• Journal of the Microelectronics and Packaging Society
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• v.19 no.1
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• pp.61-66
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• 2012

Chemical Mechanical Planarization (CMP) is a polishing process used in the microelectronic fabrication industries to achieve a globally planar wafer surface for the manufacturing of integrated circuits. Pad conditioning plays an important role in the CMP process to maintain a material removal rate (MRR) and its uniformity. For metal CMP process, highly acidic slurry containing strong oxidizer is being used. It would affect the conditioner surface which normally made of metal such as Nickel and its alloy. If conditioner surface is corroded, diamonds on the conditioner surface would be fallen out from the surface. Because of this phenomenon, not only life time of conditioners is decreased, but also more scratches are generated. To protect the conditioners from corrosion, thin organic film deposition on the metal surface is suggested without requiring current conditioner manufacturing process. To prepare the anti-corrosion film on metal conditioner surface, vapor SAM (self-assembled monolayer) and FC (Fluorocarbon) -CVD (SRN-504, Sorona, Korea) films were prepared on both nickel and nickel alloy surfaces. Vapor SAM method was used for SAM deposition using both Dodecanethiol (DT) and Perfluoroctyltrichloro silane (FOTS). FC films were prepared in different thickness of 10 nm, 50 nm and 100 nm on conditioner surfaces. Electrochemical analysis such as potentiodynamic polarization and impedance, and contact angle measurements were carried out to evaluate the coating characteristics. Impedance data was analyzed by an electrical equivalent circuit model. The observed contact angle is higher than 90o after thin film deposition, which confirms that the coatings deposited on the surfaces are densely packed. The results of potentiodynamic polarization and the impedance show that modified surfaces have better performance than bare metal surfaces which could be applied to increase the life time and reliability of conditioner during W CMP.

• Journal of the Korean Society for Nondestructive Testing
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• v.24 no.5
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• pp.508-517
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• 2004

We described a near-field scanning microwave microscope which uses a high-quality dielectric resonator with a tunable screw. The operating frequency is f=4.5 5GHz. The probe tip is mounted in a cylindrical resonant cavity coupled to a dielectric resonator We developed a hybrid tip combining a reduced length of the tapered part with a small apex. In order to understand the function of the probe, we fabricated three different tips using a conventional chemical etching technique and observed three different NSMM images for patterened Cr films on glass substrates. We measured the reflection coefficient of different metal thin film samples with the same thickness of 300m and compared with theoretical impedance respectly. By tuning the tunable screw coming through the top cover, we could improve sensitivity, signal-to-noise ratio, and spatial resolution to better than $1{\mu}m$. To demonstrate the ability of local microwave characterization, the surface resistance of metallic thin films has been mapped.

• Korean Journal of Materials Research
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• v.2 no.3
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• pp.228-238
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• 1992

An investigation on the step-coverage of PECVD and $O_3$ ThCVD oxides was undertaken to implement into the void-free inter metal dielectric planarization using multi-chamber system for the submicron double level metallization. At various initial aspect ratios the instantaneous aspect ratios were measured through modelling and experiment by depositing the oxides up to $0.9{\mu}m$ in thickness in order to monitor the onset of void formation. The modelling was found to be in a good agreement with the observed instantaneous aspect ratio of TEOS-based PECVD oxide whose re-entrant angle was less than $5^{\circ}$. It is demonstrated that either keeping the instantaneous aspect ratio of PECVD oxide as a first layer less than a factor of 0.8 or employing Ar sputter etch to create sloped oxide edge ensures the void-free planarization after$O_3$ ThCVD oxide deposition whose step-coverage is superior to PECVD oxide. It has been observed that $O_3$ ThCVD oxide etchback scheme has shown higher yield of via contact chain than non etchback process, with resistance per via contact of $0.1~0.3{\Omega}/{\mu}m^2$.

