• Title/Summary/Keyword: 디스플레이 플라즈마

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TCO 박막의 결정 구조 및 표면 특성에 따른 OLED 소자의 특성

  • Lee, Bong-Geun;Lee, Yu-Rim;Lee, Gyu-Man
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.11a
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    • pp.183-183
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    • 2009
  • OLED소자의 양극재료로써 현재는 산화인듐주석(ITO : indium tin oxide) 박막이 널리 이용되고 있다. 그러나 낮은 전기 비저항과 높은 투과도를 갖는 ITO 박막을 얻기 위해서는 $300^{\circ}C$ 이상의 고온에서 성막되어야 하며, 원료 물질인 인듐의 수급량 부족으로 인한 문제점과 독성, 저온증착의 어려움, 스퍼터링 시 음이온 충격에 의한 막 손상으로 저항의 증가의 문제점이 있고, 또한 유기발광소자의 투명전극으로 쓰일 경우에 유기물과의 계면 부적합성, 액정디스플레이의 투명전극으로 사용될 경우에 $400^{\circ}C$정도의 놓은 온도와 수소 플라즈마 분위기에서 장시간 노출 시 열화로 인한 광학적 특성변화가 문제가 된다. 이러한 문제점을 지닌 ITO 박막을 대체할 수 있는 물질로 산화 인듐아연(lZO) 박막이 많은 각광을 받고 있다. IZO(Indium Zinc Oxide) 박막은 저온 ($100^{\circ}C$ 이상)에서 증착이 가능하고 추가적인 열처리 없이도 가시광 영역에서 90% 이상의 광 투과도와 ${\sim}10^{-4}{\Omega}cm$ 이하의 낳은 전기 비저항을 갖는 것으로 알려져 있다. 이러한 IZO박막은 성막 후 고온의 열처리 과정이 필요 없기 때문에 폴리카보네이트와 같은 유기물 기판을 사용하여 제작 가능한 유연한 평판형 표시 소자의 제작에도 적용될 수 있다. IZO(Indium Zinc Oxide) 박막은 상온 공정에서도 우수한 전기적, 광학적, 표면 특성을 나타낼 뿐만 아니라 양극재료로써 높은 일함수를 가지고 있어 고효율의 유기 발광 소자를 구현하는데 유리한 재료라 판단된다. 본 연구에서는 TCO 박막의 면 저항과 표면 거칠기가 OLED 소자의 성능에 미치는 영향을 조사하였다. R.F Magnetron Sputtering을 이용하여 투명 전도막을 성막 형성 하였으며, 기판온도와 증착과정에서 주입되는 산소, 수소의 유랑 변화가 박막의 구조적, 전기적 특성에 어떠한 영향 미치는 것인가를 자세히 규명하였다 ITO 와 IZO박막은 챔버 내 다양한 가스 분위기(Ar, $Ar+O_2$ and $Ar+H_2$) 에서 R.F Magnetron Sputtering 방법으로 증착했다. TCO박막의 구조적인 이해를 돕기 위해서 X-ray diffraction 과 FESEM으로 분석했다. 광학적 투과도와 박막의 두께는 Ultraviolet Spectrophotometer(Varian, cary-500)와 Surface profile mersurement system으로 각각 측정하였다. 면저항, charge carrier농도, 그리고 TCO박막의 이동성과 길은 전기적특성은 Four-point probe와 Hall Effect Measurement(HMS-3000)로 각각 측정한다. TCO 박막의 표면 거칠기에 따른 OLED소자의 성능분석 측면에서는 TCO 박막의 표면 거칠기 조절을 위해 photo lithography 공정을 사용하여 TCO 박막을 에칭 하였다. 미세사이즈 패턴 마스크가 사용되고 에칭의 깊이는 에칭시간에 따라 조절한다. TCO박막의 표면 형태는 FESEM과 AFM으로 관찰하고 그리고 나서 유기메탈과 음극 전극을 연속적으로 TCO 박막위에 증착한다. 투명전극으로 사용되는 IZO기판 상용화를 위해 IZO기판 위에 $\alpha$-NPB, Alq3, LiF, Al순서로 OLED소자를 제작하였다. 전류밀도와 전압 그리고 발광과 OLED소자의 전압과 같은 전기적 특성은 Spectrometer (minolta CS-1000A) 에 의하여 I-V-L분석을 했다.

