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Importance of Surface Roughness of Interlayers in Fabricating $Al_2O_3$ Thick Films by Aerosol Deposition

  • Kim, Chang-Wan;Choe, Ju-Hyeon;Kim, Hyeong-Jun;Hyeon, Chang-Yong;Nam, Song-Min
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.118-118
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    • 2010
  • 현재 반도체 제조 공정 중 많은 비중을 차지하는 식각 및 증착 공정에는 대부분 플라즈마를 사용하고 있으며, 이러한 반도체 장비내의 공정 부분품들은 수율과 생산성을 향상시키기 위하여 내플라즈마 특성이 우수한 세라믹 또는 세라믹 코팅막으로 구성되어 있다. 더욱이 최근에는 미세공정을 위해 고밀도 플라즈마 공정이 요구되면서, 노출된 세라믹 층이 침식되어 파티클이 떨어져 나오거나 모재와 세라믹 막 사이의 박리현상과 같은 심각한 문제들이 발생되고 있다. 따라서 보다 우수한 내플라즈마 특성을 갖는 세라믹 코팅 기술 개발이 시급한 실정이다. 현재 내플라즈마성 세라믹 코팅막 제조를 위한 코팅기술로서는 주로 용사법이 이용되고 있으나 기공률이 높고 치밀하지 못한 등의 문제점으로 인하여 사용수명이 짧다는 한계에 봉착하였다. 이에 본 연구에서는 상온에서 치밀하고 고속으로 세라믹 후막 형성이 가능한 Aerosol Deposition (AD)법과 AD법의 단점인 edge, corner, hole에서 코팅이 잘 안 되는 점을 보완할 수 있는 Arc Plasma Anodizing (APA)법을 조합하여, 상용화된 Al 모재위에 APA법을 사용하여 $Al_2O_3$ 후막 중간층을 형성한 뒤 그 위에 AD법으로 치밀한 $Al_2O_3$ 후막 성막함으로써 내 플라즈마 향상을 위한 새로운 개념의 제조기술개발을 시도하였다. 이를 위해 우선 Al 모재 위에 APA를 사용하여 중간층인 $Al_2O_3$막을 제조하였으며, 중간층의 두께에 따른 특성을 확인한 결과, $Al_2O_3$중간층의 두께가 두꺼워질수록 표면조도가 증가함을 확인 할 수 있었다. AD법으로 $Al_2O_3$중간층 위에 치밀한 $Al_2O_3$막을 제조하는데 있어 중요인자를 확인하기 위해, AD법으로 중간층 위에 $Al_2O_3$막을 제조한 후 성막특성을 관찰하였다. 그 결과, 중간층의 표면조도가 $0.8-1\;{\mu}m$인 경우에는 수 ${\mu}m$의 두께로 성막 되었으나, 표면조도가 $1\;{\mu}m$ 이상인 $Al_2O_3$중간층 위에서는 성막 되지 않았다. 이를 통해 AD법으로 치밀하고 두꺼운 $Al_2O_3$ 후막을 $Al_2O_3$중간층 위에 성막하기 위해서는 표면조도가 중요인자임을 확인하였다.

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Multi-stage Compression Molding Technology of Fast Curing CF/Epoxy Prepreg (속경화용 탄소섬유/에폭시 프리프레그의 다단 압축 성형기술)

  • Kwak, Seong-Hun;Mun, Ji-Hun;Hong, Sang-Hwui;Kwon, Soon-Deok;Kim, Byung-Ha;Kim, Tae-Yong
    • Composites Research
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    • v.34 no.5
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    • pp.269-276
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    • 2021
  • PCM (Prepreg Compression Molding) process is a high-speed molding technology that can manufacture high-quality CFRP (Carbon Fiber Reinforced Plastic) parts. Compared to the autoclave process, it generates less waste and can significantly reduce cycle time, so various studies are being conducted in the aerospace and automobile industries. In this study, in order to improve the quality of the PCM process, a molding method was developed to increase the compression pressure of the press step by step according to the curing behavior of the prepreg. It was confirmed that this multi-stage compression molding technology is a good means to produce high-quality CFRP products and shorten cycle times. And, the laminated prepreg at room temperature was immediately put into the mold and preheated and molded at the same time, so that it could be molded without a separate preheating process. In addition, as a result of applying the same process conditions optimized for flat plate molding to three-dimensional shapes, a product similar to a flat plate in appearance could be made without the process of establishing process conditions.

