• Title/Summary/Keyword: 구리 무전해 도금

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Formation and Properties of Electroplating Copper Pillar Tin Bump on Semiconductor Process (반도체공정에서 구리기둥주석범프의 전해도금 형성과 특성)

  • Wang, Li;Jung, One-Chul;Cho, Il-Hwan;Hong, Sang-Jeen;Hwang, Jae-Ryong;Soh, Dea-Wha
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2010.10a
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    • pp.726-729
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    • 2010
  • Copper Pillar Tin Bump (CPTB) was investigated for high density chip interconnect technology development, which was prepared by electroplating and electro-less plating methods. Copper pillar tin bumps that have $100{\mu}m$ pitch were introduced with fabrication process using a KM-1250 dry film photoresist (DFR), with copper electroplating for Copper Pillar Bump (CPB) formation firstly, and then tin electro-less plating on it for control oxidation. Electric resistivity and mechanical shear strength measurements were introduced to characterize the oxidation effects and bonding process as a function of thermo-compression. Electrical resistivity increased with increasing oxidation thickness, and shear strength had maximum value with $330^{\circ}C$ and 500 N thermo-compression process. Through the simulation work, it was proved that when the CPTB decreased in its size, it was largely affected by the copper oxidation.

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Study on Improvement of Thermal Stability of Dendrite-shape Copper Particles by Electroless Silver Plating (Dendrite 형상 구리 입자의 무전해 은 도금에 의한 열적 안정성 향상에 관한 연구)

  • Hwang, In-Seong;Nam, Kwang Hyun;Chung, Dae-won
    • Applied Chemistry for Engineering
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    • v.33 no.6
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    • pp.574-580
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    • 2022
  • While in the process of electroless plating of dendrite-shape copper with silver, various silver-coated copper (Ag@Cu) particles were prepared by using both displacement plating and reducing electroless plating. The physicochemical properties of Ag@Cu particles were analyzed by scanning electron microscope- energy-dispersive X-ray spectroscopy (SEM-EDS), thermogravimetric analysis (TGA), X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD) and Brunauer-Emmett-Teller analysis (BET), and it was confirmed that the silver coated by the reducing electroless plating was formed as nano-particles on the copper surface. Ag@Cu particles were compounded with an epoxy resin to prepare a conductive film, and its thermal stability was evaluated. We investigated the effect of the difference between the displacement plating and reducing electroless plating on the initial resistance and thermal stability of conductive films.

Preparation of Electroless Copper Plated Activated Carbon Fiber Catalyst and Reactive Evaluation of NO Removal (무전해 도금법으로 제조된 구리 함유 활성탄소섬유 촉매의 제조와 NO 제거 반응성 평가)

  • Yoon, Hee-Seung;Oh, Jong Hyun;Lee, Hyung Keun;Jeon, Jong-Ki;Ryu, Seung Kon
    • Korean Chemical Engineering Research
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    • v.46 no.5
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    • pp.863-867
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    • 2008
  • Pitch based activated carbon fiber(ACF) was prepared from reformed naphtha cracking bottom oil(NCB oil) by melt spinning. The fibers obtained were stabilized, carbonized, and then steam activated. The ACF was sensitized with Pd-Sn catalytic nuclei via a single-step activation approach. This sensitized ACF was used as precursors for obtaining copper plated ACFs via electroless plating. ACFs uniformly decorated with metal particles were obtained with reduced copper plating in the reaction solution. Effects of the amount of copper on characteristics of ACF/Cu catalysts were investigated through BET surface area, X-ray diffraction, scanning emission microscopy, and ICP. The amount of copper increased with plating time, but the surface area as well as the pore volume decreased. NO conversion increased with reaction temperature. NO conversion decreased with increasing the amount of copper, which is seemed to be due to the reduction of surface area as well as the dispersion of copper.

무전해 Ni-P 도금층을 확산방지층으로 사용한 Bi-Te계 열전발전모듈의 제작

  • Jang, Jae-Won;Son, In-Jun;Bae, Seong-Hwa;Park, Gwan-Ho;Jo, Sang-Heum
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2018.06a
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    • pp.104.1-104.1
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    • 2018
  • 열전소자는 열전현상을 이용한 재료로서 여기서 열전현상이란 열을 전기로 또는 전기를 열로 바꿀 수 있는 에너지 변환 현상을 의미한다. 그 중 Bi-Te계 열전소자는 $200^{\circ}C$이하의 온도에서 열전 효율이 우수하기 때문에 항공, 컴퓨터 등의 열전발전 또는 열전냉각 모듈에 널리 사용된다. 열전 모듈 제작시 Bi-Te 소자는 구리 기판에 접합하여 사용하게 되는데 이 때 솔더의 성분인 Sn과 기판의 Cu는 소자내로 확산하여 금속간 화합물을 형성한다. 이렇게 형성된 금속간 화합물은 접합강도를 저하시키는 원인뿐만 아니라 열전 성능을 저하시키는 원인이 된다. 본 연구에서는 이러한 접합강도와 열전성능의 저하를 막기 위해 BiTe 소자의 표면에 $4{\mu}m$두께의 Ni-P 도금 공정을 추가하여 Ni-P 도금층이 Cu와 Sn의 확산을 막는 방지층 역할을 하게 한다. 그리고 도금한 소자를 $3mm{\times}3mm{\times}3mm$로 커팅하여 구리 기판에 접합하여 열전 모듈을 제작하였다. 제작된 열전모듈의 단면을 EPMA분석한 결과 Ni-P 도금층이 확산방지층으로 잘 작용되었음을 확인하였다. 또한 접합강도 측정결과 도금을 하지 않은 Bi-Te소자에 비해 접합강도가 향상되었음을 확인하였다. 따라서 Ni-P도금을 실시함으로서 금속간 화합물 형성을 억제하고 열전모듈의 성능과 접합강도를 향상시킬 수 있었다.

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Fabrication of Copper(II) Oxide Plated Carbon Sponge for Free-standing Resistive Type Gas Sensor and Its Application to Nitric Oxide Detection (프리스탠딩 저항형 가스 센서용 산화구리 무전해 도금 탄소스펀지 제조 및 일산화질소 감지)

  • Kim, Seokjin;Ha, Seongmin;Myeong, Seongjae;Lee, Young-Seak
    • Applied Chemistry for Engineering
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    • v.33 no.6
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    • pp.630-635
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    • 2022
  • Copper(II) oxide (CuO), electroless plated on a nitrogen-containing carbon sponge prepared by a melamine sponge thermal treatment, was developed as a nitric oxide (NO) gas sensor that operates without a wafer. The CuO content on the surface of the carbon sponge increased as the plating time increased, but the content of nitrogen known to induce NO gas adsorption decreased. The untreated carbon sponge showed a maximum resistance change (5.0%) at 18 min. On the other hand, the CuO plated sample (CuO30s-CS) showed a maximum resistance change of 18.3% in 8 min. It is considered that the improvement of the NO gas sensing capability was caused by the increase in hole carriers of the carbon sponge and improved movement of electrons due to CuO. However, the NO gas detection resistance of the CuO electroless plated carbon sponge for 60 s decreased to 1.9%. It is considered that the surface of the carbon sponge was completely plated with CuO, resulting in a decrease in the NO gas adsorption capacity and resistance change. Thus, CuO-plated carbon sponge can be used as an effective NO gas sensor because it has fast and excellent resistance change properties, but CuO should not be completely plated on the surface of the carbon sponge.