• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.49-49
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• 2007

최근 반도체 소자의 고집적화와 나노 (nano) 크기의 회로 선폭으로 인해 기존에 사용되었던 텅스텐이나 알루미늄 금속배선보다, 낮은 전기저항과 높은 electro-migration resistance가 필요한 Cu 금속배선이 주목받게 되었다. 하지만, Cu CMP 공정 시 높은 압력으로 인하여 low-k 유전체막의 손상과 디싱과 에로젼 현상으로 인한 문제점이 발생하게 되었다. 본 논문에서는, $KNO_3$ 전해액의 농도가 Cu 표면에 미치는 영향을 알아보기 위해 Tafel Curve와 CV (cyclic voltammograms)법을 사용하여 전기화학적 특징을 알아보았고 scanning electron microscopy (SEM), energy dispersive spectroscopy (EDS), X-ray Diffraction (XRD) 분석을 통해 금속표면을 비교 분석하였다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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• pp.120-122
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• 2005

An alumina membrane with nano-sized pore array by anodic oxidation using thin film aluminum deposited on silicon wafer was fabricated. It is important that the sample prepared by metal deposition method has a flat aluminum surface and a good adhesion between the silicon wafer and the thin film aluminum. The oxidation time was controlled by observation of current variation. While the oxalic acid with 0.2M was used for low voltage anodization under 100V, the chromic acid with 0.1M was used for high voltage anodization over 100V. The nano-sized pores with diameter of 60~120nm was obtained by low voltage anodization of 40~90V and those of 200~300nm was obtained by high voltage anodization of 120~160V. Finally, the sample was immersed to the phosphoric acid with 0.1M concentration to etching the barrier layer. The sample will be applied to electronic sensors, field emission display, and template for nano-structure.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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• pp.87-88
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• 2005

AAO(Anodic Aluminum Oxide)는 양극산화 방법을 이용하여 얻을 수 있는 알루미늄의 다공성 산화막이다. 기존의 방법에서는 DC전압을 이용하여 AAO를 성장시켰는데 본 연구에서는 AC전압을 이용하여 AAO의 성장 특성을 제어하였다. 전압원으로 DAQ를 사용하였는데 출력전압을 증폭하기 위하여 2 단 차동증폭기를 제작하였다. 실험 결과는 AAO 기판의 SEM 사진을 촬영, 분석함으로써 얻을 수 있었다. SEM 시진을 분석한 결과 pore size는 전압의 변화에 큰 영향을 받지 않음을 알 수 있었던 반면 성장 길이는 AC전압의 주기가 증가함에 따라 길어지는 성향을 확인할 수 있었다. 또한 주기와 AAO 성장 길이와의 관계를 로그스케일 그래프로 나타내보면 선형적인 특성을 나타내었다. 이를 통해 인가한 전압의 주파수에 따라 AAO의 성장 길이를 예측할 수 있었다.

• 한국추진공학회지
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• 제9권2호
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• pp.9-16
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• 2005

HTPB/AP의 성능을 이론적 계산에 의해 분석한 결과, Zr 함유 추진제는 Al 추진제보다 비추력이 낮은데 그 이유는 화염온도가 낮고, Zr 산화물의 분자량이 크기 때문이었다. HTPB/AP/Zr 추진제에서 Zr의 입도가 작을수록 연소속도가 증가하며, 입도가 작은 $2{\mu}m$ Zr은 함량이 증가할수록 금속화염으로부터 연소표면으로 전달되는 열량이 증가하여 연소 속도가 빨라지는 것으로 나타났다. 150nm 크기의 Al을 HTPB/AP/Zr 추진제에 적용하면 연소 속도가 증가하지만, 연소속도 증진 효과가 매우 좋은 Butacene 및 $1{\mu}m$ AP가 함께 함유된 추진제에서는 AP의 입도 분포의 영향에 의해 nano Al으로 인하여 연소속도가 감소할 수도 있다는 것을 알게 되었다.

• 한국표면공학회지
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• 제54권5호
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• pp.222-229
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• 2021

Icing causes various serious problems, where water vapor or water droplets adhere at cold conditions. Therefore, understanding of ice adhesion on solid surface and technology to reduce de-icing force are essential for surface finishing of metallic materials used in extreme environments and aircrafts. In this study, we controlled wettability of aluminum alloy using anodic oxidation, hydrophobic coating and lubricant-impregnation. In addition, surface porosity of anodized oxide layer was controlled to realize superhydrophilicity and superhydrophobicity. Then, de-icing force on these surfaces with a wide range of wettability and mobility of water was measured. The results show that the enhanced wettability of hydrophilic surface causes strong adhesion of ice. The hydrophobic coating on the nanoporous anodic oxide layer reduces the adhesion of ice, but the volume expansion of water during the freezing diminishes the effect. The lubricant-impregnated surface shows an extremely low adhesion of ice, since the lubricant inhibits the direct contact between ice and solid surface.

