• Title/Summary/Keyword: 다층 구조물

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Dependences of Oxide layers on the Properties of the IGZO/Ag/IGZO Multi-Layer Films (산화물층에 따른 IGZO/Ag/IGZO 다층 박막의 특성 연구)

  • ;Lee, Sang-Ryeol;Kim, Hong-Bae
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.351-351
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    • 2013
  • 한국 전체 에너지 사용량 중약 24%의 에너지가 건축물 부분에 소비되고 있다. 건축물의 벽체나 유리창 등을 통해서 에너지 손실이 이루어지는데 유리창은 벽체에 비해 약 10배 이상 낮은 단열 특성을 가지고 있기 때문에 유리창을 통한 열손실량은 더 크다. 이러한 유리창 부분의 열손실 문제를 해결할 수 있는 방안으로 좋은 단열 특성 및 낮은 방사율을 가지고 있는 Low-e coating 방법을 사용하였다. 본 실험에서는 XG glass 기판 위에 IGZO/Ag/IGZO OMO 구조의 다층 박막을 증착하였다. RF magnetron sputtering방법을 이용하여 OMO 구조의 상부와 하부의 Oxide layer로 IGZO 박막을 증착하였다. 사용된 IGZO 타겟은 $In_2O_3$ (99.99%), $Ga_2O_3$ (99.99%), ZnO (99.99%)의 분말을 각각 1:1:1 mol% 조성비로 혼합하여 소결하여 제작하였다. Thermal Evaporator 장비를 이용하여 OMO 구조의 Metal layer로 Ag (99.999%)를 증착하였다. 실험 기판은 크기 $30{\times}30mm$의 0.7T XG glass를 사용하였다. OMO 구조의 산화층 IGZO 박막은 상/하층 동일 조건으로 기판 온도는 실온으로 고정하였으며, 초기 압력 $3.0{\times}10^{-6}$ Torr, 증착 압력 $3.0{\times}10^{-2}$ Torr, RF 파워 50W, Ar 유량 50 sccm로 고정시키고 증착 시간이 변화하면서 박막을 증착하였다. OMO 구조의 Metal layer로 Ag 증착 조건은 초기 진공도가 약 $6.0{\times}10^{-6}$ Torr 이하로 유지하고 기판을 2 Rpm의 속도로 회전시켰다. 이후 0.3 V로 Ag를 10분간 가열하여 충분히 녹인 후 Film Thickness Monitor로 두께를 확인하였다. OMO 다층 박막의 산화물층 변화에 따라 로이다층 박막의 구조적, 광학적 및 전기적 특성을 분석하였다. XRD 분석결과에 의하여 Bragg's 법칙을 만족하는 피크가 나타나지 않는 비정질 구조임을 확인할 수 있으며, AFM 분석결과에 통해서 최소 1.3 nm의 Roughness를 나타내었다. UV-Visible-NIR 분광광도계를 이용하여 다층 박막은 가시광선 영역에서 평균 80%의 광 투과성을 보여 IR 영역에서 평균 30% 투과하고 좋은 차단 특성을 나왔다. Low-e 특성을 갖는 유리창을 통해서 에너지 절약을 이룰 수 있는 것을 확인할 수 있었다.

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Evaluation of Seismic Performance of Mixed Building Structures by using the Nonlinear Displacement Mode Method (비선형 변위모드법을 적용한 복합구조물의 내진성능평가)

  • 김부식;송호산
    • Journal of the Earthquake Engineering Society of Korea
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    • v.7 no.6
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    • pp.71-80
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    • 2003
  • Though a nonlinear time history analysis may be provided to estimate more exactly the seismic performance of building structure, approximation methods are still needed in the aspect of practicality and simplicity, In converting a multi-story structure to an equivalent SDOF system, the mode vectors of the multi-story structure are assumed as the mode shape in elastic state regardless of elastic or elastic-plastic state. However, the characteristics of displacement mode are also changed after the yielding made in the structural elements, because the structure becomes inelastic in each incremental load step. In this research, a method of converting MDOF system to ESDOF system is presented by using nonlinear displacement mode considering the mode change of structures after the yielding. Also, the accuracy and efficiency of the method of the nonlinear displacement mode method of the estimate of seismic response of Mixed Building Structures were examined by comparing the displacements of the roof level of the multi-story building structures estimated from this converted displacement response of ESDOF with the displacement of the roof level through the nonlinear dynamic analysis of the multi-story building structures subjected to an actual earthquake excitation.