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A Printing Process for Source/Drain Electrodes of OTFT Array by using Surface Energy Difference of PVP (Poly 4-vinylphenol) Gate Dielectric (PVP(Poly 4-vinylphenol) 게이트 유전체의 표면에너지 차이를 이용한 유기박막트랜지스터 어레이의 소스/드레인 전극 인쇄공정)

  • Choi, Jae-Cheol;Song, Chung-Kun
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.48 no.3
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    • pp.7-11
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    • 2011
  • In this paper, we proposed a simple and high-yield printing process for source and drain electrodes of organic thin film transistor (OTFT). The surface energy of PVP (poly 4-vinylphenol) gate dielectric was decreased from 56 $mJ/m^2$ to 45 $mJ/m^2$ by adding fluoride of 3000ppm into it. Meanwhile the surface energy of source and drain (S/D) electrodes area on the PVP was increased to 87 $mJ/m^2$ by treating the areas, which was patterned by photolithography, with oxygen plasma, maximizing the surface energy difference from the other areas. A conductive polymer, G-PEDOT:PSS, was deposited on the S/D electrode areas by brushing painting process. With such a simple process we could obtain a high yield of above 90 % in $16{\times}16$ arrays of OTFTs. The performance of OTFTs with the fluoride-added PVP was similar to that of OTFTs with the ordinary PVP without fluoride, generating the mobility of 0.1 $cm^2/V.sec$, which was sufficient enough to drive electrophoretic display (EPD) sheet. The EPD panel employing the OTFT-backpane successfully demonstrated to display some patterns on it.

Thermal Stability of CaMgSi2O6:Eu2+ Phosphor by EPR Measurement (EPR 측정에 의한 CaMgSi2O6:Eu2+ 형광체의 열적 안정성 연구)

  • Heo, Kyoung-Chan;Kim, Yong-Il;Ryu, Kwon-Sang;Moon, Byung-Kee
    • Journal of the Korean Magnetics Society
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    • v.15 no.4
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    • pp.246-249
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    • 2005
  • The blue-color emitting phosphor powder, $CaMgSi_{2}O_6:Eu^{2+}(CMS:Eu^{2+})$ was synthesized by the solid-state reaction method. The synthesized powder was annealed from room temperature to $1,100^{\circ}C$ in air. Its PL property and valence state of Eu atoms was measured by the photoluminescence (PL) and the electron paramagnetic resonance (EPR) spectrometers, respectively. The PL intensity was stable to $700^{\circ}C$, but drastically decreased to $1,100^{\circ}C$. The behavior of EPR intensity was very similar to the PL intensity. The EPR measurement showed that decreased intensity of the PL was caused to the oxidation from the ion $Eu^{2+}$ to $Eu^{3+}$ ions. The EPR spectrometer was powerful as a tool that could distinguish between the valence states of Eu atom as a dopant in various phosphors.

소다라임 유리기판상 다층박막 (SiO2/Nb2O5/SiO2/Nb2O5/SLG) 증착 및 저반사 특성 연구

  • Choe, Seung-Hun;Park, Jung-Jin;Lee, Jong-Geun;Choe, Jeong-Gyu;Kim, Jin-Ha;Lee, Dong-Min;Jeong, Ui-Cheon;Chae, Jin-Gyeong;Jeong, Myeong-Hyo;Son, Yeong-Ho
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.289-289
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    • 2012
  • 터치패널은 키보드나 마우스와 같은 입력장치를 사용하지 않고, 스크린에 손가락, 펜 등을 접촉하여 입력하는 방식이다. 누구나 쉽게 입력할 수 있는 장점으로 인해 기존에는 현금인출기, 키오스크 등 공공분야에 주로 많이 사용되어 왔으나, 최근의 터치스크린은 휴대폰, 게임기, 네비게이션, 노트북 모니터 등 개인정보기기의 입력장치로 활용분야가 넓어져가고 있다. 최근의 정전용량 방식의 터치패널은 디스플레이 패널 위에 올여지는 형태의 Add on type이며, 테블렛의 출현으로 터치패널의 사이즈가 커지면서 인듐산화물 투명성 전도막의 두께가 두꺼워지고, 이로 인하여 광학적 특성인 투과율이 저하되는 문제가 발생하여 투과율을 높여주기 위한 새로운 전도박막 제조방법이 요구되는 상황이다. 현재의 고글절 산화물(TiO2)과 저굴절 산화물(SiO2)의 적층형태의 저반사 특성의 다층막은 주로 플라즈마 보조의 전자빔 증착기를 이용하여 제조되기 때문에, 저반사 특성이 우수하지만 대면적 크기의 대량생산에는 적합하지가 않다. 그리고 태양전지의 에너지 변환효율도 태양전지로 흡수되는 태양광의 량에 크게 의존하기 때문에, 태양전지로 흡수되는 태양광 량을 높이기 위하여 태양전지의 가장 위층에 혹은 모듈 제작시 커버유리의 내부에 저반사 특성을 갖는 박막을 코팅한다. 특히 박막태양전지의 경우는 대면적의 유리위에 저반사 코팅을 해야 한다. 본 연구에서는 In-line magnetron sputtering system을 사용하여 소다라임 유리 기판 위에 고글절 산화물(Nb2O5)과 저굴절 산화물(SiO2)의 2층 적층형태의 "SiO2/Nb2O5/SiO2/Nb2O5/SLG" 다층 박막을 증착하고, 저반사의 광학적 특성을 하였고, 이를 논하고자한다. 일반적으로 빛이 투과되는 투명한 기판이 공기층에 노출되어있을 경우에 기판의 양면에서 공기층과의 계면에서 각각 4%의 반사율 즉, 총 8%의 반사율을 갖는데, 본 연구의 다층 박막에서는 530에서 540nm 파장 영역에서 투과율은 95% 이상, 반사율은 4.8% 이하이었다. 이 결과는 터치패널과 박막태양전지 시장의 Needs에 대응할 수 있기 때문에 산업의 응용측면에서 매우 중요한 연구 성과를 얻었다고 말할 수 있다. (본 연구는 지식경제부 사업화연게기술개발 연구지원금으로 일부 이루어졌음).

