• 제목/요약/키워드: 단면 반사율

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Design of silicon subwavelength structures with extremely transparent property for mid-infrared applications (고투과특성을 지닌 중적외선용 무반사 실리콘 서브파장구조 설계)

  • Sin, Myeong-Gyu;Lee, Jong-Heon;Song, Yeong-Min
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.282.2-282.2
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    • 2016
  • 중적외선 물질에는 Ge, ZnS, ZnSe, Si 등이 있으나 고굴절율이므로 반사가 매우 크게 발생을 한다. 이를 줄이기 위해 다층 박막 무반사 코팅을 일반적으로 사용하지만 열에 취약함, 적합한 물질을 찾는 것이 매우 어려움, 다층 박막으로 제작 시 두께가 매우 두꺼워짐의 단점이 있다. 또한 Ge, ZnS, ZnSe 의 소재는 가격이 Silicon에 비해 매우 비싸다. 그러므로 RCWA(Rigorous Coupled Wavelength Analysis) 시뮬레이션을 이용하여 상대적으로 저렴한 소재임에도 고투과성을 지닌 중적외선용 무반사 실리콘 서브파장구조(Subwavelength Structures, SWSs)를 제안한다. 본 연구에서는 원기둥, 원뿔, 파라볼라, 잘린 원뿔(truncated cone) 등의 형태에 따른 투과율 특성을 파악하여 최적구조가 파라볼라 형태임을 증명하였다. 또한 서브파장구조의 주기, 높이의 특성을 조절하여 공정 시의 종횡비(Aspect ratio)를 고려한 최적형태를 제안하였다. 중적외선 영역($3{\mu}m{\sim}5{\mu}m$)에서 일반 Silicon의 적외선 영역에서 평균 55%의 낮은 투과율을 보이나, 양면에 무반사 구조를 설계 하였을 때 평균 94%의 높은 투과율을 확인할 수 있다. 다양한 형태를 가진 무반사 실리콘 서브파장 구조물을 RCWA 방식으로 계산함으로서 특성을 파악하며 최적구조를 설계 할 수 있다. 또한 단면에 비하여 양면으로 SWSs 구조를 제작할 시 매우 두드러지는 투과특성을 확인할 수 있다. 고굴절율이지만 뛰어난 투과특성을 이용하여 초소형 적외선 카메라 렌즈 뿐만 아니라 적외선 광검출기, 광학 필터 등에 이용 가능할 것으로 예상된다.

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Real-time controlled deposition of anti-reflection and high-reflection coatings for semiconductor laser (반도체 레이저 단면의 실시간 무반사 및 고반사 코팅)

  • 김효상;박흥진;황보창권;김부균;김형문;주흥로
    • Korean Journal of Optics and Photonics
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    • v.8 no.5
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    • pp.395-402
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    • 1997
  • We have obtained the optimum thickness of anti-reflection(AR) coating on one of facets of a $\1.55mu\textrm{m}$ InGaAsP MQW FP semiconductor laser by in-site monitoring of the light emitted from the rear facet during the film deposition on the fore facet. The optimum thickness of $SiO_x$ thin film whose refractive index is 1.85 was found to be 188 nm. The reflectivity of the coated facet was calculated by the threshold current ratio of before and after AR coating, which was obtained from exprimental data, and it was about 2$\times$ $10^{-4}$. The results show that the output power is increased by 87% at bias current 60 mA, the slope efficiency is increased by 3.4 times, and the threshold current is increased by 2.64 times. By in-situ depositing of the $Si/SiO_2$ thin film HR coating on the rear facet, the output power was increased by 160% than before the AR and HR coatings, the slope efficiency was increased by 3.8 times, the threshold current was increased by 1.07 times, which is similar to the value of before AR coating. Due to the AR and HR coatings the output light power characteristics were enhanced.

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Reflection and Transmission Coefficients by a Circular Pile Breakwater (원형 파일 방파제에 의한 반사율과 투과율)

  • Cho, Il-Hyoung;Koh, Hyeok-Jun
    • Journal of Korean Society of Coastal and Ocean Engineers
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    • v.19 no.1
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    • pp.38-44
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    • 2007
  • Using the mathematical model suggested by Bennet et al.(1992), the reflection and transmission coefficients by a circular pile breakwater has been investigated in the framework of potential theory. Flow separation due to sudden contraction and expansion is generated and is the main cause of significant energy loss. Therefore, evaluation of exact energy loss coefficient is critical to enhance the reliability of mathematical model. To obtain the energy loss coefficient, 2-dimensional turbulent flow is analyzed using the FLUENT commercial code. The energy loss coefficient can be obtained from the pressure difference between upstream and downstream. Energy loss coefficient is the function of porosity and the relation equation between them is suggested throughout the curve fitting processing. To validated the suggested relation, comparison between the analytical results and the experimental results is made for four different porosities with good agreement.

