• Title/Summary/Keyword: 기계화학법

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BN 코팅층의 광학 특성에 관한 연구

  • 김경태;이성훈;이건환
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2002.05a
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    • pp.12-12
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    • 2002
  • hexagonal Boron Nitride (hBN), rhombohedral Boron Nitride (rBN)과 고밀도의 wurzitic Boron N Nitride (wBN), cubic Boron Nitride (cBN) 등의 다양한 상을 갖는 Boron nitride는 그 결정구조에 따라 저밀도, 고밀도 박막으로 분류되며 이중 hBN과 rBN은 층간 결합이 약한 $sp^2$ 결합특성을 가지고, wBN 과 cBN은 강한 $sp^3$ 결합특성을 가지고 있다. 현재까지 $sp^3$결합을 갖는 BN의 우수한 특성을 응용하기 위한 수 많은 연구들이 있어왔다. 특히 cBN은 다이아몬드에 버금가는 높은 경도뿐만 아니라 높은 화 학적 안정성 및 열전도성 등 우수한 물리화학적 특성을 가지고 있어 마찰.마모, 전자, 광학 등의 여러 분야에서의 산업적 응용이 크게 기대되고 있다. 그러나 이와 같이 BN박막의 기계적 물성과 관련한 연 구는 많이 진행되어 왔으나 전기.전자적, 광학적 특성에 관한 연구는 미비한 실정이다. 따라서 본 연구에서는 BN박막의 또 다른 웅용 분야를 탐색하고자 ME - ARE (Magnetically Enhanced A Activated Reactive Evaporation)법 에 의 해 합성 된 BN박막의 광학적 특성 에 관하여 조사하였다. BN박 막합성 은 전자총에 의 해 증발된 보론과 질소.아르곤 플라즈마의 활성 화반응증착(Activated Reactive E Evaporation)에 의해 이루어졌다. 기존의 ARE장치와 달리 열음극(hot cathode)과 양극(anode)사이에 평 행자기장을 부가하여 플라즈마의 증대시켜 반웅효율을 높였다. 합성실험용 모재로는 기본적인 특성 분 석을 위해 p-type으로 도핑된 (100) Si웨이퍼를 $30{\times}40mm$크기로 절단 후, 10%로 희석된 완충불산용액 에 10분간 침적하여 표면의 산화층을 제거한 후 사용하였으며, 광학특성 분석을 위해 $30{\times}30mm$의 glass를 아세톤으로 탈지.세척한 후 사용하였다. 박막합성실험에서 BN의 광학적 특성에 미치는 공정변수의 영향을 파악하기 위하여, 기판바이어스 전압, discharge 전류, $Ar/N_2$가스 유량비 등을 달리하여 증착하였다. 증착된 박막은 FTIR 분석을 통하 여 결정성을 확인하였으며, AFM 분석을 통하여 코팅층의 두께를 측정하였고, UV - VIS spectormeter를 이용하여 투광특성을 평가하였다.

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Cu/SiO2 CMP Process for Wafer Level Cu Bonding (웨이퍼 레벨 Cu 본딩을 위한 Cu/SiO2 CMP 공정 연구)

  • Lee, Minjae;Kim, Sarah Eunkyung;Kim, Sungdong
    • Journal of the Microelectronics and Packaging Society
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    • v.20 no.2
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    • pp.47-51
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    • 2013
  • Chemical mechanical polishing (CMP) has become one of the key processes in wafer level stacking technology for 3D stacked IC. In this study, two-step CMP process was proposed to polish $Cu/SiO_2$ hybrid bonding surface, that is, Cu CMP was followed by $SiO_2$ CMP to minimize Cu dishing. As a result, Cu dishing was reduced down to $100{\sim}200{\AA}$ after $SiO_2$ CMP and surface roughness was also improved. The bonding interface showed no noticeable dishing or interface line, implying high bonding strength.

The Surface Properties of Blend Film of Natural Rubber and Graft Latex by Dipping Process (Dipping법에 의한 천연고무와 그라프트 라텍스 블렌드 필름의 표면특성)

  • Kim, Kong-Soo;Park, Jun-Ha;Eum, Ju-Song
    • Applied Chemistry for Engineering
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    • v.5 no.6
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    • pp.990-997
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    • 1994
  • The vulcanized NR and blend films were prepared with mixing of natural rubber latex (NRL) and methyl methacrylated grafted latex(MGL) with various additives by dipping process. It was investigated the basic properties of vulcanized NR films that is optimum condition of the mature time, swelling degree, cure time at $110^{\circ}C$, and measured the mechanical properties of tensile strength and elongation of its condition. In order to identify the surface structure and the slip properties of blend films contact angles and static and kinetic friction coefficient were measured. Contact angles were decreased with increment of blend ratio of MGL, and static and kinetic friction coefficient were decreased rapidly for the NR/MG and NR-d-MG films than for the NR films. From the results, NR/MG and NR-d-MG films has slip's reinforcement in skin contact surface with increased of blend ratio of MGL.

