• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.282.2-282.2
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• 2016

중적외선 물질에는 Ge, ZnS, ZnSe, Si 등이 있으나 고굴절율이므로 반사가 매우 크게 발생을 한다. 이를 줄이기 위해 다층 박막 무반사 코팅을 일반적으로 사용하지만 열에 취약함, 적합한 물질을 찾는 것이 매우 어려움, 다층 박막으로 제작 시 두께가 매우 두꺼워짐의 단점이 있다. 또한 Ge, ZnS, ZnSe 의 소재는 가격이 Silicon에 비해 매우 비싸다. 그러므로 RCWA(Rigorous Coupled Wavelength Analysis) 시뮬레이션을 이용하여 상대적으로 저렴한 소재임에도 고투과성을 지닌 중적외선용 무반사 실리콘 서브파장구조(Subwavelength Structures, SWSs)를 제안한다. 본 연구에서는 원기둥, 원뿔, 파라볼라, 잘린 원뿔(truncated cone) 등의 형태에 따른 투과율 특성을 파악하여 최적구조가 파라볼라 형태임을 증명하였다. 또한 서브파장구조의 주기, 높이의 특성을 조절하여 공정 시의 종횡비(Aspect ratio)를 고려한 최적형태를 제안하였다. 중적외선 영역($3{\mu}m{\sim}5{\mu}m$)에서 일반 Silicon의 적외선 영역에서 평균 55%의 낮은 투과율을 보이나, 양면에 무반사 구조를 설계 하였을 때 평균 94%의 높은 투과율을 확인할 수 있다. 다양한 형태를 가진 무반사 실리콘 서브파장 구조물을 RCWA 방식으로 계산함으로서 특성을 파악하며 최적구조를 설계 할 수 있다. 또한 단면에 비하여 양면으로 SWSs 구조를 제작할 시 매우 두드러지는 투과특성을 확인할 수 있다. 고굴절율이지만 뛰어난 투과특성을 이용하여 초소형 적외선 카메라 렌즈 뿐만 아니라 적외선 광검출기, 광학 필터 등에 이용 가능할 것으로 예상된다.

• Korean Journal of Optics and Photonics
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• v.26 no.2
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• pp.115-120
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• 2015

Explicit expressions are derived for the effective reflection coefficients of obliquely incident light on a multilayered substrate coated with two uniaxially anisotropic films. Based on these reflection coefficients, ellipsometric constants are obtained as function of the tilt and azimuthal angles of the optical axes of the uniaxial films. Explicit expressions are provided, which can be used to separate the effects of surface anisotropy for anisotropic film from that of its bulk anisotropy, so that these expressions may be utilized in characterizing the surface anisotropy of alignment layers.

• Journal of the Korean Vacuum Society
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• v.16 no.3
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• pp.221-226
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• 2007

DBR (distributed Bragg reflectors) PSi (porous silicon) composite films displaying dual optical properties, both optical reflectivity and photoluminescence had been developed. DBR PSi samples were prepared by electrochemical etch of heavily doped $p^{++}-type$ silicon wafers (boron doped, polished on the <100> face, resistivity of $0.8-1.2m{\Omega}-cm$, Siltronix, Inc.). Free-standing DBR PSi films were treated with PMMA (polymethyl methacrylate) to produce flexible, stable composite materials in which the PSi matrix is covered with PMMA containing photoluminescent polysiloles. Optical characteristics of DBR PSi/polysilole-impregnated PMMA composite materials exhibit both their photonic reflectivity at 565 nm and photoluminescence at 510 nm, simultaneously. A possible application of this materials will be discussed.

• Korean Journal of Optics and Photonics
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• v.33 no.1
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• pp.22-27
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• 2022

We fabricate a polarization-independent dielectric multilayer thin-film diffraction grating for a spectral-beam-combining (SBC) system with a simple grating structure and low aspect ratio. Due to the refractive index and thickness error of the manufactured thin films, the diffraction efficiency of the fabricated diffraction grating was lower than that of the design. The causes of the errors were analyzed, and it was confirmed through simulation that diffraction efficiency could be compensated through an additional coating on the manufactured diffraction grating. As a result of sputtering an additional Ta₂O₅ layer on a fabricated diffraction grating, the diffraction efficiency was corrected and a maximum 91.7% of polarization-independent diffraction efficiency was obtained.

• Korean Journal of Materials Research
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• v.5 no.7
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• pp.835-841
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• 1995

The deposition properties of Si$_3$N$_4$ deposited by low pressure chemical vapor deposition were studied to evaluate Si$_3$N$_4$as part of multi-layer coatings for anti-oxidation and anti-wear coating of graphite in the propellant-burning environment. Si$_3$N$_4$was deposited on the pack-SiC coated graphite and the tendencies of deposition rate and surface morphology changes with temperatures and reaction gas ratios were investigated. In low deposition temperatures the deposition rate increased tilth increasing temperature but in high temperatures the deposition rate decreased with increasing temperature. The grain size of Si$_3$N$_4$decreased with increasing temperature. In condition that the range of reaction gas ratios is 20$\leq$NH$_3$/SiH$_4$$\leq$40, the deposition rate and surface morphology did not change. The Si$_3$N$_4$deposited at 800~130$0^{\circ}C$ was amorphous, and by post-annealing at 130$0^{\circ}C$ in a $N_2$ambient, the Si$_3$N$_4$crystalized.

