Catalytic growth of carbon nanotubes using plasma enhanced chemical vapor deposition(PECVD) (플라즈마 화학 증착법을 이용한 탄소나노튜브의 촉매 성장에 관한 연구)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2001.07a
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- pp.935-938
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- 2001