열처리 온도에 따른 자외선 발광다이오드용 산화물/금속/산화물 투명전극의 전기적/광학적 특성

  • Lee, Jae-Hun;Kim, Gyeong-Heon;An, Ho-Myeong;Kim, Tae-Geun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.418-419
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    • 2013
  • 현재, 인듐 주석 산화물(indium tin oxide, ITO) 박막은 가시영역에서 전기적 특성 및 광학적 특성이 우수하기 때문에 평면 디스플레이(flat displays), 박막 트랜지스터(thin film transistors), 태양전지(solar cells) 등을 포함한 광소자에 투명전도성산화물(transparent conducting oxide, TCO) 전극으로 가장 일반적으로 사용되고 있다. 하지만, 이 물질은 밴드갭이 3.4 eV로 다소 작아 다양한 분야의 의료기기, 환경 보호에 응용 가능한 자외선 영역에서 상당히 많은 양의 광흡수가 발생하는 치명적인 문제점을 가지고 있다. 또한, 인듐(Indium)의 급속한 소비는 인듐의 매장량의 한계로 인해 가격을 상승시키는 주요한 원인으로 작용하고 있다. 한편, InGaN 기반의 자외선 발광다이오드 분야에서는 팔라듐(Pd) 기반의 반투명 전극과 은(Ag) 기반의 반사전극을 주로 사용하고 있지만, 낮은 투과도와 낮은 굴절률을 때문에 여전히 자외선 발광다이오드의 광추출 효율(extraction efficiency)에 문제점을 가지고 있다. 따라서 자외선 발광다이오드의 외부양자 효율(external quantum efficiency, EQE)을 높이기 위해 높은 투과도와 GaN와 유사한 굴절률을 가지는 p-형 오믹 전극을 개발해야 한다. 본 연구에서는 초박막의 ITO (16 nm)/Ag (7 nm)/ITO (16 nm) 다층 구조를 갖는 투명전도성 전극을 제작한 후, 열처리 온도에 따른 전기, 광학적 특성에 향상에 대해서 조사하였다. 사용된 산화물/금속/산화물 전극의 구조는 유기발광 다이오드(organic light emitting diode, OLED), 태양전지 등에 많이 사용되는 안정적인 투명 전극을 자외선 LED 소자에 처음 적용하여, ITO의 전체 사용량은 줄이고, ITO 사이에 금속을 삽임함으로써 금속에 의한 전기적 특성 향상과 플라즈몬 효과에 의한 투과도를 높일 수 있는 장점을 가지고 있다. 실험 결과로는, $400^{\circ}C$에서 열처리한 ITO/Ag/ITO 다층 구조는 365 nm에서 84%의 광학적 특성과 9.644 omh/sq의 전기적 특성을 확인하였다. 실험 결과로부터 좀 더 최적화를 수행하면, ITO/Ag/ITO 다층 구조는 자외선 발광다이오드의 투명전도성 전극으로 사용될 수 있을 것이라 기대된다.

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Design of RCS Reduction Structure of Integrated Mast on the Destroyer (구축함에 탑재되는 통합마스트의 RCS 저감 구조 설계)

  • Lee, Jong-Hak;Ra, Young-Eun;Lee, Keon-Min;Jang, Ju-Su
    • Journal of IKEEE
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    • v.24 no.1
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    • pp.238-242
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    • 2020
  • This paper presents a technique using a multilayered dielectric coating to reduce the radar cross section (RCS) value of an integrated mast mounted in a destroyer. The proposed multilayer structure has the advantage of being easy to fabricate because the dielectric constant is defined so that a general dielectric that does not contain a magnetic component that requires high dielectric constant or is frequently used for blocking electromagnetic wave absorption can be used. After applying the proposed multi-layer dielectric structure to the integrated mast shape, the simulation results show that the RCS reduction performance is 10.9dB at 6GHz, 11.95dB at 12GHz, and 11.63dB at 18GHz compared to the structure without the multilayer structure.

Synthesis of Two Dimensional Polymer Network (이차원 구조를 갖는 고분자의 합성)

  • Shin, Jae Sup
    • Applied Chemistry for Engineering
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    • v.9 no.5
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    • pp.763-767
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    • 1998
  • Cholesterol-containing surfactant was synthesized, and it was sonicated with monomer [tetradeca(ethylene glycol) diacrylate] in water to from a vesicle solution. This vesicle solution was dried to construct a membrane which had a molecular multilayer structure. The monomer which stay in this membrane was polymerized with photoinitiation, and then surfactant was extracted by organic solvent. The physical properties of the two dimensional polymer network were measured, and these physical properties are tensile strength, elongation, and swelling.