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Microstructure and Adhesion Strength of Sn-Sn Mechanical Joints for Stacked Chip Package (Stacked Chip Package를 위한 Sn-Sn 기계적 접합의 미세구조와 접착강도)

  • 김주연;김시중;김연환;배규식
    • Journal of the Microelectronics and Packaging Society
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    • v.7 no.1
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    • pp.19-24
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    • 2000
  • To make stacked chip packages far high-density packaging of memory chips used in workstations or PC severs, several lead-frames are to be connected vertically. Fer this purpose. Sn or Sn/Ag were electrochemically deposited on Cu lead-frames and their microstructures were examined by XRD and SEM. Then, two specimens were annealed at $250^{\circ}C$ for 10 min. and pressed to be joined. The shear stresses of joined lead-frames were measured fur comparison. In the case of Sn only, $Cu_3Sn$ was formed by the reaction of Sn and Cu lead-frames. In the case of Sn/Ag, besides $Cu_3Sn$. $Ag_3Sn$ was formed by the reaction of Sn and Ag. Compared to joined specimens made from Sn only, those made from Sn/Ag showed 1.2 times higher shear stress. This was attributed to the $Ag_3Sn$ phase formed at the joined interface.

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The synthesis of atomically thin TiOx nanosheets with large size (원자층 두께를 갖는 대면적 TiOx 나노쉬트 합성)

  • Lee, Sang Eun;Won, Jonghan;Park, Hee Jung
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.27 no.6
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    • pp.289-294
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    • 2017
  • Films fabricated using atomic layer 2-dimensional nanosheets exhibit various physical properties depending on the size of the nanosheet. This is because the physical properties of the film depend on the interfacial properties between the sheets. Therefore, the synthesis of large-sized nanosheets is very important because it can reduce the dependency of the film on the interfacial properties. In this study, we succeeded in fabricating $TiO_x$ nanosheets with atomic layer thickness over micrometer size by using single-crystallized starting material and its chemical exfoliation. In addition, it was revealed that the mechanical agitation speed (the stirring speed of a magnetic bar) during the exfoliation step using the organic material is closely related to the nanosheet size and the colloidal concentration of the nanosheets.

Study on the Synthesis by Milling and Solid-State Reaction Method and Electrochemical Properties of LiNiO2 (기계적 혼합과 고상법에 의한 LiNiO2의 합성과 전기화학적 특성)

  • Kim, Hunuk;Youn, SunDo;Lee, Jaecheon;Park, HyeRyoung;Song, Myoungyaup
    • Journal of the Korean Ceramic Society
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    • v.42 no.5 s.276
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    • pp.319-325
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    • 2005
  • [ $LiNiO_2$ ] was synthesized by the solid-state method after mixing $LiOH{\cdot}H_2O$ and $Ni(OH)_2$ with SPEX mill. The optimum condition for the synthesis of $LiNiO_2$ was the calcination at $750^{\circ}C$ for 30h in $O_2$ stream after milling for 1 h. The $LiNiO_2$ synthesized under this condition showed relatively large value of $I_{003}/I_{104}$ and relatively small value of R-factor. When $LiNiO_2$ was cycled in 2.7$\~$4.15 V at 0.1C-rate, the first discharge capacity was not very large (145.8 mAh/g) but it showed good cycling performance. When $LiNiO_2$ was cycled in 2.7$\~$4.2 V at 0.1C-rate, the first discharge capacity was large but ,it showed poor cycling performance probably because of the transition of H2 hexagonal structure to H3 hexagonal structure. In addition, when $LiNiO_2$ was cycled in 1.0$\~$4.8 V at 1/24C- rate, the first discharge capacity was very large (257.7 mAh/g) and the discharge capacity increased with the number of cycles.

Preparation and Characterization of Biomass-based Polymer Blend Films (Biomass-based 고분자 블렌드필름의 제조 및 특성 연구)

  • Lee, Soo;Jin, Seok-Hwan;Lee, Jae-Won
    • Journal of the Korean Applied Science and Technology
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    • v.29 no.1
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    • pp.95-101
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    • 2012
  • To manufacture of a completely biodegradable and compostable biomass -based blend polymer film, two types of cellulose acetates(DS=2.4 and DS=2.7) were blended with 5 - 50 wt% of low average molecular weight polylactide(PLA) by mixing each polymer solution having same viscosity in 10 wt% methanol/dichloromethane. Their surface morphology, thermal and mechanical properties were studied. The chemical structures of blend films were confirmed by the fourier transform IR spectroscopy with attenuated total reflection(FT-IR ATR) spectrophotometer. Scanning electron microscope(SEM) photos of blend films of both CAs with less than 5 % of PLA showed homogeneous morphology. On the contrary, the other blends with higher than 20 wt% of PLA content showed a large phase separation with spherical domains. The thermal property of blend films was also analyzed with thermogravimetric analysis(TGA) and differential scanning calorimeter(DSC). The tensile strength of CA/PLA blend films was increased up to $820kg_f/cm^2$ for TAC/PLA and $600kg_f/cm^2$ for DAC/PLA.

