• Journal of the Korean Vacuum Society
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• v.21 no.5
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• pp.242-248
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• 2012

Valence band of a vacuum-reduced $TiO_2$ (001) surface has been carefully examined using synchrotron x-ray photoelectron spectroscopy to investigate variation of the gap state upon oxidation and thermal diffusion of $Ti^{3+}$ interstitials from the bulk. We compare our results with that obtained from $TiO_2$ (110) and aim to address a crystal-face dependency in the oxidation and diffusion rates of $Ti^{3+}$ interstitials. We find very similar behaviors in the oxidation and thermal diffusion rate of $Ti^{3+}$ interstitials between the two crystal faces suggesting a negligible crystal-face dependency in this case.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.238-238
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• 2010

최근 전자산업의 발전은 형상 면에서 경박 단소화로 급속하게 진행되고 있으며, 전자소자 내부에서의 배선재료로 사용되고 있는 알루미늄(Al) 박막의 두께 역시 얇아지고 있다. 두께가 20 nm 이하로 작은 극박막 범위에서 박막의 두께 증가에 따라 전기가 잘 흐르기 시작하는 박막의 최소두께로 정의 되는 유착두께를 실시간으로 측정하는 방법을 구현하고 임의의 금속박막과 기판의 조합에 있어서 각각의 재료에 대한 유착두께를 제공함으로써 향후 미세전자소자의 제작시 배선 재료의 선택에 대한 기초자료를 축적할 수 있다. 또한 금속박막의 증착공정 직전에 기판을 표면처리 하여 기판을 활성화시킬 때 표면처리가 박막의 유착두께에 미치는 영향에 대해 박막의 미세구조 변화 관점에서 연구함으로써 여러 가지 금속박막에 대한 유착두께를 줄일 수 있는 방법을 도출 할 수 있다. 본 연구에서는 유리 기판 위에 사진 식각 공정으로 패턴을 형성하고 패턴이 형성된 유리 기판은 스퍼터에 연결된 4 point probe에 구리 도선으로 연결한 후 DC 마그네트론 스퍼터법으로 Al을 증착하면서 실시간으로 시간에 따른 전기저항을 측정을 하였다. 이때 스퍼터 내부 진공도는 $4.6\;{\times}\;10^{-5}\;torr$ 까지 낮춰준 후 Al을 증착 할 때 진공도는 $1.1\;{\times}\;10^{-2}\;torr$로 맞춰주고 Ar 가스를 20 sccm 넣어준다. 1초 간격으로 전기저항을 측정한 결과 25초대에 전기저항이 급격히 감소하였으며 이때 Al 박막의 두께는 $120{\AA}$ 이고 이 두께에서부터 전류의 흐름이 좋은 것을 알 수 있다. 박막 두께에 따른 특성을 알기위해 UV 영역의 빛을 사용하는 광전자 분광기(Photoelectron Spectrometer)를 이용해 일함수를 측정하였다. Al 의 일반적인 일함수는 4.28 eV 이며, 두께가 $120{\AA}$일 때의 일함수는 4.2 eV로 거의 비슷한 값을 얻었다. 전류가 잘 흐르기 전인 12초대에서 두께가 $60{\AA}$일 때 일함수는 4.00 eV 이고 전류가 흐르기 시작한 후 50초대에서 Al 박막 두께가 $200{\AA}$ 일 때 일함수는 4.28 eV 로 일반적인 Al의 일함수와 같은 값을 얻을 수 있었다. 광전자 분광기술은 전자소자에서 중요한 전자의 성능예측에 도움을 줄 수 있으며 물질의 표면에서 더욱 다양한 정보를 얻을 수 있다. 또한 실시간 전기저항 측정을 통한 금속박막의 전기전도 특성과 미세구조에 대한 기초 자료를 제공함으로써 신기술 발전에 공헌할 것이다.

• Composites Research
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• v.29 no.4
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• pp.151-155
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• 2016

Graphene has been a valuable candidate for use as electrodes for supercapacitors. In order to improve the surface area of graphene, three-dimensional graphene was synthesized on porous Ni nanostructure using thermal chemical vapor deposition and microwave plasma chemical vapor deposition. The structural and chemical characterization of synthesized graphene was performed by scanning electron microscopy, Raman spectroscopy, and X-ray photoelectron spectroscopy. It was confirmed that three-dimensional and high-crystalline multilayer graphene onto various substrates was synthesized successfully.

• Journal of the Korean Electrochemical Society
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• v.13 no.2
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• pp.96-102
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• 2010

Effects of specimen area on the corrosion rate of low alloy steel were studied in sulfuric acid solution. The corrosion behavior of specimen was tested by electrochemical impedance spectroscopy (EIS), linear polarization resistance measurement (LPR) and potentiodynamic polarization measurement. The surface was analyzed by scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS) and electron probe X-ray micro analyzer (EPMA). As surface area was increased, corrosion rate was increased by the effect of small anode-large cathode.