• Korean Journal of Food Science and Technology
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• v.42 no.6
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• pp.699-704
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• 2010

Rapeseed oil was stored under different conditions such as in the dark, with UV treatment, and with prooxidantscytochrome C and copper ion. The rapeseed oils stored at different temperatures were analyzed by a mass spectrometrybased electronic nose and discriminant function analysis (DFA). Volatile components in the rapeseed oil increased with storage time, and the discriminant function first score (DF1) moved from a positive position to a negative position as storage time increased. Changes in DF1 were higher under UV treatment than under the dark condition (DF1: $r^2$=0.9481, F=307.03). The different DF1 values (F1) under the dark condition were 0.099, 0.187, and 0.278 as storage temperature increased. The different values under UV treatment were 0.554, 0.588, and 0.542, as storage temperature increased from 4 to $26^{\circ}C$. As concentrations of prooxidants copper ion and cytochrome C increased, amounts of volatile components also increased. These were confirmed by DFA. Furthermore, changes in responses at each ion fragment agreed with reported results for GC/MS, which formed after rancidity of the oil, including pentane, pentanal, 1-pentanol, hexanal, n-octane, 2-hexenal, heptanal, 2-heptenal, decane, 2-octenal, undecane, and dodecane.

• Composites Research
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• v.33 no.5
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• pp.296-301
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• 2020

Laminated composite materials have excellent in-plane properties, but are vulnerable in thickness directions, making it easy to delamination when bending and torsion loads are applied. Thickness directional reinforcement methods of composite materials that delay delamination include Z-pinning, Stitching, Tufting, etc., and typically Z-pinning and Stitching method are commonly used. The Z-pinning is reinforcement method by inserting metal or carbon pin in the thickness direction of prepreg, and the conventional stitching process is a method of reinforcing the mechanical properties in the thickness direction by intersecting the upper and lower fibers on the preform. In this paper, I-fiber stitching method, which complement and improve weakness of Z-pinning and Stitching method, was proposed, and the static strength of composite single-lap joints using I-fiber stitching process were evaluated. The single-lap joints were fabricated by a co-curing method using an autoclave vacuum bag process. The thickness of the composite adherend was fixed, and 5 types of specimens were manufactured with varying the stitching pattern (5×5, 7×7) and angle (0°, 45°). From the test, the failure load of the specimen reinforced by the I-fiber stitching process was increased by up to 143% compared to that of specimen without reinforcement.

• Journal of the Mineralogical Society of Korea
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• v.32 no.4
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• pp.287-301
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• 2019

Preservation of the original form is the principle for conservation, management and utilization of cultural heritages. Thus, non-destructive analysis of these samples are important field of the conservation science. In this study, examined the applicability of nondestructive surface X-ray diffraction analysis (ND-XRD) for cultural heritage by materials (rock specimen, jade stone, pigment painted specimen, earthen artifact, metal artifact). In result, all type of sample is recorded suitable X-ray diffraction patterns for identifying mineral composition in case of surface condition with adequate particle size and arrangement. And diffraction pattern is reflected surface information than matrix. Therefore, ND-XRD is thought to be applicable not only mineral identification but also interpretation of manufacturing technique and alteration trend about layered sample (in horizontally or vertically). Whereas some exceptional diffraction patterns were recorded due to overlapping information on specific crystal planes. It caused by skip the sample treatment (powdering and randomly orientation). It could be advantageously used for mineral identification, such as preferred orientation of clay minerals. In contrast, irregular diffraction pattern caused by single crystalline effect is required careful evaluation.

• Fire Science and Engineering
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• v.28 no.5
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• pp.8-13
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• 2014

The purpose of this study is to analyze the damage pattern when overcurrent is applied to a thermal magnetic type molded case circuit breaker (MCCB) using a Primary Current Injection Test System (PCITS). When an overcurrent of 150 A was applied to the PCITS for 5 seconds with the trip bar of an MCCB being damaged, it was found that the surface of the temperature control device (bimetallic strip) positioned at the right was significantly carbonized. When an overcurrent of 300 A was applied to the PCITS for 5 s under the same conditions, the entire temperature control device was deteriorated, becoming flattened and in close contact with the MCCB. When an overcurrent of 450 A was applied to the PCITS for 5 s, the coil of the temperature control device was melted and disconnected. In addition, it was observed that the contacts, the enclosure and upper cover were deformed and there was a trace of carbonization on them. When approximately 3 s had elapsed after an overcurrent of 600 A was applied, white smoke occurred inside the MCCB and a flame was radiated out, after which the overcurrent supply stopped with "phutt" (whomp) sound. It was observed that when the same type of MCCB is damaged by a general flame, the surfaces of its handle, terminal, arc divider (extinguisher) and temperature control device were carbonized uniformly. In addition, it was found that the trip bar of the operating mechanism was melted down and the metal operation pin was moved while being tripped.