Synthesis of Carbon Materials from PFO, Byproducts of Naphtha Cracking Process (나프타 분해공정 부산물인 PFO로부터 탄소구조체 합성)

  • Lee, Jiyon;Park, Seung-Kyu
    • Applied Chemistry for Engineering
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    • v.22 no.5
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    • pp.495-500
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    • 2011
  • Separation of naphthalene from pyrolyzed fuel oil, by product of Naphta cracking process (NCC) process, has been accomplished by the solvent extraction, distillation and purification process. The residual pyrolyzed fuel oil (PFO), called precursor of carbon materials, has been calcined at $300{\sim}800^{\circ}C$ in nitrogen gas to raw pitch. After the treatment of PFO by hexane and methanol, either a flake phased carbon at $350^{\circ}C$ or a carbon sphere at above $400^{\circ}C$ forms. As the calcination temperature increases, the shape of raw pitch changes from the flake phase to the sphere one, and the size of them decreases to several ${\mu}m$. Based on the BET and XRD spectrum, the carbon sphere is classified to a mesophase amorphous carbon with a cubic phase.

A Study on Manufacturing Technique and Alloy Characteristics of Bronze Mirrors from Jeollanam-do Region in the Three Kingdoms Period (전남지역 출토 삼국시대 청동거울의 합금 특성과 제작 방법 고찰)

  • Lee, Eun Ji
    • Journal of Conservation Science
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    • v.37 no.6
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    • pp.767-777
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    • 2021
  • This study analyzed the microstructures and chemical composition of three samples of bronze mirrors excavated in the Jeollanam-do region, particularly Goheung and Damyang. Under x-ray irradiation, the analysis results confirmed the broken parts and pores caused by cracks, casting, and corrosion. Major and minor elemental analysis were performed on three mirrors by Scanning electron microscopy (SEM) with Energy dispersive x-ray spectrometry (EDS) and Inductively coupled plasma mass spe ctrome try (ICP-MS). The re sult shows that the bronze mirrors containe d Cu-Sn-Pb alloys. Alpha phase and eutectic phase were observed in the microstructure, confirming that the casting was performed without additional heat treatment. Notably, Three bronze mirrors were made early Three Kingdoms period in Korea.

Experimental Verification of the Characteristic Analysis of the Aricultural Drone using Smart Operating Mode (스마트 운영 모드를 활용한 농업용 방제 드론의 특성 분석에 관한 실험적 검증)

  • Wooram Lee
    • The Journal of the Convergence on Culture Technology
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    • v.9 no.6
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    • pp.1049-1055
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    • 2023
  • The utilization of agricultural drones for pest control operations has been increasing due to its economic efficiency. However, variations in the effectiveness of these operations occur depending on the operator's proficiency. In this study, we applied a smart operating mode to overcome the limitations of manual flight mode and proposed a numerical model. Through comparative validation with prior research, we conducted experimental verification. As a result, we determined the spray time and calculation of spray area for each drone model. We selected a drone for pest control with a high similarity to the numerical model and verified it experimentally. Through this, we confirmed that the application of the smart operating mode is more effective in terms of calculation of spray area and operational efficiency compared to manual flight mode.

Fabrication of complete dentures made with monolithic discs through CAD/CAM using facial scan data and individual tray duplicating temporary denture: a case report (안면스캔 데이터와 임시의치를 복제한 개인 트레이를 활용하여 CAD/CAM을 통한 monolithic disc로 제작한 총의치 수복: 증례 보고)

  • Ju Hyun Kim;Soo-Yeon Shin
    • Journal of Dental Rehabilitation and Applied Science
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    • v.39 no.3
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    • pp.158-167
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    • 2023
  • As digital technology has advanced in the field of dentistry, the use of computer-aided design/computer-aided manufacturing (CAD/CAM) has brought changes to the stages of dental treatment. The use of CAD/CAM technology in dental restoration offers clinical efficiency and convenience by reducing production time and appointment intervals, while also simplifying the fabrication process to reduce errors. In this case, digital replication and printing of temporary teeth were used to aid a patient with complex medical histories and physical disabilities. The final impression obtained with silicone impression material included information on the vertical dimension, centric relation, and the angle and length of the anterior teeth, which shortened the production time and appointment intervals and increased patient satisfaction. The final restoration was fabricated using milling and monolithic disc techniques, demonstrating appropriate stability, retention, and support, resulting in functional and aesthetic satisfaction.