• Journal of the Korean Magnetics Society
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• v.25 no.5
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• pp.156-161
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• 2015

The electronic structures of the potential candidate semiconductor nanoparticles for dye-sensitized solar cell (DSSC), such as $ZnSnO_3$ and $Zn_2SnO_4$, have been investigated by employing X-ray photoemission spectroscopy (XPS). The measured X-ray diffraction patterns show that $ZnSnO_3$ and $Zn_2SnO_4$ samples have the single-phase ilmenite-type structure and the inverse spinel structure, respectively. The measured Zn 2p and Sn 3d core-level XPS spectra reveal that the valence states of Zn and Sn ions are divalent (Zn 2+) and tetravalent (Sn 4+), respectively, in both $ZnSnO_3$ and $Zn_2SnO_4$. On the other hand, the shallow core-level measurements show that the binding energies of Sn 4d and Zn 3d core levels in $ZnSnO_3$ are lower than those in $Zn_2SnO_4$. This work provides the information on the valence states of Zn and Sn ions and their chemical bonding in $ZnSnO_3$ and $Zn_2SnO_4$.

• Proceedings of the KIEE Conference
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• 2005.05a
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• pp.281-283
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• 2005

Processing Plasmas are very sensitive to a variation in process parameters, To maintain process quality and device field, plasma malfunction should be tightly monitored with high sensitivity. A new monitoring method is presented and this was accomplished by applying discrete wavelet transformation to X-ray photoelectron spectroscopy. XPS data were collected during a plasma etching of silicon carbide. Various effects of DWT factor on fault sensitivity were optimized experimentally. Compared to raw data, total percent sensitivity for DWT data demonstrated a significantly improved sensitivity to plasma faults induced by bias power.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.80-80
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• 2010

X선 광전자 분광법을 이용하여 Pt(110) 표면 위에 증착된 Ni 초박막의 합금 형성에 대한 연구를 수행하였다. 각각 3 ML, 6 ML Ni 초박막을 $5{\times}10-9$ Torr 이하의 초고진공에서 증착된 것을 확인하고 후열처리 과정에 따른 Ni층의 변화와 합금형성에 따른 내각준위 스펙트럼을 관찰하였다. 증착된 Ni 초박막은 증착 후 전자구조 변화에 따른 선형변화가 일어나고, 590 K부터 섞이기 시작함을 내각준위 스펙트럼의 변화들로부터 알 수 있었다. 열처리 온도가 증가하면서 계면에 Ni-Pt 합금이 형성되었음은 Pt 4f 봉우리의 FWHM 변화부터로 확인할 수 있었으며 Ni 2p3/2 의 satelite 구조의 상대적 세기가 590 K부터 급격히 증가하여, 전자구조가 변화함을 알 수 있었다. Valence Band 스펙트럼의 변화로 계면의 Pt d전자들의 상태밀도 변화도 확인하였다.

• Journal of the Korean institute of surface engineering
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• v.24 no.3
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• pp.144-150
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• 1991

The stainless steel 304 oxidized at $70^{\circ}C$ in 2.5M CrO3/5.0M H2SO4 solution and at $200^{\circ}C$ , $300^{\circ}C$, and $400^{\circ}C$ in the air are analyzed with X-ray Photoelectron Spectroscopy (XPS) to obtain depth composition profile of the surface region. It is confirmed that the surface region has a quite different composition from that of the bulk. This is due to a difference in the outward diffusion rates of the oxidized species in the surface region. The order of diffusion rates is Fe > Cr > Ni in the experimental temperature range. In spite of the inferior rate of diffusion, Cr is enriched in the surface when it is oxidized in the CrO3/H2SO4 solution. This is due to preferential dissolution of oxidized Fe.

• Analytical Science and Technology
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• v.11 no.1
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• pp.20-28
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• 1998

Fluorimetric and absorption spectroscopic studies were performed to elucidate the photocurrent decay with time in the conversion process of solar energy into electrical energy using a photoelectrochemical cell containing rose bengal as a sensitizer, and allylthiourea as a supersensitizer. Spectra of dye solution before and after irradiation revealed a new photocatalytic dimerization reaction between sensitizer and supersensitizer. It was also found that the geometrical arrangement of the transition dipoles is oblique in the dimer of dye molecules.

• Polymer(Korea)
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• v.39 no.2
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• pp.219-224
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• 2015

In this work, the effect of fiber array direction including $0^{\circ}$, $0^{\circ}/90^{\circ}$, $0^{\circ}/45^{\circ}/-45^{\circ}$ was investigated for mechanical properties of basalt fiber-reinforced composites. Mechanical properties of the composites were studied using interlaminar shear strength (ILSS) and critical stress intensity factor ($K_{IC}$) measurements. The cross-section morphologies of basalt fiber-reinforced epoxy composites were observed by scanning electron microscope (SEM). Also, the surface properties of basalt fibers were determined by Fourier transform infrared spectroscopy (FTIR) and X-ray photoelectron spectroscopy (XPS). From the results, it was observed that acid treated basalt fiber-reinforced composites showed significantly higher mechanical interfacial properties than those of untreated basalt fiber-reinforced composites. These results indicated that the hydroxyl functional groups of basalt fibers lead to the improvement of the mechanical interfacial properties of basalt fibers/epoxy composites in the all array direction.