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The Development of Scrubber for F-gas Reduction from Electronic Industry Using Pressure Swing Adsorption Method and Porous Media Combustion Method (압력순환흡착법과 다공성 매체 연소법을 이용한 전자산업 불화가스 저감 스크러버 개발)

  • Chung, Jong Kook;Lee, Ki Yong;Lee, Sang Gon;Lee, Eun Mi;Mo, Sun Hee;Lee, Dae Keun;Kim, Seung Gon
    • Clean Technology
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    • v.23 no.2
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    • pp.181-187
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    • 2017
  • The perfluorocompounds (PFCs) emitted from the semiconductor and display manufacture is treated by abatement systems which use various technologies, such as combustion, thermal, plasma, catalyst. However, it is required that the system should overcome their drawbacks with excess energy consumption and low removal efficiency. The new technology using combination of pressure swing adsorption and excess enthalpy combustion for the reduction of PFCs emissions were developed and analyzed its characteristics. PFCs concentration ratio and PFCs loss factor were calculated from measuring concentration of PFCs at the calculated by comparing concentration of PFCs at the combustor's inlet and outlet. There were performance evaluations with various gas flow for comparing energy consumption and removal efficiency with existing equipments. The concentration ratio and the loss factor of PFCs were 1.65, 8.2%, respectively, when the total gas flow of the pressure swing absorption (PSA) inlet was 204 liter per minute (LPM) and $CF_4$ concentration was 1412 ppm. In comparison with existing system at constant condition, $CF_4$ removal efficiency for a porous media combustion (PMC) showed the improvement more than 16% and the consumed energy was also reduced up to approximately 41%. Then, the total gas flow introduced into PMC and $CF_4$ concentration were 91-LPM and 2335 ppm, respectively, and the destruction and removal efficiency of $CF_4$ was about 96% at 19-LPM $CH_4$, and 40-LPM $O_2$.

A Study on Attention Mechanism in DeepLabv3+ for Deep Learning-based Semantic Segmentation (딥러닝 기반의 Semantic Segmentation을 위한 DeepLabv3+에서 강조 기법에 관한 연구)

  • Shin, SeokYong;Lee, SangHun;Han, HyunHo
    • Journal of the Korea Convergence Society
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    • v.12 no.10
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    • pp.55-61
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    • 2021
  • In this paper, we proposed a DeepLabv3+ based encoder-decoder model utilizing an attention mechanism for precise semantic segmentation. The DeepLabv3+ is a semantic segmentation method based on deep learning and is mainly used in applications such as autonomous vehicles, and infrared image analysis. In the conventional DeepLabv3+, there is little use of the encoder's intermediate feature map in the decoder part, resulting in loss in restoration process. Such restoration loss causes a problem of reducing segmentation accuracy. Therefore, the proposed method firstly minimized the restoration loss by additionally using one intermediate feature map. Furthermore, we fused hierarchically from small feature map in order to effectively utilize this. Finally, we applied an attention mechanism to the decoder to maximize the decoder's ability to converge intermediate feature maps. We evaluated the proposed method on the Cityscapes dataset, which is commonly used for street scene image segmentation research. Experiment results showed that our proposed method improved segmentation results compared to the conventional DeepLabv3+. The proposed method can be used in applications that require high accuracy.