The Effect of Front Facet Reflections on the Reflectivity Spectrum of Bragg Reflector structures (단면 반사율이 Bragg Reflector 구조의 전체 반사율 스펙트럼에 미치는 효과)

  • 김부근
    • Proceedings of the Optical Society of Korea Conference
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    • 1991.06a
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    • pp.203-208
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    • 1991
  • We present an analytic equation for the reflectivity spectrum of a Bragg reflector in terms of the front mirror reflectivity, due to the refractive index difference between the refractive index of outside medium and the average refractive index of Bragg reflector structures, and the reflectivity of a Bragg reflector calculated by the coupled wave method. We show that even Fresnel reflection causes the reflectivity spectrum of a bragg reflector to be very different from that of Bragg reflectors calculated by the coupled wave method. The reflectivity spectrum of a Bragg reflector is dramatically changed because the interference effect between the reflected wave from the front facet and that from the Bragg reflector is changed due to the difference of a phase change from a Bragg reflector when the sequence of layers in a Bragg reflector is changed.

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Comparison of the Numerical Methods for the Optimum Antireflection Coatings of Laser Diode Facets (레이저 다이오드 단면의 최적 무반사 코팅을 위한 수치해석 방법 비교)

  • 이세진;김부균
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.18 no.12
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    • pp.1935-1944
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    • 1993
  • We calculate the optimum refractive index and thickness for a single layer antireflection coating as a function of active layer thickness of a laser diode using three different simplified numerical methods. The difference of the results using three methods comes from that of the effective refractive index of a laser used in three methods. We compare three simplified methods to an exact method to check the validity of the simplified methods. We conclude that the simplified method, choosing the effective index of a laser diode as a function of incidence angle of each plane wave composing of a guided mode agree well to an exact method for both TE and TM modes and the cases of strongly and weakly guiding.

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HIPIMS를 활용한 SiO2 반사방지막 코팅 제조 및 특성분석

  • Kim, Gyeong-Hun;Kim, Seong-Min;Lee, Geun-Hyeok;An, Se-Hun;Kim, Dong-Hwan;Han, Seung-Hui
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.168.2-168.2
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    • 2014
  • 반사방지막 코팅(Anti-reflection coating)은 태양전지(Solar cell), 발광다이오드(LED) 등의 반사율을 낮추어 효율을 증대시키기 위하여 사용되고 있다. 본 실험에서는 유리 기판 위에 실리콘 타겟을 이용한 반응성 high power impulse magnetron sputtering (HIPIMS) 장비를 활용하여, 높은 공정 압력(High-pressure)에서 펄스폭(Pulse width)을 조절하여 $SiO_2$ 반사방지막 코팅층을 형성하였다. 또한, 기공이 더 많은 박막을 제작하기 위해 빗각증착(Oblique-angle deposition)을 적용하여 더 좋은 광학 특성을 갖는 반사방지막 코팅층을 형성하였다. UV-Vis spectrometer를 이용하여, 380~800 nm 파장에서 투과율(Transmittance)을 측정하여 비교, 분석하였다. Ellipsometer를 이용하여 $SiO_2$ 박막층의 굴절률(Refractive index)을 측정한 결과, 반사방지막 코팅층 내부 기공에 따라 다양한 굴절률을 가지는 것을 확인할 수 있었다. 또한, 코팅층 내부 기공의 형상을 확인하기 위해 SEM(Secondary electron microscopy)을 활용하여 코팅층 단면(Cross section)을 측정하였다. 이를 활용하여 낮은 굴절률을 갖는 반사방지용 $SiO_2$ 코팅층을 형성하여 태양전지의 광 변환 효율을 상승 시킬 수 있고, 발광다이오드의 광 추출 효율을 증가시킬 있을 것으로 여겨진다.