탄소나노튜브-그래핀 하이브리드 박막을 이용한 투명전극과 전계효과트랜지스터로의 응용

  • Kim, Seong-Ho;Song, U-Seok;Jeong, Min-Uk;Gang, Min-A;Lee, Seon-Suk;Im, Jong-Seon;Hwang, Jin-Ha;Myeong, Seong;An, Gi-Seok
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.177.1-177.1
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    • 2014
  • 단일벽 탄소나노튜브(single-wall carbon nanotube)와 그래핀(graphene)과 같은 저차원 구조의 탄소물질은 우수한 기계적, 전기적, 열적 광학적 특성으로 인해 투명하고 유연한 차세대 전자소자로의 응용(투명전극, 투명트랜지스터, 투명센서 등)을 위한 연구가 활발히 진행되고 있다. 본 연구에서는 단일벽 탄소나노튜브와 단일층 그래핀을 이용한 하이브리드 박막을 제작하여 투명전극(transparent electrode)과 전계효과 트랜지스터(field effect transistors)로의 응용 가능성을 연구하였다. 하이브리드 박막의 제작은 간단한 방법으로 단일벽 탄소나노튜브가 스핀 코팅된 구리 호일 위에 열 화학기상증착법(thermal chemical vapor deposition)을 통해 제작 하였다. 제작 과정 중 탄소나노튜브의 스핀코팅 조건을 최적화하여 하이브리드 박막에서 탄소나노 튜브의 밀도와 정렬을 제어하였으며 하이브리드 박막 제작 후 스핀 코팅 방향에 따른 박막의 저항을 측정하여 단일벽 탄소나노튜브의 코팅 방향에 따라 박막의 저항이 달라지는 모습을 확인할 수 있었다. 하이브리드 박막의 투명전극 특성을 확인 한 결과 $300{\Omega}/sq$의 면저항에 96.4%의 우수한 투과도를 보이는 것을 확인 할 수 있었다. 또한 하이브리드 박막은 CVD 그래핀과 비교하여 향상된 와 on-state current를 보이는 것을 확인 할 수 있었다. 우리는 단일벽 탄소나노튜와 단일층 그래핀으로 이루어진 하이브리드 박막이 앞으로의 투명하고 유연한 소자제작 연구에 있어 새로운 투명 전극 및, 트랜지스터 제작 방법을 제시 할 수 있을 것이다.

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Preparation of Cellulose Diacetate/Ramie Fiber Biocomposites by Melt Processing (용융가공법을 이용한 셀룰로오스 디아세테이트/라미섬유 천연복합체의 제조)

  • Lee Sang Hwan;Lee Sang Yool;Nam Jae Do;Lee Youngkwan
    • Polymer(Korea)
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    • v.30 no.1
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    • pp.70-74
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    • 2006
  • Plasticized cellulose diacetate(CDA) was prepared by homogenizing cellulose diacetate(CDA), triacetin(TA) and epoxidized soybean oil (ESO) in a high-speed mixer, then the CDA mixture was mixed with ramie fiber to produce a green composite material. In DMA analysis, the glass transition temperature of plasticized CDA and the composite was observed at $85\;^{\circ}C\;and\;140\;^{\circ}C$, respectively. A composite reinforced with alkali treated ramie fiber exhibited significantly higher mechanical properties, such as $15\;^{\circ}C$ increase in tensile strength as well as $41\;^{\circ}C$ increase in Young's modulus when compared with commercial polypropylene. In the SEM image analysis, much enhanced adhesion between plasticized CDA and alkali treated ramie fiber (AIRa) was observed.

Industrial Clusters and Their Boundaries: A Case Study for Plants in the Cincinnati metropolitan Area (씬씨내티 대도시지역의 산업군집과 경계설정)

  • Lee, Bo-Young
    • Journal of the Korean association of regional geographers
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    • v.6 no.3
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    • pp.169-184
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    • 2000
  • Industrial clusters and their boundaries are identified by factor and hot spot analyses for the greater Cincinnati metropolitan area in USA. While traditional input-output approach identified aspatial industrial clusters, this study combines traditional approach with GIS techniques to identify their boundaries. Combining the results of input-output industrial clusters with the leading industries groups, we have identified five leading industry clusters. They are food (20), chemicals (28), metal manufacturing (32), metal products (33), and machinery (35). We also used hot spot analysis to visualize each industry cluster on the research area by using Arcview software. Determining the degree to which such industries are associated spatially and their spatial delimitation may be an additional approach to measuring the efficiency of the spatial organization of an economy. It is hoped that the industrial clusters and industrial spatial clusters approaches may also proved the basis for the development of new models of the spatial arrangement of industry at a level more aggregated than that of the single plant or firm.

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