Evaluation of Salivary Cariogenic Factors in the 6th Grade Children of the Primary School (국민학교 6학년 아동의 치아우식 발생에 미치는 타액성 요인 분석)

  • Park, Myung-Ho
    • Journal of Technologic Dentistry
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    • v.10 no.1
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    • pp.151-157
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    • 1988
  • For the detection of the active cariogenic factors contributing to caries development, some practical methods such as the Snyder test, estimation of salivary flow rate and salivary buffering capacity test were evaluated statistically by comparing DMFT and DMFS indexes. Total 122 children (62 male and 60 female ; 64 rural and 58 urban) were selected ramdomly from the 6th grade of the primary school and their salivary cariogenic factors were analysed and evaluated. Among the total 122 children, 78.7% was positive in the snyder test in which the marked, moderate and slight caries activities were 29.5%, 30.3% and 18.9%, respectively. In the Snyder test, 74.45% was positive in urban children while 84.48% was positive in rural children. DMFT and DMFS indexes were markedly lower in negative group than positive group of the Snyder test (p<0.01). The mean and standard deviation of stimulated salivary flow rate was 6.97$\pm$2.57 in male and 6.34$\pm$2.54 in female but no significant difference was observed in sexuality. The stimulated salivary flow rate of urban children was slightly higher that of rural but there was no significant difference between them. However, the group that showed below average in the stimulated salivary flow rate was markedly higher in DMFI and DMFT indexes than the group of above average. The mean and standard deviation of stimulated salivary buffering capacity was 7.65$\pm$2.19 in male and 6.80$\pm$1.67 in female. This difference was significant statistically(p<0.05). Stimulated salivary buffering capacity of urban children was higher than that of rural. Increases in stimulated salivary flow rate and buffering capacity had reduced the onset of dental caries of 14-year-old permanent tooth.

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Effects of Depth and Duration of Flooding on Growth and Yield at Flowering Stage in Tomato(Lycopersicon esculentum). (토마토(Lycopersicon esculentum)의 개화기 침수 처리에 따른 생육 반응)

  • Guh, Ja-Ock;Han, Sung-Uk;Kuk, Yong-In;Chon, Sang-Uk;Lee, Young-Man
    • Korean Journal of Environmental Agriculture
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    • v.16 no.2
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    • pp.130-135
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    • 1997
  • Tomatoes are flooded differently 0, 5, 10 and 15cm, according to the developing stages such as flowering stage under the condition of greenhouse. Along with this, they are treated according to the time condition such as 6, 12, 24, 48 and 120 hours. The results obtained are summarized as follows. Plant height decreased in the depth of $0{\sim}10cm$ for over 48 hours, in the depth of 15cm for over 24 hours. Number of leaves was the same as in control, and it decreased over. Number of flowers and fruit setting of individuals decreased conspicuously according as the depth and the hours got greater and longer. Adventitious root occurred remarkably in the depth of $0{\sim}10cm$, for over 24 hours and in the depth of 15cm, 12 hours. Epinastic curvature increased greatly as the depth and the hours got greater and longer. Diffusion resistance of stomata cell increased as the depth and the hours got greater and longer. Diseases occurred conspicuously as the hours of flooding got longer rather than as the depth greater. The preventing of diseases caused by insecticide was observed, but it was not greater than in the seedling and transplanting stage. Fertilization was effective in the case of increasing the weight of shoot. Number of fruits per plant did not decrease in the depth of 0cm up to 24 hours, but decreased on the deeper level of flooding and increased as the hours got longer. Moreover with the exception of 120 hours per respective depth of the treatment, average weight of a fruit got greater as the depth and the hours got greater and longer. In the case of epinastic curvature and diffusion resistance, there was negative correlation between all the other investigated characters and positive correlation between weight of a fruits and average weight of a fruit.