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Characteristic of Wave Diffraction and Reflection for Irregular Waves in SWASH Model Around Small Port Structures (소규모 항만 구조물 주변에서 불규칙파에 대한 SWASH 모형의 반사 및 회절)

  • Kwon, Kyong Hwan;Park, Chang Wook;Park, Il Heum;Kim, Jong Hoon
    • Journal of Korean Society of Coastal and Ocean Engineers
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    • v.31 no.6
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    • pp.468-477
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    • 2019
  • The numerical model of Boussinesq approximation, which is mainly used for evaluating the port calmness due to the irregular waves, has a limit of applicability of lattice size in ports such as marinas with narrow port openings of around 30m. The SWASH model controls the partial reflection according to the depth, porosity coefficient and structure size when applying the reflected wave incident on the structure and terrain. In this study, the partial reflection evaluation at the front of the structure according to the bottom shape and the shape of the structure are examined. In order to evaluate the reproducibility of the model due to the diffraction waves entering the term, the area of incidence at right angles and inclination of the structure is constructed and compared with the diffraction theory suggested by Goda et al. (1978). The experimental results of the sectional structure reflectances calculated as the depth mean show reflectances similar to the approximate values of the reflectances presented by Stelling and Ahrens (1981). It is considered that the reflected wave is well reproduced according to the control of the reflected wave at the boundary and the shape and topography of the structure. Compared with previous studies to examine the diffraction of the wave incident from the breakwater opening, the wave incidence angle and the shape of the diffraction wave are very similar to the theoretical values, but both oblique and rectangular incidence In the case where the direction concentration is small, the diffraction degree is underestimated in some sections with the crest ratio of 0.5 to 0.6.

The Effect of Various Process Conditions on the Physical Properties of Dense Silver Films, Prepared by Using Sputter Deposition on Polyester Substrate (Polyester 상에서 Sputter 증착되는 고 밀도 은경 박막의 물리적 특성에 미치는 공정조건 변화의 효과)

  • Ri, Ui-Jae;Hwang, Tae-Su
    • Korean Journal of Materials Research
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    • v.9 no.7
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    • pp.707-714
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    • 1999
  • To save electrical energy as much as 40 % for fluorescent lighting, the reflectors coated with silver reflective thin films recently became popular with higher reflectivities and long life. The thin films fabricated by using sputtering techniques are produced mainly in U.S.A. On the other hand, some silver films deposited by using evaporation methods show low adhesion in general, although the reflectivity is no problem. We have studied various PVD methods to obtain thin films with high reflectivity and adhesion on a substrate of polyester, for a couple of years. Silver films manufactured byusing evaporation showed the reflectivity of 96.4 % and the adhesion of $12 kg/\textrm{cm}^2$. while samples manufactured by using sputtering depicted the adhesion as much as $20 Kg/\textrm{cm}^2$ that is almost double, although their reflectivity was not much different. X-ray diffraction spectra for the sputtered films demonstrated a preferential growth on (111) plane and the cross-sections of the specimens revealed a dense columnar structure to result in the enhanced adhesion.

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Impact of facet reflectivity on self-pulsations in multi-section DFB lasers (다중 전극 DFB 레이저에서 단면 반사율이 self-pulsation에 미치는 영향)

  • 김상택;지성근;김부균
    • Proceedings of the Optical Society of Korea Conference
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    • 2002.07a
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    • pp.154-155
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    • 2002
  • 완전 광 3R(Retiming, Reshaping, Reamplification) 재생기는 WDM 시스템과 광 네트워크의 크기를 확장시키기 위하여 필요한 매우 중요한 소자이다. 완전 광 3R 재생기의 구현에서 입력 광 신호로부터 광 클락 추출은 가장 핵심적인 요소이다. 이러한 광 클락 추출을 위하여 모드락 레이저 다이오드와 다중 전극 DFB 레이저에서 self-pulsating 현상을 이용하는 방법이 많이 연구되고 있다. 독일의 HHI는 다중 전극 DFB 레이저에서 self-pulsating 현상을 이용하여 80 GHz 초고속 광 클락 추출과 25-82 GHz 전기적 튜닝 특성을 보였다. (중략)

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A study on the threshold current ratio method using the measurement of coated facet reflectivity of a laser diode (레이저 다이오드의 코팅된 단면의 반사율 측정에 사용되는 문턱전류비에 관한 연구)

  • Lee, Sang-Moo;Kim, Boo-Gyoun
    • Proceedings of the KIEE Conference
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    • 1995.11a
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    • pp.541-543
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    • 1995
  • We propose the improved threshold current ratio method to determine the reflectivity of coated facets. The carrier recombination time used in the improved threshold current ratio method depends on the value of facet reflectivities. However, the carrier recombination time used in the conventional threshold current ratio method is constant regardless of facet reflectivities. The difference between the results of the two methods increases as the reflectivity of a coated facet decreases.

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