Modified HOG Feature Extraction for Pedestrian Tracking (동영상에서 보행자 추적을 위한 변형된 HOG 특징 추출에 관한 연구)

  • Kim, Hoi-Jun;Park, Young-Soo;Kim, Ki-Bong;Lee, Sang-Hun
    • Journal of the Korea Convergence Society
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    • v.10 no.3
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    • pp.39-47
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    • 2019
  • In this paper, we proposed extracting modified Histogram of Oriented Gradients (HOG) features using background removal when tracking pedestrians in real time. HOG feature extraction has a problem of slow processing speed due to large computation amount. Background removal has been studied to improve computation reductions and tracking rate. Area removal was carried out using S and V channels in HSV color space to reduce feature extraction in unnecessary areas. The average S and V channels of the video were removed and the input video was totally dark, so that the object tracking may fail. Histogram equalization was performed to prevent this case. HOG features extracted from the removed region are reduced, and processing speed and tracking rates were improved by extracting clear HOG features. In this experiment, we experimented with videos with a large number of pedestrians or one pedestrian, complicated videos with backgrounds, and videos with severe tremors. Compared with the existing HOG-SVM method, the proposed method improved the processing speed by 41.84% and the error rate was reduced by 52.29%.

Hangeul detection method based on histogram and character structure in natural image (다양한 배경에서 히스토그램과 한글의 구조적 특징을 이용한 문자 검출 방법)

  • Pyo, Sung-Kook;Park, Young-Soo;Lee, Gang Seung;Lee, Sang-Hun
    • Journal of the Korea Convergence Society
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    • v.10 no.3
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    • pp.15-22
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    • 2019
  • In this paper, we proposed a Hangeul detection method using structural features of histogram, consonant, and vowel to solve the problem of Hangul which is separated and detected consonant and vowel The proposed method removes background by using DoG (Difference of Gaussian) to remove unnecessary noise in Hangul detection process. In the image with the background removed, we converted it to a binarized image using a cumulative histogram. Then, the horizontal position histogram was used to find the position of the character string, and character combination was performed using the vertical histogram in the found character image. However, words with a consonant vowel such as '가', '라' and '귀' are combined using a structural characteristic of characters because they are difficult to combine into one character. In this experiment, an image composed of alphabets with various backgrounds, an image composed of Korean characters, and an image mixed with alphabets and Hangul were tested. The detection rate of the proposed method is about 2% lower than that of the K-means and MSER character detection method, but it is about 5% higher than that of the character detection method including Hangul.

Improved Skin Color Extraction Based on Flood Fill for Face Detection (얼굴 검출을 위한 Flood Fill 기반의 개선된 피부색 추출기법)

  • Lee, Dong Woo;Lee, Sang Hun;Han, Hyun Ho;Chae, Gyoo Soo
    • Journal of the Korea Convergence Society
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    • v.10 no.6
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    • pp.7-14
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    • 2019
  • In this paper, we propose a Cascade Classifier face detection method using the Haar-like feature, which is complemented by the Flood Fill algorithm for lossy areas due to illumination and shadow in YCbCr color space extraction. The Cascade Classifier using Haar-like features can generate noise and loss regions due to lighting, shadow, etc. because skin color extraction using existing YCbCr color space in image only uses threshold value. In order to solve this problem, noise is removed by erosion and expansion calculation, and the loss region is estimated by using the Flood Fill algorithm to estimate the loss region. A threshold value of the YCbCr color space was further allowed for the estimated area. For the remaining loss area, the color was filled in as the average value of the additional allowed areas among the areas estimated above. We extracted faces using Haar-like Cascade Classifier. The accuracy of the proposed method is improved by about 4% and the detection rate of the proposed method is improved by about 2% than that of the Haar-like Cascade Classifier by using only the YCbCr color space.

A Study on the Improvement of Skin Loss Area in Skin Color Extraction for Face Detection (얼굴 검출을 위한 피부색 추출 과정에서 피부색 손실 영역 개선에 관한 연구)

  • Kim, Dong In;Lee, Gang Seong;Han, Kun Hee;Lee, Sang Hun
    • Journal of the Korea Convergence Society
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    • v.10 no.5
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    • pp.1-8
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    • 2019
  • In this paper, we propose an improved facial skin color extraction method to solve the problem that facial surface is lost due to shadow or illumination in skin color extraction process and skin color extraction is not possible. In the conventional HSV method, when facial surface is brightly illuminated by light, the skin color component is lost in the skin color extraction process, so that a loss area appears on the face surface. In order to solve these problems, we extract the skin color, determine the elements in the H channel value range of the skin color in the HSV color space among the lost skin elements, and combine the coordinates of the lost part with the coordinates of the original image, To minimize the number of In the face detection process, the face was detected using the LBP Cascade Classifier, which represents texture feature information in the extracted skin color image. Experimental results show that the proposed method improves the detection rate and accuracy by 5.8% and 9.6%, respectively, compared with conventional RGB and HSV skin color extraction and face detection using the LBP cascade classifier method.