• Korean Chemical Engineering Research
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• v.50 no.3
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• pp.562-566
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• 2012

A novel design of tubular segmented-in-series(SIS) solid oxide fuel cell (SOFC) sub module was presented in this paper. The tubular ceramic support was fabricated by the extrusion technique. The NiO-YSZ anode and the yttria-stabilized zirconia (YSZ) electrolyte were deposited onto the ceramic support by dip coating method. After sintering at $1350^{\circ}C$ for 5 h, a dense and crack-free YSZ film was successfully fabricated. Also, the multi-layered cathode composed of LSM-YSZ composite, LSM and LSCF were coated onto the sintered ceramic support by dip coating method and sintered at $1150^{\circ}C$. The performance of the tubular SIS SOFC cell and sub module electrically connected by the Ag-glass interconnect was measured and analysed with different fuel flow and operating temperature.

• Journal of the Korean Electrochemical Society
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• v.8 no.2
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• pp.88-93
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• 2005

Anode-supported solid oxide fuel cell (SOFC) was investigated to increase the cell power density at intermediate temperature through control of the cathode structure. The anode-supported SOFC cell were fabricated by wet process, in which the electrolyte of $8mol\%\;Y_2O_3-stabilized\;ZrO_2 (YSZ)$ was coated on the surface of anode support of Ni/YSA and then the cathode was coated. The cathode has two- or three- layered structure composed of $(La_{0.85}Sr_{0.15})_{0.9}MnO_{3-x}(LSM),\;LSM/YS$ composite (LY), and $La_{0.6}Sr_{0.4}Co_{0.2}Fe_{0.8}O_3{LSCF)$ with different thickness. Their single cells with different cathode structures were characterized by measuring the cell performance and ac impedance in the temperature range of 600 to $800^{\circ}C$ in humidified hydrogen with $3\%$ water and air. The cell with $LY\;9{\mu}m/LSM\;9{\mu}m/LSCF\;17{\mu}m$ showed best performance of $590mW/cm^2$, which was attributed to low polarization resistance due to LY and to low interfacial resistance due to LSCF.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.423.2-423.2
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• 2016

태양전지 모듈은 다층 구조를 형성하고 있으며, 신뢰성과 출력 향상을 위해 다양한 연구가 진행 중에 있다. 이를 위해서 모듈에 사용되는 전면 유리는 AR 코팅과 투과도가 좋은 저철분강화유리를 사용하고, 후면에는 반사도가 높은 Backsheet를 사용하게 된다. 또한 태양전지 모듈의 제작 조건 중 하나는 비슷한 출력을 갖는 태양전지를 사용하는 것이다. 만약 태양전지의 출력 불균일이 발생하게 되면 모듈 전체 출력이 낮아질 뿐만 아니라 출력이 낮은 태양전지가 주변 태양전지보다 높은 온도를 나타낸다. 태양전지 모듈에서 온도 편차가 발생한다는 것은 전지의 출력 불균일이 발생한다고 예상할 수 있는 지표이다. 따라서 태양전지 모듈의 후면에 온도 센서를 부착하여 모니터링하였으며, 태양전지 위치에 따라서 약 $3^{\circ}C$의 온도 차이가 발생하는 것을 확인 할 수 있었다.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.04a
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• pp.251-254
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• 2002

The technique of high speed machining is widely studied in machining field. In this study, TiAIN single-layered and TiAIN/TiN double-layered coatings were applied to end-mill by an arc ion plating technique. Their performances were comparatively studied about cutting force, tool wear, tool life and surface roughness of workpiece under high speed cutting conditions. The TiAIN single-layer coated tool showed higher wear-resistance due to its higher hardness, while the TiAIN/TiN double-layer coated tool showed better performance for high metal removal, i.e., high fled per tooth condition due to its higher toughness. The surface roughness of the workpiece was not influenced by the wear amount of coated tools.

• Proceedings of the KIEE Conference
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• 2003.10a
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• pp.273-275
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• 2003

본 실험은 고출력 반도체 레이저의 p-side-down 마운팅용 솔더로서 AuSn 합금 솔더(80wt%:20wt%)의 적합성에 대해 연구하였다. $1{\mu}m$이하의 균일도로 폴리싱 된 Cu heat sink의 표면에 두께 $1{\mu}m$의 Ni로 코팅을 한다음, AuSn 다층박막은 e-beam 증착기로 AuSn 합금 솔더는 열증착기로 각각 증착하였다. 열처리는 산화 방지를 위해 $N_2$ 분위기에서 행하였으며, 동일한 압력으로 마운팅을 하였다. 표면의 거칠기와 형상은 AFM(Atomic Force Microscope)과 SEM(Scanning Electron Microscopy)으로 그리고 Au와 Sn의 성분비는 AES(Auger Electron Spectroscopy) 로 비교하였다. 또한 CW(연속발진)을 통한 L-I(Light-Current)측정을 통해 본딩상태를 비교하였다.