• 대한전기학회:학술대회논문집
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• 대한전기학회 1996년도 하계학술대회 논문집 B
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• pp.1146-1148
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• 1996

In this paper, uncertain parameters of the heat transfer model of a Dynamically Tuned Gyroscope (DTG) are estimated by the Recursive Least Squares (RLS) method. Also, using this model, a temperature controller for a DTG is designed. As the temperature controller, a PI controller is used. It is presented that a controller can be easily designed when the heat transfer model of a DTG is used. By simulations and experiments, it is shown that the estimated heat transfer model is appropriate and the desired performance of the temperature controller is satisfied.

• 한국정밀공학회지
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• 제17권11호
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• pp.81-87
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• 2000

A new resonator that is fabricated by single polysilicon layer process is presented. The resonator can move in two orthogonal direction on the plane parallel to the substrate. And the resonant frequencies of the two modes are intrinsically designed to be identical since the overall structure of the resonator is symmetric about the two directions of motion. Since the resonator ideally has two identical vibration mode, it can be applied to various micro-devices that requires multi DOF motion, especially to microgyroscopes. To investigate the feasibility of application of the resonator, dynamic model of the resonator including the nonlinear behavior of driving electrodes is derived and evaluated with the fabricated one, and the self-tuning characteristics are proved though experiments.