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Experimental and Numerical Study on the Effect of the Rain Infiltration with the Increase of Surface Temperature (지표면 온도상승이 빗물의 토양침투에 미치는 영향에 대한 실험 및 수치 해석적 연구)

  • Shin, Nara;Shin, Mi Soo;Jang, Dong Soon
    • Journal of Korean Society of Environmental Engineers
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    • v.35 no.6
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    • pp.422-429
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    • 2013
  • It is generally known that the increase of the Earth surface temperature due to the global warming together with the land desertification by rapid urban development has caused severe climate and weather change. In desert or desertification land, it is observed that there are always severe flooding phenomena, even if desert sand has the high porosity, which could be believed as the favorable condition of rain water infiltration into ground water. The high runoff feature causes possibly another heavy rain by quick evaporation with the depletion of underground water due to the lack of infiltration. The basic physics of desert flooding is reasonably assumed due to the thermal buoyancy of the higher temperature of the soil temperature than that of the rain drop. Considering the importance of this topic associated with water resource management and climate disaster prevention, no systematic investigation has, however, been reported in literature. In this study, therefore, a laboratory scale experiment together with the effort of numerical calculation have been performed to evaluate quantitatively the basic hypothesis of run-off mechanism caused by the increase of soil temperature. To this end, first, of all, a series of experiment has been made repeatedly with the change of soil temperature with well-sorted coarse sand having porosity of 35% and particle diameter, 2.0 mm. In specific, in case 1, the ground surface temperature was kept at $15^{\circ}C$, while in case 2 that was high enough at $70^{\circ}C$. The temperature of $70^{\circ}C$ was tested as this try since the informal measured surface temperature of black sand in California's Coachella Valley up to at 191 deg. $^{\circ}F$ ($88^{\circ}C$). Based on the experimental study, it is observed that the amount of runoff at $70^{\circ}C$ was higher more than 5% compared to that at $15^{\circ}C$. Further, the relative amount of infiltration by the decrease of the surface temperature from 70 to $15^{\circ}C$ is about more than 30%. The result of numerical calculation performed was well agreed with the experimental data, that is, the increase of runoff in calculation as 4.6%. Doing this successfully, a basic but important research could be made in the near future for the more complex and advanced topic for this topic.

Study on the Oral Health Care by Parents Who have The Child (자녀(子女)에 대한 구강(口腔) 보건(保健) 기초(基礎) 지식(知識)에 관한 연구(硏究) (대구시내(大邱市內) 치과내원(齒科內院) 환자(患者)의 부모(父母)를 중심(中心)으로))

  • Lee, Jong-Do
    • Journal of Technologic Dentistry
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    • v.19 no.1
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    • pp.175-184
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    • 1997
  • The purpose of this study is to examine the effect of parents knowledge on oral health status toward their children. This study was carried out to investigate and analyze the congnitive degree of dental subjects and public who have an experience to be treated for their teeth on the dental knowledge, operative dentistry, and dental prothesis in the oral health care through the questionnaires. The results are as follows; 1. In questioning the fundamental knowledges, 47.6% of respondents in their thirties said that milk tooth of their children are number 20. Although schooling level of their parents is not rel evant to this survey, 21.9% who have only high-school diploma, said also "number 20". As a conclusion, most parents have a big concern in their children's teeth. 2. 44.0% parents answered, asked "who do decayed teeth sping up, and 26.4% said" It is why children eat sugary. Asked "What is efficient preventive measures decayed teeth", 26.5% said it is very relevant to be in the utilization of F-tooth-paste. 3. For children's good theeth, periodically brushing is the important. Most parents recognized brushing efficient. 4. In questioning the possession amount of decayed teeth, 45.8% have more than four. Usually those parents who have children filled their decayed teeth with artificial or installed with dental prosthesis. As a conclusion age is relevant in this study in P<0.05 level. 5. In asking for efficient starting-year of tooth brushing, 42.6% said that 2 or 3 year age is the most efficient, and especially 80.6% teath children to learn brushing themselves(P<0.05) 6. In surveying the way they obtained dental information, 38.9% were given from mass media, but 90% were once not delivered with the education of dental health. Because parents have been know narrow and deficient information of dental health mass media, experts in dental health have to deliver help their parents to be delivered with systematical dental information. The conclustion of this study can summarized that parent's role very important to their children's tooth health and the education program for systematical dental information should be delivered to their parents.

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