine. The portable laser interferometer which integrates a laser probe and optics, is developed for the convenient measurement. For the experiment, moving mirror set up on the micro stage. The velocity decoding board is also added to calculate doppler shift frequency directly. The output signal is obtained and analyzed by LabView. Finally experiments are found out the relation between micro displacement and output signal.

• Transactions of the Korean Society of Mechanical Engineers
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• v.16 no.10
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• pp.1900-1907
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• 1992

This paper presents the vibration mode, natural frequencies and amplitudes of the circular plate due to the changes of the boundary conditions by varying free arc angles. The vibration mode, amplitudes and natural frequencies of the circular plate are obtained by time-average holographic interferometry and laser doppler vibrometer. The vibration modes of the circular plate with the mixed boundary conditions are found from the 1st mode to the 4th mode. The curve shapes of the natural frequency ratios obtained from this study are in a good agreement with other results obtained by numerical analysis. The displacement curves obtained from time average holographic interferometry and laser doppler vibrometer agree well in case of large amplitude, but show a little difference in case of small amplitude.

• Journal of the Korean GEO-environmental Society
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• v.15 no.12
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• pp.71-77
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• 2014

Heavy rainfall induces many disasters including slope failure and infrastructure collapse. In this point of view, rainfall-simulated centrifugal model test can be a reasonable tool to evaluate the stability of geotechnical structure. In order to obtain the displacements of a model in centrifugal model test, in general, LVDT and laser displacement sensor are used. However, when the rainfall is simulated, the LVDT has the problem of excessive infiltration into the model ground, and the laser displacement sensor provides the measuring result with inaccuracy due to the dispersion of the laser radiation. Hence, in this study, horizontal displacement sensor for rainfall-simulated centrifugal model test was developed. This sensor produced with a thin elastic steel plate and gave the accurate relationship between the displacement and the strain.

• Korean Journal of Optics and Photonics
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• v.8 no.4
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• pp.267-276
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• 1997

We set up a four-wave holographic interferometer using a symmetric dual-beam illumination which is to measure in-plane and out-of-plane displacement simultaneously. In order to acquire the displacement phase map we applied the phase-shifting method and removed the noise of the phase map with least-squares fitting. In this approach the access to information relative to both the difference and sum of phases existing in the two arms of four-wave holographic interferometer was allowed. As a result, in-plane and out-of-plane displacement was measured to the accuracy of λ/40 and λ/100, respectively at λ=632.8nm

• Korean Journal of Optics and Photonics
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• v.28 no.2
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• pp.75-82
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• 2017

We present a new type of receiver-transmitter optical system that can be adapted to the sensor head of a displacement-measuring interferometer. The interferometer is utilized to control positioning error and repetition accuracy of a wafer, down to the order of 1 nm, in a semiconductor manufacturing process. Currently, according to the tendency of scale-up of wafers, an interferometer is demanded to measure a wider range of displacement. To solve this technical problem, we suggest a new type of receiver-transmitter optical system consisting of a GRIN lens-Collimating lens-Afocal lens system, compared to conventional receiver-transmitter using a single collimating lens. By adapting this new technological optical structure, we can improve coupling efficiency up to about 100 times that of a single conventional collimating lens.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.5 no.2
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• pp.22-26
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• 2006

This paper addresses the development of a laser interferometer to measure micro displacement for a micro system. The laser interferometer is able to measure micro displacement during a few micro seconds with non-contact. In order to employ the interferometer, the displacement calibration experiment should be required. For the experiment, a laser probe installed on the optical table with optical devices and a micro stage. The velocity decoding board is also added to calculate doppler shift frequency directly. The output signal is processed by LabView. Finally experiments are found out the relation between displacement and output signal.