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Analysis of Penetration Phenomenon of High Altitude Electromagnetic Pulse into Buried Facilities with Various Moisture Content and Depth (수분 함유량 및 지하 구조물 깊이에 따른 고고도 전자기파(HEMP) 투과 현상 분석)

  • Kang, Hee-Do;Oh, Il-Young;Yook, Jong-Gwan
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.24 no.6
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    • pp.644-653
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    • 2013
  • In this paper, a formulation for obliquely incident electromagnetic wave has been presented for an analysis of highpower electromagnetic pulse penetration into multilayered dispersive media. Based on generalized models of measured dielectric constants and propagation channels reflecting the Earth's general features, the propagation phenomenon of the obliquely incident early-time(E1) high altitude electromagnetic pulse(HEMP) is analyzed. In addition, the polarization and critical angle are also considered. It is found that the total reflection occurs at an incident angle of about 38 degrees at the soil-rock interface, and that the parallel-polarized E1 HEMP penetrates better than the perpendicular-polarized one. The peak level of the penetrating electric field is found to be 5.6 kV/m at normal incidence, regardless of the type of polarization, and E1 HEMP is greatly reduced near the critical angle. Moreover, the penetrating E1 HEMP is analyzed as a variation of moisture content and depth of materials, resulting E1 HEMP could be useful in determining the levels of shielding required for buried facilities.

A Study on the Extraction of Parasitic Inductance for Multiple-level Interconnect Structures (다층배선 인터커넥트 구조의 기생 인덕턴스 추출 연구)

  • Yoon, Suk-In;Won, Tae-Young
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.39 no.7
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    • pp.16-25
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    • 2002
  • This paper presents a methodology and application for extracting parasitic inductances in a multi-level interconnect semiconductor structure by a numerical technique. In order to calculate the parasitic inductances, the distrubution of electric potential and current density in the metal lines are calculated by finite element method (FEM). Thereafter, the magneto-static energy caused by the current density in metal lines was calculated. The result of simulation is compared with the result of Grover equation about analytic simple structures, and 4 bit ROM array with a dimension of $13{\times}10.25{\times}8.25{\mu}m^3$ was simulated to extract the parasitic inductnaces. In this calculation, 6,358 nodes with 31,941 tetrahedra were used in ULTRA 10 workstation. The total CPU time for the simulation was about 150 seconds, while the memory size of 20 MB was required.

Modeling of Old Masonry Lining in Railroad Tunnels (철도터널내 조적식 라이닝의 모형화에 관한 연구)

  • Lee, J.S.;Shin, H.K.;Kim, M.I.
    • Journal of Korean Tunnelling and Underground Space Association
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    • v.3 no.3
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    • pp.3-13
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    • 2001
  • The behavior of the masonry lining is studied to gain basic information on how to reinforce the masonry tunnels. Apart from the previous works on the masonry structures, the multi-course masonry structure, realistic in field condition, is considered and the constitutive relationship of the masonry is, therefore, established. The design charts of the orthotropic material properties are proposed according to the stiffness ratio and the crack initiation and subsequent propagation model is also considered to model the brittle nature of the masonry. A numerical analysis on the masonry panel is investigated to verify the proposed model and future works of the masonry lining are briefly explained.

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Evaluation of Nonlinear Response for Moment Resisting Reinforced Concrete Frames Based on Equivalent SDOF System (등가 1 자유도계에 의한 철근콘크리트 모멘트 골조구조의 비선형 지진응답 평가법의 검토)

  • 송호산;전대한
    • Journal of the Earthquake Engineering Society of Korea
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    • v.7 no.1
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    • pp.9-16
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    • 2003
  • To evaluate the seismic performance of multistory building structures use an equivalent SDOF model to represent the resistance of the structure to deformation as it respond in its predominant mode. This paper presents a method of converting a MDOF system into an equivalent SDOF model. The principal objective of this investigation is to evaluate appropriateness of converting method through perform nonlinear time history analysis of a multistory building structures and an equivalent SDOF model. The hysteresis rules to be used an equivalent SDOF model is obtained from the pushover analysis. Comparing the peak inelastic response of a moment resisting reinforced concrete frames and an equivalent SDOF model, the adequacy and the validity of the converting method is verified. The conclusion of this study is following; A method of converting a MDOF system into an equivalent SDOF model through the nonlinear time history response analysis is valid. The representative lateral displacement of a moment resisting reinforced concrete frames is close to the height of the first modal participation vector \ulcorner$_1{\beta}$${_1{\mu}}=1$. It can be found that the hysteresis rule of an equivalent SDOF model have influence on the time history response. Therefore, it necessary for selecting hysteresis rules to consider hysteresis characteristics of a moment resisting reinforced concrete frames.