• Journal of the Microelectronics and Packaging Society
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• v.28 no.4
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• pp.41-45
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• 2021

In this study, in order to secure the high reliability of the memristor, we adopted a patterned lithium filament seed layer as the main agent for resistive switching (RS) characteristic on the 30 nm thick ZrO₂ thin film at the device manufacturing stage. Lithium filament seed layer with a thickness of 5 nm and an area of 5 ㎛ × 5 ㎛ were formed on the ZrO₂ thin film, and various electrode areas were applied to investigate the effect of capacitance on filament type memristive behavior in the parallel memristive circuit of memristor and capacitor. The RS characteristics were measured in the samples before and after 250℃ post-annealing for lithium metal diffusion. In the case of conductive filaments formed by thermal diffusion (post-annealed sample), it was not available to control the filament by applying voltage, and the other hand, the as-deposited sample showed the reversible RS characteristics by the formation and rupture of filaments. Finally, via the comparison of the RS characteristics according to the electrode area, it was confirmed that capacitance is an important factor for the formation and rupture of filaments.

• Progress in Superconductivity and Cryogenics
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• v.25 no.2
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• pp.10-13
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• 2023

High-T_C superconductivity (HTSC) has been the central issue in the field of condensed matter physics for decades. An essential part of the research on superconductivity is finding new exotic superconductors. It was recently suggested that Ir-substituted La_0.7Sr_0.3MnO₃ (LSMIO) is a new high-T_C superconductor. However, systematic studies to experimentally verify the superconductivity have not been done. Here, we report the growth processes of LSMIO thin films and their electrical transport properties. We observed a clear negative correlation between the intensity of the laser utilized for film deposition and the Curie temperature of the deposited film. We attributed this effect to the suppression of Sr concentration in the LSMIO films as the laser intensity increased. However, our LSMIO films show conventional ferromagnetism instead of HTSC. To realize the HTSC in LSMIO systems, further exploration of diverse compositions of LSMIO compounds is essential.

• Journal of Life Science
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• v.25 no.5
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• pp.487-495
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• 2015

We carried out pH stability, chemical inhibition, chemical modification, and pH-dependent kinetic parameter assessments to further characterize protocatechuate 3,4-dioxygenase from Pseudomonas pseudoalcaligenes KF707. Protocatechuate 3,4-dioxygenase was stable in the pH range of 4.5~10.5. L-ascorbate and glutathione were competitive inhibitors with $K_{is}$ values of 0.17 mM and 0.86 mM, respectively. DL-dithiothreitol was a noncompetitive inhibitor with a $K_{is}$ value of 1.57 mM and a $K_{ii}$ value of 8.08 mM. Potassium cyanide, p-hydroxybenzoate, and sodium azide showed a noncompetitive inhibition pattern with $K_{is}$ values of 55.7 mM, 0.22 mM, and 15.64 mM, and $K_{ii}$ values of 94.1 mM, 8.08 mM, and 662.64 mM, respectively. $FeCl_{2}$ was the best competitive inhibitor with a $K_{is}$ value of $29{\mu}M$. $FeCl_{3}$, $MnCl_{2}$, $CoCl_{2}$, and $AlCl_{3}$ were also competitive inhibitors with $K_{is}$ values of 1.21 mM, 0.85 mM, 3.98 mM, and 0.21 mM, respectively. Other metal ions showed noncompetitive inhibition patterns. The pH-dependent kinetic parameter data showed that there may be at least two catalytic groups with pK values of 6.2 and 9.4 and two binding groups with pK values of 5.5 and 9.0. Lysine, cysteine, tyrosine, carboxyl, and histidine were modified by their own specific chemical modifiers, indicating that they are involved in substrate binding and catalysis.