• 소성∙가공
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• 제28권5호
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• pp.239-246
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• 2019

Various surface texturing techniques have been studied because of the effective applicability of micro or nano scale surface patterns. Particularly, the most promising types of patterns include the hierarchical patterns, which consists of micro/nano structures. Different processes such as MEMS, laser machining, micro cutting and micro grinding have been applied in the production of hierarchical patterns on various material surfaces. This study demonstrates the process of hot imprinting to induce the hierarchical patterns on the Al alloy surfaces. Wire electrical discharge machining (WEDM) process was used to imprint molds with micro scale sinusoidal pattern. In addition, the sinusoidal pattern with rough surface morphology was obtained as a result of the discharge craters. Consequently, the hierarchical patterns consisting of the sinusoidal pattern and the discharge craters were prepared on the imprinting mold surface. Hot imprinting process for the Al plates was conducted on the prepared mold, and the replication performance was analyzed. As a result, it was confirmed that the hierarchical patterns of the mold were effectively duplicated on the surface of Al plate.

• 한국분말재료학회지
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• 제28권3호
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• pp.253-258
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• 2021

There is increasing demand for the development of a new material with high strength, high stiffness, and good electrical conductivity that can be used for high-voltage direct current cables. In this study, we develop aluminum-based composites containing C₆₀ fullerenes, carbon nanotubes, or graphene using a powder metallurgical route and evaluate their strength, stiffness, coefficient of thermal expansion, and electrical conductivity. By optimizing the process conditions, a material with a tensile strength of 800 MPa, an elastic modulus of 90 GPa, and an electrical conductivity of 40% IACS is obtained, which may replace iron-core cables. Furthermore, by designing the type and volume fraction of the reinforcement, a material with a tensile strength of 380 MPa, elastic modulus of 80 GPa, and electrical conductivity of 54% IACS is obtained, which may compete with AA 6201 aluminum alloys for use in all-aluminum conductor cables.

• Corrosion Science and Technology
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• 제21권6호
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• pp.476-486
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• 2022

Recently, aluminum 6061 instead of copper alloy is used for cooling heat exchangers used in the internal combustion of engines due to its economic feasibility, lightweight, and excellent thermal conductivity. In this study, aluminum 6061 alloy was anodized with oxalic acid, phosphoric acid, or chromic acid as an anodizing electrolyte at the same concentration of 0.3 M. After the third anodization, FDTS, a material with low surface energy, was coated to compare hydrophobic properties and anti-icing characteristics. Aluminum was converted into an anodization film after anodization on the surface, which was confirmed through Energy Dispersive X-ray Spectroscopy (EDS). Pore distance, interpore distance, anodization film thickness, and solid fraction were measured with a Field Emission Scanning Electron Microscope (FESEM). For anti-icing, hydrophobic surfaces were anodized with oxalic acid, phosphoric acid, or chromic acid solution. The sample anodized in oxalic acid had the lowest solid fraction. It had the highest contact angle for water droplets and the lowest contact hysteresis angle. The anti-icing contact angle showed a tendency to decrease for specimens in all solutions.

• Design & Manufacturing
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• 제17권2호
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• pp.47-54
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• 2023

The research direction of the automobile industry worldwide is speeding up research to improve fuel efficiency through weight reduction as the weight of automobiles increases due to environmental problems, convenience demands, and safety problems. As a way to solve weight reduction, there is a method of improving mechanical properties by improving the development and manufacturing method of lightweight materials with replaceable mechanical properties. Therefore, research on the molding and processing technology of aluminum, which is a lightweight material, is being actively conducted. In this study, aluminum material was applied. By using Autoform S/W, a press forming analysis program, the blank holding force, mold die R, and bead restraint force were selected in three levels, respectively, and the results and optimization of formability and shape freezing were carried out. In this study, aluminum material was applied. By using Autoform S/W, a press molding analysis program, the blank holding force, mold die R, and bead restraint force were selected in three levels, respectively, and the results and optimization of formability and shape freezing were carried out. The optimized results were confirmed by comparative analysis of formability and Spring Back. As a result of the experiment, it was possible to confirm the result value of the Spring Back of the final product according to the tensile change of the material.

• 한국산업융합학회 논문집
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• 제26권5호
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• pp.743-750
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• 2023

Aluminum alloy is a material widely used in the aircraft industry. However, since it has relatively low hardness, strength and tribological properties, it is necessary to improve these properties. In this paper, a TiN thin film was coated on the surface of AL7075-T7351 using DC magnetron sputtering. The coating was performed by setting different deposition pressure, deposition time, and applied power. Then, the tribological properties of the thin film were investigated. As a result of the experiment, the hardness of the thin film was higher than that of the base material, and the specimen with the highest hardness had excellent friction coefficient, wear amount, and adhesive strength characteristics. Through this study, it was confirmed that the tribological characteristics of aluminum alloy can be improved by depositing thin films using DC magnetron sputtering.